CN105378120A - 连续处理过程中用于顺序熔化和精炼的方法及设备 - Google Patents

连续处理过程中用于顺序熔化和精炼的方法及设备 Download PDF

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Publication number
CN105378120A
CN105378120A CN201480040667.2A CN201480040667A CN105378120A CN 105378120 A CN105378120 A CN 105378120A CN 201480040667 A CN201480040667 A CN 201480040667A CN 105378120 A CN105378120 A CN 105378120A
Authority
CN
China
Prior art keywords
chamber
processing chamber
processing
transfer
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201480040667.2A
Other languages
English (en)
Chinese (zh)
Inventor
亨利克·弗朗茨
阿诺·尼卜林
乌尔里希·布里歇尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ALD Vacuum Technologies GmbH
Original Assignee
ALD Vacuum Technologies GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ALD Vacuum Technologies GmbH filed Critical ALD Vacuum Technologies GmbH
Publication of CN105378120A publication Critical patent/CN105378120A/zh
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B9/00—General processes of refining or remelting of metals; Apparatus for electroslag or arc remelting of metals
    • C22B9/04—Refining by applying a vacuum
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C01B33/037—Purification
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B9/00—General processes of refining or remelting of metals; Apparatus for electroslag or arc remelting of metals
    • C22B9/16—Remelting metals
    • C22B9/22—Remelting metals with heating by wave energy or particle radiation
    • C22B9/228—Remelting metals with heating by wave energy or particle radiation by particle radiation, e.g. electron beams
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B19/00—Combinations of different kinds of furnaces that are not all covered by any single one of main groups F27B1/00 - F27B17/00
    • F27B19/02—Combinations of different kinds of furnaces that are not all covered by any single one of main groups F27B1/00 - F27B17/00 combined in one structure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D11/00—Arrangement of elements for electric heating in or on furnaces
    • F27D11/06—Induction heating, i.e. in which the material being heated, or its container or elements embodied therein, form the secondary of a transformer
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D11/00—Arrangement of elements for electric heating in or on furnaces
    • F27D11/08—Heating by electric discharge, e.g. arc discharge
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D11/00—Arrangement of elements for electric heating in or on furnaces
    • F27D11/12—Arrangement of elements for electric heating in or on furnaces with electromagnetic fields acting directly on the material being heated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D3/00—Charging; Discharging; Manipulation of charge
    • F27D3/14—Charging or discharging liquid or molten material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
    • C22B9/00—General processes of refining or remelting of metals; Apparatus for electroslag or arc remelting of metals
    • C22B9/16—Remelting metals
    • C22B9/22—Remelting metals with heating by wave energy or particle radiation
    • C22B9/226—Remelting metals with heating by wave energy or particle radiation by electric discharge, e.g. plasma
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B19/00—Combinations of different kinds of furnaces that are not all covered by any single one of main groups F27B1/00 - F27B17/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D27/00—Stirring devices for molten material

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Continuous Casting (AREA)
  • Furnace Details (AREA)
CN201480040667.2A 2013-07-18 2014-07-17 连续处理过程中用于顺序熔化和精炼的方法及设备 Pending CN105378120A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102013107685.8 2013-07-18
DE102013107685.8A DE102013107685B3 (de) 2013-07-18 2013-07-18 Vorrichtung und Verfahren zum sequentiellen Schmelzen und Raffinieren in einem kontinuierlichen Verfahren
PCT/EP2014/065429 WO2015007861A1 (de) 2013-07-18 2014-07-17 Vorrichtung und verfahren zum sequentiellen schmelzen und raffinieren in einem kontinuierlichen verfahren

Publications (1)

Publication Number Publication Date
CN105378120A true CN105378120A (zh) 2016-03-02

Family

ID=51211225

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201480040667.2A Pending CN105378120A (zh) 2013-07-18 2014-07-17 连续处理过程中用于顺序熔化和精炼的方法及设备

Country Status (9)

Country Link
US (1) US20160160314A1 (enExample)
EP (1) EP3022325B1 (enExample)
JP (1) JP2016530400A (enExample)
CN (1) CN105378120A (enExample)
CA (1) CA2916477A1 (enExample)
DE (1) DE102013107685B3 (enExample)
PL (1) PL3022325T3 (enExample)
RU (1) RU2639083C2 (enExample)
WO (1) WO2015007861A1 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113368522A (zh) * 2021-07-02 2021-09-10 上海大学 一种铟的真空蒸馏装置和蒸馏方法
JP2022168831A (ja) * 2021-04-26 2022-11-08 株式会社豊田中央研究所 金属精製方法および金属精製装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220349026A1 (en) * 2021-04-26 2022-11-03 Kabushiki Kaisha Toyota Chuo Kenkyusho Metal purifying method and metal purifying apparatus

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4027722A (en) * 1963-02-01 1977-06-07 Airco, Inc. Electron beam furnace
US5503655A (en) * 1994-02-23 1996-04-02 Orbit Technologies, Inc. Low cost titanium production
CN1207696A (zh) * 1995-12-22 1999-02-10 霍戈文斯-斯塔尔公司 制造可成形钢的方法和设备

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1291760B (de) * 1963-11-08 1969-04-03 Suedwestfalen Ag Stahlwerke Verfahren und Vorrichtung zum diskontinuierlichen und kontinuierlichen Vakuum-Schmelzen und -Giessen von Staehlen und stahlaehnlichen Legierungen (Superiegierungen)
FR2085436A1 (en) * 1970-04-21 1971-12-24 Alsacienne Atom Multi-chamber furnace installation for melting, refining - and casting metals
FR2132534B2 (enExample) * 1971-04-07 1974-11-08 Activite Atom Avance
DE2501603B2 (de) * 1975-01-16 1977-08-25 Institut problem htja Akademn Nauk Ukrainskoj SSR, Kiew (Sowjetunion) Einrichtung zur vakuumbehandlung fluessiger metalle
JPH0421727A (ja) * 1990-05-14 1992-01-24 Daido Steel Co Ltd チタン鋳塊の製造方法および装置
JPH05285638A (ja) * 1992-04-07 1993-11-02 Toshiba Mach Co Ltd 電磁ポンプのダクト
EP0796820B1 (en) * 1996-03-19 2000-07-19 Kawasaki Steel Corporation Process and apparatus for refining silicon
ES2285148T3 (es) * 2002-06-15 2007-11-16 Solios Thermal Limited Aparato de induccion electromagnetica y metodo de tratamiento de materiales fundidos.
EP1913991A4 (en) * 2005-08-10 2009-11-25 Central Res Inst Elect CLEANING DEVICE AND CLEANING PROCEDURE

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4027722A (en) * 1963-02-01 1977-06-07 Airco, Inc. Electron beam furnace
US5503655A (en) * 1994-02-23 1996-04-02 Orbit Technologies, Inc. Low cost titanium production
CN1207696A (zh) * 1995-12-22 1999-02-10 霍戈文斯-斯塔尔公司 制造可成形钢的方法和设备

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
沈阳铸造研究所编: "《压力铸造经验汇编》", 31 December 1975, 第一机械工业部情报所 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022168831A (ja) * 2021-04-26 2022-11-08 株式会社豊田中央研究所 金属精製方法および金属精製装置
JP7733599B2 (ja) 2021-04-26 2025-09-03 株式会社豊田中央研究所 金属精製方法および金属精製装置
CN113368522A (zh) * 2021-07-02 2021-09-10 上海大学 一种铟的真空蒸馏装置和蒸馏方法
CN113368522B (zh) * 2021-07-02 2022-12-23 上海大学 一种铟的真空蒸馏装置和蒸馏方法

Also Published As

Publication number Publication date
PL3022325T3 (pl) 2018-04-30
DE102013107685B3 (de) 2014-09-18
CA2916477A1 (en) 2015-01-22
RU2639083C2 (ru) 2017-12-19
EP3022325B1 (de) 2017-10-04
EP3022325A1 (de) 2016-05-25
RU2016105398A (ru) 2017-08-23
US20160160314A1 (en) 2016-06-09
JP2016530400A (ja) 2016-09-29
WO2015007861A1 (de) 2015-01-22

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PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20160302