CN105677071B - 触摸屏及其制备方法 - Google Patents
触摸屏及其制备方法 Download PDFInfo
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- CN105677071B CN105677071B CN201410662897.4A CN201410662897A CN105677071B CN 105677071 B CN105677071 B CN 105677071B CN 201410662897 A CN201410662897 A CN 201410662897A CN 105677071 B CN105677071 B CN 105677071B
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- 238000002360 preparation method Methods 0.000 title claims abstract description 16
- 239000000758 substrate Substances 0.000 claims abstract description 94
- 230000003667 anti-reflective effect Effects 0.000 claims abstract description 44
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 71
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 34
- 239000000377 silicon dioxide Substances 0.000 claims description 34
- 239000007789 gas Substances 0.000 claims description 24
- 238000004544 sputter deposition Methods 0.000 claims description 23
- 235000012239 silicon dioxide Nutrition 0.000 claims description 21
- 238000001771 vacuum deposition Methods 0.000 claims description 19
- 239000007788 liquid Substances 0.000 claims description 18
- 229910052786 argon Inorganic materials 0.000 claims description 17
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 claims description 17
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 16
- 239000001301 oxygen Substances 0.000 claims description 16
- 229910052760 oxygen Inorganic materials 0.000 claims description 16
- 239000008367 deionised water Substances 0.000 claims description 15
- 229910021641 deionized water Inorganic materials 0.000 claims description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 14
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 12
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 12
- KRQUFUKTQHISJB-YYADALCUSA-N 2-[(E)-N-[2-(4-chlorophenoxy)propoxy]-C-propylcarbonimidoyl]-3-hydroxy-5-(thian-3-yl)cyclohex-2-en-1-one Chemical compound CCC\C(=N/OCC(C)OC1=CC=C(Cl)C=C1)C1=C(O)CC(CC1=O)C1CCCSC1 KRQUFUKTQHISJB-YYADALCUSA-N 0.000 claims description 8
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 8
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims description 8
- 229910052758 niobium Inorganic materials 0.000 claims description 8
- 239000010955 niobium Substances 0.000 claims description 8
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 8
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 8
- 239000005083 Zinc sulfide Substances 0.000 claims description 7
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 7
- 238000004140 cleaning Methods 0.000 claims description 7
- 239000012535 impurity Substances 0.000 claims description 7
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 7
- 239000013077 target material Substances 0.000 claims description 7
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims description 6
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 6
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 6
- 239000000908 ammonium hydroxide Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 claims description 6
- 229910052774 Proactinium Inorganic materials 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 5
- 239000012299 nitrogen atmosphere Substances 0.000 claims description 5
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 5
- DRDVZXDWVBGGMH-UHFFFAOYSA-N zinc;sulfide Chemical compound [S-2].[Zn+2] DRDVZXDWVBGGMH-UHFFFAOYSA-N 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 4
- 230000008569 process Effects 0.000 claims description 4
- 235000019504 cigarettes Nutrition 0.000 claims description 3
- 230000000536 complexating effect Effects 0.000 claims description 3
- 239000004519 grease Substances 0.000 claims description 3
- 239000005416 organic matter Substances 0.000 claims description 3
- 230000003647 oxidation Effects 0.000 claims description 3
- 238000007254 oxidation reaction Methods 0.000 claims description 3
- 239000012495 reaction gas Substances 0.000 claims description 3
- 238000005477 sputtering target Methods 0.000 claims description 3
- 239000004408 titanium dioxide Substances 0.000 claims description 3
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims description 2
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 abstract description 4
- 239000010410 layer Substances 0.000 description 115
- 229920000139 polyethylene terephthalate Polymers 0.000 description 12
- 239000005020 polyethylene terephthalate Substances 0.000 description 12
- 238000010586 diagram Methods 0.000 description 7
- 230000008859 change Effects 0.000 description 5
- -1 Polyethylene terephthalate Polymers 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 238000002310 reflectometry Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 241000790917 Dioxys <bee> Species 0.000 description 2
- 229910003978 SiClx Inorganic materials 0.000 description 2
- 239000004411 aluminium Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910001385 heavy metal Inorganic materials 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000009738 saturating Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 239000004568 cement Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 239000008246 gaseous mixture Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- MRNHPUHPBOKKQT-UHFFFAOYSA-N indium;tin;hydrate Chemical compound O.[In].[Sn] MRNHPUHPBOKKQT-UHFFFAOYSA-N 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Surface Treatment Of Optical Elements (AREA)
- Laminated Bodies (AREA)
- Position Input By Displaying (AREA)
- Physical Vapour Deposition (AREA)
Abstract
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CN201410662897.4A CN105677071B (zh) | 2014-11-19 | 2014-11-19 | 触摸屏及其制备方法 |
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CN201410662897.4A CN105677071B (zh) | 2014-11-19 | 2014-11-19 | 触摸屏及其制备方法 |
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CN105677071A CN105677071A (zh) | 2016-06-15 |
CN105677071B true CN105677071B (zh) | 2019-06-28 |
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Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
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CN106906443B (zh) * | 2017-03-20 | 2019-02-12 | 天王电子(深圳)有限公司 | 一种适用于钟表零件的透明耐磨膜制备方法 |
CN108043680A (zh) * | 2017-12-07 | 2018-05-18 | 江西沃格光电股份有限公司 | 保护膜、复合材料及其制备方法和应用 |
CN109002234A (zh) * | 2018-07-11 | 2018-12-14 | 惠州市德赛西威汽车电子股份有限公司 | 一种外挂式低反射率电容式触摸屏 |
CN109491545B (zh) | 2018-12-19 | 2020-12-04 | 武汉华星光电半导体显示技术有限公司 | 触摸屏组件及电子设备 |
CN110413150B (zh) | 2019-07-09 | 2020-12-25 | 深圳市华星光电半导体显示技术有限公司 | 一种红外触控显示装置及其制备方法 |
CN111560586A (zh) * | 2020-04-30 | 2020-08-21 | 豪威星科薄膜视窗(深圳)有限公司 | 一种电容触摸屏镀膜工艺及触摸屏 |
CN113238305A (zh) * | 2021-04-26 | 2021-08-10 | 深圳莱宝高科技股份有限公司 | Ar膜的制备方法及应用 |
EP4392253A1 (en) * | 2021-08-25 | 2024-07-03 | Inalfa Roof Systems Group B.V. | A transparent roof panel assembly for a vehicle roof |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201305551Y (zh) * | 2009-03-11 | 2009-09-09 | 深圳市三鑫精美特玻璃有限公司 | 双面镀膜玻璃 |
CN203510854U (zh) * | 2013-09-30 | 2014-04-02 | 深圳市正星光电技术有限公司 | 一种高透过率玻璃及触摸显示屏 |
CN204256704U (zh) * | 2014-11-19 | 2015-04-08 | 南昌欧菲光学技术有限公司 | 触摸屏 |
-
2014
- 2014-11-19 CN CN201410662897.4A patent/CN105677071B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201305551Y (zh) * | 2009-03-11 | 2009-09-09 | 深圳市三鑫精美特玻璃有限公司 | 双面镀膜玻璃 |
CN203510854U (zh) * | 2013-09-30 | 2014-04-02 | 深圳市正星光电技术有限公司 | 一种高透过率玻璃及触摸显示屏 |
CN204256704U (zh) * | 2014-11-19 | 2015-04-08 | 南昌欧菲光学技术有限公司 | 触摸屏 |
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Address after: 330013 HUANGJIAHU Road, Nanchang Economic and Technological Development Zone, Nanchang City, Jiangxi Province Patentee after: NANCHANG OFILM OPTICAL TECHNOLOGY Co.,Ltd. Patentee after: Nanchang OFilm Tech. Co.,Ltd. Patentee after: Ophiguang Group Co.,Ltd. Patentee after: SUZHOU OFILM TECH Co.,Ltd. Address before: 330013 HUANGJIAHU Road, Nanchang Economic and Technological Development Zone, Nanchang City, Jiangxi Province Patentee before: NANCHANG OFILM OPTICAL TECHNOLOGY Co.,Ltd. Patentee before: Nanchang OFilm Tech. Co.,Ltd. Patentee before: OFilm Tech Co.,Ltd. Patentee before: SUZHOU OFILM TECH Co.,Ltd. Address after: 330013 HUANGJIAHU Road, Nanchang Economic and Technological Development Zone, Nanchang City, Jiangxi Province Patentee after: NANCHANG OFILM OPTICAL TECHNOLOGY Co.,Ltd. Patentee after: Nanchang OFilm Tech. Co.,Ltd. Patentee after: OFilm Tech Co.,Ltd. Patentee after: SUZHOU OFILM TECH Co.,Ltd. Address before: 330013 HUANGJIAHU Road, Nanchang Economic and Technological Development Zone, Nanchang City, Jiangxi Province Patentee before: NANCHANG OFILM OPTICAL TECHNOLOGY Co.,Ltd. Patentee before: Nanchang OFilm Tech. Co.,Ltd. Patentee before: Shenzhen OFilm Tech Co.,Ltd. Patentee before: SUZHOU OFILM TECH Co.,Ltd. |
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TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20210107 Address after: 231323 Building 1, precision electronics industrial park, Hangbu Town, Shucheng County, Lu'an City, Anhui Province Patentee after: Anhui jingzhuo optical display technology Co.,Ltd. Address before: 330013 HUANGJIAHU Road, Nanchang Economic and Technological Development Zone, Nanchang City, Jiangxi Province Patentee before: NANCHANG OFILM OPTICAL TECHNOLOGY Co.,Ltd. Patentee before: Nanchang OFilm Tech. Co.,Ltd. Patentee before: Ophiguang Group Co.,Ltd. Patentee before: SUZHOU OFILM TECH Co.,Ltd. |