CN106113941B - 用于喷墨记录头的基板 - Google Patents
用于喷墨记录头的基板 Download PDFInfo
- Publication number
- CN106113941B CN106113941B CN201610282660.2A CN201610282660A CN106113941B CN 106113941 B CN106113941 B CN 106113941B CN 201610282660 A CN201610282660 A CN 201610282660A CN 106113941 B CN106113941 B CN 106113941B
- Authority
- CN
- China
- Prior art keywords
- substrate
- component
- print head
- ink jet
- jet print
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 69
- 239000010410 layer Substances 0.000 claims abstract description 44
- 239000011241 protective layer Substances 0.000 claims abstract description 24
- 239000011159 matrix material Substances 0.000 claims abstract description 18
- 239000000463 material Substances 0.000 claims description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 9
- 239000004020 conductor Substances 0.000 claims description 9
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 7
- 229910052721 tungsten Inorganic materials 0.000 claims description 7
- 239000010937 tungsten Substances 0.000 claims description 7
- 230000003068 static effect Effects 0.000 abstract description 27
- 230000015556 catabolic process Effects 0.000 abstract description 12
- 238000004519 manufacturing process Methods 0.000 description 10
- 238000000034 method Methods 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 6
- 239000007921 spray Substances 0.000 description 6
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000006260 foam Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- 238000005507 spraying Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 230000000670 limiting effect Effects 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 229910004200 TaSiN Inorganic materials 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 239000012777 electrically insulating material Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000005187 foaming Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 108010022579 ATP dependent 26S protease Proteins 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910018182 Al—Cu Inorganic materials 0.000 description 1
- 240000002853 Nelumbo nucifera Species 0.000 description 1
- 235000006508 Nelumbo nucifera Nutrition 0.000 description 1
- 235000006510 Nelumbo pentapetala Nutrition 0.000 description 1
- 206010037660 Pyrexia Diseases 0.000 description 1
- 229910008807 WSiN Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000010009 beating Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000009194 climbing Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 239000002305 electric material Substances 0.000 description 1
- 238000009429 electrical wiring Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000002829 reductive effect Effects 0.000 description 1
- 230000002940 repellent Effects 0.000 description 1
- 239000005871 repellent Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/05—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers produced by the application of heat
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04511—Control methods or devices therefor, e.g. driver circuits, control circuits for electrostatic discharge protection
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14088—Structure of heating means
- B41J2/14112—Resistive element
- B41J2/14129—Layer structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
- B41J2/1639—Manufacturing processes molding sacrificial molding
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015-094765 | 2015-05-07 | ||
| JP2015094765A JP6566709B2 (ja) | 2015-05-07 | 2015-05-07 | インクジェット記録ヘッド用基板 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106113941A CN106113941A (zh) | 2016-11-16 |
| CN106113941B true CN106113941B (zh) | 2018-06-01 |
Family
ID=57222293
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610282660.2A Expired - Fee Related CN106113941B (zh) | 2015-05-07 | 2016-04-29 | 用于喷墨记录头的基板 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9751301B2 (enExample) |
| JP (1) | JP6566709B2 (enExample) |
| CN (1) | CN106113941B (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6859706B2 (ja) * | 2016-12-28 | 2021-04-14 | ブラザー工業株式会社 | ヘッドモジュール及び液体吐出装置 |
| US11039529B2 (en) * | 2018-02-14 | 2021-06-15 | Ricoh Company, Ltd. | Cover plates that attenuate electrostatic discharge at printheads |
| US10913269B2 (en) | 2018-02-22 | 2021-02-09 | Canon Kabushiki Kaisha | Liquid discharge head substrate and liquid discharge head |
| US10730294B2 (en) * | 2018-02-22 | 2020-08-04 | Canon Kabushiki Kaisha | Liquid-discharge-head substrate, liquid discharge head, and method for manufacturing liquid-discharge-head substrate |
| JP7214409B2 (ja) * | 2018-09-05 | 2023-01-30 | キヤノン株式会社 | 液体吐出ヘッド |
| JP7191669B2 (ja) | 2018-12-17 | 2022-12-19 | キヤノン株式会社 | 液体吐出ヘッド用基板およびその製造方法 |
| CN113059914B (zh) * | 2021-03-25 | 2022-07-08 | 苏州印科杰特半导体科技有限公司 | 一种液体喷射流道 |
| JP7620482B2 (ja) | 2021-04-06 | 2025-01-23 | キヤノン株式会社 | 液体吐出ヘッド用基板及び記録装置 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1320078A (zh) * | 1999-09-27 | 2001-10-31 | 松下电器产业株式会社 | 喷墨头、喷墨头的制造方法及喷墨式记录装置 |
| US6513911B1 (en) * | 1999-06-04 | 2003-02-04 | Canon Kabushiki Kaisha | Micro-electromechanical device, liquid discharge head, and method of manufacture therefor |
| CN1486848A (zh) * | 2002-07-10 | 2004-04-07 | ������������ʽ���� | 液体喷出头的制造方法 |
| CN1517215A (zh) * | 2003-01-10 | 2004-08-04 | 佳能株式会社 | 喷墨记录头 |
| CN102686402A (zh) * | 2009-12-18 | 2012-09-19 | 柯尼卡美能达喷墨技术株式会社 | 喷墨头 |
| CN104339868A (zh) * | 2013-07-29 | 2015-02-11 | 佳能株式会社 | 打印元件基板、打印头和打印装置 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6361150B1 (en) | 1999-08-30 | 2002-03-26 | Hewlett-Packard Company | Electrostatic discharge protection of electrically-inactive components in a thermal ink jet printing system |
| JP4865309B2 (ja) * | 2005-11-29 | 2012-02-01 | キヤノン株式会社 | インクジェット記録ヘッド用基板の製造方法 |
| JP4847360B2 (ja) | 2006-02-02 | 2011-12-28 | キヤノン株式会社 | 液体吐出ヘッド基体、その基体を用いた液体吐出ヘッドおよびそれらの製造方法 |
| JP2008023715A (ja) * | 2006-07-18 | 2008-02-07 | Canon Inc | 液体吐出ヘッドおよびその製造方法 |
| US7959262B2 (en) | 2008-05-26 | 2011-06-14 | Canon Kabushiki Kaisha | Ink jet recording head substrate, and ink jet recording head including the substrate |
| JP5733967B2 (ja) * | 2010-12-14 | 2015-06-10 | キヤノン株式会社 | 液体吐出ヘッド及びその製造方法 |
| JP6029316B2 (ja) * | 2012-04-27 | 2016-11-24 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
| JP6150519B2 (ja) | 2012-12-27 | 2017-06-21 | キヤノン株式会社 | インクジェット記録ヘッド用基板、インクジェット記録ヘッド、インクジェット記録ヘッドの製造方法、インクジェット記録装置、およびインクジェット記録ヘッド用基板における個別部分と他の個別部分との電気的分離方法 |
| US9096059B2 (en) * | 2012-12-27 | 2015-08-04 | Canon Kabushiki Kaisha | Substrate for inkjet head, inkjet head, and inkjet printing apparatus |
| JP6039411B2 (ja) | 2012-12-27 | 2016-12-07 | キヤノン株式会社 | インクジェットヘッド用基板、インクジェットヘッド、インクジェットヘッドの製造方法 |
| JP2014151553A (ja) * | 2013-02-08 | 2014-08-25 | Seiko Epson Corp | 流路ユニットおよび流路ユニットの製造方法 |
| US9199460B2 (en) * | 2013-06-28 | 2015-12-01 | Hewlett-Packard Development Company, L.P. | Apparatuses including a plate having a recess and a corresponding protrusion to define a chamber |
-
2015
- 2015-05-07 JP JP2015094765A patent/JP6566709B2/ja not_active Expired - Fee Related
-
2016
- 2016-04-25 US US15/137,333 patent/US9751301B2/en not_active Expired - Fee Related
- 2016-04-29 CN CN201610282660.2A patent/CN106113941B/zh not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6513911B1 (en) * | 1999-06-04 | 2003-02-04 | Canon Kabushiki Kaisha | Micro-electromechanical device, liquid discharge head, and method of manufacture therefor |
| CN1320078A (zh) * | 1999-09-27 | 2001-10-31 | 松下电器产业株式会社 | 喷墨头、喷墨头的制造方法及喷墨式记录装置 |
| CN1486848A (zh) * | 2002-07-10 | 2004-04-07 | ������������ʽ���� | 液体喷出头的制造方法 |
| CN1517215A (zh) * | 2003-01-10 | 2004-08-04 | 佳能株式会社 | 喷墨记录头 |
| CN102686402A (zh) * | 2009-12-18 | 2012-09-19 | 柯尼卡美能达喷墨技术株式会社 | 喷墨头 |
| CN104339868A (zh) * | 2013-07-29 | 2015-02-11 | 佳能株式会社 | 打印元件基板、打印头和打印装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6566709B2 (ja) | 2019-08-28 |
| CN106113941A (zh) | 2016-11-16 |
| US20160325544A1 (en) | 2016-11-10 |
| JP2016210070A (ja) | 2016-12-15 |
| US9751301B2 (en) | 2017-09-05 |
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|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180601 |
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| CF01 | Termination of patent right due to non-payment of annual fee |