CN105375815A - 压电驱动装置、机器人以及它们的驱动方法 - Google Patents

压电驱动装置、机器人以及它们的驱动方法 Download PDF

Info

Publication number
CN105375815A
CN105375815A CN201510477540.3A CN201510477540A CN105375815A CN 105375815 A CN105375815 A CN 105375815A CN 201510477540 A CN201510477540 A CN 201510477540A CN 105375815 A CN105375815 A CN 105375815A
Authority
CN
China
Prior art keywords
piezoelectric
electrode
wiring
conductive
drive device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201510477540.3A
Other languages
English (en)
Chinese (zh)
Inventor
岩崎友寿
小西晃雄
梶野喜一
上條浩一
宫泽修
荒川丰
山田大介
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of CN105375815A publication Critical patent/CN105375815A/zh
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Program-controlled manipulators
    • B25J9/10—Program-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Program-controlled manipulators characterised by positioning means for manipulator elements electric
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H02N2/004—Rectangular vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/0075—Electrical details, e.g. drive or control circuits or methods
    • H02N2/0085—Leads; Wiring arrangements
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14—Drive circuits; Control arrangements or methods
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P25/00—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
    • H02P25/02—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the kind of motor
    • H02P25/032—Reciprocating, oscillating or vibrating motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P25/00—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
    • H02P25/16—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the circuit arrangement or by the kind of wiring
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P25/00—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
    • H02P25/16—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the circuit arrangement or by the kind of wiring
    • H02P25/32—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the circuit arrangement or by the kind of wiring using discharge tubes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2023—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/27—Arm part
    • Y10S901/28—Joint

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Manipulator (AREA)
CN201510477540.3A 2014-08-13 2015-08-06 压电驱动装置、机器人以及它们的驱动方法 Pending CN105375815A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014-164631 2014-08-13
JP2014164631A JP6398454B2 (ja) 2014-08-13 2014-08-13 圧電駆動装置、ロボット、及び、それらの駆動方法

Publications (1)

Publication Number Publication Date
CN105375815A true CN105375815A (zh) 2016-03-02

Family

ID=53794142

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510477540.3A Pending CN105375815A (zh) 2014-08-13 2015-08-06 压电驱动装置、机器人以及它们的驱动方法

Country Status (6)

Country Link
US (2) US9666785B2 (enExample)
EP (1) EP2985795A1 (enExample)
JP (1) JP6398454B2 (enExample)
KR (1) KR20160020359A (enExample)
CN (1) CN105375815A (enExample)
TW (1) TWI657606B (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107800324A (zh) * 2016-08-31 2018-03-13 精工爱普生株式会社 振子及制造方法、压电致动器及电机、机器人及输送装置
CN112405604A (zh) * 2019-08-21 2021-02-26 精工爱普生株式会社 压电驱动装置及机器人

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105375812A (zh) * 2014-08-13 2016-03-02 精工爱普生株式会社 压电驱动装置及其驱动方法、机器人及其驱动方法
JP6439466B2 (ja) * 2015-01-30 2018-12-19 セイコーエプソン株式会社 圧電駆動装置、ロボット及びロボットの駆動方法
JP6724393B2 (ja) * 2016-01-29 2020-07-15 セイコーエプソン株式会社 圧電駆動装置、モーター、ロボット及びポンプ
JP2017229194A (ja) * 2016-06-24 2017-12-28 セイコーエプソン株式会社 Ｍｅｍｓデバイス、圧電アクチュエーター、及び、超音波モーター
JP6828342B2 (ja) * 2016-09-23 2021-02-10 セイコーエプソン株式会社 圧電アクチュエーター、圧電モーター、ロボット、電子部品搬送装置、プリンターおよび圧電アクチュエーターの製造方法
JP6946893B2 (ja) * 2017-09-22 2021-10-13 セイコーエプソン株式会社 圧電駆動装置、圧電モーター、ロボット、電子部品搬送装置、プリンターおよびプロジェクター
JP7110570B2 (ja) * 2017-09-25 2022-08-02 Tdk株式会社 振動ユニット
DE102017009542B3 (de) * 2017-10-13 2019-01-03 Marco Systemanalyse Und Entwicklung Gmbh Positioniervorrichtung
JP7769558B2 (ja) 2021-05-12 2025-11-13 浜松ホトニクス株式会社 圧電ユニット及びアクチュエータ装置
US12527227B2 (en) 2021-05-12 2026-01-13 Hamamatsu Photonics K.K. Actuator device
JP7696305B2 (ja) 2021-05-12 2025-06-20 浜松ホトニクス株式会社 アクチュエータ装置
US12514123B2 (en) * 2021-05-12 2025-12-30 Hamamatsu Photonics K.K. Actuator device and actuator system

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1240481A (zh) * 1996-10-30 2000-01-05 农业技术研究基金会 Rna病毒的感染性克隆及其衍生的疫苗及诊断分析
CN1507687A (zh) * 2002-03-01 2004-06-23 ������������ʽ���� 压电致动器及具有压电致动器的钟表以及便携装置
US20090009109A1 (en) * 2007-07-02 2009-01-08 Seiko Epson Corporation Method for driving ultrasonic motor
CN101674029A (zh) * 2008-09-09 2010-03-17 佳能株式会社 振动波驱动装置
US20120248805A1 (en) * 2011-03-29 2012-10-04 Seiko Epson Corporation Piezoelectric actuator, motor, robot hand, and robot
CN103284755A (zh) * 2012-02-24 2013-09-11 精工爱普生株式会社 超声波换能器装置、探测器、电子设备及超声波诊断装置

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3165578B2 (ja) * 1994-02-21 2001-05-14 株式会社フコク 超音波モータ
JPH08111991A (ja) 1994-08-19 1996-04-30 Mitsui Petrochem Ind Ltd 超音波モータ用圧電振動子および圧電振動子の取付け方法
JPH09140169A (ja) 1995-11-16 1997-05-27 Nikon Corp 振動アクチュエータ
JP3122064B2 (ja) 1997-09-03 2001-01-09 リコー計器株式会社 圧電トランスの電極接続構造
TW498397B (en) * 2000-10-19 2002-08-11 Ind Tech Res Inst Long-stroke precision piezoelectric actuator
JP2002142473A (ja) * 2000-11-02 2002-05-17 Canon Inc 振動波駆動装置および振動波駆動装置を用いた装置
JP4311054B2 (ja) 2003-03-24 2009-08-12 セイコーエプソン株式会社 圧電アクチュエータ、これを備えた装置、および圧電アクチュエータの製造方法
JP2004320979A (ja) 2003-04-03 2004-11-11 Seiko Epson Corp 稼働装置および電気機器
JP2005176479A (ja) * 2003-12-10 2005-06-30 Canon Inc 振動体および振動波アクチュエータ
JP2005237102A (ja) * 2004-02-19 2005-09-02 Seiko Epson Corp 圧電アクチュエータ、時計及び電子機器
JP4736468B2 (ja) 2005-02-24 2011-07-27 セイコーエプソン株式会社 圧電アクチュエータおよび機器
JP2007259669A (ja) 2006-03-24 2007-10-04 Toshiba Corp 圧電アクチュエータ及びそれを用いたマイクロメカニカルデバイス、可変容量キャパシタ、スイッチ
JP2008130810A (ja) * 2006-11-21 2008-06-05 Seiko Precision Inc アクチュエータ及びその製造方法
US8437061B2 (en) * 2007-08-27 2013-05-07 Panasonic Corporation Piezoelectric actuator, optical reflection element using the same and piezoelectric driver
TW200939614A (en) * 2008-03-14 2009-09-16 Chao-Ping Lee Piezoelectric actuated device
JP5446122B2 (ja) 2008-04-25 2014-03-19 パナソニック株式会社 ミアンダ形振動子およびこれを用いた光学反射素子
JP5091051B2 (ja) * 2008-08-25 2012-12-05 日立マクセル株式会社 カメラモジュール、カメラモジュールの製造方法、及びレンズの駆動方法
JP2011160525A (ja) * 2010-01-29 2011-08-18 Seiko Epson Corp 圧電振動体装置、及び電子機器
JP2012025096A (ja) 2010-07-27 2012-02-09 Seiko Epson Corp 圧電素子、液体噴射ヘッドおよび液体噴射装置
JP2013135484A (ja) * 2011-12-26 2013-07-08 Wac Data Service Kk 圧電駆動装置
WO2014007088A1 (ja) * 2012-07-04 2014-01-09 株式会社村田製作所 圧電ファン
JP2014030290A (ja) 2012-07-31 2014-02-13 Canon Inc 振動体及び振動波アクチュエータ

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1240481A (zh) * 1996-10-30 2000-01-05 农业技术研究基金会 Rna病毒的感染性克隆及其衍生的疫苗及诊断分析
CN1507687A (zh) * 2002-03-01 2004-06-23 ������������ʽ���� 压电致动器及具有压电致动器的钟表以及便携装置
US20090009109A1 (en) * 2007-07-02 2009-01-08 Seiko Epson Corporation Method for driving ultrasonic motor
CN101674029A (zh) * 2008-09-09 2010-03-17 佳能株式会社 振动波驱动装置
US20120248805A1 (en) * 2011-03-29 2012-10-04 Seiko Epson Corporation Piezoelectric actuator, motor, robot hand, and robot
CN103284755A (zh) * 2012-02-24 2013-09-11 精工爱普生株式会社 超声波换能器装置、探测器、电子设备及超声波诊断装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107800324A (zh) * 2016-08-31 2018-03-13 精工爱普生株式会社 振子及制造方法、压电致动器及电机、机器人及输送装置
US11581477B2 (en) 2016-08-31 2023-02-14 Seiko Epson Corporation Vibrator, piezoelectric actuator, piezoelectric motor, robot, electronic component conveyance apparatus, and manufacturing method of vibrator
CN112405604A (zh) * 2019-08-21 2021-02-26 精工爱普生株式会社 压电驱动装置及机器人
CN112405604B (zh) * 2019-08-21 2023-06-16 精工爱普生株式会社 压电驱动装置及机器人

Also Published As

Publication number Publication date
US20160049574A1 (en) 2016-02-18
US9666785B2 (en) 2017-05-30
EP2985795A1 (en) 2016-02-17
KR20160020359A (ko) 2016-02-23
TWI657606B (zh) 2019-04-21
US20170229634A1 (en) 2017-08-10
JP2016040993A (ja) 2016-03-24
TW201611360A (zh) 2016-03-16
JP6398454B2 (ja) 2018-10-03
US10249811B2 (en) 2019-04-02

Similar Documents

Publication Publication Date Title
JP6398454B2 (ja) 圧電駆動装置、ロボット、及び、それらの駆動方法
JP6405785B2 (ja) 圧電駆動装置、ロボット、及び、それらの駆動方法
CN106329985A (zh) 压电驱动装置、机器人以及压电驱动装置的驱动方法
CN105375813A (zh) 压电驱动装置及其驱动方法、机器人及其驱动方法
JP6543951B2 (ja) 圧電駆動装置、ロボット、及び、それらの駆動方法
CN106887970B (zh) 电气设备、压电马达、机器人、机械手以及送液泵
CN105846716A (zh) 压电驱动装置、机器人及机器人的驱动方法
CN105375812A (zh) 压电驱动装置及其驱动方法、机器人及其驱动方法
CN107017334A (zh) 压电驱动装置及其制造方法、马达、机器人以及泵
CN106849741A (zh) 压电致动器、层叠致动器、压电马达、机器人以及机械手
US11107969B2 (en) Piezoelectric drive device, robot, and method for driving piezoelectric drive device
JP6459291B2 (ja) 圧電駆動装置及びその駆動方法、ロボット及びその駆動方法
CN105939131A (zh) 压电驱动装置以及机器人
JP6432204B2 (ja) 圧電駆動装置、ロボット、及び、それらの駆動方法
JP2016040984A (ja) 圧電駆動装置及びその駆動方法、ロボット及びその駆動方法
CN105375816A (zh) 压电驱动装置、机器人以及它们的驱动方法
JP6641910B2 (ja) 圧電駆動装置およびその製造方法、モーター、ロボット、ならびにポンプ
JP6702447B2 (ja) 圧電駆動装置及びその駆動方法、ロボット及びその駆動方法
JP6413461B2 (ja) 圧電駆動装置及びその駆動方法、ロボット及びその駆動方法
CN107068850A (zh) 压电驱动装置、马达、机器人以及泵
JP6641911B2 (ja) 圧電駆動装置およびその製造方法、モーター、ロボット、ならびにポンプ
JP2017118599A (ja) 圧電駆動装置およびその製造方法、モーター、ロボット、ならびにポンプ

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
WD01 Invention patent application deemed withdrawn after publication
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20160302