TW201613813A - Vacuum suction head and vacuum suction device using same - Google Patents
Vacuum suction head and vacuum suction device using sameInfo
- Publication number
- TW201613813A TW201613813A TW104120120A TW104120120A TW201613813A TW 201613813 A TW201613813 A TW 201613813A TW 104120120 A TW104120120 A TW 104120120A TW 104120120 A TW104120120 A TW 104120120A TW 201613813 A TW201613813 A TW 201613813A
- Authority
- TW
- Taiwan
- Prior art keywords
- suction
- vacuum suction
- shaft
- shell part
- same
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
- B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/912—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers provided with drive systems with rectilinear movements only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
Abstract
Disclosed are a vacuum suction head and a vacuum suction device using the same, comprising a suction pad, which is in contact with a sucked surface of a sucked object for vacuum suction; a suction shaft, which has one end connected with the suction pad and supports the suction pad and comprises a suction and draining channel formed internally for sucking and draining air in the suction pad; a shell part, which comprises an internal space in which the suction shaft is supported to be slidable and movable; an elastic supporting part, which elastically supports the suction shaft inside the shell part in an axial direction of the shell part; and a shaft fixing unit, which is located at one side of the shell part and restricts the movement of the suction shaft for fixing the same. As such, generation of vibration in the sucked object is suppressed during transportation thereof thereby preventing damage.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020140136469A KR20160042508A (en) | 2014-10-10 | 2014-10-10 | Vacuum suction head and vacuum suction apparatus using the same |
Publications (1)
Publication Number | Publication Date |
---|---|
TW201613813A true TW201613813A (en) | 2016-04-16 |
Family
ID=55708885
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW104120120A TW201613813A (en) | 2014-10-10 | 2015-06-23 | Vacuum suction head and vacuum suction device using same |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP2016078228A (en) |
KR (1) | KR20160042508A (en) |
CN (1) | CN105500391A (en) |
TW (1) | TW201613813A (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020035841A (en) * | 2018-08-29 | 2020-03-05 | 日本電産サンキョー株式会社 | Transfer robot |
CN110281057A (en) * | 2019-05-31 | 2019-09-27 | 西南电子技术研究所(中国电子科技集团公司第十研究所) | The general self-sealing of vacuum suction system opens and closes connector certainly |
KR102643958B1 (en) * | 2021-10-07 | 2024-03-07 | 주식회사 티에프이 | Picker assembly for semiconductor package and adsorption moudule used therefor |
CN116040313B (en) * | 2023-03-30 | 2023-06-13 | 中南大学 | Adjustable suction speed double-variable cavity adaptive pneumatic adsorption device |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW200301211A (en) * | 2001-12-11 | 2003-07-01 | Mitsuboshi Diamond Ind Co Ltd | Method of suckingly holding substrate, and suckingly and holdingly carrying machine using the method |
EP1685930B1 (en) * | 2003-11-21 | 2009-01-14 | Mitsuboshi Diamond Industrial Co., Ltd. | Vacuum suction head, and vacuum suction device and table using the same |
KR20080066370A (en) * | 2007-01-12 | 2008-07-16 | 주식회사 탑 엔지니어링 | Substrate adsorption apparatus |
-
2014
- 2014-10-10 KR KR1020140136469A patent/KR20160042508A/en not_active Application Discontinuation
-
2015
- 2015-05-27 JP JP2015106940A patent/JP2016078228A/en active Pending
- 2015-06-23 TW TW104120120A patent/TW201613813A/en unknown
- 2015-09-07 CN CN201510564556.8A patent/CN105500391A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
JP2016078228A (en) | 2016-05-16 |
KR20160042508A (en) | 2016-04-20 |
CN105500391A (en) | 2016-04-20 |
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