CN105322953B - 振动器件、电子设备以及移动体 - Google Patents

振动器件、电子设备以及移动体 Download PDF

Info

Publication number
CN105322953B
CN105322953B CN201510440969.5A CN201510440969A CN105322953B CN 105322953 B CN105322953 B CN 105322953B CN 201510440969 A CN201510440969 A CN 201510440969A CN 105322953 B CN105322953 B CN 105322953B
Authority
CN
China
Prior art keywords
vibrating
excitation electrodes
vibration
substrate
vibrating element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201510440969.5A
Other languages
English (en)
Chinese (zh)
Other versions
CN105322953A (zh
Inventor
下平和彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of CN105322953A publication Critical patent/CN105322953A/zh
Application granted granted Critical
Publication of CN105322953B publication Critical patent/CN105322953B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/09—Elastic or damping supports
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0504—Holders or supports for bulk acoustic wave devices
    • H03H9/0528—Holders or supports for bulk acoustic wave devices consisting of clips
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/08—Holders with means for regulating temperature
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1028—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being held between spring terminals

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
CN201510440969.5A 2014-07-30 2015-07-24 振动器件、电子设备以及移动体 Expired - Fee Related CN105322953B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014-154619 2014-07-30
JP2014154619A JP6442899B2 (ja) 2014-07-30 2014-07-30 振動デバイス、電子機器、および移動体

Publications (2)

Publication Number Publication Date
CN105322953A CN105322953A (zh) 2016-02-10
CN105322953B true CN105322953B (zh) 2020-07-28

Family

ID=55181084

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510440969.5A Expired - Fee Related CN105322953B (zh) 2014-07-30 2015-07-24 振动器件、电子设备以及移动体

Country Status (3)

Country Link
US (1) US10027308B2 (enExample)
JP (1) JP6442899B2 (enExample)
CN (1) CN105322953B (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6414396B2 (ja) * 2014-06-16 2018-10-31 ミツミ電機株式会社 レンズホルダ駆動装置およびカメラ付き携帯端末
JP2019102857A (ja) * 2017-11-29 2019-06-24 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
WO2019167920A1 (ja) * 2018-02-28 2019-09-06 株式会社村田製作所 振動基板、振動素子、及び振動子
US12381532B2 (en) * 2020-10-15 2025-08-05 Texas Instruments Incorporated Bulk acoustic wave device with integrated temperature sensor and heater

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5094880A (enExample) * 1973-12-14 1975-07-28
JPH0388509A (ja) * 1989-08-31 1991-04-12 Nippon Dempa Kogyo Co Ltd 圧電振動子
WO1999065087A1 (en) * 1998-06-11 1999-12-16 Delaware Capital Formation, Inc. Oven-heated crystal resonator and oscillator assembly
CN1892231A (zh) * 2005-06-28 2007-01-10 京瓷株式会社 加速度传感器及使用该加速度传感器的磁盘装置
JP2009302701A (ja) * 2008-06-11 2009-12-24 Nippon Dempa Kogyo Co Ltd 恒温型の水晶デバイス
CN103888097A (zh) * 2012-12-19 2014-06-25 精工爱普生株式会社 振动片、振子、振荡器、电子设备以及移动体

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5094880U (enExample) * 1973-12-26 1975-08-08
JPS60174312U (ja) * 1984-04-27 1985-11-19 京セラ株式会社 水晶発振器
JP2002198739A (ja) 2000-12-26 2002-07-12 Toyo Commun Equip Co Ltd 表面実装型圧電発振器
US6984925B2 (en) * 2002-05-28 2006-01-10 Delaware Capital Formation, Inc Low acceleration sensitivity mounting structures for crystal resonators
JP4804813B2 (ja) 2005-06-24 2011-11-02 日本電波工業株式会社 圧電発振器
TW200744314A (en) 2006-05-18 2007-12-01 Taitien Electronics Co Ltd Oscillator device capable of keeping constant temperature
JP4509152B2 (ja) * 2007-08-28 2010-07-21 シャープ株式会社 薄膜圧電トランスおよびその製造方法
ATE534191T1 (de) 2009-03-09 2011-12-15 Micro Crystal Ag Oszillatorvorrichtung, die einen wärmegesteuerten piezoeletrischen quarz umfasst
US9015812B2 (en) 2012-05-22 2015-04-21 Hasso-Plattner-Institut Fur Softwaresystemtechnik Gmbh Transparent control of access invoking real-time analysis of the query history
JP6349722B2 (ja) * 2013-12-25 2018-07-04 セイコーエプソン株式会社 振動デバイス、電子機器、および移動体

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5094880A (enExample) * 1973-12-14 1975-07-28
JPH0388509A (ja) * 1989-08-31 1991-04-12 Nippon Dempa Kogyo Co Ltd 圧電振動子
WO1999065087A1 (en) * 1998-06-11 1999-12-16 Delaware Capital Formation, Inc. Oven-heated crystal resonator and oscillator assembly
CN1892231A (zh) * 2005-06-28 2007-01-10 京瓷株式会社 加速度传感器及使用该加速度传感器的磁盘装置
JP2009302701A (ja) * 2008-06-11 2009-12-24 Nippon Dempa Kogyo Co Ltd 恒温型の水晶デバイス
CN103888097A (zh) * 2012-12-19 2014-06-25 精工爱普生株式会社 振动片、振子、振荡器、电子设备以及移动体

Also Published As

Publication number Publication date
JP2016032244A (ja) 2016-03-07
CN105322953A (zh) 2016-02-10
JP6442899B2 (ja) 2018-12-26
US10027308B2 (en) 2018-07-17
US20160036411A1 (en) 2016-02-04

Similar Documents

Publication Publication Date Title
CN104242865B (zh) 电子器件、电子设备和移动体
JP6179155B2 (ja) 振動デバイス、電子機器、および移動体
JP6098377B2 (ja) 発振装置、電子機器、および移動体
JP6641859B2 (ja) 振動デバイス、発振器、電子機器、および移動体
CN105306002B (zh) 电子部件、电子部件的制造方法、电子设备以及移动体
JP6295611B2 (ja) 振動子、発振器、電子機器、および移動体
JP2017028360A (ja) 電子デバイス、電子機器、および基地局装置
CN104242860B (zh) 振动片、振子、电子器件、电子设备以及移动体
CN105322953B (zh) 振动器件、电子设备以及移动体
JP2016152607A (ja) 振動片、振動子、発振器、電子機器、および移動体
US20200309526A1 (en) Vibrator device, electronic apparatus, and vehicle
CN105306001A (zh) 电子部件、电子部件的制造方法、电子设备以及移动体
CN107070409A (zh) 振动器件及制造方法、振荡器、电子设备、移动体和基站
US10009006B2 (en) Resonator device, electronic apparatus, and moving object
US10381979B2 (en) Electronic component package, oscillator, electronic apparatus, and vehicle
US9590585B2 (en) Resonation device, oscillator, electronic apparatus, and moving object
JP2017139681A (ja) 振動デバイス、振動デバイスの製造方法、電子機器、基地局装置、および移動体
JP2015231001A (ja) 電子デバイスおよび電子デバイスの製造方法
JP2015050483A (ja) 電子デバイス、電子機器および移動体
JP6634678B2 (ja) 振動子、発振器、電子機器、および移動体
JP6465152B2 (ja) 振動片、振動子、電子デバイス、電子機器及び移動体
JP2016131279A (ja) 振動子、発振器、電子機器、および移動体
JP2016174201A (ja) 振動片、振動子、振動デバイス、発振器、電子機器、および移動体
JP2015088793A (ja) 振動子、発振器、電子機器および移動体
JP2017085264A (ja) 振動片、振動子、発振器、電子機器、および移動体

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20200728

Termination date: 20210724