CN105369253B - 防冲孔铝化学抛光添加剂及其应用 - Google Patents
防冲孔铝化学抛光添加剂及其应用 Download PDFInfo
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- CN105369253B CN105369253B CN201510680415.2A CN201510680415A CN105369253B CN 105369253 B CN105369253 B CN 105369253B CN 201510680415 A CN201510680415 A CN 201510680415A CN 105369253 B CN105369253 B CN 105369253B
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- polishing
- acid
- additive
- polishing additive
- anionic polymer
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F3/00—Brightening metals by chemical means
- C23F3/02—Light metals
- C23F3/03—Light metals with acidic solutions
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
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Claims (9)
Priority Applications (1)
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CN201510680415.2A CN105369253B (zh) | 2015-10-21 | 2015-10-21 | 防冲孔铝化学抛光添加剂及其应用 |
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CN201510680415.2A CN105369253B (zh) | 2015-10-21 | 2015-10-21 | 防冲孔铝化学抛光添加剂及其应用 |
Publications (2)
Publication Number | Publication Date |
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CN105369253A CN105369253A (zh) | 2016-03-02 |
CN105369253B true CN105369253B (zh) | 2017-11-17 |
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CN201510680415.2A Active CN105369253B (zh) | 2015-10-21 | 2015-10-21 | 防冲孔铝化学抛光添加剂及其应用 |
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Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN107675180A (zh) * | 2017-08-22 | 2018-02-09 | 珠海市奥美伦精细化工有限公司 | 一种两酸抛光添加剂、制备方法及其应用 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1809620A (zh) * | 2003-04-21 | 2006-07-26 | 卡伯特微电子公司 | 用于cmp的涂覆金属氧化物颗粒 |
CN101010349A (zh) * | 2004-07-02 | 2007-08-01 | 独立行政法人理化学研究所 | 含金属茂配合物的聚合催化剂组合物和使用其制备的聚合物 |
CN101959983A (zh) * | 2008-03-06 | 2011-01-26 | 株式会社Lg化学 | Cmp浆料及使用该浆料进行抛光的方法 |
CN101978019A (zh) * | 2008-03-21 | 2011-02-16 | 卡伯特微电子公司 | 用于抛光镶嵌结构中的铝/铜和钛的组合物 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005200452A (ja) * | 2004-01-13 | 2005-07-28 | Mitsui Chemicals Inc | α−オレフィン(共)重合体の製造方法 |
JP6148858B2 (ja) * | 2012-12-28 | 2017-06-14 | 花王株式会社 | 磁気ディスク基板用研磨液組成物 |
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2015
- 2015-10-21 CN CN201510680415.2A patent/CN105369253B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1809620A (zh) * | 2003-04-21 | 2006-07-26 | 卡伯特微电子公司 | 用于cmp的涂覆金属氧化物颗粒 |
CN101010349A (zh) * | 2004-07-02 | 2007-08-01 | 独立行政法人理化学研究所 | 含金属茂配合物的聚合催化剂组合物和使用其制备的聚合物 |
CN101959983A (zh) * | 2008-03-06 | 2011-01-26 | 株式会社Lg化学 | Cmp浆料及使用该浆料进行抛光的方法 |
CN101978019A (zh) * | 2008-03-21 | 2011-02-16 | 卡伯特微电子公司 | 用于抛光镶嵌结构中的铝/铜和钛的组合物 |
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Publication number | Publication date |
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CN105369253A (zh) | 2016-03-02 |
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Effective date of registration: 20180830 Address after: 226100 No. 10 Qinghua Road, three Factory Street, Haimen City, Nantong, Jiangsu Co-patentee after: Nantong Mei Tai Xin Materials Co., Ltd. Patentee after: Long shun chemical (Nantong) Co., Ltd. Co-patentee after: SHANGHAI RUITELIANG CHEMICAL CO., LTD. Address before: 201709 room 261, 2 story C, 2 building, No. 1, he Xiang Road, Baihe Town, Qingpu District, Shanghai. Patentee before: SHANGHAI LVTONG CHEMICAL TECHNOLOGY CO., LTD. |
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Effective date of registration: 20210716 Address after: 313000 Chengnan Industrial Park, Heping Town, Changxing County, Huzhou City, Zhejiang Province Patentee after: Zhejiang ruiteliang Microelectronic Materials Co.,Ltd. Address before: 226100 No. 10 Qinghua Road, three Factory Street, Haimen City, Nantong, Jiangsu Patentee before: LONGSHUN CHEMICAL (NANTONG) Co.,Ltd. Patentee before: NANTONG MEITAI NEW MATERIAL Co.,Ltd. Patentee before: SHANGHAI RUITELIANG CHEMICAL INDUSTRIAL Co.,Ltd. |