CN105500391A - 真空吸附头及使用其的真空吸附装置 - Google Patents

真空吸附头及使用其的真空吸附装置 Download PDF

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Publication number
CN105500391A
CN105500391A CN201510564556.8A CN201510564556A CN105500391A CN 105500391 A CN105500391 A CN 105500391A CN 201510564556 A CN201510564556 A CN 201510564556A CN 105500391 A CN105500391 A CN 105500391A
Authority
CN
China
Prior art keywords
absorption
axle
vacuum suction
housing section
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201510564556.8A
Other languages
English (en)
Chinese (zh)
Inventor
金荣男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsuboshi Diamond Industrial Co Ltd
Original Assignee
Mitsuboshi Diamond Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsuboshi Diamond Industrial Co Ltd filed Critical Mitsuboshi Diamond Industrial Co Ltd
Publication of CN105500391A publication Critical patent/CN105500391A/zh
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/912—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers provided with drive systems with rectilinear movements only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Optics & Photonics (AREA)
  • Manipulator (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Hooks, Suction Cups, And Attachment By Adhesive Means (AREA)
  • Load-Engaging Elements For Cranes (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CN201510564556.8A 2014-10-10 2015-09-07 真空吸附头及使用其的真空吸附装置 Pending CN105500391A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2014-0136469 2014-10-10
KR1020140136469A KR20160042508A (ko) 2014-10-10 2014-10-10 진공 흡착 헤드 및 그를 사용하는 진공 흡착 장치

Publications (1)

Publication Number Publication Date
CN105500391A true CN105500391A (zh) 2016-04-20

Family

ID=55708885

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510564556.8A Pending CN105500391A (zh) 2014-10-10 2015-09-07 真空吸附头及使用其的真空吸附装置

Country Status (4)

Country Link
JP (1) JP2016078228A (ja)
KR (1) KR20160042508A (ja)
CN (1) CN105500391A (ja)
TW (1) TW201613813A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110281057A (zh) * 2019-05-31 2019-09-27 西南电子技术研究所（中国电子科技集团公司第十研究所） 真空吸附系统通用自密封自开合联接器
CN110872000A (zh) * 2018-08-29 2020-03-10 日本电产三协株式会社 搬运机器人
CN116040313A (zh) * 2023-03-30 2023-05-02 中南大学 可调吸速双变腔体适应性气动吸附装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102643958B1 (ko) * 2021-10-07 2024-03-07 주식회사 티에프이 반도체 패키지 픽커 어셈블리 및 그에 사용되는 흡착 모듈

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200301211A (en) * 2001-12-11 2003-07-01 Mitsuboshi Diamond Ind Co Ltd Method of suckingly holding substrate, and suckingly and holdingly carrying machine using the method
US7665783B2 (en) * 2003-11-21 2010-02-23 Mitsuboshi Diamond Industrial, Co., Ltd. Vacuum suction head, and vacuum suction device and table using the same
KR20080066370A (ko) * 2007-01-12 2008-07-16 주식회사 탑 엔지니어링 기판흡착장치

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110872000A (zh) * 2018-08-29 2020-03-10 日本电产三协株式会社 搬运机器人
CN110281057A (zh) * 2019-05-31 2019-09-27 西南电子技术研究所（中国电子科技集团公司第十研究所） 真空吸附系统通用自密封自开合联接器
CN116040313A (zh) * 2023-03-30 2023-05-02 中南大学 可调吸速双变腔体适应性气动吸附装置

Also Published As

Publication number Publication date
JP2016078228A (ja) 2016-05-16
KR20160042508A (ko) 2016-04-20
TW201613813A (en) 2016-04-16

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C06 Publication
PB01 Publication
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20160420

WD01 Invention patent application deemed withdrawn after publication