CN105563674B - Diamond wire polycrystal silicon ingot excavation machine - Google Patents
Diamond wire polycrystal silicon ingot excavation machine Download PDFInfo
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- CN105563674B CN105563674B CN201610101068.8A CN201610101068A CN105563674B CN 105563674 B CN105563674 B CN 105563674B CN 201610101068 A CN201610101068 A CN 201610101068A CN 105563674 B CN105563674 B CN 105563674B
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- guide wheel
- portal frame
- diamond wire
- cutting
- workbench
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
Special cutting device technical field is processed the present invention relates to polysilicon, it is desirable to provide diamond wire polycrystal silicon ingot excavation machine.The diamond wire polycrystal silicon ingot excavation machine includes great underframe, enters blade insert, left tension motor mounting bracket, right tension motor mounting bracket, workbench, manipulator mounting rack, portal frame, is oriented to guide wheel, cutting guide wheel mounting bracket, cutting guide wheel, main guide rail, workbench and moves horizontally motor, reductor, main leading screw, directive wheel motor, can utilize Buddha's warrior attendant wire cutting crystal ingot.The present invention uses diamond wire saw cut, and cutting tool marks are small, and quality of cut face is high, greatly reduces the loss of raw material；The present invention substantially improves working environment, realizes environmentally friendly production；The present invention uses horizontal direction feed, and line bow is small, and feed is fast, and cutting efficiency is high；And guide wheel quantity is few, the simple easily cloth of gauze.
Description
Technical field
The present invention is to process special cutting device technical field, more particularly to diamond wire polycrystal silicon ingot evolution on polysilicon
Machine.
Background technology
Polycrystal silicon ingot needed after forming by a firing by evolution, block, photovoltaic is made in flour milling chamfering, the technique such as section
Battery.The evolution of crystal ingot is the first procedure of overall processing process, is that large-scale crystal ingot is cut into small cuboid.At present most
Ripe, the most common many user's grid lines of evolution equipment are cut from top feed, and the workspace of netting twine saw is to be mutually perpendicular to simultaneously
Several lines of cut composition in Different Plane, does not have 4 netting twines to constitute a grid, when equipment is run, cutting wire, which is driven, to be cut
Silicon ingot is cut, after the completion of cutting, a small cuboid crystal ingot is just formed in the grid of netting twine composition.
Cutting mode used in netting twine cutting is divided into mortar wire cutting and Buddha's warrior attendant wire cutting.
When being cut using mortar wire cutting, quickly motion brings the liquid containing abrasive material into workpiece joint-cutting to steel wire, produces cutting
Effect.With mortar wire cutting because its joint-cutting is narrow, section amount is big, and section cost is low and is widely used；Single cutting efficiency is low, cutting
When the waste pulp intractability that produces it is big, cause the pollution to environment；Use cost is high, steel wire and glass pulley wear and tear simultaneously, makes
With short life, thread-changing process complexity is time-consuming again after broken string.
During using Buddha's warrior attendant wire cutting, dissection is reached by the friction between the diamond and workpiece on diamond wire.Use
There is silica flour easily to recycle for Buddha's warrior attendant wire cutting, cutting environment is good, cutting surfaces damage the advantages such as small, efficiency is high.
The diamond wire polycrystal silicon ingot evolution equipment generally used at present, such as " polycrystal silicon ingot evolution diamond wire device " are (specially
The U of profit CN 203680563), before cutting, first by one pull-out of diamond wire, and form netted across tens guide wheels.Due to from
The surface feed of crystal ingot, the span of gauze is big, and the line bow caused is just very big so that the time of bracing wire bow increases, so that
Obtain cutting efficiency low.The gauze of large span easily leaves cut in cutting surfaces again, increases follow-up work amount.In addition, used
Diamond wire it is thinner, across tens guide wheels, reciprocating motion easily causes broken string, once broken string, thread-changing difficulty is big, it is time-consuming.Together
When due to wanting cloth to reticulate gauze, it is necessary to diamond wire repeatedly commutates, cut and lead when so easily causing diamond wire to move back and forth
To wheel so that the consumption of directive wheel and diamond wire is greatly improved, their service life is reduced, greatly adds and uses into
This.
The content of the invention
It is a primary object of the present invention to overcome deficiency of the prior art, there is provided a kind of use diamond fretsaw butt
Equipment.In order to solve the above technical problems, the solution of the present invention is：
Diamond wire polycrystal silicon ingot excavation machine is provided, Buddha's warrior attendant wire cutting crystal ingot, the diamond wire polycrystal silicon ingot evolution can be utilized
Machine include great underframe, enter blade insert, left tension motor mounting bracket, right tension motor mounting bracket, workbench, manipulator mounting rack,
Portal frame, guiding guide wheel, cutting guide wheel mounting bracket, cutting guide wheel, main guide rail, workbench move horizontally motor, reductor, main silk
Thick stick, directive wheel motor；
Main guide rail is installed, the top of main guide rail is equipped with workbench, and the middle of great underframe is equipped with work on the great underframe
Motor is moved horizontally as platform, workbench, which moves horizontally motor connection, reductor, and reductor is connected by main leading screw with workbench,
Workbench is set axially to be moved horizontally along main leading screw；The strip of 8 insertions is provided with the workbench, for diamond wire
Gauze is passed through；
The manipulator mounting rack is the column (being fixed on the ground by foundation bolt) equipped with hydraulic cylinder；The machinery
Hand is arranged on manipulator mounting rack, can realize horizontal direction, the movement of vertical direction, and clamp and rotate the work(of crystal ingot
Energy；
The portal frame is arranged on the left of the surface of great underframe, portal frame and is provided with left tension motor mounting bracket, dragon
Right tension motor mounting bracket is installed on the right side of door frame；The portal frame is included on portal frame upper beam, portal frame underbeam, portal frame
It is installed with side by side on the front of beam below 5 guiding guide wheels, 5 guiding guide wheels and is installed with 8 cutting guide wheel mounting brackets side by side, gantry
It is installed with side by side on the front of frame underbeam above 4 guiding guide wheels, 4 guiding guide wheels and is installed with 8 cutting guide wheel mounting brackets side by side；
One end installed in the guiding guide wheel of portal frame upper beam middle is connected with directive wheel motor, each cutting guide wheel mounting bracket
It is upper that cutting guide wheel is housed；And ensureing diamond wire by being oriented to during guide wheel, the diamond wire of vertical direction is respectively by a portal frame
The wire casing of guide wheel is cut at the Liang Chu cuttings wire casing of guide wheel, a portal frame underbeam so that when workbench horizontal feed is cut
The line bow of generation is on the inside of cutting guide wheel；
It is described enter blade insert include left bank line part, left retractable cable part, left transition guide wheel, left tension motor, left tension force
Arm, left tension force guide wheel, right winding displacement part, right retractable cable part, right transition guide wheel, right tension motor, right tension arm, right tension force are led
Wheel；The left bank line part is arranged on the left of great underframe, and left retractable cable part is housed above left bank line part, and the left transition is led
Wheel, left tension motor, left tension arm are arranged on left tension motor mounting bracket, and left tension force guide wheel is arranged on left tension arm；Institute
Right winding displacement part is stated on the right side of great underframe, right retractable cable part is housed above right winding displacement part；The right transition guide wheel, the right side
Tension motor, right tension arm are arranged on right tension motor mounting bracket, and right tension force guide wheel is arranged on right tension arm.
As a further improvement, waist type groove is provided with the cutting guide wheel mounting bracket, for the adjacent Buddha's warrior attendant of left and right adjusting
The distance between line.
As a further improvement, it is described to be arranged on portal frame upper beam, the line of each 8 cutting guide wheels of portal frame underbeam
Groove, is used for the center for the strip that diamond wire is passed through on workbench.
As a further improvement, the manipulator grabs manipulator using double, and what can be grabbed by manipulator moves horizontally reality
Now capture.
As a further improvement, the left transition guide wheel, left tension force guide wheel, all guiding guide wheels, right transition guide wheel, the right side
The metallic channel of tension force guide wheel all in approximately the same plane so that by metallic channel diamond wire in the same plane.
Compared with prior art, the beneficial effects of the invention are as follows：
The present invention uses diamond wire saw cut, and cutting tool marks are small, and quality of cut face is high, greatly reduces the damage of raw material
Consumption.The present invention substantially improves working environment, realizes environmentally friendly production.The present invention uses horizontal direction feed, and line bends small, feed
It hurry up, cutting efficiency is high；And guide wheel quantity is few, the simple easily cloth of gauze.
Brief description of the drawings
Fig. 1 is isometric view of the invention.
Fig. 2 is front view of the invention.
Fig. 3 is top view of the invention.
Fig. 4 is left view of the invention.
Fig. 5 is enters the front view of blade insert in the present invention.
Fig. 6 is the top view after the completion of first time feed cutting of the invention.
Fig. 7 is the top view before second of feed of the invention.
Fig. 8 is the top view after the completion of second of feed of the invention is cut.
Reference in figure is：1 portal frame；2 enter blade insert；3 manipulator mounting racks；4 manipulators；5 crystal ingots；6 work
Platform；7 great underframes；8 left tension motor mounting brackets；9 left tension motors；10 main leading screws；11 reductors；12 workbench move horizontally electricity
Machine；13 main guide rails；14 directive wheel motors；15 right tension motors；16 right tension motor mounting brackets；17 left bank line parts；18
Left retractable cable part；19 left transition guide wheels；20 left tension force guide wheels；21 left tension arms；22 are oriented to guide wheel；23 cutting guide wheels are installed
Frame；24 cutting guide wheels；25 portal frame upper beams；26 right tension arms；27 right tension force guide wheels；28 right transition guide wheels；29 right retractable cable portions
Part；30 right winding displacement parts；31 portal frame underbeams；32 diamond wires.
Embodiment
The present invention is described in further detail with embodiment below in conjunction with the accompanying drawings：
As shown in Figures 1 to 4, diamond wire polycrystal silicon ingot excavation machine includes great underframe 7, enters blade insert 2, left tension motor peace
Shelve 8, right tension motor mounting bracket 16, workbench 6, manipulator mounting rack 3, portal frame 1, guiding guide wheel 22, cutting guide wheel peace
Shelve 23, cutting guide wheel 24, main guide rail 13, workbench and move horizontally motor 12, reductor 11, main leading screw 10, guiding wheel drive
Motor 14, can cut crystal ingot 5 using diamond wire 32.
Main guide rail 13 is installed, the top of main guide rail 13 is equipped with workbench 6, and the middle of great underframe 7 is equipped with great underframe 7
Workbench moves horizontally motor 12, and workbench moves horizontally motor 12 and is connected with reductor 11, and reductor 11 passes through main leading screw 10
It is connected with workbench 6, enables the moving along the main axial carry out level of leading screw 10 of workbench 6.8 are provided with the workbench 6
The strip of insertion, is passed through for the gauze of diamond wire 32.
Manipulator mounting rack 3 is specially the column equipped with hydraulic cylinder, is fixed on the ground by foundation bolt.The machinery
Hand 4 grabs manipulator using double, and manipulator 4 is arranged on manipulator mounting rack 3, passes through moving horizontally that manipulator is grabbed, manipulator 4
Horizontal direction, the movement of vertical direction can be realized, and clamps and rotate the function of crystal ingot 5.
Portal frame 1 is arranged on the surface of great underframe 7, and the left side of portal frame 1 is provided with left tension motor mounting bracket 8, dragon
The right side of door frame 1 is provided with right tension motor mounting bracket 16.The portal frame 1 includes portal frame upper beam 25, portal frame underbeam 31；
The lower section for being installed with 5 guiding guide wheels, 22,5 guiding guide wheels 22 on the front of portal frame upper beam 25 side by side is installed with 8 cuttings side by side
Guide wheel mounting bracket 23；The top of 4 guiding guide wheels, 22,4 guiding guide wheels 22 is installed with side by side on the front of portal frame underbeam 31 simultaneously
Row is equipped with 8 cutting guide wheel mounting brackets 23.It is connected with and leads installed in one end of the guiding guide wheel 22 of the middle of portal frame upper beam 25
To wheel drive motor 14；It is equipped with cutting guide wheel 24, and cutting guide wheel mounting bracket 23 and is provided with each cutting guide wheel mounting bracket 23
Waist type groove, for the distance between adjacent diamond wire 32 of left and right adjusting.And installed in portal frame upper beam 25, portal frame underbeam 31
The groove of each 8 cutting guide wheels 24, which is located on workbench 6, is used for the center for the strip that diamond wire 32 is passed through.
As shown in figure 5, entering blade insert 2 includes left bank line part 17, left retractable cable part 18, left transition guide wheel 19, a left side
Force motor 9, left tension arm 21, left tension force guide wheel 20, right winding displacement part 30, right retractable cable part 29, right transition guide wheel 28, the right side
Force motor 15, right tension arm 26, right tension force guide wheel 27.The left bank line part 17 is arranged on the left side of great underframe 7, left bank line part
17 tops are equipped with left retractable cable part 18, and the left transition guide wheel 19, left tension motor 9, left tension arm 21 are arranged on left tension force
On motor mounting rack 8, left tension force guide wheel 20 is arranged on left tension arm 21；It is right that the right winding displacement part 30 is arranged on great underframe 7
Side, the right top of winding displacement part 30 is equipped with right retractable cable part 29；The right transition guide wheel 28, right tension motor 15, right tension arm
26 are arranged on right tension motor mounting bracket 16, and right tension force guide wheel 27 is arranged on right tension arm 26.
Diamond wire 32 out, bypasses left transition wheel 19, left tension force guide wheel 20, into dragon successively from left retractable cable part 18
Guiding guide wheel 22 on door frame upper beam 25, the guiding guide wheel 22 on down around portal frame underbeam 31, then again up around
After second guiding guide wheel 22 on portal frame upper beam 25, repetitive cycling 4 times, led from the guiding of rightmost on portal frame upper beam 25
Wheel 22 is laid out, and right tension force guide wheel 27, right transition guide wheel 28 were entered successively, right retractable cable part 29 is finally entered.The left transition
Guide wheel 19, left tension force guide wheel 20, middle all guiding guide wheels 22, right transition guide wheel 28, right tension force guide wheel 27 metallic channel all
In approximately the same plane so that by guide groove diamond wire 32 in the same plane.The process is oriented to guide wheel 22
Its each wire casing by a cutting guide wheel 24 up and down of the diamond wire 32 of vertical direction so that in the cutting of the horizontal feed of workbench 6
When the line bow that produces between cutting guide wheel 24 so that diamond wire 32 is by left transition guide wheel 19, left tension force guide wheel 20, middle
All guiding guide wheels 22, right transition guide wheel 28, right tension force guide wheel 27 when be still within original plane.
As shown in Figure 6 to 8, during cutting, crystal ingot 5 is placed on directly over workbench 6；Left retractable cable part 18 and right retractable cable
Part 29 is moved back and forth, and drives diamond wire 32 thereon to move reciprocatingly；Workbench moves horizontally motor 12 and drives work simultaneously
The level of platform 6 moves horizontally the direction first time feed of motor 12 to workbench so that portal frame upper beam 25 and portal frame underbeam 31 it
Between cutting guide wheel 24 in the middle of diamond wire 32 crystal ingot 5 is cut.After the completion of being cut when one side, workbench 6 retreats withdrawing；
Manipulator 4, which is moved downward, picks up crystal ingot 5, after being rotated by 90 °, then crystal ingot 5 is placed on workbench 6；Workbench moves horizontally electricity
Machine 12 drives the level of workbench 6 to move horizontally 12 direction of motor, second of feed to workbench again；It is finally completed cutting.
Finally it should be noted that listed above is only specific embodiment of the invention.It is clear that the invention is not restricted to
Above example, can also there is many variations.One of ordinary skill in the art can directly lead from present disclosure
All deformations for going out or associating, are considered as protection scope of the present invention.
Claims (4)
1. diamond wire polycrystal silicon ingot excavation machine, can utilize Buddha's warrior attendant wire cutting crystal ingot, it is characterised in that the diamond wire polycrystal silicon ingot
Excavation machine includes great underframe, enters blade insert, left tension motor mounting bracket, right tension motor mounting bracket, workbench, manipulator installation
Frame, portal frame, be oriented to guide wheel, cutting guide wheel mounting bracket, cutting guide wheel, main guide rail, workbench move horizontally motor, reductor,
Main leading screw, directive wheel motor；
Main guide rail is installed, the top of main guide rail is equipped with workbench, and the middle of great underframe is equipped with workbench on the great underframe
Motor is moved horizontally, workbench, which moves horizontally motor connection, reductor, reductor is connected by main leading screw with workbench, makes work
Making platform can axially be moved horizontally along main leading screw；The strip of 8 insertions is provided with the workbench, for diamond wire gauze
Pass through；
The manipulator mounting rack is the column equipped with hydraulic cylinder；The manipulator is arranged on manipulator mounting rack, can be realized
The movement of horizontal direction, vertical direction, and clamp and rotate the function of crystal ingot；
The portal frame is arranged on the left of the surface of great underframe, portal frame and is provided with left tension motor mounting bracket, portal frame
Right side right tension motor mounting bracket is installed；The portal frame includes portal frame upper beam, portal frame underbeam, portal frame upper beam
It is installed with side by side on front below 5 guiding guide wheels, 5 guiding guide wheels and is installed with 8 cutting guide wheel mounting brackets side by side, under portal frame
It is installed with side by side on the front of beam above 4 guiding guide wheels, 4 guiding guide wheels and is installed with 8 cutting guide wheel mounting brackets side by side；Install
Directive wheel motor is connected with one end of the guiding guide wheel of portal frame upper beam middle, is filled on each cutting guide wheel mounting bracket
There is cutting guide wheel；And ensureing diamond wire by being oriented to during guide wheel, the diamond wire of vertical direction respectively passes through at a portal frame upper beam
Cut the wire casing of guide wheel, the wire casing of guide wheel is cut at a portal frame underbeam so that produced when workbench horizontal feed is cut
Line bow cutting guide wheel on the inside of；
It is described enter blade insert include left bank line part, left retractable cable part, left transition guide wheel, left tension motor, left tension arm, a left side
Tension force guide wheel, right winding displacement part, right retractable cable part, right transition guide wheel, right tension motor, right tension arm, right tension force guide wheel；Institute
Left bank line part is stated on the left of great underframe, left retractable cable part, the left transition guide wheel, a left side are housed above left bank line part
Tension motor, left tension arm are arranged on left tension motor mounting bracket, and left tension force guide wheel is arranged on left tension arm；The right row
Line part is arranged on the right side of great underframe, and right retractable cable part is housed above right winding displacement part；The right transition guide wheel, right tension force electricity
Machine, right tension arm are arranged on right tension motor mounting bracket, and right tension force guide wheel is arranged on right tension arm；
The left transition guide wheel, left tension force guide wheel, all guiding guide wheels, right transition guide wheel, the metallic channel of right tension force guide wheel all exist
In approximately the same plane so that by metallic channel diamond wire in the same plane.
2. diamond wire polycrystal silicon ingot excavation machine according to claim 1, it is characterised in that on the cutting guide wheel mounting bracket
Waist type groove is provided with, for the distance between adjacent diamond wire of left and right adjusting.
3. diamond wire polycrystal silicon ingot excavation machine according to claim 1, it is characterised in that described to be arranged on portal frame
The wire casing of beam, each 8 cutting guide wheels of portal frame underbeam, is used for the center for the strip that diamond wire is passed through on workbench.
4. diamond wire polycrystal silicon ingot excavation machine according to claim 1, it is characterised in that the manipulator is using double grapples
Tool hand, what can be grabbed by manipulator moves horizontally realization crawl.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610101068.8A CN105563674B (en) | 2016-02-24 | 2016-02-24 | Diamond wire polycrystal silicon ingot excavation machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610101068.8A CN105563674B (en) | 2016-02-24 | 2016-02-24 | Diamond wire polycrystal silicon ingot excavation machine |
Publications (2)
| Publication Number | Publication Date |
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| CN105563674A CN105563674A (en) | 2016-05-11 |
| CN105563674B true CN105563674B (en) | 2017-08-25 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201610101068.8A Active CN105563674B (en) | 2016-02-24 | 2016-02-24 | Diamond wire polycrystal silicon ingot excavation machine |
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Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106182480B (en) * | 2016-08-31 | 2017-12-22 | 浙江晶盛机电股份有限公司 | Diamond wire crystal ingot excavation machine |
| CN106346620B (en) * | 2016-11-14 | 2018-05-22 | 江苏美科硅能源有限公司 | A kind of polycrystal silicon ingot, which blocks, uses fixing tool |
| JP6222393B1 (en) * | 2017-03-21 | 2017-11-01 | 信越半導体株式会社 | Ingot cutting method |
| CN108214952B (en) * | 2017-12-27 | 2024-05-31 | 青岛高测科技股份有限公司 | Full-automatic distributed polysilicon squaring method |
| CN108406899A (en) * | 2018-02-13 | 2018-08-17 | 福建富易天龙智能科技有限公司 | A kind of method and apparatus of plaster bandage multi-wire saw |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5890481A (en) * | 1996-04-01 | 1999-04-06 | Saint-Gobain/Norton Industrial Ceramics Corporation | Method and apparatus for cutting diamond |
| EP2427295A1 (en) * | 2009-05-04 | 2012-03-14 | Meyer Burger AG | Wire saw |
| DE102011054107A1 (en) * | 2011-09-30 | 2013-04-04 | Schott Solar Ag | Device for recovering wire break arising at wire field of multi-wire saw utilized for cutting silicon, has wire loop formed based on ends of cracked wire, and deflection rollers mounted at support, which is mounted above wire guide rollers |
| CN203622671U (en) * | 2013-12-13 | 2014-06-04 | 无锡斯达新能源科技股份有限公司 | Diamond numerical-control swing multi-wire cutting and squaring machine |
| CN105216128B (en) * | 2015-09-30 | 2017-07-28 | 上海日进机床有限公司 | Multi-wire saw equipment applied to silicon ingot evolution |
| CN205416062U (en) * | 2016-02-24 | 2016-08-03 | 浙江晶盛机电股份有限公司 | Buddha's warrior attendant line polycrystalline silicon ingot squaring machine |
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2016
- 2016-02-24 CN CN201610101068.8A patent/CN105563674B/en active Active
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