CN206416011U - Full-automatic silicon single crystal rod barreling equipment integrating - Google Patents

Full-automatic silicon single crystal rod barreling equipment integrating Download PDF

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Publication number
CN206416011U
CN206416011U CN201621271668.0U CN201621271668U CN206416011U CN 206416011 U CN206416011 U CN 206416011U CN 201621271668 U CN201621271668 U CN 201621271668U CN 206416011 U CN206416011 U CN 206416011U
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component
guide rail
mounting seat
great underframe
fixed
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CN201621271668.0U
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Inventor
曹建伟
沈文杰
严浩
傅林坚
吴兵兵
何守龙
谢龙辉
王凯
邱敏秀
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Zhejiang Jingsheng Mechanical and Electrical Co Ltd
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Zhejiang Jingsheng Mechanical and Electrical Co Ltd
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Abstract

The utility model is related to silicon single crystal rod process equipment, it is desirable to provide a kind of full-automatic silicon single crystal rod barreling equipment integrating.Including elongated great underframe, on its surface along its length provided with two parallel main guide rails;Grinding table assembly is movably arranged on two main guide rails, and moving along main guide rail is realized by drive connection mechanism by main drive motor;It is used for the platform of carrying provided with four altogether in the both sides of great underframe:It is respectively used to carrying corase grind power head assembly, fine grinding power head assembly, feeding manipulator component and centering mechanical hand component;On great underframe, crystal orientation detection means and radius detection unit are additionally provided with.The utility model greatly improves the range of work and working ability of crystal bar drum sanding equipment, realizes the automatic centering of silicon rod;Processing efficiency is improved, the cost of manpower and logistics is saved;It can guarantee that the permanent and stable high accuracy operation of equipment;Significantly reduce production noise;Organic emission is not produced, discarded object is also less, preserves the ecological environment.

Description

Full-automatic silicon single crystal rod barreling equipment integrating
Technical field
The utility model belongs to silicon single crystal rod process equipment field, and in particular to a kind of full-automatic silicon single crystal rod barrel finishing Equipment integrating.
Background technology
Silicon single crystal is as a kind of important semi-conducting material, with good electric property and heat endurance, from last century After the sixties are found and utilized by people, just the rapid germanium single crystal that substitutes turns into the main material of semiconductor.Silicon materials are because of it With high temperature resistant and radiation resistance preferably, the particularly suitable characteristic for making high power device and as application it is most a kind of half Conductor material, most of integrated circuit semiconductor apparatus is manufactured with silicon materials.In the good silicon single crystal method of processability, Grown by CZ Method silicon single crystal have equipment and technique it is relatively easy, it is easy realization automatically control.Pulling of crystals silicon rod is from single crystal growing furnace In draw out come after need to proceed series of processes, early stage include block, the grinding of evolution, fillet and plane lapping etc. Machining;It is follow-up also to need to be cut into slices after silicon rod viscose, clean, chamfering, grinding, corrosion and cleaning again;Finally by silicon Piece carry out making herbs into wool, diffusion, system tie, could manufacture after the process such as plated film and sintering semiconductor devices or for photovoltaic generation too Positive energy cell piece.
At present, most of domestic semiconductor manufacturer still uses changes system into cylindrical barreling lathe, this kind of machine by general grinding machine Bed is required for by manually completing several times to processes such as the feeding of silicon single crystal rod, centering, crystal orientation detections, and precision is not very It is high.Widely used silicon single crystal rod tumbling mill has the disadvantages that and not enough in the market:The feeding of silicon single crystal rod needs to lean on It is artificial to embrace upper equipment, it is placed in the middle of seat clamping table end to end;The axiality of silicon single crystal rod and end to end seat clamping table is led to Cross manually to beat and carry out centering, precision is relatively low;The crystal orientation detection of silicon single crystal rod can not be integrated on tumbling mill, it is necessary to by silicon rod Remove to the detection of other board, be placed on again after the completion of detection on tumbling mill and be ground V grooves or the flat side of grinding;The processing of silicon single crystal rod Size limitations are larger, are typically only capable to the bar of the cylindrical and length dimension of the fixation of work sheet one;By universal machine tools are changed a social system Tumbling mill automaticity it is low, working ability is smaller, and more equipment can only be purchased by such as wanting to enhance production capacities, but efficiency nothing again Method is improved, and the import equipment of like product is expensive.
Utility model content
The technical problems to be solved in the utility model is to overcome above-mentioned of the prior art not enough full-automatic there is provided one kind Silicon single crystal rod barrel finishing equipment integrating.
To solve technical problem, solution of the present utility model is:
A kind of full-automatic silicon single crystal rod barrel finishing equipment integrating, including the great underframe for carrying are provided;The great underframe It is elongated, on its surface along its length provided with two parallel main guide rails;Grinding table assembly is movably arranged on two On main guide rail, moving along main guide rail is realized by drive connection mechanism by main drive motor;
It is used for the platform of carrying provided with four altogether in the both sides of great underframe:Two platforms are located at the middle part of great underframe and relative Arrangement, one of carrying corase grind power head assembly, another carrying fine grinding power head assembly;Another two platform is located at great underframe One end and positioned opposite, one of carrying feeding manipulator component, another carrying centering mechanical hand component;In great underframe On, it is additionally provided with crystal orientation detection means and radius detection unit.
In the utility model, in addition to outer cover metal plate component, outer cover metal plate component is in integrally inverted U-shaped structure, and it two End is fixed on great underframe.
In the utility model, the grinding table assembly includes headstock, tailstock, base, clamping cylinder, dial direct and drives electricity Machine and to knife sensor cluster;Wherein, base is movably installed on two main guide rails, and its bottom is fixedly connected with motor by screw Mounting seat, main drive motor is on motor mount;The drive connection mechanism includes the rack being fixed on great underframe, with And with rack pitch wheel;Gear is fixed in the rotary shaft of main drive motor;Headstock and tailstock are relatively installed on The both sides of base, its center line is perpendicular to main guide rail;Clamping cylinder is set below base, for driving headstock or tailstock to adjust phase Mutual spacing;Headstock or tailstock are provided with for measuring basis to knife sensor cluster and reference block, and for controlling crystal bar Rotation and the indexing direct driving motor of angle position.
In the utility model, the corase grind power head assembly includes corase grind feeding guide rail mounting seat, horizontal feed component, water The dynamic servomotor of translation, corase grind upright guide rail mounting seat, vertical feeder assembly, corase grind variable-frequency motor, rough grinding wheel mounting seat and Rough grinding wheel component;Wherein, horizontal feed component is fixed on the platform on great underframe by roughly grinding feeding guide rail mounting seat, and Installation direction is perpendicular to main guide rail;Servomotor is moved horizontally to be connected with horizontal feed component by drive disk assembly;Vertical feeding Component is fixed on horizontal feed component by roughly grinding upright guide rail mounting seat, and corase grind variable-frequency motor and rough grinding wheel mounting seat are solid It is scheduled on vertical feeder assembly, rough grinding wheel component is in rough grinding wheel mounting seat.
In the utility model, the fine grinding power head assembly includes fine grinding feeding guide rail mounting seat, horizontal feed component, essence Mill upright guide rail mounting seat, vertical feeder assembly, move horizontally servomotor, fine grinding variable-frequency motor, finishing wheel mounting seat and Finishing wheel component;Wherein, horizontal feed component is fixed on the platform on great underframe by refining feeding guide rail mounting seat, and Installation direction is perpendicular to main guide rail;Servomotor is moved horizontally to be connected with horizontal feed component by drive disk assembly;Vertical feeding Component is fixed on horizontal feed component by refining upright guide rail mounting seat, and fine grinding variable-frequency motor and finishing wheel mounting seat are solid It is scheduled on vertical feeder assembly, finishing wheel component is in finishing wheel mounting seat.
In the utility model, the feeding manipulator component includes feeding mechanical hand, guide rail mounting seat, telescopic cylinder component With horizontal feed component;Wherein, feeding manipulator is movably installed on the guide rail of guide rail mounting seat, and guide rail mounting seat is fixed on greatly On the platform of underframe;Telescopic cylinder component is connected to guide rail mounting seat by horizontal feed component.
In the utility model, the centering mechanical hand component includes horizontal guide rail mounting seat, moves horizontally component, level shifting Dynamic servomotor, centering upright guide rail mounting seat, the vertical feeder assembly of centering, vertical shift motor and centering hand are grabbed;Wherein, water Flat moving assembly is fixed on the platform on great underframe by horizontal guide rail mounting seat, and installation direction is perpendicular to main guide rail;Water The dynamic servomotor of translation is connected by drive disk assembly with moving horizontally component;The vertical feeder assembly of centering passes through centering upright guide rail Mounting seat, which is fixed on, to be moved horizontally on component, and vertical shift motor and centering hand are grasped and be scheduled on the vertical feeder assembly of centering.
In the utility model, the crystal orientation detection means includes gantry installation frame, laser range sensor component, sensor Support, lift cylinder component and case;Wherein, gantry installation frame has the supporting leg that can be stretched up and down, across main guide rail and admittedly It is scheduled on great underframe;Laser range sensor component is fixed in gantry installation frame by sensor stand suspension;Lift cylinder Component is arranged on gantry installation frame upper end and protected by case.
In the utility model, the radius detection unit include mounting seat, motor, horizontal rectilinear motion unit, Support base and touch sensor unit;Wherein, horizontal rectilinear motion unit is arranged on great underframe by mounting seat;Contact Formula sensor unit is by connecting rod on support base, and support base then on the guide rail of horizontal rectilinear motion unit, drives Dynamic motor is located at one end of horizontal rectilinear motion unit.
In the utility model, air supply system and water system and drainage system are additionally provided with the great underframe.
Compared with prior art, the beneficial effects of the utility model are:
(1) the integral function of the silicon single crystal rod barreling processes external diameter from 2 inches to 8 inches, length from 50mm~ 1000mm crystal bar, greatly improves the range of work and working ability of crystal bar drum sanding equipment;
(2) the silicon single crystal rod barreling all-in-one realizes the automatic centering of silicon rod by centering mechanical-hand device, solves existing There is the problem of being needed in crystal bar drum sanding equipment by manually beaing come centering and relatively low precision;
(3) crystal orientation detection means is integrated on tumbling mill by the silicon single crystal rod barreling all-in-one, without silicon rod is removed to another Outer board detection, and the semiconductor crystal bar of three kinds of 100,110,111 face specification can be met simultaneously;Crystal orientation is directly entered after having detected Row grinding process, greatly reduces the time of inter process, improves processing efficiency, has saved the cost of manpower and logistics;
(4) the grinding unit head of crystal bar processing is divided into fine grinding and corase grind unit head, and corase grind unit head cutting output is big and speed It hurry up, fine grinding unit head finished surface is smooth, can be by meeting different process requirements;
(5) horizontally and vertically the feeding of the grinding unit head of crystal bar processing, the mobile etc. of workbench drives by servomotor It is dynamic, and the horizontally and vertically feeding of unit head is ground by high-precision ball leading screw driving, it is ensured that enough machining accuracies;Work Make the motion of platform by helical gear rack-driving, while feed accuracy is ensured, increase the ability of bending resistance anti-vibration;It is simultaneously big Underframe, unit head mounting seat use the part of high rigidity, can guarantee that the permanent and stable high accuracy operation of equipment;
(6) closed metal plate case can be discharged the silica flour produced in equipment production process by pump-line, and can be shown Reduction production noise is write, the influence of processing pollution and noise to workshop condition is effectively reduced;
(7) when equipment is processed in addition to water, electricity, gas are consumed, processing auxiliary material only has emery wheel, compared to monomer process equipment without sand Slurry, steel wire etc., do not produce organic emission, and discarded object is also less, preserves the ecological environment.
Brief description of the drawings
Fig. 1 is appearance schematic diagram of the present utility model;
Fig. 2 is that the utility model removes the top view after case metal plate component;
Fig. 3 is the utility model great underframe schematic diagram;
Fig. 4 is that the utility model is ground table assembly schematic diagram;
Fig. 5 is that the utility model roughly grinds unit head schematic diagram;
Fig. 6 is that the utility model refines unit head schematic diagram;
Fig. 7 is the utility model feeding manipulator component diagram;
Fig. 8 is the utility model centering mechanical hand component diagram;
Fig. 9 is the utility model crystal orientation detection means schematic diagram;
Figure 10 is the utility model radius detection unit schematic diagram.
Reference is:100 great underframes;200 grinding table assemblies;300 corase grind power head assemblies;400 fine grinding power Head assembly;500 feeding manipulator components;600 centering mechanical hand components;700 crystal orientation detection means;800 radius detection units; 900 outer cover metal plate components;101 great underframe bodies;102 main guide rails;103 rack and pinion assemblies;104 main drive motors;105 motors Mounting seat;201 headstocks;202 tailstocks;203 bases;204 clamping cylinders;205 indexing direct driving motors;206 pairs of knife sensor clusters; 301 corase grind variable-frequency motors;302 corase grind feeding guide rail mounting seats;303 move horizontally servomotor;304 horizontal feed components;305 Roughly grind upright guide rail mounting seat;306 vertical feeder assemblies;307 rough grinding wheel mounting seats;308 rough grinding wheel components;401 fine grindings Variable-frequency motor;402 fine grinding feeding guide rail mounting seats,;403 move horizontally servomotor;404 horizontal feed components;405 fine grindings are perpendicular Straight guide mounting seat;406 vertical feeder assemblies;407 brilliant grinding abrasive disk mounting seats;408 finishing wheel components;501 feeding mechanical hands; 502 guide rail mounting seats;503 telescopic cylinder components;504 horizontal feed components;601 vertical shift motors;602 centering upright guide rails Mounting seat;The vertical feeder assembly of 603 centerings;604 move horizontally servomotor;605 horizontal guide rail mounting seats;606 move horizontally Component;607 centering hands are grabbed;701 gantry installation frames;702 laser range sensor components;703 lift cylinder components;801 install Base;802 motors;803 horizontal rectilinear motion units;804 support bases;805 touch sensor units.
Embodiment
Following embodiment can make the technical staff of this professional skill field more fully understand the utility model, but not The utility model is limited in any way.
Full-automatic silicon single crystal rod barrel finishing equipment integrating described in the utility model, including the great underframe 100 for carrying; Great underframe 100 is elongated, on its surface along its length provided with two parallel main guide rails 102;It is ground table assembly 200 It is movably arranged on two main guide rails 102, the shifting along main guide rail 102 is realized by drive connection mechanism by main drive motor 104 It is dynamic;It is used for the platform of carrying provided with four altogether in the both sides of great underframe 100:Two platforms are located at middle part and the phase of great underframe 100 To arrangement, one of carrying corase grind power head assembly 300, another carrying fine grinding power head assembly 400;Another two platform position In one end of great underframe 100 and positioned opposite, one of carrying feeding manipulator component 500, another carrying centering mechanical Hand component 600;100 are additionally provided with crystal orientation detection means 700 and radius detection unit 800 on great underframe.
Great underframe body 101 is welded by Q235 steel plates, it is ensured that the strength and stiffness of great underframe;It is also whole including one Body is in the outer cover metal plate component 900 of inverted U-shape structure, and its two ends is fixed on great underframe 100, for protecting whole equipment.Greatly Air supply system, water system and drainage system are additionally provided with underframe.Drainage system can be effectively discharged out mixing in crystal bar process Close the cooling water for having silica flour.
Being ground table assembly 200 includes headstock 201, tailstock 202, base 203, clamping cylinder 204, indexing direct driving motor 205 and to knife sensor cluster 206;Wherein, base 203 is movably installed on two main guide rails 102, and its bottom is solid by screw Surely motor mount 105 is connected, main drive motor 104 is on motor mount 105;The drive connection mechanism is gear teeth Bar assembly 103, including the rack being fixed on great underframe 100, and with rack pitch wheel;Gear is fixed on main drive In the rotary shaft of dynamic motor 104;Headstock 201 and tailstock 202 are relatively installed on the both sides of base 203, its center line perpendicular to Main guide rail 102;Headstock 201 is drawn close or remote under the driving of clamping cylinder 204 to tailstock 202, so as to realize the clamping of crystal bar With loosen;The front end both sides of headstock 201 are symmetrically installed with to knife sensor cluster 206 and reference block, the survey before being ground for crystal bar Measure benchmark;The other end of headstock 201 is provided with indexing direct driving motor 205;The centre of gyration of headstock 201 and tailstock 202 is located at same axle On line;Headstock 201 and tailstock 202 can install various sizes of universal chuck, it is adaptable to various sizes of crystal bar (2 inches~8 Inch);When crystal bar is clamped, by indexing the direct driving motor 205 accurately rotation of control crystal bar and angle position.Main drive motor 104 band moving gears are moved along rack, so that drive grinding table assembly 200 to be advanced on two symmetrical main guide rails, from And it is steady and be accurately displaced on underframe between each station;
Corase grind power head assembly 300 includes corase grind variable-frequency motor 301, corase grind feeding guide rail mounting seat 302, moves horizontally and watch Motor 303, horizontal feed component 304, corase grind upright guide rail mounting seat 305, vertical feeder assembly 306, rough grinding wheel is taken to install Seat 307 and rough grinding wheel component 308;Wherein, horizontal feed component 304 is fixed on greatly by roughly grinding feeding guide rail mounting seat 302 On platform on underframe 100, and installation direction is perpendicular to main guide rail 102;Move horizontally servomotor 303 by drive disk assembly with Horizontal feed component 304 is connected;Vertical feeder assembly 306 is fixed on horizontal feed group by roughly grinding upright guide rail mounting seat 305 On part 304, corase grind variable-frequency motor 301 and rough grinding wheel mounting seat 307 are fixed on vertical feeder assembly 306, rough grinding wheel group Part 308 is in rough grinding wheel mounting seat 307.The corase grind driving rough grinding wheel 308 of variable-frequency motor 301 rotates, and realizes crystal bar workpiece Grinding;The granularity of rough grinding wheel 308 is 100~200 mesh, for crystal bar roughly grinding operation.
Fine grinding power head assembly 400 includes fine grinding variable-frequency motor 401, fine grinding feeding guide rail mounting seat 402, moves horizontally and watch Motor 403, horizontal feed component 404, fine grinding upright guide rail mounting seat 405, vertical feeder assembly 406, finishing wheel is taken to install Seat 407 and finishing wheel component 408;Wherein, horizontal feed component 404 is fixed on greatly by refining feeding guide rail mounting seat 402 On platform on underframe 100, and installation direction is perpendicular to main guide rail 102;Move horizontally servomotor 403 by drive disk assembly with Horizontal feed component 404 is connected;Vertical feeder assembly 406 is fixed on horizontal feed group by refining upright guide rail mounting seat 405 On part 404, fine grinding variable-frequency motor 401 and finishing wheel mounting seat 407 are fixed on vertical feeder assembly 406, finishing wheel group Part 408 is in finishing wheel mounting seat 407.The fine grinding driving finishing wheel 408 of variable-frequency motor 401 rotates, and realizes the mill of workpiece Cut;The granularity of the finishing wheel 407 is 400~600 mesh, for crystal bar precision grinding process.
Feeding manipulator component 500 includes feeding mechanical hand 501, guide rail mounting seat 502, telescopic cylinder component 503 and water Flat feeder assembly 504;Wherein, feeding manipulator 501 is movably installed on the guide rail of guide rail mounting seat 502, guide rail mounting seat 502 On the platform for being fixed on great underframe 100;Telescopic cylinder component 503 is connected to guide rail mounting seat by horizontal feed component 504 502.Feeding manipulator component 500 is used to hold up crystal bar to be processed, and sends into before centering mechanical hand 600.
Centering mechanical hand component 600 includes horizontal guide rail mounting seat 605, moves horizontally component 606, moves horizontally servo electricity Machine 604, centering upright guide rail mounting seat 602, the vertical feeder assembly 603 of centering, vertical shift motor 601 and centering hand grab 607; Wherein, component 606 is moved horizontally to be fixed on the platform on great underframe 100 by horizontal guide rail mounting seat 605, and installation direction Perpendicular to main guide rail 102;Servomotor 604 is moved horizontally to be connected with moving horizontally component 606 by drive disk assembly;Centering is vertical Feeder assembly 603 is fixed on by the mounting seat of centering upright guide rail mounting seat 602 and moved horizontally on component 606, vertical shift electricity Machine 601 and centering hand are grabbed 607 and are fixed on the vertical feeder assembly 603 of centering.The centering hand of feeding manipulator component 600 grabs 607 Two V-grooves are designed with, big V-groove is applied to the big silicon rod (6~8 inches) of size, and small V-groove is applied to the small silicon rod of size (2~4 inches);Crystal bar on feeding manipulator component 500 is held up and clamped by centering mechanical hand component 600, and passes through level Shift servo motor 604 accurately controls the position of size crystal bar, makes the axial line one of its axial line and grinding table assembly 200 Cause, realize crystal bar centering.
Crystal orientation detection means 700 includes gantry installation frame 701, laser range sensor component 702, sensor stand, liter Sending down abnormally ascending cylinder component 703 and case;Wherein, gantry installation frame 701 have can flexible supporting leg up and down, across main guide rail 102 and It is fixed on great underframe 100;Laser range sensor component 702 is fixed on gantry installation frame 701 by sensor stand suspension On;Lift cylinder component 703 is arranged on the upper end of gantry installation frame 701 and protected by case.Crystal orientation detection means 700 can be by swashing Ligh-ranging sensor cluster 702 carries out non-contact detecting, so that it is determined that the crest line position of crystal bar.
The radius detection unit 800 includes mounting seat 801, motor 802, horizontal rectilinear motion unit 803, branch Support seat 804 and touch sensor unit 805;Wherein, horizontal rectilinear motion unit 803 is arranged on big by mounting seat 801 On underframe 100;Touch sensor unit 805 is by connecting rod on support base 804, and support base 804 is then arranged on level On the guide rail of linear motion unit 803, motor 802 is located at one end of horizontal rectilinear motion unit 803.Motor 802 Horizontal rectilinear motion unit is driven, drives touch sensor unit 805 to move, crystal bar radius is detected after contact crystal bar, typically Along crystal bar axis direction, 3 to 5 positions are detected.

Claims (10)

1. a kind of full-automatic silicon single crystal rod barreling equipment integrating, including the great underframe for carrying;Characterized in that, the great underframe It is elongated, on its surface along its length provided with two parallel main guide rails;Grinding table assembly is movably arranged on two On main guide rail, moving along main guide rail is realized by drive connection mechanism by main drive motor;
It is used for the platform of carrying provided with four altogether in the both sides of great underframe:Two platforms are located at the middle part of great underframe and relative cloth Put, one of carrying corase grind power head assembly, another carrying fine grinding power head assembly;Another two platform is located at great underframe One end and positioned opposite, one of carrying feeding manipulator component, another carrying centering mechanical hand component;In great underframe On, it is additionally provided with crystal orientation detection means and radius detection unit.
2. equipment according to claim 1, it is characterised in that also including outer cover metal plate component, outer cover metal plate component is overall In inverted U-shaped structure, its two ends is fixed on great underframe.
3. the equipment according to any one of claim 1 or 2, it is characterised in that the grinding table assembly includes Headstock, tailstock, base, clamping cylinder, indexing direct driving motor and to knife sensor cluster;Wherein, base is movably installed in two On main guide rail, its bottom is fixedly connected with motor mount by screw, and main drive motor is on motor mount;The driving Bindiny mechanism includes being fixed on rack on great underframe, and with rack pitch wheel;Gear is fixed on main driving electricity In the rotary shaft of machine;Headstock and tailstock are relatively installed on the both sides of base, and its center line is perpendicular to main guide rail;Set below base Clamping cylinder, for driving headstock or tailstock with adjust each other away from;Headstock or tailstock are provided with for measuring basis to knife Sensor cluster and reference block, and for controlling the indexing direct driving motor of crystal bar rotation and angle position.
4. the equipment according to any one of claim 1 or 2, it is characterised in that the corase grind power head assembly includes Roughly grind feeding guide rail mounting seat, horizontal feed component, move horizontally servomotor, corase grind upright guide rail mounting seat, vertical feeding Component, corase grind variable-frequency motor, rough grinding wheel mounting seat and rough grinding wheel component;Wherein, horizontal feed component is fed by roughly grinding Guide rail mounting seat is fixed on the platform on great underframe, and installation direction is perpendicular to main guide rail;Servomotor is moved horizontally to pass through Drive disk assembly is connected with horizontal feed component;Vertical feeder assembly is fixed on horizontal feed group by roughly grinding upright guide rail mounting seat On part, corase grind variable-frequency motor and rough grinding wheel mounting seat are fixed on vertical feeder assembly, and rough grinding wheel component is mounted in corase grind sand Take turns in mounting seat.
5. the equipment according to any one of claim 1 or 2, it is characterised in that the fine grinding power head assembly includes Refine feeding guide rail mounting seat, horizontal feed component, move horizontally servomotor, fine grinding upright guide rail mounting seat, vertical feeding Component, fine grinding variable-frequency motor, finishing wheel mounting seat and finishing wheel component;Wherein, horizontal feed component is fed by refining Guide rail mounting seat is fixed on the platform on great underframe, and installation direction is perpendicular to main guide rail;Servomotor is moved horizontally to pass through Drive disk assembly is connected with horizontal feed component;Vertical feeder assembly is fixed on horizontal feed group by refining upright guide rail mounting seat On part, fine grinding variable-frequency motor and finishing wheel mounting seat are fixed on vertical feeder assembly, and finishing wheel component is mounted in fine grinding sand Take turns in mounting seat.
6. the equipment according to any one of claim 1 or 2, it is characterised in that the feeding manipulator component includes Feeding mechanical hand, guide rail mounting seat, telescopic cylinder component and horizontal feed component;Wherein, feeding manipulator, which is movably installed in, leads On the guide rail of rail mounting seat, guide rail mounting seat is fixed on the platform of great underframe;Telescopic cylinder component passes through horizontal feed component It is connected to guide rail mounting seat.
7. the equipment according to any one of claim 1 or 2, it is characterised in that the centering mechanical hand component includes Horizontal guide rail mounting seat, component is moved horizontally, servomotor, centering upright guide rail mounting seat, centering is moved horizontally and feeds vertically Component, vertical shift motor and centering hand are grabbed;Wherein, component is moved horizontally to be fixed on great underframe by horizontal guide rail mounting seat Platform on, and installation direction is perpendicular to main guide rail;Servomotor is moved horizontally by drive disk assembly and component company is moved horizontally Connect;The vertical feeder assembly of centering is fixed on by centering upright guide rail mounting seat and moved horizontally on component, vertical shift motor and Centering hand, which is grasped, to be scheduled on the vertical feeder assembly of centering.
8. the equipment according to any one of claim 1 or 2, it is characterised in that the crystal orientation detection means includes dragon Door mounting bracket, laser range sensor component, sensor stand, lift cylinder component and case;Wherein, gantry installation frame has Can flexible supporting leg up and down, across main guide rail and be fixed on great underframe;Laser range sensor component passes through sensor branch Frame suspension is fixed in gantry installation frame;Lift cylinder component is arranged on gantry installation frame upper end and protected by case.
9. the equipment according to any one of claim 1 or 2, it is characterised in that the radius detection unit includes peace Fill base, motor, horizontal rectilinear motion unit, support base and touch sensor unit;Wherein, horizontal rectilinear motion list Member is arranged on great underframe by mounting seat;Touch sensor unit is by connecting rod on support base, and support base is then On the guide rail of horizontal rectilinear motion unit, motor is located at one end of horizontal rectilinear motion unit.
10. the equipment according to any one of claim 1 or 2, it is characterised in that supply is additionally provided with the great underframe System and water system and drainage system.
CN201621271668.0U 2016-11-25 2016-11-25 Full-automatic silicon single crystal rod barreling equipment integrating Active CN206416011U (en)

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Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106475878A (en) * 2016-11-25 2017-03-08 浙江晶盛机电股份有限公司 A kind of full-automatic silicon single crystal rod barreling equipment integrating
CN109773640A (en) * 2019-03-22 2019-05-21 天通日进精密技术有限公司 A kind of round as a ball grooving method of crystal bar using the vertical round as a ball groover of semiconductor crystal bar
WO2022041863A1 (en) * 2020-08-28 2022-03-03 天通日进精密技术有限公司 Silicon rod grinding machine and silicon rod grinding method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106475878A (en) * 2016-11-25 2017-03-08 浙江晶盛机电股份有限公司 A kind of full-automatic silicon single crystal rod barreling equipment integrating
CN109773640A (en) * 2019-03-22 2019-05-21 天通日进精密技术有限公司 A kind of round as a ball grooving method of crystal bar using the vertical round as a ball groover of semiconductor crystal bar
CN109773640B (en) * 2019-03-22 2020-06-16 天通日进精密技术有限公司 Wafer rod rounding and grooving method using semiconductor wafer rod vertical type rounding and grooving machine
WO2022041863A1 (en) * 2020-08-28 2022-03-03 天通日进精密技术有限公司 Silicon rod grinding machine and silicon rod grinding method

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