CN106112791B - 钛合金研磨及化学机械抛光方法 - Google Patents
钛合金研磨及化学机械抛光方法 Download PDFInfo
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- CN106112791B CN106112791B CN201610517763.2A CN201610517763A CN106112791B CN 106112791 B CN106112791 B CN 106112791B CN 201610517763 A CN201610517763 A CN 201610517763A CN 106112791 B CN106112791 B CN 106112791B
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- Prior art keywords
- polishing
- grinding
- abrasive
- titanium alloy
- hydrogen peroxide
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- 238000000227 grinding Methods 0.000 title claims abstract description 46
- 229910001069 Ti alloy Inorganic materials 0.000 title claims abstract description 42
- 238000000034 method Methods 0.000 title claims abstract description 14
- 238000005498 polishing Methods 0.000 claims abstract description 87
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 74
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 59
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 claims abstract description 45
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical group OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 claims abstract description 44
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 28
- 239000000243 solution Substances 0.000 claims abstract description 28
- 239000012530 fluid Substances 0.000 claims abstract description 26
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 23
- 238000003801 milling Methods 0.000 claims abstract description 19
- 239000008139 complexing agent Substances 0.000 claims abstract description 18
- 239000008367 deionised water Substances 0.000 claims abstract description 18
- 229910021641 deionized water Inorganic materials 0.000 claims abstract description 18
- 239000003082 abrasive agent Substances 0.000 claims abstract description 16
- BJEPYKJPYRNKOW-REOHCLBHSA-N (S)-malic acid Chemical group OC(=O)[C@@H](O)CC(O)=O BJEPYKJPYRNKOW-REOHCLBHSA-N 0.000 claims abstract description 13
- BJEPYKJPYRNKOW-UHFFFAOYSA-N alpha-hydroxysuccinic acid Natural products OC(=O)C(O)CC(O)=O BJEPYKJPYRNKOW-UHFFFAOYSA-N 0.000 claims abstract description 13
- 239000001630 malic acid Substances 0.000 claims abstract description 13
- 235000011090 malic acid Nutrition 0.000 claims abstract description 13
- 239000007800 oxidant agent Substances 0.000 claims abstract description 9
- 230000001590 oxidative effect Effects 0.000 claims abstract description 9
- 238000011068 loading method Methods 0.000 claims abstract description 5
- 244000137852 Petrea volubilis Species 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 6
- 229910001868 water Inorganic materials 0.000 claims description 5
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 4
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 4
- 238000003754 machining Methods 0.000 abstract description 8
- 229910001092 metal group alloy Inorganic materials 0.000 abstract description 4
- 239000000523 sample Substances 0.000 description 21
- 238000012360 testing method Methods 0.000 description 8
- 239000002253 acid Substances 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
- 239000003153 chemical reaction reagent Substances 0.000 description 4
- 239000010410 layer Substances 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- 231100000481 chemical toxicant Toxicity 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000003440 toxic substance Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000006061 abrasive grain Substances 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 239000003002 pH adjusting agent Substances 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 239000004576 sand Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- PXFBZOLANLWPMH-UHFFFAOYSA-N 16-Epiaffinine Natural products C1C(C2=CC=CC=C2N2)=C2C(=O)CC2C(=CC)CN(C)C1C2CO PXFBZOLANLWPMH-UHFFFAOYSA-N 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- BHPQYMZQTOCNFJ-UHFFFAOYSA-N Calcium cation Chemical compound [Ca+2] BHPQYMZQTOCNFJ-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 244000248349 Citrus limon Species 0.000 description 1
- 235000005979 Citrus limon Nutrition 0.000 description 1
- 229910000997 High-speed steel Inorganic materials 0.000 description 1
- JLVVSXFLKOJNIY-UHFFFAOYSA-N Magnesium ion Chemical compound [Mg+2] JLVVSXFLKOJNIY-UHFFFAOYSA-N 0.000 description 1
- 229910000883 Ti6Al4V Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 235000013361 beverage Nutrition 0.000 description 1
- 229910001424 calcium ion Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000002242 deionisation method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910001425 magnesium ion Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 239000008399 tap water Substances 0.000 description 1
- 235000020679 tap water Nutrition 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
- B24B29/02—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/06—Other polishing compositions
- C09G1/14—Other polishing compositions based on non-waxy substances
- C09G1/18—Other polishing compositions based on non-waxy substances on other substances
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Abstract
Description
Claims (1)
Priority Applications (1)
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CN201610517763.2A CN106112791B (zh) | 2016-07-01 | 2016-07-01 | 钛合金研磨及化学机械抛光方法 |
Applications Claiming Priority (1)
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CN201610517763.2A CN106112791B (zh) | 2016-07-01 | 2016-07-01 | 钛合金研磨及化学机械抛光方法 |
Publications (2)
Publication Number | Publication Date |
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CN106112791A CN106112791A (zh) | 2016-11-16 |
CN106112791B true CN106112791B (zh) | 2019-01-18 |
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CN201610517763.2A Active CN106112791B (zh) | 2016-07-01 | 2016-07-01 | 钛合金研磨及化学机械抛光方法 |
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Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108237442B (zh) * | 2016-12-23 | 2020-08-04 | 蓝思科技(长沙)有限公司 | 一种超薄陶瓷指纹识别片的加工工艺 |
CN106637223A (zh) * | 2016-12-28 | 2017-05-10 | 苏州华碧微科检测技术有限公司 | 一种钛合金材料抛光方法 |
CN108754183B (zh) * | 2018-06-21 | 2020-11-06 | 宁波江丰电子材料股份有限公司 | 钛蒸发料的制备方法和钛蒸发料 |
CN109500721A (zh) * | 2018-12-22 | 2019-03-22 | 浙江宏泰精密科技有限公司 | 一种金属抛光方法 |
CN109848821A (zh) * | 2018-12-28 | 2019-06-07 | 大连理工大学 | 一种镍合金的绿色环保化学机械抛光方法 |
CN110183971A (zh) * | 2019-06-28 | 2019-08-30 | 大连理工大学 | 一种整体叶轮的绿色环保混合化学机械抛光液与抛光方法 |
CN110296877B (zh) * | 2019-07-31 | 2020-06-12 | 西北有色金属研究院 | 一种纯钛金相试样的制备方法 |
CN110509114B (zh) * | 2019-08-14 | 2021-01-05 | 大连理工大学 | 一种钨合金的研磨抛光方法 |
CN111811904A (zh) * | 2020-07-17 | 2020-10-23 | 安徽工业大学 | 一种GCr15高温激光共聚焦原位动态观察试样的制备方法 |
CN111834229A (zh) * | 2020-07-23 | 2020-10-27 | 大连理工大学 | 一种碲锌镉晶片的绿色环保化学机械抛光方法 |
CN112658977A (zh) * | 2020-12-17 | 2021-04-16 | 江苏集萃精凯高端装备技术有限公司 | 片状氧化镥激光晶体化学机械抛光方法 |
CN113787450B (zh) * | 2021-09-07 | 2022-11-15 | 大连理工大学 | 一种FeCrAl材料的超光滑表面制备方法 |
CN114525512B (zh) * | 2022-01-25 | 2024-06-25 | 深圳市拍档科技有限公司 | 一种可循环使用的钛合金镜面抛光液及其制备方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102703853B (zh) * | 2012-06-12 | 2013-09-11 | 南京航空航天大学 | 钛合金的表面强化方法 |
CN102877068A (zh) * | 2012-09-24 | 2013-01-16 | 广西大学 | 环境友好型钛合金化学机械抛光液 |
CN102965613B (zh) * | 2012-12-05 | 2014-10-15 | 南京航空航天大学 | 一种钛合金低温表面渗氮方法 |
CN103203681B (zh) * | 2013-04-07 | 2015-04-29 | 大连理工大学 | 一种ii-vi族软脆晶体研磨抛光方法 |
CN104650736A (zh) * | 2013-11-18 | 2015-05-27 | 安集微电子(上海)有限公司 | 一种化学机械抛光液及其应用 |
US9144883B2 (en) * | 2014-02-12 | 2015-09-29 | Taiwan Semiconductor Manufacturing Co., Ltd | Abrasive article, conditioning disk and method for forming abrasive article |
CN103862354B (zh) * | 2014-03-24 | 2015-12-09 | 南京航空航天大学 | 超薄单晶锗片的加工方法 |
CN103978406A (zh) * | 2014-05-12 | 2014-08-13 | 大连理工大学 | 一种铌酸锂晶体高效超光滑化学机械抛光方法 |
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Address after: Changzhou science and Education City, No.18, middle Changwu Road, Wujin District, Changzhou City, Jiangsu Province, 213000 Patentee after: JIANGSU RESEARCH INSTITUTE CO LTD DALIAN University OF TECHNOLOGY Address before: Room 201, building a, Changzhou Research Institute, Dalian University of technology, Changzhou science and Education City, No. 801, middle Changwu Road, Wujin District, Changzhou City, Jiangsu Province, 213164 Patentee before: CHANGZHOU INSTITUTE OF DALIAN University OF TECHNOLOGY |
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Effective date of registration: 20210105 Address after: 213200 Junbo small and micro enterprise park, 288-1 Huacheng Middle Road, development zone, Jintan District, Changzhou City, Jiangsu Province Patentee after: Jintan branch of Dalian Institute of technology Jiangsu Research Institute Co.,Ltd. Address before: Changzhou science and Education City, No.18, middle Changwu Road, Wujin District, Changzhou City, Jiangsu Province, 213000 Patentee before: JIANGSU RESEARCH INSTITUTE CO LTD DALIAN University OF TECHNOLOGY |
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EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20161116 Assignee: Changzhou Haiheng Nano Technology Co.,Ltd. Assignor: Jintan branch of Dalian Institute of technology Jiangsu Research Institute Co.,Ltd. Contract record no.: X2024980006158 Denomination of invention: Grinding and chemical mechanical polishing methods for titanium alloys Granted publication date: 20190118 License type: Common License Record date: 20240524 |