CN105717720A - 一种具有防爆功能的铜制程装置及铜制程防爆方法 - Google Patents

一种具有防爆功能的铜制程装置及铜制程防爆方法 Download PDF

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CN105717720A
CN105717720A CN201610159171.8A CN201610159171A CN105717720A CN 105717720 A CN105717720 A CN 105717720A CN 201610159171 A CN201610159171 A CN 201610159171A CN 105717720 A CN105717720 A CN 105717720A
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copper wiring
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李嘉
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TCL China Star Optoelectronics Technology Co Ltd
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Shenzhen China Star Optoelectronics Technology Co Ltd
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Priority to PCT/CN2016/081786 priority patent/WO2017156853A1/zh
Priority to US15/128,967 priority patent/US20180142359A1/en
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Abstract

本发明公开了一种具有防爆功能的铜制程装置和铜制程防爆方法，铜制程装置包括反应腔室、设于反应腔室下方用于盛放刻蚀用的药液的容器、进液管、回流管、温控单元、自控单元和进液管上的泵，反应腔室内设有用于朝其内的基板喷洒药液的喷淋组件，进液管和回流管分别同时连接在喷淋组件和容器之间，进液管用于在泵的工作下自容器朝喷淋组件运输药液；温控单元包括温度传感器，温度传感器设于容器内，用于实时检测容器内的药液温度；自控单元与温控单元电连接，容器内的药液温度高于预设温度范围时，自控单元控制泵停止工作。本发明可以避免药液温度异常时出现药液容器爆炸的现象，保障了作业人员的人身安全。

Description

一种具有防爆功能的铜制程装置及铜制程防爆方法
技术领域
本发明涉及液晶显示器生产技术领域，尤其涉及一种具有防爆功能的铜制程装置及铜制程防爆方法。
背景技术
随着TFT-LCD(thinfilmtransistor-liquidcrystaldisplay，即薄膜晶体管液晶显示器)逐渐往超大尺寸、高驱动频率、高分辨率等方面发展，如何有效地降低面板导线电阻与寄生电容日趋重要。薄膜晶体管液晶显示器在制作时，高质量的导线制程技术已经成为主宰薄膜晶体管组件与面板特性的关键。
在TFT中，Cu制程由于低电阻、高频等优点现已取代Al而被广泛应用在大尺寸面板上。但是Cu金属刻蚀通常使用的是双氧水，双氧水形态非常不稳定，随着药液Cu离子含量增加会加速双氧水的分解，从而短时间内产生大量的热和气体，容易出现容器爆炸，给安全生产带来隐患。
发明内容
鉴于现有技术存在的不足，本发明提供了一种安全可靠的具有防爆功能的铜制程装置及防爆方法。
为了实现上述的目的，本发明采用了如下的技术方案：
一种具有防爆功能的铜制程装置，包括反应腔室、设于所述反应腔室下方用于盛放刻蚀用的药液的容器、进液管、回流管、温控单元、自控单元和所述进液管上的泵，所述反应腔室内设有用于朝其内的基板喷洒药液的喷淋组件，所述进液管连接在所述喷淋组件和所述容器之间，所述回流管连接在所述应腔室的底部和所述容器之间，所述进液管用于在所述泵的工作下自所述容器朝所述喷淋组件运输药液；所述温控单元包括温度传感器，所述温度传感器设于所述容器内，用于实时检测所述容器内的药液温度；所述自控单元与所述温控单元电连接，所述容器内的药液温度高于预设温度范围时，所述自控单元控制所述泵停止工作。
进一步地，所述具有防爆功能的铜制程装置还包括连接所述自控单元的超温警报模块，所述容器内的药液温度高于所述预设温度范围时，所述超温警报模块发出警报信息。
进一步地，所述温控单元还包括加热器，所述容器内的药液温度低于所述预设温度范围时，所述加热器对所述容器内的药液加热直至药液达到所述预设温度范围。
进一步地，所述具有防爆功能的铜制程装置还包括连接所述容器的排水管，所述容器内的药液温度高于所述预设温度范围时，所述自控单元控制所述排水管开启排液。
进一步地，所述具有防爆功能的铜制程装置还包括循环管道和设于所述循环管道上的循环泵，所述循环管道的两端分别连接在所述容器的两个不同高度的部位，所述循环泵自所述循环管道较低的管口朝另一管口输送药液。
进一步地，所述具有防爆功能的铜制程装置还包括连接所述容器的稀释水管，所述容器内的药液温度高于所述预设温度范围时，所述自控单元控制所述稀释水管开启进水稀释药液。
本发明的另一目的在于提供一种铜制程防爆方法，其中，温控单元检测所述容器内的药液温度，在所述容器内的药液温度高于预设温度范围时，所述自控单元控制所述泵停止工作，同时反应腔室内的药液在重力作用下自所述回流管回流至所述反应腔室下部的所述容器。
进一步地，所述铜制程防爆方法还包括：在所述容器内的药液温度低于所述预设温度范围时，所述自控单元控制所述温控单元对所述容器内的药液加热直至药液达到所述预设温度范围。
进一步地，所述铜制程防爆方法还包括：在所述容器内的药液温度高于所述预设温度范围时，所述自控单元控制稀释水管朝所述容器内注水直至药液达到所述预设温度范围。
进一步地，所述铜制程防爆方法还包括：在所述容器内的药液温度高于所述预设温度范围时，所述自控单元控制所述排水管开启排液直至药液低于预定液位，单位时间内所述稀释水管的进水量小于排水管的排液量。
本发明利用温控单元实时监控盛放药液的容器的温度，并在药液的温度不正常时，利用自控单元控制装置的相应结构的协调，保证容器内药液处于正常温度。当药液温度过低时控制温控单元加热，当药液温度过高时可控制超温警报模块发出警报，并可切断反应腔室的药液供给，防止基板损伤。另外还可通过控制稀释水管工作以降低容器内药液的温度，通过排水管排出稀释后的药液。该铜制程装置和铜制程防爆方法可以保证铜制程顺利进行，可以避免药液反应过程中不稳定引起的容器爆炸，保障了作业人员的人身安全。
附图说明
图1为本发明实施例的铜制程装置的结构示意图。
图2为本发明实施例的铜制程防爆结构的原理框图。
图3为本发明实施例的铜制程防爆方法的原理图。
具体实施方式
为了使本发明的目的、技术方案及优点更加清楚明白，以下结合附图及实施例，对本发明进一步详细说明。应当理解，此处所描述的具体实施例仅仅用以解释本发明，并不用于限定本发明。
参阅图1，本发明实施例的一种具有防爆功能的铜制程装置，包括用于放置基板S进行反应制程的反应腔室10和位于反应腔室10下方的容器20，在反应腔室10内设有用于朝其内的基板S喷洒药液的喷淋组件11，进液管30连接在喷淋组件11和容器20之间，回流管40连接在应腔室10的底部和容器20之间。容器20用于盛放刻蚀用的药液，进液管30上连接有泵M，在泵M工作状态下，容器20内的药液由进液管30抽取进入反应腔室10内的喷淋组件11中朝基板S喷洒，刻蚀反应后的药液自反应腔室10底部的回流管40流入容器20内进行二次利用，如此循环。
但刻蚀反应后的药液分解易产生大量的气体和热量，为防止经回流管40流回容器20内的液体温度过高而引起容器20爆炸，结合图2所示，本发明实施例的铜制程装置的防爆部分的结构包括电连接的温控单元50和自控单元C。温控单元50具有温度传感器51，该温度传感器51设置在容器20内，用于实时检测容器20内的药液温度；在容器20内的药液温度高于预设温度范围T0时，自控单元C即控制泵M停止工作。当泵M停止工作后，进液管30即停止输送药液，进液管30内的药液在重力作用下全部回流至容器20，可以防止药液与铜基板S继续反应加剧药液分解，从而可以避免事故发生。例如，预设温度范围T0可以设置在爆炸极限温度以下，预留一定的缓冲时间，当容器20内的药液温度尚未达到该爆炸极限温度时即产生预警而切断制程的药液供给，提前预防事故发生。
优选地，铜制程装置还具有循环管道1和设于循环管道1上的循环泵M0，循环管道1的两端分别连接在容器20的两个不同高度的部位，循环泵M0自循环管道1较低的管口朝另一管口输送药液。较佳地，循环管道1的一端设于容器20的一个侧壁，其另一端设于容器20的顶壁，药液自下而上被抽出，再自上而下流回，可以实现充分混合并实现冷热药液的热均匀性。
同时，本实施例的铜制程装置还可以在自控单元C上连接有超温警报模块，当容器20内的药液温度高于预设温度范围T0时，自控单元C即将信息反馈给超温警报模块使其发出警报信息，可以引起操作者关注以采取相关措施。
考虑到药液的最佳反应温度，温控单元50还可以设有加热器，当容器20内的药液温度低于预设温度范围T0时，加热器可以对容器20内的药液加热直至药液达到预设温度范围T0(药液达到预设温度范围T0后加热器即自动停止加热)。
进一步地，本实施例的铜制程装置的容器20一端还连接有排水管60，排水管60上设置有排液阀K1，当容器20内的药液温度高于预设温度范围T0时，泵M停止工作，药液在重力作用下全部回流至容器20，自控单元C控制排水管60开启排液，以排除高温药液。排水管60优选设置在容器20的底部，以方便容器20内液位可以排放至任意所需的液位。
作为本实施例的一种实施方式，该铜制程装置还包括连接容器20的稀释水管70，稀释水管70上设置有进水阀K2，当容器20内的药液温度高于预设温度范围T0时，自控单元C控制稀释水管70开启进水稀释药液，直至容器20内药液达到预设温度范围T0即自动关断进水阀K2。优选地，自稀释水管70注入的稀释液采用DIW(De-Ionwater，去离子水)稀释和降温，可以最大限度地避免杂质影响药液。优选地，单位时间的稀释水管70进水量小于排水管60的排液量，可以保证容器20内药液在稀释和降温过程中不溢出。
本实施例还提供了一种铜制程防爆方法，如图3所示，正常状态下，泵M工作，药液由进液管30被抽取进入反应腔室10内的喷淋组件11中朝基板S喷洒，刻蚀反应后的药液自反应腔室10底部的回流管40流入容器20内进行二次利用。同时，循环泵M0自循环管道1较低的管口朝另一管口输送药液。温控单元50实时检测容器20内的药液温度是否异常(即是否在预设温度范围T0内)，在容器20内的药液温度高于预设温度范围T0时，自控单元C控制泵M停止工作，同时反应腔室10内的药液在重力作用下自回流管40回流至反应腔室10下部的容器20，进液管30内的药液停止输送。
该铜制程防爆方法还包括：当容器20内的药液温度过低(低于预设温度范围T0)时，自控单元C控制温控单元50对容器20内的药液加热，直至药液达到预设温度范围T0。
当容器20内的药液温度高于预设温度范围T0时，该铜制程防爆方法还进一步包括：自控单元C控制稀释水管70朝容器20内注水，直至药液达到预设温度范围T0。
当容器20内的药液温度高于预设温度范围T0时，该铜制程防爆方法还进一步包括：自控单元C控制排水管60开启排液直至药液低于预定液位，且优选单位时间内稀释水管70的进水量小于排水管60的排液量。
本发明利用温控单元实时监控盛放药液的容器的温度，并在药液的温度不正常时，利用自控单元控制装置的相应结构的协调，保证容器内药液处于正常温度。当药液温度过低时控制温控单元加热，当药液温度过高时可控制超温警报模块发出警报，并可切断反应腔室的药液供给，防止基板损伤。另外还可通过控制稀释水管工作以降低容器内药液的温度，通过排水管排出稀释后的药液。该铜制程装置和铜制程防爆方法可以保证铜制程顺利进行，可以避免药液反应过程中不稳定引起的容器爆炸，保障了作业人员的人身安全。
以上所述仅是本申请的具体实施方式，应当指出，对于本技术领域的普通技术人员来说，在不脱离本申请原理的前提下，还可以做出若干改进和润饰，这些改进和润饰也应视为本申请的保护范围。

Claims (10)

1.一种具有防爆功能的铜制程装置，其特征在于，包括反应腔室(10)、设于所述反应腔室(10)下方用于盛放刻蚀用的药液的容器(20)、进液管(30)、回流管(40)、温控单元(50)、自控单元(C)和所述进液管(30)上的泵(M)，所述反应腔室(10)内设有用于朝其内的基板(S)喷洒药液的喷淋组件(11)，所述进液管(30)连接在所述喷淋组件(11)和所述容器(20)之间，所述回流管(40)连接在所述应腔室(10)的底部和所述容器(20)之间，所述进液管(30)用于在所述泵(M)的工作下自所述容器(20)朝所述喷淋组件(11)运输药液；所述温控单元(50)包括温度传感器，所述温度传感器设于所述容器(20)内，用于实时检测所述容器(20)内的药液温度；所述自控单元(C)与所述温控单元(50)电连接，所述容器(20)内的药液温度高于预设温度范围(T0)时，所述自控单元(C)控制所述泵(M)停止工作。
2.根据权利要求1所述的具有防爆功能的铜制程装置，其特征在于，还包括连接所述自控单元(C)的超温警报模块，所述容器(20)内的药液温度高于所述预设温度范围(T0)时，所述超温警报模块发出警报信息。
3.根据权利要求1所述的具有防爆功能的铜制程装置，其特征在于，所述温控单元(50)还包括加热器，所述容器(20)内的药液温度低于所述预设温度范围(T0)时，所述加热器对所述容器(20)内的药液加热直至药液达到所述预设温度范围(T0)。
4.根据权利要求1所述的具有防爆功能的铜制程装置，其特征在于，还包括连接所述容器(20)的排水管(60)，所述容器(20)内的药液温度高于所述预设温度范围(T0)时，所述自控单元(C)控制所述排水管(60)开启排液。
5.根据权利要求1所述的具有防爆功能的铜制程装置，其特征在于，还包括循环管道(1)和设于所述循环管道(1)上的循环泵(M0)，所述循环管道(1)的两端分别连接在所述容器(20)的两个不同高度的部位，所述循环泵(M0)自所述循环管道(1)较低的管口朝另一管口输送药液。
6.根据权利要求1-5任一所述的具有防爆功能的铜制程装置，其特征在于，还包括连接所述容器(20)的稀释水管(70)，所述容器(20)内的药液温度高于所述预设温度范围(T0)时，所述自控单元控制所述稀释水管(70)开启进水稀释药液。
7.一种铜制程防爆方法，其特征在于，温控单元(50)检测所述容器(20)内的药液温度，在所述容器(20)内的药液温度高于预设温度范围(T0)时，所述自控单元(C)控制所述泵(M)停止工作，同时反应腔室(10)内的药液在重力作用下自所述回流管(40)回流至所述反应腔室(10)下部的所述容器(20)。
8.根据权利要求7所述的铜制程防爆方法，其特征在于，还包括：在所述容器(20)内的药液温度低于所述预设温度范围(T0)时，所述自控单元(C)控制所述温控单元(50)对所述容器(20)内的药液加热直至药液达到所述预设温度范围(T0)。
9.根据权利要求7或8所述的铜制程防爆方法，其特征在于，还包括：在所述容器(20)内的药液温度高于所述预设温度范围(T0)时，所述自控单元(C)控制稀释水管(70)朝所述容器(20)内注水直至药液达到所述预设温度范围(T0)。
10.根据权利要求9所述的铜制程防爆方法，其特征在于，还包括：在所述容器(20)内的药液温度高于所述预设温度范围(T0)时，所述自控单元(C)控制所述排水管(60)开启排液直至药液低于预定液位，单位时间内所述稀释水管(70)的进水量小于排水管(60)的排液量。
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