CN106054299B - 一种易清洗的红外截止滤光片及其镀膜方法 - Google Patents
一种易清洗的红外截止滤光片及其镀膜方法 Download PDFInfo
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- CN106054299B CN106054299B CN201610604271.7A CN201610604271A CN106054299B CN 106054299 B CN106054299 B CN 106054299B CN 201610604271 A CN201610604271 A CN 201610604271A CN 106054299 B CN106054299 B CN 106054299B
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 55
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims abstract description 38
- 210000003684 theca cell Anatomy 0.000 claims abstract description 35
- 239000000758 substrate Substances 0.000 claims abstract description 32
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 28
- 239000002131 composite material Substances 0.000 claims abstract description 24
- 229910052681 coesite Inorganic materials 0.000 claims abstract description 21
- 229910052906 cristobalite Inorganic materials 0.000 claims abstract description 21
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 21
- 229910052682 stishovite Inorganic materials 0.000 claims abstract description 21
- 229910052905 tridymite Inorganic materials 0.000 claims abstract description 21
- AZCUJQOIQYJWQJ-UHFFFAOYSA-N oxygen(2-) titanium(4+) trihydrate Chemical compound [O-2].[O-2].[Ti+4].O.O.O AZCUJQOIQYJWQJ-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910009815 Ti3O5 Inorganic materials 0.000 claims description 9
- 150000002500 ions Chemical class 0.000 claims description 8
- 230000008021 deposition Effects 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 1
- -1 silica Ion Chemical class 0.000 claims 1
- 238000000576 coating method Methods 0.000 abstract description 10
- 230000003287 optical effect Effects 0.000 abstract description 10
- 239000011521 glass Substances 0.000 abstract description 9
- 230000000694 effects Effects 0.000 abstract description 7
- 239000011248 coating agent Substances 0.000 abstract description 6
- 238000005520 cutting process Methods 0.000 abstract description 5
- 230000009471 action Effects 0.000 abstract description 4
- 238000000151 deposition Methods 0.000 abstract description 4
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 abstract description 3
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- 239000000428 dust Substances 0.000 description 2
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- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
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- 239000010936 titanium Substances 0.000 description 1
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/208—Filters for use with infrared or ultraviolet radiation, e.g. for separating visible light from infrared and/or ultraviolet radiation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0694—Halides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/083—Oxides of refractory metals or yttrium
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/10—Glass or silica
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/14—Protective coatings, e.g. hard coatings
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- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Optics & Photonics (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Optical Filters (AREA)
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Abstract
Description
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201610604271.7A CN106054299B (zh) | 2016-07-29 | 2016-07-29 | 一种易清洗的红外截止滤光片及其镀膜方法 |
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CN201610604271.7A CN106054299B (zh) | 2016-07-29 | 2016-07-29 | 一种易清洗的红外截止滤光片及其镀膜方法 |
Publications (2)
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CN106054299A CN106054299A (zh) | 2016-10-26 |
CN106054299B true CN106054299B (zh) | 2019-05-28 |
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Families Citing this family (5)
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CN106443853B (zh) * | 2016-11-25 | 2019-01-25 | 中国科学院上海技术物理研究所 | 一种可见光近红外透射中长波红外反射的宽光谱分色片 |
CN107577006A (zh) * | 2017-10-13 | 2018-01-12 | 无锡奥芬光电科技有限公司 | 一种低入射角度依赖性红外截止滤光片 |
CN110196466B (zh) * | 2019-05-24 | 2023-11-28 | 河南镀邦光电股份有限公司 | 一种低翘曲度红外截止滤光片及其镀膜方法 |
CN110205594A (zh) * | 2019-05-24 | 2019-09-06 | 河南镀邦光电股份有限公司 | 一种盖板im镀膜结构及制备方法 |
CN114400290B (zh) * | 2022-01-26 | 2023-04-18 | 华能新能源股份有限公司 | 一种导电电极和复合盖板玻璃的制备方法及其应用 |
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JP5268436B2 (ja) * | 2008-06-06 | 2013-08-21 | キヤノン株式会社 | 光学フィルタ及び撮像装置 |
CN101620286B (zh) * | 2009-06-30 | 2011-01-19 | 中国航空工业集团公司洛阳电光设备研究所 | 一种截止滤光膜膜系及其镀制方法 |
US20130250403A1 (en) * | 2012-03-22 | 2013-09-26 | Palo Alto Research Center Incorporated | High infrared transmission window with self cleaning hydrophilic surface |
CN104947044A (zh) * | 2015-07-22 | 2015-09-30 | 上海巨煌光电科技有限公司 | 一种红外截止滤光片的镀膜方法 |
CN105589123B (zh) * | 2016-03-03 | 2018-09-28 | 舜宇光学(中山)有限公司 | 大曲率透镜表面用的红外紫外截止滤光膜结构及制作方法 |
CN205880267U (zh) * | 2016-07-29 | 2017-01-11 | 利达光电股份有限公司 | 一种易清洗的红外截止滤光片 |
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Effective date of registration: 20190712 Address after: 473000 No. 366 Xinchen West Road, Nanyang High-tech Zone, Henan Province Patentee after: Nanyang Lida Photoelectric Co.,Ltd. Address before: 473003 No. 508 Industrial Road, Nanyang City, Henan Province Patentee before: LIDA OPTICAL AND ELECTRONIC Co.,Ltd. |
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TR01 | Transfer of patent right | ||
CB03 | Change of inventor or designer information |
Inventor after: Sun Bo Inventor after: Jiao Taotao Inventor after: Zhang Hao Inventor after: Fu Yong Inventor after: Li Zhichao Inventor before: Sun Bo Inventor before: Jiao Tao Inventor before: Zhang Hao Inventor before: Fu Yong Inventor before: Li Zhichao |
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CB03 | Change of inventor or designer information |