CN105340096A - 振动波驱动装置、振动波马达用定子、振动波马达、驱动控制系统、光学设备及振动波驱动装置的制造方法 - Google Patents

振动波驱动装置、振动波马达用定子、振动波马达、驱动控制系统、光学设备及振动波驱动装置的制造方法 Download PDF

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Publication number
CN105340096A
CN105340096A CN201480035744.5A CN201480035744A CN105340096A CN 105340096 A CN105340096 A CN 105340096A CN 201480035744 A CN201480035744 A CN 201480035744A CN 105340096 A CN105340096 A CN 105340096A
Authority
CN
China
Prior art keywords
electrode
vibration wave
piezoelectric element
driving
drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201480035744.5A
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English (en)
Chinese (zh)
Inventor
伊福俊博
古田达雄
武田宪一
小山信也
田中秀典
藤田知志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of CN105340096A publication Critical patent/CN105340096A/zh
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163—Motors with ring stator
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/0075—Electrical details, e.g. drive or control circuits or methods
    • H02N2/0085—Leads; Wiring arrangements
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14—Drive circuits; Control arrangements or methods
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/04—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning
    • H10N30/045—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning by polarising
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
CN201480035744.5A 2013-06-28 2014-06-23 振动波驱动装置、振动波马达用定子、振动波马达、驱动控制系统、光学设备及振动波驱动装置的制造方法 Pending CN105340096A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013-135972 2013-06-28
JP2013135972 2013-06-28
PCT/JP2014/067297 WO2014208765A1 (en) 2013-06-28 2014-06-23 Vibration wave drive device, stator for a vibration wave motor, vibration wave motor, driving control system, optical apparatus, and manufacturing method of a vibration wave driving device

Publications (1)

Publication Number Publication Date
CN105340096A true CN105340096A (zh) 2016-02-17

Family

ID=51177112

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201480035744.5A Pending CN105340096A (zh) 2013-06-28 2014-06-23 振动波驱动装置、振动波马达用定子、振动波马达、驱动控制系统、光学设备及振动波驱动装置的制造方法

Country Status (6)

Country Link
US (1) US10038394B2 (enExample)
EP (1) EP3014669B1 (enExample)
JP (1) JP6478491B2 (enExample)
KR (1) KR20160019968A (enExample)
CN (1) CN105340096A (enExample)
WO (1) WO2014208765A1 (enExample)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106206927A (zh) * 2015-05-29 2016-12-07 佳能株式会社 压电体、振动波马达和电子设备
CN108696174A (zh) * 2017-03-31 2018-10-23 精工爱普生株式会社 驱动装置及方法、机器人、输送装置、打印机及投影仪
CN109923685A (zh) * 2016-11-18 2019-06-21 Vega格里沙贝两合公司 压电发射和/或接收装置、具有这种压电发射和/或接收装置的振动传感器及制造压电发射和/或接收装置的方法
CN111463343A (zh) * 2019-01-22 2020-07-28 中国科学院上海硅酸盐研究所 一种适用于压电单晶材料的极化方法
CN111542189A (zh) * 2020-05-27 2020-08-14 维沃移动通信有限公司 电子设备
CN111650827A (zh) * 2020-05-27 2020-09-11 维沃移动通信有限公司 电子设备
CN115259838A (zh) * 2022-08-19 2022-11-01 中船重工海声科技有限公司 一种扭转振动晶环及其制作方法

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US9762992B2 (en) * 2015-05-08 2017-09-12 Kabushiki Kaisha Audio-Technica Condenser microphone unit, condenser microphone, and method of manufacturing condenser microphone unit
US10536097B2 (en) 2015-11-27 2020-01-14 Canon Kabushiki Kaisha Ultrasonic motor, drive control system, optical apparatus, and vibrator
US10516091B2 (en) 2015-11-27 2019-12-24 Canon Kabushiki Kaisha Ultrasonic motor, drive control system, optical apparatus, and vibrator
US10451833B2 (en) 2015-11-27 2019-10-22 Canon Kabushiki Kaisha Ultrasonic motor, drive control system, optical apparatus, and vibrator
US10775681B2 (en) 2015-11-27 2020-09-15 Canon Kabushiki Kaisha Ultrasonic motor, drive control system, optical apparatus, and vibrator
KR101871974B1 (ko) 2016-11-17 2018-08-02 한국과학기술원 전단형 압전 액츄에이터
JP6919237B2 (ja) * 2017-03-09 2021-08-18 Tdk株式会社 圧電組成物及び圧電素子
JP6919236B2 (ja) 2017-03-09 2021-08-18 Tdk株式会社 圧電組成物及び圧電素子
GB2561883A (en) * 2017-04-27 2018-10-31 Cambridge Touch Tech Ltd Touchscreen panel haptics
JP6619827B2 (ja) * 2018-01-18 2019-12-11 キヤノン株式会社 振動型モータ及びレンズ駆動装置
US11469689B2 (en) * 2018-06-08 2022-10-11 Canon Kabushiki Kaisha Vibration wave motor, drive control system, and optical apparatus
JP7204455B2 (ja) * 2018-11-30 2023-01-16 キヤノン株式会社 振動型アクチュエータ、雲台、および電子機器
CN114280874B (zh) * 2020-09-17 2025-10-24 新思考电机有限公司 光学部件驱动装置、照相机装置以及电子设备

Citations (6)

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JPS63194580A (ja) * 1987-02-07 1988-08-11 Olympus Optical Co Ltd 超音波モ−タ
JPH03285575A (ja) * 1990-03-30 1991-12-16 Nissan Motor Co Ltd 超音波モーター
US5471108A (en) * 1993-02-05 1995-11-28 Imra Europe Sa And Techsonic Realization process of a distribution network of electric signals, obtained distribution network and piezoelectric motor including such a network
US5563478A (en) * 1992-08-18 1996-10-08 Nikon Corporation Drive control device for an ultrasonic motor
US20010022485A1 (en) * 1997-12-25 2001-09-20 Nobumitsu Oda Ultrasonic motor
JP2013034366A (ja) * 2011-06-27 2013-02-14 Canon Inc 圧電素子、振動波モーター用ステーター、振動波モーター、駆動制御システム、光学機器および振動波モーター用ステーターの製造方法

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US5134348A (en) * 1989-04-07 1992-07-28 Canon Kabushiki Kaisha Vibration wave motor
US6288475B1 (en) * 1998-02-27 2001-09-11 Star Micronics Co., Ltd. Ultrasonic motor
US6943481B2 (en) * 2001-06-05 2005-09-13 Canon Precision Kabushiki Kaisha Vibration member and vibration wave driving apparatus
JP2005210860A (ja) 2004-01-26 2005-08-04 Nikon Corp 振動アクチュエータ及び振動アクチュエータの製造方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63194580A (ja) * 1987-02-07 1988-08-11 Olympus Optical Co Ltd 超音波モ−タ
JPH03285575A (ja) * 1990-03-30 1991-12-16 Nissan Motor Co Ltd 超音波モーター
US5563478A (en) * 1992-08-18 1996-10-08 Nikon Corporation Drive control device for an ultrasonic motor
US5471108A (en) * 1993-02-05 1995-11-28 Imra Europe Sa And Techsonic Realization process of a distribution network of electric signals, obtained distribution network and piezoelectric motor including such a network
US20010022485A1 (en) * 1997-12-25 2001-09-20 Nobumitsu Oda Ultrasonic motor
JP2013034366A (ja) * 2011-06-27 2013-02-14 Canon Inc 圧電素子、振動波モーター用ステーター、振動波モーター、駆動制御システム、光学機器および振動波モーター用ステーターの製造方法

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106206927A (zh) * 2015-05-29 2016-12-07 佳能株式会社 压电体、振动波马达和电子设备
US10263172B2 (en) 2015-05-29 2019-04-16 Canon Kabushiki Kaisha Piezoelectric body, vibration wave motor and electronic apparatus
CN106206927B (zh) * 2015-05-29 2019-05-21 佳能株式会社 压电体、振动波马达和电子设备
CN109923685A (zh) * 2016-11-18 2019-06-21 Vega格里沙贝两合公司 压电发射和/或接收装置、具有这种压电发射和/或接收装置的振动传感器及制造压电发射和/或接收装置的方法
CN109923685B (zh) * 2016-11-18 2023-11-10 Vega格里沙贝两合公司 压电发射和接收装置及其制造方法，以及振动传感器
CN108696174A (zh) * 2017-03-31 2018-10-23 精工爱普生株式会社 驱动装置及方法、机器人、输送装置、打印机及投影仪
CN108696174B (zh) * 2017-03-31 2022-09-20 精工爱普生株式会社 驱动装置及方法、机器人、输送装置、打印机及投影仪
CN111463343A (zh) * 2019-01-22 2020-07-28 中国科学院上海硅酸盐研究所 一种适用于压电单晶材料的极化方法
CN111542189A (zh) * 2020-05-27 2020-08-14 维沃移动通信有限公司 电子设备
CN111650827A (zh) * 2020-05-27 2020-09-11 维沃移动通信有限公司 电子设备
CN115259838A (zh) * 2022-08-19 2022-11-01 中船重工海声科技有限公司 一种扭转振动晶环及其制作方法
CN115259838B (zh) * 2022-08-19 2023-10-20 中船重工海声科技有限公司 一种扭转振动晶环及其制作方法

Also Published As

Publication number Publication date
US20160118914A1 (en) 2016-04-28
KR20160019968A (ko) 2016-02-22
JP2015029410A (ja) 2015-02-12
EP3014669B1 (en) 2018-01-31
WO2014208765A1 (en) 2014-12-31
EP3014669A1 (en) 2016-05-04
US10038394B2 (en) 2018-07-31
JP6478491B2 (ja) 2019-03-06

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Application publication date: 20160217