JP6478491B2 - 振動波駆動装置、振動波モーター用ステーター、振動波モーター、駆動制御システム及び光学機器、並びに振動波駆動装置の製造方法 - Google Patents

振動波駆動装置、振動波モーター用ステーター、振動波モーター、駆動制御システム及び光学機器、並びに振動波駆動装置の製造方法 Download PDF

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Publication number
JP6478491B2
JP6478491B2 JP2014131558A JP2014131558A JP6478491B2 JP 6478491 B2 JP6478491 B2 JP 6478491B2 JP 2014131558 A JP2014131558 A JP 2014131558A JP 2014131558 A JP2014131558 A JP 2014131558A JP 6478491 B2 JP6478491 B2 JP 6478491B2
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Japan
Prior art keywords
electrode
vibration wave
drive
region
driving
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JP2014131558A
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English (en)
Japanese (ja)
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JP2015029410A5 (enExample
JP2015029410A (ja
Inventor
伊福　俊博
俊博 伊福
達雄 古田
達雄 古田
武田　憲一
憲一 武田
小山　信也
信也 小山
田中　秀典
秀典 田中
知志 藤田
知志 藤田
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Canon Inc
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Canon Inc
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Priority to JP2014131558A priority Critical patent/JP6478491B2/ja
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Publication of JP2015029410A5 publication Critical patent/JP2015029410A5/ja
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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163—Motors with ring stator
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/0075—Electrical details, e.g. drive or control circuits or methods
    • H02N2/0085—Leads; Wiring arrangements
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14—Drive circuits; Control arrangements or methods
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/04—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning
    • H10N30/045—Treatments to modify a piezoelectric or electrostrictive property, e.g. polarisation characteristics, vibration characteristics or mode tuning by polarising
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2014131558A 2013-06-28 2014-06-26 振動波駆動装置、振動波モーター用ステーター、振動波モーター、駆動制御システム及び光学機器、並びに振動波駆動装置の製造方法 Active JP6478491B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014131558A JP6478491B2 (ja) 2013-06-28 2014-06-26 振動波駆動装置、振動波モーター用ステーター、振動波モーター、駆動制御システム及び光学機器、並びに振動波駆動装置の製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013135972 2013-06-28
JP2013135972 2013-06-28
JP2014131558A JP6478491B2 (ja) 2013-06-28 2014-06-26 振動波駆動装置、振動波モーター用ステーター、振動波モーター、駆動制御システム及び光学機器、並びに振動波駆動装置の製造方法

Publications (3)

Publication Number Publication Date
JP2015029410A JP2015029410A (ja) 2015-02-12
JP2015029410A5 JP2015029410A5 (enExample) 2017-07-27
JP6478491B2 true JP6478491B2 (ja) 2019-03-06

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JP2014131558A Active JP6478491B2 (ja) 2013-06-28 2014-06-26 振動波駆動装置、振動波モーター用ステーター、振動波モーター、駆動制御システム及び光学機器、並びに振動波駆動装置の製造方法

Country Status (6)

Country Link
US (1) US10038394B2 (enExample)
EP (1) EP3014669B1 (enExample)
JP (1) JP6478491B2 (enExample)
KR (1) KR20160019968A (enExample)
CN (1) CN105340096A (enExample)
WO (1) WO2014208765A1 (enExample)

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US9762992B2 (en) * 2015-05-08 2017-09-12 Kabushiki Kaisha Audio-Technica Condenser microphone unit, condenser microphone, and method of manufacturing condenser microphone unit
JP6602054B2 (ja) * 2015-05-29 2019-11-06 キヤノン株式会社 圧電体、振動子、及び、振動波モータ
US10775681B2 (en) 2015-11-27 2020-09-15 Canon Kabushiki Kaisha Ultrasonic motor, drive control system, optical apparatus, and vibrator
US10451833B2 (en) 2015-11-27 2019-10-22 Canon Kabushiki Kaisha Ultrasonic motor, drive control system, optical apparatus, and vibrator
US10516091B2 (en) 2015-11-27 2019-12-24 Canon Kabushiki Kaisha Ultrasonic motor, drive control system, optical apparatus, and vibrator
US10536097B2 (en) 2015-11-27 2020-01-14 Canon Kabushiki Kaisha Ultrasonic motor, drive control system, optical apparatus, and vibrator
KR101871974B1 (ko) 2016-11-17 2018-08-02 한국과학기술원 전단형 압전 액츄에이터
EP3542405B1 (de) * 2016-11-18 2020-10-28 VEGA Grieshaber KG Piezoelektrische sende- und/oder empfangseinrichtung, vibrationssensor mit einer solchen piezoelektrischen sende- und/oder empfangseinrichtung sowie verfahren zur herstellung einer piezoelektrischen sende- und/oder empfangseinrichtung
JP6919236B2 (ja) 2017-03-09 2021-08-18 Tdk株式会社 圧電組成物及び圧電素子
JP6919237B2 (ja) * 2017-03-09 2021-08-18 Tdk株式会社 圧電組成物及び圧電素子
JP6848614B2 (ja) * 2017-03-31 2021-03-24 セイコーエプソン株式会社 圧電駆動装置、圧電駆動装置の駆動方法、ロボット、電子部品搬送装置、プリンターおよびプロジェクター
GB2561883A (en) * 2017-04-27 2018-10-31 Cambridge Touch Tech Ltd Touchscreen panel haptics
JP6619827B2 (ja) * 2018-01-18 2019-12-11 キヤノン株式会社 振動型モータ及びレンズ駆動装置
US11469689B2 (en) 2018-06-08 2022-10-11 Canon Kabushiki Kaisha Vibration wave motor, drive control system, and optical apparatus
JP7204455B2 (ja) * 2018-11-30 2023-01-16 キヤノン株式会社 振動型アクチュエータ、雲台、および電子機器
CN111463343B (zh) * 2019-01-22 2022-03-08 中国科学院上海硅酸盐研究所 一种适用于压电单晶材料的极化方法
CN111650827A (zh) * 2020-05-27 2020-09-11 维沃移动通信有限公司 电子设备
CN111542189A (zh) * 2020-05-27 2020-08-14 维沃移动通信有限公司 电子设备
CN114280874B (zh) * 2020-09-17 2025-10-24 新思考电机有限公司 光学部件驱动装置、照相机装置以及电子设备
CN115259838B (zh) * 2022-08-19 2023-10-20 中船重工海声科技有限公司 一种扭转振动晶环及其制作方法

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JPS63194580A (ja) * 1987-02-07 1988-08-11 Olympus Optical Co Ltd 超音波モ−タ
US5134348A (en) * 1989-04-07 1992-07-28 Canon Kabushiki Kaisha Vibration wave motor
JPH03285575A (ja) 1990-03-30 1991-12-16 Nissan Motor Co Ltd 超音波モーター
US5563478A (en) * 1992-08-18 1996-10-08 Nikon Corporation Drive control device for an ultrasonic motor
FR2701340B1 (fr) 1993-02-05 1995-03-24 Imra Europe Sa Procédé de réalisation d'un circuit de distribution de signaux électriques, circuit de distribution obtenu et moteur piézoélectrique comportant un tel circuit.
JPH11191970A (ja) * 1997-12-25 1999-07-13 Asmo Co Ltd 超音波モータ
US6288475B1 (en) * 1998-02-27 2001-09-11 Star Micronics Co., Ltd. Ultrasonic motor
US6943481B2 (en) * 2001-06-05 2005-09-13 Canon Precision Kabushiki Kaisha Vibration member and vibration wave driving apparatus
JP2005210860A (ja) 2004-01-26 2005-08-04 Nikon Corp 振動アクチュエータ及び振動アクチュエータの製造方法
EP3188266B1 (en) 2011-06-27 2022-04-06 Canon Kabushiki Kaisha A method for manufacturing a stator for a piezoelectric oscillatory wave motor

Also Published As

Publication number Publication date
KR20160019968A (ko) 2016-02-22
CN105340096A (zh) 2016-02-17
EP3014669A1 (en) 2016-05-04
US10038394B2 (en) 2018-07-31
EP3014669B1 (en) 2018-01-31
JP2015029410A (ja) 2015-02-12
WO2014208765A1 (en) 2014-12-31
US20160118914A1 (en) 2016-04-28

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