CN105161399A - 高效彩色多晶太阳能电池片的处理方法及其处理装置 - Google Patents
高效彩色多晶太阳能电池片的处理方法及其处理装置 Download PDFInfo
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- CN105161399A CN105161399A CN201510477588.4A CN201510477588A CN105161399A CN 105161399 A CN105161399 A CN 105161399A CN 201510477588 A CN201510477588 A CN 201510477588A CN 105161399 A CN105161399 A CN 105161399A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02082—Cleaning product to be cleaned
- H01L21/0209—Cleaning of wafer backside
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
- Cleaning In General (AREA)
Abstract
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Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201510477588.4A CN105161399B (zh) | 2015-08-06 | 2015-08-06 | 彩色多晶太阳能电池片的处理方法及其处理装置 |
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CN201510477588.4A CN105161399B (zh) | 2015-08-06 | 2015-08-06 | 彩色多晶太阳能电池片的处理方法及其处理装置 |
Publications (2)
Publication Number | Publication Date |
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CN105161399A true CN105161399A (zh) | 2015-12-16 |
CN105161399B CN105161399B (zh) | 2018-07-17 |
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CN201510477588.4A Active CN105161399B (zh) | 2015-08-06 | 2015-08-06 | 彩色多晶太阳能电池片的处理方法及其处理装置 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111112216A (zh) * | 2020-01-08 | 2020-05-08 | 深圳市鑫承诺环保产业股份有限公司 | 一种半导体高精洗装置 |
CN112582501A (zh) * | 2020-12-14 | 2021-03-30 | 张家港博佑光电科技有限公司 | 一种硅太阳能电池rena多晶制绒加工方法 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002252201A (ja) * | 2001-02-26 | 2002-09-06 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
CN1833314A (zh) * | 2003-08-07 | 2006-09-13 | 株式会社荏原制作所 | 基片处理装置、基片处理方法和基片固定装置 |
CN101154564A (zh) * | 2006-09-26 | 2008-04-02 | 大日本网目版制造株式会社 | 基板处理装置 |
JP2011066352A (ja) * | 2009-09-18 | 2011-03-31 | Toshiba Corp | 基板の製造装置及び製造方法 |
CN202180065U (zh) * | 2011-07-26 | 2012-04-04 | 韩华新能源(启东)有限公司 | 全自动太阳能硅片扩散前清洗设备 |
JP2012199407A (ja) * | 2011-03-22 | 2012-10-18 | Dainippon Screen Mfg Co Ltd | 基板処理装置および基板処理方法 |
CN203437362U (zh) * | 2013-08-26 | 2014-02-19 | 中芯国际集成电路制造(北京)有限公司 | 晶圆清洗装置 |
CN203803852U (zh) * | 2014-01-28 | 2014-09-03 | 包头市山晟新能源有限责任公司 | 厚片硅料的清洗装置 |
CN104300037A (zh) * | 2013-07-18 | 2015-01-21 | 北京中科信电子装备有限公司 | 一种太阳能电池去除死层的方法 |
-
2015
- 2015-08-06 CN CN201510477588.4A patent/CN105161399B/zh active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002252201A (ja) * | 2001-02-26 | 2002-09-06 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
CN1833314A (zh) * | 2003-08-07 | 2006-09-13 | 株式会社荏原制作所 | 基片处理装置、基片处理方法和基片固定装置 |
CN101154564A (zh) * | 2006-09-26 | 2008-04-02 | 大日本网目版制造株式会社 | 基板处理装置 |
JP2011066352A (ja) * | 2009-09-18 | 2011-03-31 | Toshiba Corp | 基板の製造装置及び製造方法 |
JP2012199407A (ja) * | 2011-03-22 | 2012-10-18 | Dainippon Screen Mfg Co Ltd | 基板処理装置および基板処理方法 |
CN202180065U (zh) * | 2011-07-26 | 2012-04-04 | 韩华新能源(启东)有限公司 | 全自动太阳能硅片扩散前清洗设备 |
CN104300037A (zh) * | 2013-07-18 | 2015-01-21 | 北京中科信电子装备有限公司 | 一种太阳能电池去除死层的方法 |
CN203437362U (zh) * | 2013-08-26 | 2014-02-19 | 中芯国际集成电路制造(北京)有限公司 | 晶圆清洗装置 |
CN203803852U (zh) * | 2014-01-28 | 2014-09-03 | 包头市山晟新能源有限责任公司 | 厚片硅料的清洗装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111112216A (zh) * | 2020-01-08 | 2020-05-08 | 深圳市鑫承诺环保产业股份有限公司 | 一种半导体高精洗装置 |
CN112582501A (zh) * | 2020-12-14 | 2021-03-30 | 张家港博佑光电科技有限公司 | 一种硅太阳能电池rena多晶制绒加工方法 |
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CN105161399B (zh) | 2018-07-17 |
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Address after: 314415, No. 116, Xian Xia Road, Jianshan New District, Jiaxing, Zhejiang, Haining Applicant after: Zhejiang Ruixin dessy energy Polytron Technologies Inc Address before: 314415, No. 116, Xian Xia Road, Jianshan New District, Jiaxing, Zhejiang, Haining Applicant before: ZHEJIANG DESOLAR OPTOELECTRONICS CO., LTD. |
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Address after: No. 116, Xian Xia Road, Jianshan new area, Haining City, Jiaxing, Zhejiang Patentee after: Zhejiang dexirui New Energy Technology Co., Ltd Address before: 314415, No. 116, Xian Xia Road, Jianshan New District, Jiaxing, Zhejiang, Haining Patentee before: ZHEJIANG DESOLAR NEW ENERGY TECHNOLOGY Co.,Ltd. |
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Denomination of invention: Treatment method and device of color polycrystalline solar cells Effective date of registration: 20201204 Granted publication date: 20180717 Pledgee: Huangwan sub branch of Zhejiang Haining Rural Commercial Bank Co.,Ltd. Pledgor: Zhejiang dexirui New Energy Technology Co., Ltd Registration number: Y2020330001119 |