CN105803394A - TiZrCrAlN多元复合耐磨涂层刀具及其制备方法 - Google Patents
TiZrCrAlN多元复合耐磨涂层刀具及其制备方法 Download PDFInfo
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Abstract
本发明公开了一种TiZrCrAlN多元复合耐磨涂层刀具及其制备方法，属于金属切削刀具技术领域，包括刀具基体，刀具基体上设有涂层，刀具由下至上依次为：刀具基体、Ti过渡层、Ti/Zr/Cr/Al过渡层和TiZrCrAlN多元复合涂层；所述制备方法依次通过前处理、离子清洗、沉积Ti过渡层、沉积Ti/Zr/Cr/Al过渡层、沉积TiZrCrAlN多元复合涂层和后处理。本发明TiZrCrAlN多元复合耐磨涂层刀具及其制备方法，采用多弧离子镀和非平衡磁控溅射复合镀膜方法制备多元复合涂层，表面涂层为TiZrCrAlN多元涂层，刀具基体与表面涂层之间有Ti过渡层和Ti/Zr/Cr/Al过渡层，以减小残余应力，显著提高涂层的强度和韧性，具有更好的耐冲击性和抗磨损性，能够改善原有二元涂层耐磨性差的缺点，显著提高刀具的使用寿命以及切削性能。
Description
技术领域
本发明属于金属切削刀具技术领域，具体涉及一种TiZrCrAlN多元复合耐磨涂层刀具及其制备方法。
背景技术
对刀具进行涂层处理是提高刀具性能的重要途径之一。涂层刀具将刀具基体与涂层相结合，使刀具性能大大提高。TiN、ZrN等氮化物单涂层刀具自上世纪70年代成功应用于切削刀具后，成为目前应用最为广泛的涂层刀具。然而，随着切削加工技术的发展以及高速切削技术的推广，二元氮化物涂层相对较差的韧性和耐磨性限制了其应用。通过制备多元复合结构的涂层可以显著提高涂层的韧性、强度及耐冲击性等综合性能，涂层的多元复合结构已经成为涂层刀具的重要发展方向。
发明内容
本发明提供了一种TiZrCrAlN多元复合耐磨涂层刀具及其制备方法，其目的在于，克服现有二元涂层刀具技术的不足，采用多弧离子镀和非平衡磁控溅射复合镀膜方法制备多元复合涂层，提高涂层的韧性、强度及耐冲击性等综合性能。
本发明TiZrCrAlN多元复合耐磨涂层刀具，包括刀具基体，涂层为Ti、Ti/Zr/Cr/Al和TiZrCrAlN；刀具由下至上依次为：刀具基体、Ti过渡层、Ti/Zr/Cr/Al过渡层和TiZrCrAlN多元复合涂层。
所述刀具基体的材料为硬质合金或高速钢。
本发明所述的TiZrCrAlN多元复合耐磨涂层刀具的制备方法，在刀具基体表面电弧离子镀沉积Ti过渡层，然后多弧离子镀+非平衡磁控溅射复合沉积Ti/Zr/Cr/Al过渡层，最后同时沉积TiZrCrAlN多元复合涂层(沉积时使用1个Ti电弧靶、1个Zr电弧靶、1个Cr非平衡磁控溅射靶和1个Al非平衡磁控溅射靶)，其制备步骤如下：
1)前处理：将刀具基体表面打磨、抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各30min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至5.0×10-3Pa，加热至300℃，保温30-40min；
2)离子清洗：通Ar气，其压力为1.5Pa，开启偏压电源，电压1000V，占空比0.5，辉光放电清洗15min；降低偏压至800V，开启离子源离子清洗25min，开启Ti靶的电弧源，靶电流50A，偏压500V，离子轰击Ti靶2min；
3)沉积Ti过渡层：调整Ar气压0.5-0.6Pa，偏压降至400V，沉积温度300℃，Ti靶电流70A，电弧镀Ti过渡层3-4min；
4)沉积Ti/Zr/Cr/Al过渡层：调整Ar气压0.5Pa，偏压降至300V，Ti多弧靶的靶电流80A；Zr多弧靶电流为70A，Cr非平衡磁控溅射靶电流为35A，Al非平衡磁控溅射靶电流为30A，沉积温度250-280℃，共沉积Ti/Zr/Cr/Al过渡层10min；
5)沉积TiZrCrAlN多元复合涂层：保持其它参数不变，开启N2，N2气压1.0Pa，占空比为0.5，复合沉积沉TiZrCrAlN层50min；其它参数不变，占空比降为0.4，复合TiZrCrAlN多元复合涂层10min；占空比降为0.3，复合TiZrCrAlN多元复合涂层10min；占空比降为0.2，复合TiZrCrAlN多元复合涂层10min；
6)后处理：关闭各电源、离子源及气体源，涂层结束。
与现有技术相比，本发明的有益效果为：本发明TiZrCrAlN多元复合耐磨涂层刀具及其制备方法，采用多弧离子镀和非平衡磁控溅射复合镀膜方法制备多元复合涂层，表面涂层为TiZrCrAlN多元涂层，刀具基体与表面涂层之间有Ti过渡层和Ti/Zr/Cr/Al过渡层，以减小残余应力，增加涂层与刀具基体间的结合强度，该TiZrCrAlN多元复合耐磨涂层刀具在涂层中同时增加了Ti、Zr、Cr、Al等4中金属，显著提高涂层的强度和韧性，具有更好的耐冲击性和抗磨损性，能够改善原有二元涂层耐磨性差的缺点，显著提高刀具的使用寿命以及切削性能。
附图说明
图1为本发明的的TiZrCrAlN多元复合耐磨涂层刀具的结构示意图。
图中：1、刀具基体，2、Ti过渡层，3、Ti/Zr/Cr/Al过渡涂层，4、TiZrCrAlN多元复合涂层。
具体实施方式：
下面给出本发明的两个最佳实施例。
实施例一
一种TiZrCrAlN多元复合耐磨涂层刀具，该刀具为普通的铣刀片，其刀具基体1的材料为：硬质合金YT15；涂层材料为：Ti、Ti/Zr/Cr/Al和TiZrCrAlN；刀具由下至上依次为：刀具基体1、Ti过渡层2、Ti/Zr/Cr/Al过渡层3和TiZrCrAlN多元复合涂层4。
本发明所述的TiZrCrAlN多元复合耐磨涂层刀具的制备方法，沉积方式为：在刀具基体表面电弧离子镀沉积Ti过渡层，然后多弧离子镀+非平衡磁控溅射复合沉积Ti/Zr/Cr/Al过渡层，最后同时沉积TiZrCrAlN多元复合涂层(沉积时使用1个Ti电弧靶、1个Zr电弧靶、1个Cr非平衡溅射靶和1个Al非平衡磁控溅射靶)，其制备步骤如下：
1)前处理：将硬质合金YT15铣刀片基体表面抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各30min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至5.0×10-3Pa，加热至300℃，保温30min；
2)离子清洗：通Ar气，其压力为1.5Pa，开启偏压电源，电压1000V，占空比0.5，辉光放电清洗15min；降低偏压至800V，开启离子源离子清洗25min，开启Ti靶的电弧源，靶电流50A，偏压500V，离子轰击Ti靶2min；
3)沉积Ti过渡层：调整Ar气压0.5Pa，偏压降至400V，沉积温度300℃，Ti靶电流70A，电弧镀Ti过渡层3min；
4)沉积Ti/Zr/Cr/Al过渡层：Ar气压0.5Pa，偏压300V，Ti多弧靶的靶电流80A；Zr多弧靶电流为70A，Cr非平衡磁控溅射靶电流为35A，Al非平衡磁控溅射靶电流为30A，沉积温度250℃，共沉积Ti/Zr/Cr/Al过渡层10min；
5)TiZrCrAlN多元复合涂层：保持其它参数不变，开启N2，N2气压1.0Pa，占空比为0.5，复合沉积沉TiZrCrAlN层50min；其它参数不变，占空比降为0.4，复合TiZrCrAlN多元复合涂层10min；占空比降为0.3，复合TiZrCrAlN多元复合涂层10min；占空比降为0.2，复合TiZrCrAlN多元复合涂层10min；
6)后处理：关闭各电源、离子源及气体源，涂层结束。
实施例二
一种TiZrCrAlN多元复合耐磨涂层刀具，该刀具为普通麻花钻，其基体材料为：高速钢W18Cr4V；涂层材料为：Ti、Ti/Zr/Cr/Al和TiZrCrAlN；刀具由下至上依次为：刀具基体1、Ti过渡层2、Ti/Zr/Cr/Al过渡层3和TiZrCrAlN多元复合涂层4。
本发明所述的TiZrCrAlN多元复合耐磨涂层刀具的制备方法，沉积方式为：在刀具基体表面电弧离子镀沉积Ti过渡层，然后多弧离子镀+非平衡磁控溅射复合沉积Ti/Zr/Cr/Al过渡层，最后同时沉积TiZrCrAlN多元复合涂层(沉积时使用1个Ti电弧靶、1个Zr电弧靶、1个Cr非平衡溅射靶和1个Al非平衡磁控溅射靶)，其制备步骤如下：
1)前处理：将基体材料为W18Cr4V的麻花钻刀具基体表面用金相砂纸打磨，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各30min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至5.0×10-3Pa，加热至300℃，保温40min；
2)离子清洗：通Ar气，其压力为1.5Pa，开启偏压电源，电压1000V，占空比0.5，辉光放电清洗15min；降低偏压至800V，开启离子源离子清洗25min，开启Ti靶的电弧源，靶电流50A，偏压500V，离子轰击Ti靶2min；
3)沉积Ti过渡层：调整Ar气压0.6Pa，偏压降至400V，沉积温度300℃，Ti靶电流70A，电弧镀Ti过渡层4min；
4)沉积Ti/Zr/Cr/Al过渡层：Ar气压0.5Pa，偏压300V，Ti多弧靶的靶电流80A；Zr多弧靶电流为70A，Cr非平衡磁控溅射靶电流为35A，Al非平衡磁控溅射靶电流为30A，沉积温度280℃，共沉积Ti/Zr/Cr/Al过渡层10min；
5)TiZrCrAlN多元复合涂层：保持其它参数不变，开启N2，N2气压1.0Pa，占空比为0.5，复合沉积沉TiZrCrAlN层50min；其它参数不变，占空比降为0.4，复合TiZrCrAlN多元复合涂层10min；占空比降为0.3，复合TiZrCrAlN多元复合涂层10min；占空比降为0.2，复合TiZrCrAlN多元复合涂层10min；
6)后处理：关闭各电源、离子源及气体源，涂层结束。
Claims (3)
1.一种TiZrCrAlN多元复合耐磨涂层刀具，包括材料刀具基体(1)，其特征在于，涂层为Ti、Ti/Zr/Cr/Al和TiZrCrAlN；刀具由下至上依次为：刀具基体(1)、Ti过渡层(2)、Ti/Zr/Cr/Al过渡层(3)和TiZrCrAlN多元涂层(4)。
2.根据权利要求1所述的TiZrCrAlN多元复合耐磨涂层刀具，其特征在于，所述刀具基体的材料为硬质合金或高速钢。
3.一种如权利要求1或2所述的TiZrCrAlN多元复合耐磨涂层刀具的制备方法，其特征在于，在刀具基体表面电弧离子镀沉积Ti过渡层，然后多弧离子镀+非平衡磁控溅射复合沉积Ti/Zr/Cr/Al过渡层，最后同时沉积TiZrCrAlN多元涂层(沉积时使用1个Ti电弧靶、1个Zr电弧靶、1个Cr非平衡磁控溅射靶和1个Al非平衡磁控溅射靶)，其制备步骤如下：
1)前处理：将刀具基体表面打磨、抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各30min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至5.0×10-3Pa，加热至300℃，保温30-40min；
2)离子清洗：通Ar气，其压力为1.5Pa，开启偏压电源，电压1000V，占空比0.5，辉光放电清洗15min；降低偏压至800V，开启离子源离子清洗25min，开启Ti靶的电弧源，靶电流50A，偏压500V，离子轰击Ti靶2min；
3)沉积Ti过渡层：调整Ar气压0.5-0.6Pa，偏压降至400V，沉积温度300℃，Ti靶电流70A，电弧镀Ti过渡层3-4min；
4)沉积Ti/Zr/Cr/Al过渡层：调整Ar气压0.5Pa，偏压降至300V，Ti多弧靶的靶电流80A；Zr多弧靶电流为70A，Cr非平衡磁控溅射靶电流为35A，Al非平衡磁控溅射靶电流为30A，沉积温度250-280℃，共沉积Ti/Zr/Cr/Al过渡层10min；
5)沉积TiZrCrAlN多元涂层：保持其它参数不变，开启N2，N2气压1.0Pa，占空比为0.5，复合沉积沉TiZrCrAlN层50min；其它参数不变，占空比降为0.4，复合沉积TiZrCrAlN层10min；占空比降为0.3，复合沉积TiZrCrAlN层10min；占空比降为0.2，复合沉积TiZrCrAlN层10min；
6)后处理：关闭各电源、离子源及气体源，涂层结束。
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107815643A (zh) * | 2017-09-14 | 2018-03-20 | 上海新弧源涂层技术有限公司 | 一种用于高温服役的纳米多层涂层及其制备方法 |
| CN108486534A (zh) * | 2018-05-03 | 2018-09-04 | 晋中经纬化纤精密制造有限公司 | 一种钽、不锈钢喷丝头纳米复合涂层结构及其制备工艺 |
| CN111979544A (zh) * | 2020-09-22 | 2020-11-24 | 南京航空航天大学 | 一种采用热致相变膜作为应力调控层多级调节刀具涂层应力的方法 |
| CN112708853A (zh) * | 2020-12-22 | 2021-04-27 | 安徽工业大学 | 一种微粒子喷丸后处理改善AlCrN涂层刀具性能的加工方法 |
| US11420346B2 (en) * | 2020-08-19 | 2022-08-23 | Acme United Corporation | Coating for cutting implement |
| CN116590662A (zh) * | 2023-05-09 | 2023-08-15 | 东莞市普拉提纳米科技有限公司 | 一种切削钛合金用含硼高熵合金刀具涂层及其制备工艺 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1854333A (zh) * | 2005-04-27 | 2006-11-01 | 北京实力源科技开发有限责任公司 | 一种新的真空镀膜方法和设备 |
| CN101596607A (zh) * | 2009-05-04 | 2009-12-09 | 山东大学 | TiZrN涂层刀具及其制备方法 |
| CN102517546A (zh) * | 2011-12-30 | 2012-06-27 | 山推工程机械股份有限公司 | 一种耐磨刀具的加工方法 |
| CN103132019A (zh) * | 2013-03-20 | 2013-06-05 | 洛阳理工学院 | 一种A1ZrCrN复合双梯度涂层刀具及其制备方法 |
| CN103249869A (zh) * | 2010-11-23 | 2013-08-14 | 山高刀具公司 | 涂层切削工具刀片 |
-
2016
- 2016-04-22 CN CN201610259500.6A patent/CN105803394B/zh active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1854333A (zh) * | 2005-04-27 | 2006-11-01 | 北京实力源科技开发有限责任公司 | 一种新的真空镀膜方法和设备 |
| CN101596607A (zh) * | 2009-05-04 | 2009-12-09 | 山东大学 | TiZrN涂层刀具及其制备方法 |
| CN103249869A (zh) * | 2010-11-23 | 2013-08-14 | 山高刀具公司 | 涂层切削工具刀片 |
| CN102517546A (zh) * | 2011-12-30 | 2012-06-27 | 山推工程机械股份有限公司 | 一种耐磨刀具的加工方法 |
| CN103132019A (zh) * | 2013-03-20 | 2013-06-05 | 洛阳理工学院 | 一种A1ZrCrN复合双梯度涂层刀具及其制备方法 |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107815643A (zh) * | 2017-09-14 | 2018-03-20 | 上海新弧源涂层技术有限公司 | 一种用于高温服役的纳米多层涂层及其制备方法 |
| CN108486534A (zh) * | 2018-05-03 | 2018-09-04 | 晋中经纬化纤精密制造有限公司 | 一种钽、不锈钢喷丝头纳米复合涂层结构及其制备工艺 |
| US11420346B2 (en) * | 2020-08-19 | 2022-08-23 | Acme United Corporation | Coating for cutting implement |
| CN111979544A (zh) * | 2020-09-22 | 2020-11-24 | 南京航空航天大学 | 一种采用热致相变膜作为应力调控层多级调节刀具涂层应力的方法 |
| CN111979544B (zh) * | 2020-09-22 | 2022-11-15 | 南京航空航天大学 | 一种采用热致相变膜作为应力调控层多级调节刀具涂层应力的方法 |
| CN112708853A (zh) * | 2020-12-22 | 2021-04-27 | 安徽工业大学 | 一种微粒子喷丸后处理改善AlCrN涂层刀具性能的加工方法 |
| CN116590662A (zh) * | 2023-05-09 | 2023-08-15 | 东莞市普拉提纳米科技有限公司 | 一种切削钛合金用含硼高熵合金刀具涂层及其制备工艺 |
| CN116590662B (zh) * | 2023-05-09 | 2024-01-23 | 东莞市普拉提纳米科技有限公司 | 一种切削钛合金用含硼高熵合金刀具涂层及其制备工艺 |
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