TW201613813A - Vacuum suction head and vacuum suction device using same - Google Patents

Vacuum suction head and vacuum suction device using same

Info

Publication number
TW201613813A
TW201613813A TW104120120A TW104120120A TW201613813A TW 201613813 A TW201613813 A TW 201613813A TW 104120120 A TW104120120 A TW 104120120A TW 104120120 A TW104120120 A TW 104120120A TW 201613813 A TW201613813 A TW 201613813A
Authority
TW
Taiwan
Prior art keywords
suction
vacuum suction
shaft
shell part
same
Prior art date
Application number
TW104120120A
Other languages
Chinese (zh)
Inventor
Young-Nam Kim
Original Assignee
Mitsuboshi Diamond Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsuboshi Diamond Ind Co Ltd filed Critical Mitsuboshi Diamond Ind Co Ltd
Publication of TW201613813A publication Critical patent/TW201613813A/en

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00Gripping heads and other end effectors
    • B25J15/06Gripping heads and other end effectors with vacuum or magnetic holding means
    • B25J15/0616Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90Devices for picking-up and depositing articles or materials
    • B65G47/91Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/912Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers provided with drive systems with rectilinear movements only
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67712Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically

Abstract

Disclosed are a vacuum suction head and a vacuum suction device using the same, comprising a suction pad, which is in contact with a sucked surface of a sucked object for vacuum suction; a suction shaft, which has one end connected with the suction pad and supports the suction pad and comprises a suction and draining channel formed internally for sucking and draining air in the suction pad; a shell part, which comprises an internal space in which the suction shaft is supported to be slidable and movable; an elastic supporting part, which elastically supports the suction shaft inside the shell part in an axial direction of the shell part; and a shaft fixing unit, which is located at one side of the shell part and restricts the movement of the suction shaft for fixing the same. As such, generation of vibration in the sucked object is suppressed during transportation thereof thereby preventing damage.
TW104120120A 2014-10-10 2015-06-23 Vacuum suction head and vacuum suction device using same TW201613813A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020140136469A KR20160042508A (en) 2014-10-10 2014-10-10 Vacuum suction head and vacuum suction apparatus using the same

Publications (1)

Publication Number Publication Date
TW201613813A true TW201613813A (en) 2016-04-16

Family

ID=55708885

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104120120A TW201613813A (en) 2014-10-10 2015-06-23 Vacuum suction head and vacuum suction device using same

Country Status (4)

Country Link
JP (1) JP2016078228A (en)
KR (1) KR20160042508A (en)
CN (1) CN105500391A (en)
TW (1) TW201613813A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020035841A (en) * 2018-08-29 2020-03-05 日本電産サンキョー株式会社 Transfer robot
CN110281057A (en) * 2019-05-31 2019-09-27 西南电子技术研究所(中国电子科技集团公司第十研究所) The general self-sealing of vacuum suction system opens and closes connector certainly
KR102643958B1 (en) * 2021-10-07 2024-03-07 주식회사 티에프이 Picker assembly for semiconductor package and adsorption moudule used therefor
CN116040313B (en) * 2023-03-30 2023-06-13 中南大学 Adjustable suction speed double-variable cavity adaptive pneumatic adsorption device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200301211A (en) * 2001-12-11 2003-07-01 Mitsuboshi Diamond Ind Co Ltd Method of suckingly holding substrate, and suckingly and holdingly carrying machine using the method
EP1685930B1 (en) * 2003-11-21 2009-01-14 Mitsuboshi Diamond Industrial Co., Ltd. Vacuum suction head, and vacuum suction device and table using the same
KR20080066370A (en) * 2007-01-12 2008-07-16 주식회사 탑 엔지니어링 Substrate adsorption apparatus

Also Published As

Publication number Publication date
JP2016078228A (en) 2016-05-16
KR20160042508A (en) 2016-04-20
CN105500391A (en) 2016-04-20

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