CN106187216A - 用于生产制备高导热陶瓷基片的三元复合助烧剂 - Google Patents
用于生产制备高导热陶瓷基片的三元复合助烧剂 Download PDFInfo
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Abstract
本发明公开了用于生产制备高导热陶瓷基片的三元复合助烧剂,其创新点在于:所述三元复合助烧剂由Al2O3、Y2O3和CaO组成,其摩尔比为255:500:84。本发明通过采用Al2O3、Y2O3和CaO三元复合助烧剂,在较低的烧结温度下获得高的热导率,降低能耗,减少了生产成本,提高了生产效率。
Description
技术领域
本发明涉及助烧剂,具体涉及生产制备高导热陶瓷基片的复合助烧剂。
背景技术
现代科学技术的发展对材料的要求日益提高,随着电子器件和电子装置中元器件的复杂性和密集性日益提高,对作为集成电路重要支柱的陶瓷基片提出了更高的要求,要求其具备良好的导热性能。长期以来,绝大多数大功率混合集成电路的基板材料一直延用Al2O3和BeO陶瓷。但是Al2O3陶瓷的热导率低,热膨胀系数与Si不太匹配;BeO陶瓷虽然具有优良的综合性能,但其较高的生产成本和含有剧毒等缺点严重制约了它的应用推广。因此,从性能、成本和环境等方面逐渐反映出二者已不能完全满足现代电子功率器件发展的需要。
氮化铝陶瓷具有高的热导率、低的介电常熟,与Si相匹配的热膨胀系数、良好的绝缘性、热化学稳定性好、无毒等优点成为高密度集成电路基板材料的最佳选择。然而氮化铝陶瓷属于共价化合物,自扩散系数很小,难于烧结致密,且杂质等各种缺陷的存在对其热导率亦有很大的损害。
纯净的氮化铝粉末在通常的烧结温度下很难烧结致密,致密度不高的材料很难具有高的热导率。通常采用以下三条途径获得致密、高性能的氮化铝陶瓷:1)使用超细粉;2)热压或热等静压烧结;3)引入烧结助剂。第一条途径受粉体影响比较大,商业氮化铝粉通常无法满足要求,而且超细粉容易氧化、团聚;第二条途径只能烧结形状简单的氮化铝陶瓷材料,且能耗大;在工业上易于实现,且有可能获得低成本高性能的氮化铝陶瓷材料。
发明内容
本发明要解决的技术问题是提供用于生产制备高导热陶瓷基片的三元复合助烧剂,能够促进氮化铝陶瓷致密化,提高热导率。
为解决上述技术问题,本发明采用的技术方案为:
用于生产制备高导热陶瓷基片的三元复合助烧剂,其创新点在于:所述三元复合助烧剂由Al2O3、Y2O3和CaO组成。
除Y2O3和CaO单独作用外,生成的第二晶界相呈不浸润状态,随烧结温度提高或保温时间延长,晶界相将由烧结体内部向表面迁移,从而净化晶界,提高热导率。
Y2O3驱氧能力强,稳定性好,与Al2O3反应生成的第二晶相,减少氮化铝颗粒表面和晶格中氧杂质含量,提高烧结体导热率的同时保护晶格的完整性。
CaO可以在较低温度下与氧化铝反应形成液相,促进氮化铝陶瓷致密化。
反应生成的Y3Al5O12和Ca3Y2O6沉积在晶界处,降低了氮化铝晶粒中的氧缺陷,从而提高热导率。
进一步的,所述Al2O3、Y2O3和CaO的摩尔比为255:500:84。
通过控制摩尔比,减少反应过程中杂质含量,提高热导率。
本发明的有益效果:本发明通过采用Al2O3、Y2O3和CaO三元复合助烧剂,在较低的烧结温度下获得高的热导率,降低能耗,减少了生产成本,提高了生产效率。
具体实施方式
下面结合具体实施例对本发明的技术方案作详细说明。
实施例1
用于生产制备高导热陶瓷基片的三元复合助烧剂的组成为Al2O3、Y2O3和CaO,其摩尔比为255:500:84。烧结温度为1580℃,保温时间3小时,得到的导电率为170W/m·k。
对比例1
将实施例1的助烧剂改为Y2O3,烧结温度为1580℃,保温时间3小时,得到的导电率为152W/m·k。
上述实施例仅用以说明本发明的技术方案,而非对本发明的构思和保护范围进行限定,本领域的普通技术人员对本发明的技术方案进行修改或者等同替换,而不脱离技术方案的宗旨和范围,其均应涵盖在本发明的权利要求范围中。
Claims (2)
1.用于生产制备高导热陶瓷基片的三元复合助烧剂,其特征在于:所述三元复合助烧剂由Al2O3、Y2O3和CaO组成。
2.根据权利要求1所述的用于生产制备高导热陶瓷基片的三元复合助烧剂,其特征在于:所述Al2O3、Y2O3和CaO的摩尔比为255:500:84。
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CN106927834A (zh) * | 2017-04-24 | 2017-07-07 | 南通博泰美术图案设计有限公司 | 用于生产制备高导热陶瓷基片的三元复合助烧剂配方 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN103755358A (zh) * | 2013-12-30 | 2014-04-30 | 莱鼎电子材料科技有限公司 | 一种用于生产制备高导热陶瓷基片的三元复合助烧剂 |
CN104098336A (zh) * | 2013-04-15 | 2014-10-15 | 中国科学院上海硅酸盐研究所 | 一种制备高热导率、高强度氮化硅陶瓷的方法 |
CN104829238A (zh) * | 2015-04-02 | 2015-08-12 | 朱卫 | 用于生产制备高导热陶瓷基片的三元复合助烧剂 |
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CN104098336A (zh) * | 2013-04-15 | 2014-10-15 | 中国科学院上海硅酸盐研究所 | 一种制备高热导率、高强度氮化硅陶瓷的方法 |
CN103755358A (zh) * | 2013-12-30 | 2014-04-30 | 莱鼎电子材料科技有限公司 | 一种用于生产制备高导热陶瓷基片的三元复合助烧剂 |
CN104829238A (zh) * | 2015-04-02 | 2015-08-12 | 朱卫 | 用于生产制备高导热陶瓷基片的三元复合助烧剂 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN106927834A (zh) * | 2017-04-24 | 2017-07-07 | 南通博泰美术图案设计有限公司 | 用于生产制备高导热陶瓷基片的三元复合助烧剂配方 |
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