CN106142369B - 切断装置 - Google Patents
切断装置 Download PDFInfo
- Publication number
- CN106142369B CN106142369B CN201510177779.9A CN201510177779A CN106142369B CN 106142369 B CN106142369 B CN 106142369B CN 201510177779 A CN201510177779 A CN 201510177779A CN 106142369 B CN106142369 B CN 106142369B
- Authority
- CN
- China
- Prior art keywords
- brittle material
- material substrate
- microscope carrier
- support bar
- cutting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000758 substrate Substances 0.000 claims abstract description 93
- 239000000463 material Substances 0.000 claims abstract description 76
- 238000005520 cutting process Methods 0.000 claims abstract description 62
- 239000002313 adhesive film Substances 0.000 claims abstract description 17
- 238000003825 pressing Methods 0.000 description 13
- 239000004065 semiconductor Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000295 complement effect Effects 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 230000011218 segmentation Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 208000013201 Stress fracture Diseases 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000001144 postural effect Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
Images
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Dicing (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014-171059 | 2014-08-26 | ||
| JP2014171059A JP6446912B2 (ja) | 2014-08-26 | 2014-08-26 | ブレーク装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106142369A CN106142369A (zh) | 2016-11-23 |
| CN106142369B true CN106142369B (zh) | 2019-10-15 |
Family
ID=55540184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510177779.9A Active CN106142369B (zh) | 2014-08-26 | 2015-04-15 | 切断装置 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6446912B2 (enExample) |
| KR (1) | KR102351929B1 (enExample) |
| CN (1) | CN106142369B (enExample) |
| TW (1) | TWI654063B (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI797154B (zh) * | 2018-01-31 | 2023-04-01 | 日商三星鑽石工業股份有限公司 | 膜剝離機構及基板裂斷系統 |
| TW202041343A (zh) * | 2018-12-18 | 2020-11-16 | 日商三星鑽石工業股份有限公司 | 陶瓷片的製造方法及陶瓷片製造用之煅燒前片的製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103786267A (zh) * | 2012-10-26 | 2014-05-14 | 三星钻石工业股份有限公司 | 脆性材料基板的分断方法与分断装置 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004026539A (ja) * | 2002-06-24 | 2004-01-29 | Nakamura Tome Precision Ind Co Ltd | ガラス基板の割断加工方法及びその装置 |
| JP4589201B2 (ja) * | 2005-08-23 | 2010-12-01 | 株式会社ディスコ | 基板の切削装置 |
| KR100748305B1 (ko) * | 2006-03-02 | 2007-08-09 | 삼성에스디아이 주식회사 | 절단된 기판의 이송방법 |
| US20100175834A1 (en) * | 2009-01-13 | 2010-07-15 | Shin-Kan Liu | Wafer splitting laminate mechanism |
| TWI508153B (zh) * | 2010-04-30 | 2015-11-11 | 三星鑽石工業股份有限公司 | Disconnection device and disconnection method of brittle material substrate |
| JP5182339B2 (ja) * | 2010-08-31 | 2013-04-17 | 三星ダイヤモンド工業株式会社 | 基板ブレーク装置 |
| JP5187421B2 (ja) * | 2010-11-30 | 2013-04-24 | 三星ダイヤモンド工業株式会社 | 脆性材料基板のブレイク方法 |
| KR101217398B1 (ko) * | 2011-02-25 | 2013-01-02 | 앰코 테크놀로지 코리아 주식회사 | 웨이퍼 다이싱 장치 및 이를 이용한 웨이퍼 다이싱 방법 |
| JP5589899B2 (ja) * | 2011-03-03 | 2014-09-17 | 株式会社デンソー | 基板の分割方法及び分割装置 |
| JP2013071335A (ja) * | 2011-09-28 | 2013-04-22 | Mitsuboshi Diamond Industrial Co Ltd | マザー基板の分断方法 |
-
2014
- 2014-08-26 JP JP2014171059A patent/JP6446912B2/ja active Active
-
2015
- 2015-04-03 KR KR1020150047233A patent/KR102351929B1/ko active Active
- 2015-04-15 CN CN201510177779.9A patent/CN106142369B/zh active Active
- 2015-05-22 TW TW104116538A patent/TWI654063B/zh active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103786267A (zh) * | 2012-10-26 | 2014-05-14 | 三星钻石工业股份有限公司 | 脆性材料基板的分断方法与分断装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201607717A (zh) | 2016-03-01 |
| JP2016043638A (ja) | 2016-04-04 |
| KR102351929B1 (ko) | 2022-01-14 |
| TWI654063B (zh) | 2019-03-21 |
| KR20160024734A (ko) | 2016-03-07 |
| CN106142369A (zh) | 2016-11-23 |
| JP6446912B2 (ja) | 2019-01-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |