CN106054299A - 一种易清洗的红外截止滤光片及其镀膜方法 - Google Patents
一种易清洗的红外截止滤光片及其镀膜方法 Download PDFInfo
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- CN106054299A CN106054299A CN201610604271.7A CN201610604271A CN106054299A CN 106054299 A CN106054299 A CN 106054299A CN 201610604271 A CN201610604271 A CN 201610604271A CN 106054299 A CN106054299 A CN 106054299A
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- 238000000576 coating method Methods 0.000 title abstract description 11
- 230000003670 easy-to-clean Effects 0.000 title abstract 2
- 239000000463 material Substances 0.000 claims abstract description 80
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 48
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims abstract description 40
- 239000000758 substrate Substances 0.000 claims abstract description 34
- 239000002131 composite material Substances 0.000 claims abstract description 26
- 238000004140 cleaning Methods 0.000 claims abstract description 22
- 229910052681 coesite Inorganic materials 0.000 claims abstract description 21
- 229910052906 cristobalite Inorganic materials 0.000 claims abstract description 21
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 21
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 21
- 229910052682 stishovite Inorganic materials 0.000 claims abstract description 21
- 229910052905 tridymite Inorganic materials 0.000 claims abstract description 21
- 238000000034 method Methods 0.000 claims abstract description 16
- 238000007747 plating Methods 0.000 claims abstract description 14
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- 229910052814 silicon oxide Inorganic materials 0.000 claims abstract description 6
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- 150000002500 ions Chemical class 0.000 claims description 9
- 229910009815 Ti3O5 Inorganic materials 0.000 claims description 8
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 6
- 230000003647 oxidation Effects 0.000 claims description 5
- 238000007254 oxidation reaction Methods 0.000 claims description 5
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- 238000010438 heat treatment Methods 0.000 claims 1
- 239000002253 acid Substances 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 5
- 238000005520 cutting process Methods 0.000 abstract description 3
- 238000000151 deposition Methods 0.000 abstract description 3
- 239000000428 dust Substances 0.000 abstract description 3
- 230000002159 abnormal effect Effects 0.000 abstract description 2
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- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
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- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
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- 229910052760 oxygen Inorganic materials 0.000 description 1
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/208—Filters for use with infrared or ultraviolet radiation, e.g. for separating visible light from infrared and/or ultraviolet radiation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0694—Halides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/083—Oxides of refractory metals or yttrium
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/10—Glass or silica
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/14—Protective coatings, e.g. hard coatings
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- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
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Abstract
Description
Claims (7)
Priority Applications (1)
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CN201610604271.7A CN106054299B (zh) | 2016-07-29 | 2016-07-29 | 一种易清洗的红外截止滤光片及其镀膜方法 |
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CN201610604271.7A CN106054299B (zh) | 2016-07-29 | 2016-07-29 | 一种易清洗的红外截止滤光片及其镀膜方法 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106443853A (zh) * | 2016-11-25 | 2017-02-22 | 中国科学院上海技术物理研究所 | 一种可见光近红外透射中长波红外反射的宽光谱分色片 |
CN107577006A (zh) * | 2017-10-13 | 2018-01-12 | 无锡奥芬光电科技有限公司 | 一种低入射角度依赖性红外截止滤光片 |
CN110196466A (zh) * | 2019-05-24 | 2019-09-03 | 河南镀邦光电股份有限公司 | 一种低翘曲度红外截止滤光片及其镀膜方法 |
CN110205594A (zh) * | 2019-05-24 | 2019-09-06 | 河南镀邦光电股份有限公司 | 一种盖板im镀膜结构及制备方法 |
CN114400290A (zh) * | 2022-01-26 | 2022-04-26 | 华能新能源股份有限公司 | 一种导电电极和复合盖板玻璃的制备方法及其应用 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101598828A (zh) * | 2008-06-06 | 2009-12-09 | 佳能株式会社 | 光学滤波器及摄像设备 |
CN101620286A (zh) * | 2009-06-30 | 2010-01-06 | 中国航空工业集团公司洛阳电光设备研究所 | 一种截止滤光膜膜系及其镀制方法 |
US20130250403A1 (en) * | 2012-03-22 | 2013-09-26 | Palo Alto Research Center Incorporated | High infrared transmission window with self cleaning hydrophilic surface |
CN104947044A (zh) * | 2015-07-22 | 2015-09-30 | 上海巨煌光电科技有限公司 | 一种红外截止滤光片的镀膜方法 |
CN105589123A (zh) * | 2016-03-03 | 2016-05-18 | 舜宇光学(中山)有限公司 | 大曲率透镜表面用的红外紫外截止滤光膜结构及制作方法 |
CN205880267U (zh) * | 2016-07-29 | 2017-01-11 | 利达光电股份有限公司 | 一种易清洗的红外截止滤光片 |
-
2016
- 2016-07-29 CN CN201610604271.7A patent/CN106054299B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101598828A (zh) * | 2008-06-06 | 2009-12-09 | 佳能株式会社 | 光学滤波器及摄像设备 |
CN101620286A (zh) * | 2009-06-30 | 2010-01-06 | 中国航空工业集团公司洛阳电光设备研究所 | 一种截止滤光膜膜系及其镀制方法 |
US20130250403A1 (en) * | 2012-03-22 | 2013-09-26 | Palo Alto Research Center Incorporated | High infrared transmission window with self cleaning hydrophilic surface |
CN104947044A (zh) * | 2015-07-22 | 2015-09-30 | 上海巨煌光电科技有限公司 | 一种红外截止滤光片的镀膜方法 |
CN105589123A (zh) * | 2016-03-03 | 2016-05-18 | 舜宇光学(中山)有限公司 | 大曲率透镜表面用的红外紫外截止滤光膜结构及制作方法 |
CN205880267U (zh) * | 2016-07-29 | 2017-01-11 | 利达光电股份有限公司 | 一种易清洗的红外截止滤光片 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106443853A (zh) * | 2016-11-25 | 2017-02-22 | 中国科学院上海技术物理研究所 | 一种可见光近红外透射中长波红外反射的宽光谱分色片 |
CN106443853B (zh) * | 2016-11-25 | 2019-01-25 | 中国科学院上海技术物理研究所 | 一种可见光近红外透射中长波红外反射的宽光谱分色片 |
CN107577006A (zh) * | 2017-10-13 | 2018-01-12 | 无锡奥芬光电科技有限公司 | 一种低入射角度依赖性红外截止滤光片 |
CN110196466A (zh) * | 2019-05-24 | 2019-09-03 | 河南镀邦光电股份有限公司 | 一种低翘曲度红外截止滤光片及其镀膜方法 |
CN110205594A (zh) * | 2019-05-24 | 2019-09-06 | 河南镀邦光电股份有限公司 | 一种盖板im镀膜结构及制备方法 |
CN110196466B (zh) * | 2019-05-24 | 2023-11-28 | 河南镀邦光电股份有限公司 | 一种低翘曲度红外截止滤光片及其镀膜方法 |
CN114400290A (zh) * | 2022-01-26 | 2022-04-26 | 华能新能源股份有限公司 | 一种导电电极和复合盖板玻璃的制备方法及其应用 |
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Effective date of registration: 20190712 Address after: 473000 No. 366 Xinchen West Road, Nanyang High-tech Zone, Henan Province Patentee after: Nanyang Lida Photoelectric Co.,Ltd. Address before: 473003 No. 508 Industrial Road, Nanyang City, Henan Province Patentee before: LIDA OPTICAL AND ELECTRONIC Co.,Ltd. |
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Inventor after: Sun Bo Inventor after: Jiao Taotao Inventor after: Zhang Hao Inventor after: Fu Yong Inventor after: Li Zhichao Inventor before: Sun Bo Inventor before: Jiao Tao Inventor before: Zhang Hao Inventor before: Fu Yong Inventor before: Li Zhichao |