CN105643820B - Diamond wire monocrystal silicon-rod butting equipment - Google Patents
Diamond wire monocrystal silicon-rod butting equipment Download PDFInfo
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- CN105643820B CN105643820B CN201610158042.7A CN201610158042A CN105643820B CN 105643820 B CN105643820 B CN 105643820B CN 201610158042 A CN201610158042 A CN 201610158042A CN 105643820 B CN105643820 B CN 105643820B
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- guide wheel
- feed
- tension
- mounting bracket
- portal frame
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
Abstract
The present invention relates to silicon single crystal rod to process special cutting device, it is desirable to provide diamond wire monocrystal silicon-rod butting equipment.The diamond wire monocrystal silicon-rod butting equipment includes great underframe, portal frame, winding displacement mounting bracket, tension motor mounting bracket, tension motor, tension arm, workbench headstock, workbench tailstock, winding displacement part, retractable cable part, the inclined detection part of line, feed unit, transition guide wheel, tension force guide wheel, it is used to clamp crystal bar between workbench headstock and workbench tailstock, and crystal bar can be controlled to be rotated along the axis of workbench headstock and workbench tailstock.The present invention is compact-sized, rationally distributed；The present invention uses diamond wire saw cut, and cutting tool marks are small, and quality of cut face is high, greatly reduces the loss of raw material；The present invention substantially improves working environment, realizes environmentally friendly production.
Description
Technical field
The present invention is set on silicon single crystal rod processing special cutting device field, more particularly to diamond wire monocrystal silicon-rod butting
It is standby.
Background technology
Silicon single crystal rod drawn out from single crystal growing furnace come after need to continue series of processes, include early stage block,
Evolution, angle rounding and flat surface grinding etc. are machined；Then, also need will to be cut into slices after silicon rod viscose, clean, chamfering, corrosion and
Clean again；With regard to that can produce for photovoltaic generation after the processes such as last silicon chip progress making herbs into wool, diffusion, system knot, plated film and sintering
Solar battery sheet.
Diamond wire monocrystal silicon-rod butting equipment is used for evolution process, and it will block the cylindrical crystal bar side of cutting into of completion
Rod.Diamond wire monocrystal silicon-rod butting equipment utilization spark stone line as line of cut, spark stone line be by resin bonding or
Diamond is adhered to steel wire surface, spark stone line abbreviation diamond wire by electric plating method.Diamond cutting line slicing machine passes through on diamond wire
Diamond and the friction of silicon rod therebetween reach dissection.
Domestic main silicon single crystal rod evolution equipment is thick come evolution, common blade with traditional blade or mortar line at present
Degree is in 3mm or so, and the saw kerf of diamond fretsaw is only 0.3-0.45mm, and the damage of raw material can be reduced using diamond fretsaw
Lose, significantly reduce production cost.Traditional mortar free type cutting mode, its bad environments, not environmentally, there is substantial amounts of mortar
Need to recycle, consume substantial amounts of manpower, financial resources.And clear water can be used directly during diamond wire saw cut as cutting
Liquid, the working environment of worker is greatly improved, realize environmentally friendly production.
The content of the invention
It is a primary object of the present invention to overcome deficiency of the prior art, there is provided a kind of using diamond fretsaw butt
Equipment.In order to solve the above technical problems, the solution of the present invention is：
Diamond wire monocrystal silicon-rod butting equipment, including the installation of great underframe, portal frame, winding displacement mounting bracket, tension motor are provided
Frame, tension motor, tension arm, workbench headstock, workbench tailstock, winding displacement part, retractable cable part, the inclined detection part of line, enter
Knife unit, transition guide wheel, tension force guide wheel, the portal frame are provided with two, respectively left portal frame and right portal frame；The winding displacement
Mounting bracket is provided with two, respectively left bank line mounting bracket and right winding displacement mounting bracket；The tension motor mounting bracket is provided with two, point
Wei not left tension motor mounting bracket and right tension motor mounting bracket；The tension motor is provided with two, respectively left tension motor
With right tension motor；The tension arm is provided with two, respectively left tension arm and right tension arm；The transition guide wheel is provided with five
It is individual, respectively First Transition guide wheel, the second transition guide wheel, the 3rd transition guide wheel, the 4th transition guide wheel and the 5th transition guide wheel；Institute
Tension force guide wheel is stated provided with two, respectively left tension force guide wheel and right tension force guide wheel；The feed unit is provided with four, respectively the
One feed unit, the second feed unit, the 3rd feed unit and the 4th feed unit；The winding displacement part is provided with two, respectively
For left bank line part and right winding displacement part, winding displacement part is used to diamond wire being evenly spaced in retractable cable part；The receipts
Unwrapping wire part is provided with two, and respectively left retractable cable part and right retractable cable part, retractable cable part are used to realize diamond wire
Reciprocating motion；The inclined detection part of line is provided with two, and the respectively left inclined detection part of line and the inclined detection part of right line, line are inclined
Whether the diamond wire that detection part is used to detect on retractable cable part is uniformly distributed；
The left bank line mounting bracket is arranged on the left side of great underframe, and left bank line part is arranged on the upper of left bank line mounting bracket
Side；The left retractable cable part is arranged on the top of left bank line part；The left portal frame is arranged on the upper left side of great underframe, left
Tension motor mounting bracket is arranged on the top of left portal frame, and the left inclined detection part of line is arranged on the outside of left portal frame, and first enters
Knife unit and the 4th feed unit are arranged on the inner side of left portal frame；First Transition is installed on the left tension motor mounting bracket
Guide wheel, the second transition guide wheel, left tension motor, left tension arm, the left tension force guide wheel are arranged on left tension arm；
The right winding displacement mounting bracket is arranged on the right side of great underframe, and right winding displacement part is arranged on the upper of right winding displacement mounting bracket
Side；The right retractable cable part is arranged on the top of right winding displacement part；The right portal frame is arranged on the upper right side of great underframe, right
Tension motor mounting bracket is arranged on the top of right portal frame, and the right inclined detection part of line is arranged on the outside of right portal frame, and second enters
Knife unit and the 3rd feed unit are arranged on the inner side of right portal frame；The 3rd transition is installed on the right tension motor mounting bracket
Guide wheel, the 4th transition guide wheel, right tension motor, right tension arm, the right tension force guide wheel are arranged on right tension arm；
The 5th transition guide wheel is arranged between left portal frame and right portal frame；The workbench headstock and workbench tail
Seat is arranged on the surface of great underframe, is used to clamp crystal bar between workbench headstock and workbench tailstock, and can control crystal bar
Rotated along the axis of workbench headstock and workbench tailstock.
In the present invention, the first feed guide wheel is installed, the first feed unit can be independent on the first feed unit
Control the feed velocity and depth of cut of the first feed guide wheel in the vertical direction.
In the present invention, the second feed guide wheel is installed, the second feed unit can be independent on the second feed unit
Control the feed velocity and depth of cut of the second feed guide wheel in the vertical direction.
In the present invention, the 3rd feed guide wheel is installed, the 3rd feed unit can be independent on the 3rd feed unit
Control the feed velocity and depth of cut of the 3rd feed guide wheel in the vertical direction.
In the present invention, the 4th feed guide wheel is installed, the 4th feed unit can be independent on the 4th feed unit
Control the feed velocity and depth of cut of the 4th feed guide wheel in the vertical direction.
In the present invention, the 5th transition guide wheel is provided with speed measuring device, and the linear velocity of diamond wire can be carried out
Detection obtains in real time.
Compared with prior art, the beneficial effects of the invention are as follows：
The present invention is compact-sized, rationally distributed；The present invention uses diamond wire saw cut, and cutting tool marks are small, cut surface matter
Amount is high, greatly reduces the loss of raw material；The present invention substantially improves working environment, realizes environmentally friendly production.
Brief description of the drawings
Fig. 1 is the front view of the present invention.
Fig. 2 is the rearview of the present invention.
Reference in figure is：1 great underframe；2 left bank line mounting brackets；3 left bank line parts；4 left retractable cable parts；5 is left
The inclined detection part of line；6 first feed guide wheels；7 first feed units；8 left tension force guide wheels；9 left tension arms；10 First Transitions are led
Wheel；11 second transition guide wheels；12 the 3rd transition guide wheels；13 the 4th transition guide wheels；14 right tension arms；15 right tension force guide wheels；16
Two feed units；The 17 right inclined detection parts of line；18 second feed guide wheels；19 right retractable cable parts；20 crystal bars；21 right winding displacement parts
Part；22 right winding displacement mounting brackets；23 workbench tailstocks；24 right tension motors；25 right tension motor mounting brackets；26 the 5th transition are led
Wheel；27 right portal frames；28 the 3rd feed units；29 the 3rd feed guide wheels；30 workbench headstocks；31 left tension motors；32 left
Force motor mounting bracket；33 left portal frames；34 the 4th feed units；35 the 4th feed guide wheels.
Embodiment
The present invention is described in further detail with embodiment below in conjunction with the accompanying drawings：
Diamond wire monocrystal silicon-rod butting equipment as shown in Figure 1 and Figure 2, including great underframe 1, portal frame, winding displacement mounting bracket,
Tension motor mounting bracket, tension motor, tension arm, workbench headstock 30, workbench tailstock 23, winding displacement part, retractable cable part,
The inclined detection part of line, feed unit, transition guide wheel, tension force guide wheel.
The portal frame is provided with two, respectively left portal frame 33 and right portal frame 27.The winding displacement mounting bracket is provided with two
It is individual, respectively left bank line mounting bracket 2 and right winding displacement mounting bracket 22.The tension motor mounting bracket is provided with two, is respectively left
Force motor mounting bracket 32 and right tension motor mounting bracket 25.The tension motor is provided with two, the respectively left He of tension motor 31
Right tension motor 24.The tension arm is provided with two, respectively left tension arm 9 and right tension arm 14.The transition guide wheel is provided with
Five, respectively First Transition guide wheel 10, the second transition guide wheel 11, the 3rd transition guide wheel 12, the 4th transition guide wheel 13 and the 5th
Transition guide wheel 26.The tension force guide wheel is provided with two, respectively left tension force guide wheel 8 and right tension force guide wheel 15.The winding displacement part
Provided with two, respectively left bank line part 3 and right winding displacement part 21；Winding displacement part is used to uniformly for diamond wire to be arranged in receipts
On unwrapping wire part.The retractable cable part is provided with two, respectively left retractable cable part 4 and right retractable cable part 19；Retractable cable
Part is used for the reciprocating motion for realizing diamond wire.The inclined detection part of line is provided with two, the respectively left inclined detection part 5 of line
Detection part 17 inclined with right line；Whether the inclined detection part of line is used to detect is uniformly distributed from the diamond wire on retractable cable part.
The feed unit is provided with four, respectively the first feed unit 7, the second feed unit 16, the 3rd feed unit
28 and the 4th feed unit 34；First feed guide wheel 6 is installed, the first feed unit 7 can be controlled independently on first feed unit 7
Make the feed velocity and depth of cut of the in the vertical direction of the first feed guide wheel 6；Second is provided with second feed unit 16 to enter
Knife guide wheel 18, the second feed unit 16 are capable of feed velocity and the feed of the in the vertical direction of the second feed of independent control guide wheel 18
Depth；3rd feed guide wheel 29 is installed, the 3rd feed unit 28 being capable of the feed of independent control the 3rd on the 3rd feed unit 28
The feed velocity and depth of cut of the in the vertical direction of guide wheel 29；The 4th feed guide wheel 35 is installed on 4th feed unit 34,
4th feed unit 34 is capable of the feed velocity and depth of cut of the in the vertical direction of the 4th feed guide wheel of independent control 35.
The left bank line mounting bracket 2 is arranged on the left side of great underframe 1, and left bank line part 3 is arranged on left bank line mounting bracket 2
Top；The left retractable cable part 4 is arranged on the top of left bank line part 3.The left portal frame 33 is arranged on a left side for great underframe 1
Top, left tension motor mounting bracket 32 are arranged on the top of left portal frame 33, and the left inclined detection part 5 of line is arranged on left portal frame 33
Outside, the first feed unit 7 and the 4th feed unit 34 are arranged on the inner side of left portal frame 33.The left tension motor installation
First Transition guide wheel 10, the second transition guide wheel 11, left tension motor 31, left tension arm 9 are installed, the left tension force is led on frame 32
Wheel 8 is arranged on left tension arm 9.
The right winding displacement mounting bracket 22 is arranged on the right side of great underframe 1, and right winding displacement part 21 is arranged on right winding displacement mounting bracket
22 top；The right retractable cable part 19 is arranged on the top of right winding displacement part 21.The right portal frame 27 is arranged on big bottom
The upper right side of frame 1, right tension motor mounting bracket 25 are arranged on the top of right portal frame 27, and the right inclined detection part 17 of line is arranged on the right side
The outside of portal frame 27, the second feed unit 16 and the 3rd feed unit 28 are arranged on the inner side of right portal frame 27.Described right
3rd transition guide wheel 12, the 4th transition guide wheel 13, right tension motor 24, right tension arm 14 are installed on force motor mounting bracket 25,
The right tension force guide wheel 15 is arranged on right tension arm 14.
The 5th transition guide wheel 26 is arranged between left portal frame 33 and right portal frame 27, on the 5th transition guide wheel 26 also
Provided with speed measuring device, detection in real time can be carried out to the linear velocity of diamond wire and obtained.The workbench headstock 30 and workbench
Tailstock 23 is arranged on the surface of great underframe 1, is used to clamp crystal bar 20, and energy between workbench headstock 30 and workbench tailstock 23
Enough crystal bar 20 is controlled to be rotated along the axis of workbench headstock 30 and workbench tailstock 23.
Diamond wire from left retractable cable part 4 out, successively by the inclined detection part 5 of left line, First Transition guide wheel 10,
Left tension force guide wheel 8, the second transition guide wheel 11；Then straight down by the first feed guide wheel 6 on the first feed unit 7；Again
In the horizontal direction after the 4th feed guide wheel 35 on the 4th feed unit 34, diamond wire vertically bypasses the 5th mistake
Cross guide wheel 26；Next in the horizontal direction by the 3rd feed guide wheel 29 and the second feed unit 16 on the 3rd feed unit 28
On the second feed guide wheel 18；And then diamond wire is vertically up around the 3rd transition guide wheel 12；Then pass through successively
Right tension force guide wheel 15, the 4th transition guide wheel 13, the inclined detection part 17 of right line are crossed, finally enters right retractable cable part 19.
During cutting, left retractable cable part 4 and right retractable cable part 19 carry out back rotation, drive diamond wire thereon to do back and forth
Motion；The first feed unit 7 drives the first feed guide wheel 6 downfeed simultaneously, and the 4th feed unit 34 drives the 4th feed to lead
Take turns 35 downfeed, and from the diamond wire driven between the first feed guide wheel 6 and the 4th feed guide wheel 35 to incision people's crystal bar
In 20；Second feed unit 16 drives the second feed guide wheel 18 downfeed, and the 3rd feed unit 28 drives the 3rd feed guide wheel
29 downfeed, so as to drive the diamond wire between the second feed guide wheel 18 and the 3rd feed guide wheel 29 to incision people crystal bar 20
In；In cutting, the tension force on diamond wire is controlled by left tension motor 31 and right tension motor 24.
After the opposing sides of crystal bar 20 is cut, the first feed unit 7 drives 6 upward withdrawing of the first feed guide wheel, and second enters
Knife unit 16 drives 18 upward withdrawing of the second feed guide wheel, and the 3rd feed unit 28 drives 29 upward withdrawing of the 3rd feed guide wheel,
4th feed unit 34 drives setback knife on the 4th feed guide wheel 35；After the completion of withdrawing, workbench headstock 30 and workbench tailstock
23 drive the crystal bar 20 of middle clamping to be rotated in a clockwise direction 90 degree；Then left retractable cable part 4 and right retractable cable part 19
Carry out back rotation, drive diamond wire thereon to move reciprocatingly；The first feed unit 7 drives the first feed guide wheel 6 downward simultaneously
Feed, the 4th feed unit 34 drive the 4th feed guide wheel 35 downfeed, and from driving the first feed guide wheel 6 and the 4th feed
Diamond wire between guide wheel 35 is into incision people crystal bar 20；Second feed unit 16 drives the second feed guide wheel 18 to enter downwards
Knife, the 3rd feed unit 28 drives the 3rd feed guide wheel 29 downfeed, so as to drive the second feed guide wheel 18 and the 3rd feed
Diamond wire between guide wheel 29 is into incision people crystal bar 20.After 4 faces of crystal bar 20 are all cut, cutting is completed.
Finally it should be noted that listed above is only specific embodiment of the invention.It is clear that the invention is not restricted to
Above example, there can also be many variations.One of ordinary skill in the art can directly lead from present disclosure
All deformations for going out or associating, are considered as protection scope of the present invention.
Claims (1)
1. diamond wire monocrystal silicon-rod butting equipment, including great underframe, portal frame, winding displacement mounting bracket, tension motor mounting bracket, tension force
Motor, tension arm, workbench headstock, workbench tailstock, winding displacement part, retractable cable part, the inclined detection part of line, feed unit,
Transition guide wheel, tension force guide wheel, it is characterised in that the portal frame is provided with two, respectively left portal frame and right portal frame；It is described
Winding displacement mounting bracket is provided with two, respectively left bank line mounting bracket and right winding displacement mounting bracket；The tension motor mounting bracket is provided with two
It is individual, respectively left tension motor mounting bracket and right tension motor mounting bracket；The tension motor is provided with two, respectively left tension force
Motor and right tension motor；The tension arm is provided with two, respectively left tension arm and right tension arm；The transition guide wheel is provided with
Five, respectively First Transition guide wheel, the second transition guide wheel, the 3rd transition guide wheel, the 4th transition guide wheel and the 5th transition guide wheel；
The tension force guide wheel is provided with two, respectively left tension force guide wheel and right tension force guide wheel；The feed unit is provided with four, is respectively
First feed unit, the second feed unit, the 3rd feed unit and the 4th feed unit；The winding displacement part is provided with two, point
Not Wei left bank line part and right winding displacement part, winding displacement part is used to diamond wire being evenly spaced in retractable cable part；It is described
Retractable cable part is provided with two, and respectively left retractable cable part and right retractable cable part, retractable cable part are used to realize diamond
The reciprocating motion of line；The inclined detection part of line be provided with two, the respectively left inclined detection part of line and the inclined detection part of right line, line
Whether the diamond wire that inclined detection part is used to detect on retractable cable part is uniformly distributed；
The left bank line mounting bracket is arranged on the left side of great underframe, and left bank line part is arranged on the top of left bank line mounting bracket；Institute
State the top that left retractable cable part is arranged on left bank line part；The left portal frame is arranged on the upper left side of great underframe, left tension force
Motor mounting rack is arranged on the top of left portal frame, and the left inclined detection part of line is arranged on the outside of left portal frame, the first feed list
Member and the 4th feed unit are arranged on the inner side of left portal frame；First feed guide wheel is installed, first enters on the first feed unit
Knife unit is capable of the feed velocity and depth of cut of independent control the first feed guide wheel in the vertical direction；On 4th feed unit
4th feed guide wheel is installed, the 4th feed unit is capable of the feed velocity of the feed guide wheel in the vertical direction of independent control the 4th
And depth of cut；Be provided with the left tension motor mounting bracket First Transition guide wheel, the second transition guide wheel, left tension motor,
Left tension arm, the left tension force guide wheel are arranged on left tension arm；
The right winding displacement mounting bracket is arranged on the right side of great underframe, and right winding displacement part is arranged on the top of right winding displacement mounting bracket；Institute
State the top that right retractable cable part is arranged on right winding displacement part；The right portal frame is arranged on the upper right side of great underframe, right tension force
Motor mounting rack is arranged on the top of right portal frame, and the right inclined detection part of line is arranged on the outside of right portal frame, the second feed list
Member and the 3rd feed unit are arranged on the inner side of right portal frame；Second feed guide wheel is installed, second enters on the second feed unit
Knife unit is capable of the feed velocity and depth of cut of independent control the second feed guide wheel in the vertical direction；On 3rd feed unit
3rd feed guide wheel is installed, the 3rd feed unit is capable of the feed velocity of the feed guide wheel in the vertical direction of independent control the 3rd
And depth of cut；Be provided with the right tension motor mounting bracket the 3rd transition guide wheel, the 4th transition guide wheel, right tension motor,
Right tension arm, the right tension force guide wheel are arranged on right tension arm；
The 5th transition guide wheel is arranged between left portal frame and right portal frame, and the 5th transition guide wheel is provided with speed measuring device,
Detection in real time can be carried out to the linear velocity of diamond wire to obtain；The workbench headstock and workbench tailstock are arranged on great underframe
Surface, be used to clamp crystal bar between workbench headstock and workbench tailstock, and crystal bar can be controlled along workbench headstock and
The axis rotation of workbench tailstock.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610158042.7A CN105643820B (en) | 2016-03-18 | 2016-03-18 | Diamond wire monocrystal silicon-rod butting equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610158042.7A CN105643820B (en) | 2016-03-18 | 2016-03-18 | Diamond wire monocrystal silicon-rod butting equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105643820A CN105643820A (en) | 2016-06-08 |
| CN105643820B true CN105643820B (en) | 2018-01-19 |
Family
ID=56494787
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610158042.7A Active CN105643820B (en) | 2016-03-18 | 2016-03-18 | Diamond wire monocrystal silicon-rod butting equipment |
Country Status (1)
| Country | Link |
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| CN (1) | CN105643820B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106273017B (en) * | 2016-11-02 | 2018-10-19 | 内蒙古中环光伏材料有限公司 | A kind of method of squaring silicon bar |
| CN107322823B (en) * | 2017-08-09 | 2023-06-23 | 福州天瑞线锯科技有限公司 | Double-drive monocrystalline silicon rod double-side cutting machine |
| CN108995062B (en) * | 2018-08-13 | 2020-06-02 | 浙江贝盛新材料科技有限公司 | Adjust more convenient single crystal silicon rod cutting device |
| CN108724500B (en) * | 2018-08-13 | 2020-10-27 | 浙江贝盛新材料科技有限公司 | Single crystal silicon rod cutting machine wide in application range |
| CN110026826B (en) * | 2018-09-30 | 2024-04-16 | 浙江晶盛机电股份有限公司 | Full-automatic monocrystalline silicon rod cutting and grinding combined machining integrated equipment and application method thereof |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0970820A (en) * | 1995-09-06 | 1997-03-18 | Seiko Epson Corp | Wire type processing-cutting device |
| JP2001232550A (en) * | 2000-02-21 | 2001-08-28 | Toyo Advanced Technologies Co Ltd | Cutting method using wire saw and wire saw |
| CN202439138U (en) * | 2012-02-19 | 2012-09-19 | 上海日进机床有限公司 | Cutting jig for silicon on sapphire bar |
| CN102555091B (en) * | 2012-02-29 | 2015-04-08 | 无锡斯达新能源科技股份有限公司 | Multi-station sapphire single-wire swinging cutting machine |
| CN202862421U (en) * | 2012-08-30 | 2013-04-10 | 大连连城数控机器股份有限公司 | Four-roller winding mechanism |
| CN103878893B (en) * | 2013-12-31 | 2015-11-18 | 江苏和亿自动化科技有限公司 | Multi-line cutting machine automatic control system and method |
| CN205497823U (en) * | 2016-03-18 | 2016-08-24 | 浙江晶盛机电股份有限公司 | Buddha's warrior attendant line single crystal silicon rod butt equipment |
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2016
- 2016-03-18 CN CN201610158042.7A patent/CN105643820B/en active Active
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