CN104833350A - Bionic hair sensor for being sensitive to flow velocity and accelerated velocity vectors and detection method thereof - Google Patents
Bionic hair sensor for being sensitive to flow velocity and accelerated velocity vectors and detection method thereof Download PDFInfo
- Publication number
- CN104833350A CN104833350A CN201510203285.3A CN201510203285A CN104833350A CN 104833350 A CN104833350 A CN 104833350A CN 201510203285 A CN201510203285 A CN 201510203285A CN 104833350 A CN104833350 A CN 104833350A
- Authority
- CN
- China
- Prior art keywords
- anchor point
- comb
- resonator
- mass
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 132
- 239000013598 vector Substances 0.000 title abstract description 8
- 239000011664 nicotinic acid Substances 0.000 title abstract 3
- 230000000694 effects Effects 0.000 claims abstract description 82
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 20
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 20
- 239000010703 silicon Substances 0.000 claims abstract description 20
- 239000011521 glass Substances 0.000 claims abstract description 15
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 239000012530 fluid Substances 0.000 claims abstract description 8
- 238000000605 extraction Methods 0.000 claims description 49
- 230000001133 acceleration Effects 0.000 claims description 27
- 230000035945 sensitivity Effects 0.000 claims description 20
- 229920000642 polymer Polymers 0.000 abstract description 2
- 230000008878 coupling Effects 0.000 abstract 1
- 238000010168 coupling process Methods 0.000 abstract 1
- 238000005859 coupling reaction Methods 0.000 abstract 1
- 238000000354 decomposition reaction Methods 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 7
- 230000008859 change Effects 0.000 description 5
- 238000013461 design Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000001939 inductive effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 244000126211 Hericium coralloides Species 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000002146 bilateral effect Effects 0.000 description 1
- 230000003592 biomimetic effect Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005421 electrostatic potential Methods 0.000 description 1
- 230000003648 hair appearance Effects 0.000 description 1
- 230000003806 hair structure Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 235000001968 nicotinic acid Nutrition 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Abstract
The invention discloses a bionic hair sensor for being sensitive to flow velocity and accelerated velocity vectors and a detection method thereof; the bionic hair sensor includes a top polymer hair, a middle annular silicon micro-sensor structure, and a bottom signal wire prepared on a glass substrate. When acted by an external accelerated velocity or fluid, the top hair drives a round mass block and an annular mass block in the annular silicon micro-sensor structure to swing; with use of a negative stiffness effect principle of an electrostatic force, and through swinging of the round mass block and the annular mass block in the annular silicon micro-sensor structure, resonant frequencies of resonators arranged around the round mass block and the annular mass block are caused to be changed, and values of the flow velocity and the accelerated velocity are detected; with use of a coupling structure of the mass block and the annular mass block, the swinging direction of the top hair is subjected to vector decomposition, and the vector direction of the accelerated velocity or the fluid velocity is detected.
Description
Technical field
The invention belongs to microelectron-mechanical field of inertia measurement, particularly relate to a kind of bionical hair sensor for flow velocity, acceleration sensitivity.
Background technology
MEMS (Micro-Machined Electro Mechanical Sensor) is the abbreviation of microelectromechanicmachine machine sensor, and it is a kind of device and instrument of micron-sized similar integrated circuit.MEMS technology is the basic technology of an extensive application prospect.With the MEMS sensor that semiconductor technology and micro-electromechanical processing technology design, manufacture, integrated level is high, and can integrate with signal processing circuit, greatly reduces production cost, obtains tremendous expansion in automobile, consumer electronics and communications electronics field.MEMS acceleration transducer can be divided into piezoelectric type, pressure resistance type, condenser type, resonant mode, heat convection type etc. by the difference of sensitivity principle.
Hair formula sensor is a kind of novel microsensor had a high potential, the hair structure of occurring in nature is copied to carry out sensor design, use bionics principle, existing MEMS technology technology is coordinated to process, the measurement to flow velocity, acceleration, angular velocity etc. can be realized, the advantage such as there is sensitivity and resolution is high, wide dynamic range, antijamming capability are strong.
In recent years, domestic and international You Duojia research institution starts the research to hair formula sensor.Professor G.J.M.Krijnen of Universiteit Twente of Holland tentatively have developed a kind of hair formula flow sensor, carries out sensitivity, can realize the sensitivity to mm/s level wind speed by the polymeric hair at top to flow velocity.But the hair formula sensor of current most of mechanism research and development can only realize the measurement of the size to physical quantity, and cannot the direction of measure physical quantities, and function singleness, structure is comparatively complicated, and practicality is poor.
Summary of the invention
Goal of the invention: in order to overcome the deficiencies in the prior art, the invention provides a kind of detection method of the bionical hair sensor for flow velocity and acceleration sensitivity, has the advantages such as highly sensitive, class digital conversion, dynamic range are large.
Technical scheme: for achieving the above object, the technical solution used in the present invention is:
For the bionical hair sensor of flow velocity and acceleration sensitivity, comprise top polymeric hair, middle part ring-type silicon micro-sensor structure and bottom glass substrate, described ring-type silicon micro-sensor structure comprises mass and comprises the annulus mass block of mass with the concyclic heart of mass, described polymeric hair is arranged on mass, and described ring-type silicon micro-sensor structure is suspended in glass substrate; The right side of described mass is provided with the first resonator, the first negative stiffness effects comb group is provided with between described first resonator and mass, the left side of described mass is provided with the second resonator, is provided with the second negative stiffness effects comb group between described second resonator and mass; On the upside of mass, by torsion beam quality of connection block and annulus mass block inner ring in first, on the downside of mass, by torsion beam quality of connection block and annulus mass block inner ring in second; On the right side of described annulus mass block, outer ring is provided with the first outer torsion beam, described first outer torsion beam is connected with the first anchor point, on the left of described annulus mass block, outer ring is provided with the second outer torsion beam, and described second outer torsion beam is connected with the second anchor point; On the upside of described annulus mass block, outer ring is provided with the 3rd resonator, the 3rd negative stiffness effects comb group is provided with between described 3rd resonator and annulus mass block, on the downside of described annulus mass block, outer ring is provided with the 4th resonator, is provided with the 4th negative stiffness effects comb group between described 4th resonator and annulus mass block.
Further, described first resonator comprises the first rectangle mass, U-shaped beam, fixed anchor point, and is successively set on the first driving comb, the first comb and the first driving detection comb on the first rectangle mass; Described first driving comb is divided into left side the first driving comb and right side first driving comb, and be symmetrical arranged about the first rectangle mass, described first comb is divided into left side the first comb and right side first comb, and be symmetrical arranged about the first rectangle mass, described first drives detection comb to be divided into left side first to drive detection comb and right side first to drive detection comb, and is symmetrical arranged about the first rectangle mass; Described first driving comb and the first comb form electrostatic plates electric capacity drives structure, described first drives detection comb and the first comb to form electrostatic plates capacitive detecting structure, described U-shaped beam and the first rectangle mass four summits are connected, described U-shaped beam is connected to corresponding fixed anchor point, be suspended on glass substrate by U-shaped beam and fixed anchor point by the first rectangle mass, described U-shaped beam can along mass or annulus mass block diametric(al) folding movement; Described first resonator, the second resonator, the 3rd resonator are all identical with the structure of the 4th resonator;
Further, described first resonator, second resonator, the driving comb of the 3rd resonator and the 4th resonator and driving detection comb are respectively equipped with driving comb frame anchor point and drive detection comb frame anchor point, described driving comb frame anchor point is divided into: driving comb anchor point on the right side of driving comb frame anchor point and first on the left of in the of on the first resonator first, driving comb anchor point on the right side of driving comb frame anchor point and second on the left of in the of on second resonator second, driving comb anchor point on the right side of driving comb frame anchor point and the 3rd on the left of in the of on 3rd resonator the 3rd, and the 4th driving comb anchor point on the right side of driving comb frame anchor point and the 4th on the left of the 4th on resonator, described driving detection comb frame anchor point is divided into: drive on the left of in the of on the first resonator first on the right side of detection comb frame anchor point and first and drive detection comb frame anchor point, drive on the left of in the of on second resonator second on the right side of detection comb frame anchor point and second and drive detection comb frame anchor point, drive on the left of in the of on 3rd resonator the 3rd on the right side of detection comb frame anchor point and the 3rd and drive detection comb frame anchor point, and drive on the right side of detection comb frame anchor point and the 4th on the left of the 4th on the 4th resonator and drive detection comb frame anchor point, described U-shaped beam is divided into the U-shaped beam of right upper portion, the U-shaped beam of lower right side, the U-shaped beam of left lower and the U-shaped beam of left upper portion, described four fixed anchor points are divided into right upper portion fixed anchor point, lower right side fixed anchor point, left lower fixed anchor point and left upper portion fixed anchor point, the U-shaped beam of described right upper portion is corresponding with right upper portion fixed anchor point to be connected, the U-shaped beam of described lower right side is corresponding with lower right side fixed anchor point to be connected, the U-shaped beam of described left lower is corresponding with left lower fixed anchor point to be connected, and the U-shaped beam of described left upper portion is corresponding with left upper portion fixed anchor point to be connected.
Further, described glass substrate comprises signal lead, and described signal lead comprises:
The anchor point electrode one be connected respectively with the first anchor point and the second anchor point, anchor point electrode two and anchor point extraction electrode; To the upper right fixed anchor point electrode one that right upper portion fixed anchor point connects, upper right fixed anchor point electrode two, upper right fixed anchor point electrode three, upper right fixed anchor point electrode four and corresponding upper right fixed anchor point extraction electrode; To the bottom right fixed anchor point electrode one that lower right side fixed anchor point connects, bottom right fixed anchor point electrode two, bottom right fixed anchor point electrode three, bottom right fixed anchor point electrode four and corresponding bottom right fixed anchor point extraction electrode; To the lower-left fixed anchor point electrode one that left lower fixed anchor point connects, lower-left fixed anchor point electrode two, lower-left fixed anchor point electrode three, lower-left fixed anchor point electrode four and corresponding lower-left fixed anchor point extraction electrode; To the upper left fixed anchor point electrode one that left upper portion fixed anchor point connects, upper left fixed anchor point electrode two, upper left fixed anchor point electrode three, upper left fixed anchor point electrode four and corresponding upper left fixed anchor point extraction electrode; To driving comb anchor point electrode on the right side of driving comb frame anchor point electrode, first on the left of in the of driving comb anchor point on the right side of driving comb frame anchor point and first on the left of in the of first is connected respectively first and corresponding first driving comb anchor point extraction electrode; To driving comb anchor point electrode on the right side of driving comb frame anchor point electrode, second on the left of in the of driving comb anchor point on the right side of driving comb frame anchor point and second on the left of in the of second is connected respectively second and corresponding second driving comb anchor point extraction electrode; To driving comb anchor point electrode on the right side of driving comb frame anchor point electrode, the 3rd on the left of in the of the driving comb anchor point on the right side of driving comb frame anchor point and the 3rd on the left of in the of the 3rd is connected respectively the 3rd and corresponding 3rd driving comb anchor point extraction electrode; To driving comb anchor point electrode on the right side of driving comb frame anchor point electrode, the 4th on the left of in the of the driving comb anchor point on the right side of driving comb frame anchor point and the 4th on the left of in the of the 4th is connected respectively the 4th and corresponding four-wheel drive comb anchor point extraction electrode; To drive on the left of in the of first drive detection comb frame anchor point to divide on the right side of detection comb frame anchor point and first to be connected first on the left of drive on the right side of detection comb frame anchor point electrode and first and drive detection comb frame anchor point electrode and corresponding first to drive detection comb frame extraction electrode; To drive on the left of in the of second drive detection comb frame anchor point to divide on the right side of detection comb frame anchor point and second to be connected second on the left of drive on the right side of detection comb frame anchor point electrode and second and drive detection comb frame anchor point electrode and corresponding second to drive detection comb frame extraction electrode; To drive on the left of in the of the 3rd drive detection comb frame anchor point to divide on the right side of detection comb frame anchor point and the 3rd to be connected the 3rd on the left of drive on the right side of detection comb frame anchor point electrode and the 3rd and drive detection comb frame anchor point electrode and the corresponding 3rd to drive detection comb frame extraction electrode; To drive on the left of in the of the 4th drive detection comb frame anchor point to divide on the right side of detection comb frame anchor point and the 4th to be connected the 4th on the left of drive on the right side of detection comb frame anchor point electrode and the 4th and drive detection comb frame anchor point electrode and corresponding four-wheel drive detection comb frame extraction electrode.
Further, the rectangle mass in described first resonator, the second resonator, the 3rd resonator and the 4th resonator does reciprocal simple harmonic motion along the diametric(al) of mass or annulus mass block under the effect of the driving comb of its both sides.
Further, the first negative stiffness effects comb group, the second negative stiffness effects comb group, the 3rd negative stiffness effects comb group with the 4th negative stiffness effects comb group are: by being separately fixed at the first resonator, the second resonator, the 3rd resonator become insert group with the comb be fixed on mass or annulus mass block with the comb of the rectangle mass of the 4th resonator.
For the detection method of the bionical hair sensor of flow velocity and acceleration sensitivity, definition mass or annulus mass block place plane are XOY plane; When outside has the fluid matasomatism being parallel to XOY plane to be parallel to the input of XOY plane acceleration in polymeric hair or have, polymeric hair can deflect, the mass that is connected with polymeric hair is driven in ring-type silicon micro-sensor structure to deflect, wherein the deflection of X-direction is delivered on mass, and mass deflects under the support along torsion beam in torsion beam and second in Y direction is arranged first; Y direction in polymeric hair deflection be deflected through quality of connection block and annulus mass block first in torsion beam and second torsion beam be delivered on annulus mass block, annulus mass block deflects under the support along the first outer torsion beam that X-direction is arranged and the second outer torsion beam; The deflection of mass or annulus mass block, can drive the deflection of the part comb in the first negative stiffness effects comb group, the second negative stiffness effects comb group or the 3rd negative stiffness effects comb group, the 4th negative stiffness effects comb group respectively.
Beneficial effect: advantage of the present invention is as follows:
(1) Biomimetic Polymers hair is adopted to carry out the input of responsive external physical amount (acceleration or flow velocity), compared to the MEMS inertia device of routine, sensing unit in the design and the polymeric hair quality shared by whole sensor, volume ratio are larger, accordingly, its sensitivity is higher, measuring accuracy is higher, antijamming capability is stronger.
(2) circular mass arranged by the concyclic heart and annulus mass block and the ring-type silicon micro-sensor main structure body formed with the torsion beam be connected between the two, achieve the resolution of vectors to outside input reason amount, only need the vector detection that single-sensor can realize physical quantity, structure is simple simultaneously, process compatible.
(3) relative to the capacitive detecting structure of routine, in the present invention's design based on the principle of the negative stiffness effects of static broach capacitance resonance machine achieve the responsive external physical amount of polymeric hair produce the frequency measurement of deflection, reduce the impact of internal parasitic capacitances on output signal, improve the antijamming capability to external noise simultaneously, output class digital signal, is convenient to follow-up signal transacting.
(4) the comb electric capacity in drives structure adopts variable area form, and slide-film damping is little, and driving amplitude is large, and quality factor are higher; Drive the comb electric capacity in detection architecture to adopt and become spaced versions, capacitance change is large, sensor highly sensitive.
Accompanying drawing explanation
Fig. 1 is the present invention for the structural representation of the bionical hair sensor of flow velocity and acceleration sensitivity.
Fig. 2 is the floor map of the first resonator.
The lead-in wire schematic diagram that Fig. 3 is the present invention in the bionical hair sensor bottom glass substrate of flow velocity and acceleration sensitivity.
Embodiment
Below in conjunction with accompanying drawing, the present invention is further described.
As shown in Figure 1, for the bionical hair sensor of flow velocity and acceleration sensitivity, comprise top polymeric hair 1, middle part ring-type silicon micro-sensor structure and bottom glass substrate, the material of shown polymeric hair 1 is SU-8, and by obtaining after being bonded in mass 2 after stretching.Described ring-type silicon micro-sensor structure comprises mass 2 and comprises the annulus mass block 3 of mass 2 with the concyclic heart of mass 2, described polymeric hair 1 is arranged on mass 2, described ring-type silicon micro-sensor structure is suspended in glass substrate, and described mass 2 is circular mass.
The right side of described mass 2 is provided with the first resonator 7-1, the first negative stiffness effects comb group 8-1 is provided with between described first resonator 7-1 and mass 2, the left side of described mass 2 is provided with the second resonator 7-2, is provided with the second negative stiffness effects comb group 8-2 between described second resonator 7-2 and mass 2.
On the upside of mass 2, by torsion beam 4-1 quality of connection block 2 and annulus mass block 3 inner ring in first, on the downside of mass 2, by torsion beam 4-2 quality of connection block 2 and annulus mass block 3 inner ring in second.
Outer ring is provided with the first outer torsion beam 5-1 on the right side of described annulus mass block 3, described first outer torsion beam 5-1 is connected with the first anchor point 6-1, outer ring is provided with the second outer torsion beam 5-2 on the left of described annulus mass block 3, described second outer torsion beam 5-2 is connected with the second anchor point 6-2.
On the upside of described annulus mass block 3, outer ring is provided with the 3rd resonator 7-3, the 3rd negative stiffness effects comb group 8-3 is provided with between described 3rd resonator 7-3 and annulus mass block 3, on the downside of described annulus mass block 3, outer ring is provided with the 4th resonator 7-4, is provided with the 4th negative stiffness effects comb group 8-4 between described 4th resonator 7-4 and annulus mass block 3.
Top polymeric hair 1 drives the mass 2 in ring-type silicon micro-sensor structure and annulus mass block 3 to swing when external acceleration or fluid matasomatism; Utilize the negative stiffness effects principle of electrostatic force, by the swing of mass 2 and annulus mass block 3 in ring-type silicon micro-sensor structure, cause the change being arranged in mass 2 and annulus mass 3 pieces resonator resonance frequency around, realize the detection to flow velocity and acceleration magnitude; By adopting mass 2 and the coupled structure of annulus mass block 3, resolution of vectors being carried out to the swaying direction of top polymeric hair 1, realizing detecting the direction vector of acceleration or fluid velocity.
Because described first resonator 7-1, the second resonator 7-2, the 3rd resonator 7-3 are all identical with the structure of the 4th resonator 7-4; The present invention for the first resonator 7-1, as Fig. 2.Described first resonator 7-1 comprises the first rectangle mass 701, U-shaped beam, fixed anchor point, and is successively set on the first driving comb, the first comb and the first driving detection comb on the first rectangle mass 701; Described first driving comb is divided into left side the first driving comb 702-1b and right side first driving comb 702-2b, and be symmetrical arranged about the first rectangle mass 701, described first comb is divided into left side the first comb 702-1a and right side first comb 702-2a, and be symmetrical arranged about the first rectangle mass 701, described first drives detection comb to be divided into left side first to drive detection comb 702-1c and right side first to drive detection comb 702-2c, and is symmetrical arranged about the first rectangle mass 701.
Described first driving comb and the first comb form electrostatic plates electric capacity drives structure, described first drives detection comb and the first comb to form electrostatic plates capacitive detecting structure, described U-shaped beam and the first rectangle mass 701 4 summits are connected, described U-shaped beam is connected to corresponding fixed anchor point, be suspended on glass substrate by U-shaped beam and fixed anchor point by the first rectangle mass 701, described U-shaped beam can along mass 2 or annulus mass block 3 diametric(al) folding movement.Described second resonator 7-2, the 3rd resonator 7-3 are identical with the first resonator 7-1 structure with the 4th resonator 7-4, and in the present invention, driving comb is divided into the four-wheel drive comb of first driving comb of the first resonator 7-1, second driving comb of the second resonator 7-2, the 3rd driving comb of the 3rd resonator 7-3 and the 4th resonator 7-4; Comb is divided into the 4th comb of first comb of the first resonator 7-1, second comb of the second resonator 7-2, the 3rd comb of the 3rd resonator 7-3 and the 4th resonator 7-4; Detection comb is driven to be divided into first of the first resonator 7-1 to drive second of detection comb, the second resonator 7-2 to drive the 3rd driving detection comb of detection comb, the 3rd resonator 7-3 and the four-wheel drive detection comb of the 4th resonator 7-4.Rectangle mass is divided into the second rectangle mass of first rectangle mass 701, the second resonator 7-2 of the first resonator 7-1, the 3rd rectangle mass of the 3rd resonator 7-3 and the rectangle mass of the 4th resonator 7-4.
Described first resonator 7-1, second resonator 7-2, the driving comb of the 3rd resonator 7-3 and the 4th resonator 7-4 and driving detection comb are respectively equipped with driving comb frame anchor point and drive detection comb frame anchor point, described driving comb frame anchor point is divided into: driving comb anchor point on the right side of driving comb frame anchor point and first on the left of in the of on the first resonator 7-1 first, driving comb anchor point on the right side of driving comb frame anchor point and second on the left of in the of on second resonator 7-2 second, driving comb anchor point on the right side of driving comb frame anchor point and the 3rd on the left of in the of on 3rd resonator 7-3 the 3rd, and the 4th driving comb anchor point on the right side of driving comb frame anchor point and the 4th on the left of the 4th on resonator 7-4.
Described driving detection comb frame anchor point is divided into: drive on the left of in the of on the first resonator 7-1 first on the right side of detection comb frame anchor point and first and drive detection comb frame anchor point, drive on the left of in the of on second resonator 7-2 second on the right side of detection comb frame anchor point and second and drive detection comb frame anchor point, drive on the left of in the of on 3rd resonator 7-3 the 3rd on the right side of detection comb frame anchor point and the 3rd and drive detection comb frame anchor point, and drive on the right side of detection comb frame anchor point and the 4th on the left of the 4th on the 4th resonator 7-4 and drive detection comb frame anchor point.
Described U-shaped beam is divided into the U-shaped beam 704-1 of right upper portion, the U-shaped beam 704-2 of lower right side, left lower U-shaped beam 704-3 and the U-shaped beam 704-4 of left upper portion, described four fixed anchor points are divided into right upper portion fixed anchor point 703-1, lower right side fixed anchor point 703-2, left lower fixed anchor point 703-3 and left upper portion fixed anchor point 703-4, described right upper portion U-shaped beam 704-1 is corresponding with right upper portion fixed anchor point 703-1 to be connected, described lower right side U-shaped beam 704-2 is corresponding with lower right side fixed anchor point 703-2 to be connected, described left lower U-shaped beam 704-3 is corresponding with left lower fixed anchor point 703-3 to be connected, described left upper portion U-shaped beam 704-4 is corresponding with left upper portion fixed anchor point 703-4 to be connected.
Described glass substrate comprises the signal lead being produced on glass substrate upper surface, and as Fig. 3, described signal lead comprises:
Anchor point electrode one 901b, anchor point electrode two 901c that are connected respectively with the first anchor point 6-1 and the second anchor point 6-2 and anchor point extraction electrode 901a.
To upper right fixed anchor point electrode one 902b that right upper portion fixed anchor point 703-1 connects, upper right fixed anchor point electrode two 902c, upper right fixed anchor point electrode three 902d, upper right fixed anchor point electrode four 902e and corresponding upper right fixed anchor point extraction electrode 902a; To bottom right fixed anchor point electrode one 905b that lower right side fixed anchor point 703-2 connects, bottom right fixed anchor point electrode two 905c, bottom right fixed anchor point electrode three 905d, bottom right fixed anchor point electrode four 905e and corresponding bottom right fixed anchor point extraction electrode 905a; To lower-left fixed anchor point electrode one 908b that left lower fixed anchor point 703-3 connects, lower-left fixed anchor point electrode two 908c, lower-left fixed anchor point electrode three 908d, lower-left fixed anchor point electrode four 908e and corresponding lower-left fixed anchor point extraction electrode 908a; To upper left fixed anchor point electrode one 911b that left upper portion fixed anchor point 703-4 connects, upper left fixed anchor point electrode two 911c, upper left fixed anchor point electrode three 911d, upper left fixed anchor point electrode four 911e and corresponding upper left fixed anchor point extraction electrode 911a.
To driving comb anchor point electrode 904c on the right side of driving comb frame anchor point electrode 904b, first on the left of in the of driving comb anchor point on the right side of driving comb frame anchor point and first on the left of in the of first is connected respectively first and corresponding first driving comb anchor point extraction electrode 904a; To driving comb anchor point electrode 907c on the right side of driving comb frame anchor point electrode 907b, second on the left of in the of driving comb anchor point on the right side of driving comb frame anchor point and second on the left of in the of second is connected respectively second and corresponding second driving comb anchor point extraction electrode 907a; To driving comb anchor point electrode 910c on the right side of driving comb frame anchor point electrode 910b, the 3rd on the left of in the of the driving comb anchor point on the right side of driving comb frame anchor point and the 3rd on the left of in the of the 3rd is connected respectively the 3rd and corresponding 3rd driving comb anchor point extraction electrode 910a; To driving comb anchor point electrode 913c on the right side of driving comb frame anchor point electrode 913b, the 4th on the left of in the of the driving comb anchor point on the right side of driving comb frame anchor point and the 4th on the left of in the of the 4th is connected respectively the 4th and corresponding four-wheel drive comb anchor point extraction electrode 913a.
To drive on the left of in the of first drive detection comb frame anchor point to divide on the right side of detection comb frame anchor point and first to be connected first on the left of drive on the right side of detection comb frame anchor point electrode 903b and first and drive detection comb frame anchor point electrode 903c and corresponding first to drive detection comb frame extraction electrode 903a; To drive on the left of in the of second drive detection comb frame anchor point to divide on the right side of detection comb frame anchor point and second to be connected second on the left of drive on the right side of detection comb frame anchor point electrode 906b and second and drive detection comb frame anchor point electrode 906c and corresponding second to drive detection comb frame extraction electrode 906a; To drive on the left of in the of the 3rd drive detection comb frame anchor point to divide on the right side of detection comb frame anchor point and the 3rd to be connected the 3rd on the left of drive on the right side of detection comb frame anchor point electrode 909b and the 3rd and drive detection comb frame anchor point electrode 909c and the corresponding 3rd to drive detection comb frame extraction electrode 909a; To drive on the left of in the of the 4th drive detection comb frame anchor point to divide on the right side of detection comb frame anchor point and the 4th to be connected the 4th on the left of drive on the right side of detection comb frame anchor point electrode 912b and the 4th and drive detection comb frame anchor point electrode 912c and corresponding four-wheel drive detection comb frame extraction electrode 912a.
Rectangle mass in described first resonator 7-1, the second resonator 7-2, the 3rd resonator 7-3 and the 4th resonator 7-4 does reciprocal simple harmonic motion along the diametric(al) of mass 2 or annulus mass block 3 under the effect of the driving comb of its both sides.
First negative stiffness effects comb group 8-1, the second negative stiffness effects comb group 8-2, the 3rd negative stiffness effects comb group 8-3 with the 4th negative stiffness effects comb group 8-4 are: by being separately fixed at the first resonator 7-1, the second resonator 7-2, the 3rd resonator 7-3 becomes insert group with the comb be fixed on mass 2 or annulus mass block 3 with the comb of the rectangle mass of the 4th resonator 7-4.
Definition mass 2 or annulus mass block 3 place plane are XOY plane;
When outside has the fluid matasomatism being parallel to XOY plane to be parallel to the input of XOY plane acceleration in polymeric hair 1 or have, polymeric hair 1 can deflect, the mass 2 that is connected with polymeric hair 1 is driven in ring-type silicon micro-sensor structure to deflect, wherein the deflection of X-direction is delivered on mass 2, and mass 2 deflects under the support along torsion beam 4-2 in torsion beam 4-1 and second in Y direction is arranged first.
The torsion beam 4-2 in torsion beam 4-1 and second that to be deflected through in quality of connection block 2 and first of annulus mass block 3 of the Y direction during polymeric hair 1 deflects is delivered on annulus mass block 3, and annulus mass block 3 deflects under the support along the first outer torsion beam 5-1 that X-direction is arranged and the second outer torsion beam 5-2.
The deflection of mass 2 or annulus mass block 3, can drive the deflection of the part comb in the first negative stiffness effects comb group 8-1, the second negative stiffness effects comb group 8-2 or the 3rd negative stiffness effects comb group 8-3, the 4th negative stiffness effects comb group 8-4 respectively.
Detection method specifically adopts bilateral quiet electrically driven (operated) mode to drive each resonator works.Below for the first resonator 7-1, upper right fixed anchor point extraction electrode 902a applies the AC drive voltage with identical direct current biasing, is fixed on the left side first driving comb 702-1b on comb frame, right side first driving comb 702-2b and can applies electrostatic force to the left side first comb 702-1a be fixed on the first rectangle mass 701 and right side first comb 702-2a.First rectangle mass 701 is under the drive being fixed on the left side first driving comb 702-1b of its both sides, right side first driving comb 702-2b, under the support of right upper portion U-shaped beam 704-1, lower right side U-shaped beam 704-2, left lower U-shaped beam 704-3 and the U-shaped beam 704-4 of left upper portion, the diametric(al) along circular mass 2 does reciprocal simple harmonic motion; The electrostatic driving force that electrostatic plates electric capacity drives structure is subject at driving direction is:
In formula, n is the movable comb number of teeth of the first resonator 7-1, and ε is specific inductive capacity, and h is the thickness of its structure, d
0for its comb tooth spacing, V
dfor the DC offset voltage of driving voltage, V
afor alternating voltage, ω
dfor the angular frequency of alternating voltage.
First resonator 7-1, second resonator 7-2, 3rd resonator 7-3, rectangle mass in 4th resonator 7-4 is respectively by corresponding first driving comb anchor point extraction electrode 904a separately, second driving comb anchor point extraction electrode 907a, 3rd driving comb anchor point extraction electrode 910a and four-wheel drive comb anchor point extraction electrode 913a, and apply identical AC drive voltage respectively by four driving circuits that can be independently controlled, make the first resonator 7-1, second resonator 7-2, 3rd resonator 7-3, the rectangle mass of the correspondence in the 4th resonator 7-4 all does simple harmonic motion under the effect of electrostatic driving force.
Driving detection comb structure in first resonator 7-1, the second resonator 7-2, the 3rd resonator 7-3, the 4th resonator 7-4, object is the frequency utilizing comb electric capacity Differential Detection principle to detect the simple harmonic motion of rectangle mass, feed back to the first driving comb anchor point extraction electrode 904a, the second driving comb anchor point extraction electrode 907a, the 3rd driving comb anchor point extraction electrode 910a and four-wheel drive comb anchor point extraction electrode 913a simultaneously, it is made to adjust, realize the closed-loop control to each rectangle mass, rectangle mass is operated in resonance frequency.
For the first resonator 7-1, when the first rectangle mass 701 carries out simple harmonic motion along driving direction under first drives detection comb to promote, in the first driving detection comb, the capacitance change of comb is:
In formula, n
1for the single side comb teeth number of movable first driving detection comb, h is the thickness of its comb, and ε is specific inductive capacity, and d is its comb gap, and Δ x is drive displacement.
Electrostatic potential applies via anchor point extraction electrode 901a, due to the good electric conductivity of monocrystalline silicon, then mass 2 and annulus mass block 3 all can with identical voltages, then the first negative stiffness effects comb group 8-1, second negative stiffness effects comb group 8-2, with mass 2 in 3rd negative stiffness effects comb group 8-3 and the 4th negative stiffness effects comb group 8-4, the comb that annulus mass block 3 is connected also can with identical voltage, according to electrostatic negative stiffness effect principle, first negative stiffness effects comb group 8-1, second negative stiffness effects comb group 8-2, in 3rd negative stiffness effects comb group 8-3 and the 4th negative stiffness effects comb group 8-4 respectively with the first resonator 7-1, second resonator 7-2, 3rd resonator 7-3, the natural frequency of the part be directly connected with it in the comb that the 4th resonator 7-4 is connected and whole resonator structure can reduce, putting before this, first resonator 7-1, second resonator 7-2, 3rd resonator 7-3, simple harmonic oscillation is carried out with respective natural frequency under the driving comb of the resonance inside of the rectangle mass in the 4th resonator 7-4 respectively all belonging to separately and the effect of driving detection comb.
When outside has the fluid matasomatism being parallel to XOY plane to be parallel to the input of XOY plane acceleration in polymeric hair 1 or have, polymeric hair 1 can deflect, drive the circular mass 2 be connected with polymeric hair 1 in ring-type silicon micro-sensor structure to deflect, wherein the deflection of X-direction can cause mass 2 to deflect under the support along torsion beam 4-2 in torsion beam 4-1 and second in Y direction is arranged first; The deflection of the Y direction during polymeric hair 1 deflects can not impact mass 2 deflection in the X-axis direction, but being delivered on annulus mass block 3 by torsion beam 4-2 in torsion beam 4-1 and second in quality of connection block 2 and first of annulus mass block 3, annulus mass block 3 deflects under the support along the first outer torsion beam 5-1 that X-direction is arranged and the second outer torsion beam 5-2; The deflection of mass 2 or annulus mass block 3 can drive the deflection of the comb be connected with mass 2 or annulus mass block 3 be fixed in the first negative stiffness effects comb group 8-1, the second negative stiffness effects comb group 8-2 on circular mass 2 or annulus mass block 3 or the 3rd negative stiffness effects comb group 8-3, the 4th negative stiffness effects comb group 8-4 respectively.First negative stiffness effects comb group 8-1, second negative stiffness effects comb group 8-2, in 3rd negative stiffness effects comb group 8-3 and the 4th negative stiffness effects comb group 8-4, the comb be fixed on mass 2 or annulus mass block 3 can be followed and be deflected, and the first negative stiffness effects comb group 8-1, second negative stiffness effects comb group 8-2, in 3rd negative stiffness effects comb group 8-3 and the 4th negative stiffness effects comb group 8-4, the comb be fixed on rectangle mass can not follow deflection, by the first negative stiffness effects comb group 8-1, second negative stiffness effects comb group 8-2, the comb on mass 2 or annulus mass block 3 and the first negative stiffness effects comb group 8-1 is fixed in 3rd negative stiffness effects comb group 8-3 and the 4th negative stiffness effects comb group 8-4, second negative stiffness effects comb group 8-2, the overlapping area being fixed on the capacitor plate that the comb on rectangle mass is formed in 3rd negative stiffness effects comb group 8-3 and the 4th negative stiffness effects comb group 8-4 changes.Overlapping area between this brief acceleration, flow rate detection comb changes, therefore the electrostatic force coming from the comb be fixed on mass 2 or annulus mass block 3 in the first negative stiffness effects comb group 8-1, the second negative stiffness effects comb group 8-2, the 3rd negative stiffness effects comb group 8-3 and the 4th negative stiffness effects comb group 8-4 suffered by the comb be connected with each resonator changes, according to electrostatic negative stiffness effect, because electrostatic force changes, so the equivalent negative stiffness change produced, the natural frequency of middle part ring-type silicon micro-sensor structure changes.When there is electrostatic negative stiffness, resonance frequency becomes:
Wherein, k is the former mechanical stiffness of comb, k
efor the comb mechanical stiffness under the effect of electrostatic force negative stiffness effects, f
efor the resonance frequency under the effect of electrostatic force negative stiffness effects.
By driving detection comb to the detection driving resonance frequency change, thus the angle that hair deflects can be drawn, by can be calculated the size knowing acceleration or flow rate speed.
The above is only the preferred embodiment of the present invention; be noted that for those skilled in the art; under the premise without departing from the principles of the invention, can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (7)
1. for the bionical hair sensor of flow velocity and acceleration sensitivity, comprise top polymeric hair (1), middle part ring-type silicon micro-sensor structure and bottom glass substrate, it is characterized in that: described ring-type silicon micro-sensor structure comprises mass (2) and comprises the annulus mass block (3) of mass (2) with mass (2) the concyclic heart, described polymeric hair (1) is arranged on mass (2), and described ring-type silicon micro-sensor structure is suspended in glass substrate;
The right side of described mass (2) is provided with the first resonator (7-1), the first negative stiffness effects comb group (8-1) is provided with between described first resonator (7-1) and mass (2), the left side of described mass (2) is provided with the second resonator (7-2), is provided with the second negative stiffness effects comb group (8-2) between described second resonator (7-2) and mass (2);
In mass (2) upside, by torsion beam (4-1) quality of connection block (2) and annulus mass block (3) inner ring in first, in mass (2) downside, by torsion beam (4-2) quality of connection block (2) and annulus mass block (3) inner ring in second;
Outer ring is provided with the first outer torsion beam (5-1) on described annulus mass block (3) right side, described first outer torsion beam (5-1) is connected with the first anchor point (6-1), outer ring is provided with the second outer torsion beam (5-2) in described annulus mass block (3) left side, and described second outer torsion beam (5-2) is connected with the second anchor point (6-2);
Outer ring, described annulus mass block (3) upside is provided with the 3rd resonator (7-3), the 3rd negative stiffness effects comb group (8-3) is provided with between described 3rd resonator (7-3) and annulus mass block (3), outer ring, described annulus mass block (3) downside is provided with the 4th resonator (7-4), is provided with the 4th negative stiffness effects comb group (8-4) between described 4th resonator (7-4) and annulus mass block (3).
2. according to claim 1 for the bionical hair sensor of flow velocity and acceleration sensitivity, it is characterized in that: described first resonator (7-1) comprises the first rectangle mass (701), U-shaped beam, fixed anchor point, and be successively set on the first driving comb, the first comb and the first driving detection comb on the first rectangle mass (701), described first driving comb is divided into left side the first driving comb (702-1b) and right side first driving comb (702-2b), and be symmetrical arranged about the first rectangle mass (701), described first comb is divided into left side the first comb (702-1a) and right side first comb (702-2a), and be symmetrical arranged about the first rectangle mass (701), described first drives detection comb to be divided into left side first to drive detection comb (702-1c) and right side first to drive detection comb (702-2c), and be symmetrical arranged about the first rectangle mass (701),
Described first driving comb and the first comb form electrostatic plates electric capacity drives structure, described first drives detection comb and the first comb to form electrostatic plates capacitive detecting structure, described U-shaped beam and the first rectangle mass (701) four summits are connected, described U-shaped beam is connected to corresponding fixed anchor point, be suspended on glass substrate by U-shaped beam and fixed anchor point by the first rectangle mass (701), described U-shaped beam can along mass (2) or annulus mass block (3) diametric(al) folding movement;
Described first resonator (7-1), the second resonator (7-2), the 3rd resonator (7-3) are all identical with the structure of the 4th resonator (7-4).
3. according to claim 2 for the bionical hair sensor of flow velocity and acceleration sensitivity, it is characterized in that: described first resonator (7-1), second resonator (7-2), the driving comb of the 3rd resonator (7-3) and the 4th resonator (7-4) and driving detection comb are respectively equipped with driving comb frame anchor point and drive detection comb frame anchor point, described driving comb frame anchor point is divided into: driving comb anchor point on the right side of driving comb frame anchor point and first on the left of in the of on the first resonator (7-1) first, driving comb anchor point on the right side of driving comb frame anchor point and second on the left of in the of on second resonator (7-2) second, driving comb anchor point on the right side of driving comb frame anchor point and the 3rd on the left of in the of on 3rd resonator (7-3) the 3rd, and the 4th driving comb anchor point on the right side of driving comb frame anchor point and the 4th on the left of the 4th on resonator (7-4),
Described driving detection comb frame anchor point is divided into: drive on the left of in the of on the first resonator (7-1) first on the right side of detection comb frame anchor point and first and drive detection comb frame anchor point, drive on the left of in the of on second resonator (7-2) second on the right side of detection comb frame anchor point and second and drive detection comb frame anchor point, drive on the left of in the of on 3rd resonator (7-3) the 3rd on the right side of detection comb frame anchor point and the 3rd and drive detection comb frame anchor point, and drive on the right side of detection comb frame anchor point and the 4th on the left of the 4th on the 4th resonator (7-4) and drive detection comb frame anchor point;
Described U-shaped beam is divided into the U-shaped beam of right upper portion (704-1), the U-shaped beam of lower right side (704-2), the U-shaped beam of left lower (704-3) and the U-shaped beam of left upper portion (704-4), described four fixed anchor points are divided into right upper portion fixed anchor point (703-1), lower right side fixed anchor point (703-2), left lower fixed anchor point (703-3) and left upper portion fixed anchor point (703-4), the U-shaped beam of described right upper portion (704-1) is corresponding with right upper portion fixed anchor point (703-1) to be connected, the U-shaped beam of described lower right side (704-2) is corresponding with lower right side fixed anchor point (703-2) to be connected, the U-shaped beam of described left lower (704-3) is corresponding with left lower fixed anchor point (703-3) to be connected, the U-shaped beam of described left upper portion (704-4) is corresponding with left upper portion fixed anchor point (703-4) to be connected.
4., according to claim 3 for the bionical hair sensor of flow velocity and acceleration sensitivity, it is characterized in that: described glass substrate comprises signal lead, described signal lead comprises:
The anchor point electrode one (901b) be connected respectively with the first anchor point (6-1) and the second anchor point (6-2), anchor point electrode two (901c) and anchor point extraction electrode (901a);
To the upper right fixed anchor point electrode one (902b) that right upper portion fixed anchor point (703-1) connects, upper right fixed anchor point electrode two (902c), upper right fixed anchor point electrode three (902d), upper right fixed anchor point electrode four (902e) and corresponding upper right fixed anchor point extraction electrode (902a); To the bottom right fixed anchor point electrode one (905b) that lower right side fixed anchor point (703-2) connects, bottom right fixed anchor point electrode two (905c), bottom right fixed anchor point electrode three (905d), bottom right fixed anchor point electrode four (905e) and corresponding bottom right fixed anchor point extraction electrode (905a); To the lower-left fixed anchor point electrode one (908b) that left lower fixed anchor point (703-3) connects, lower-left fixed anchor point electrode two (908c), lower-left fixed anchor point electrode three (908d), lower-left fixed anchor point electrode four (908e) and corresponding lower-left fixed anchor point extraction electrode (908a); To the upper left fixed anchor point electrode one (911b) that left upper portion fixed anchor point (703-4) connects, upper left fixed anchor point electrode two (911c), upper left fixed anchor point electrode three (911d), upper left fixed anchor point electrode four (911e) and corresponding upper left fixed anchor point extraction electrode (911a);
To driving comb anchor point electrode (904c) on the right side of driving comb frame anchor point electrode (904b), first on the left of in the of driving comb anchor point on the right side of driving comb frame anchor point and first on the left of in the of first is connected respectively first and corresponding first driving comb anchor point extraction electrode (904a); To driving comb anchor point electrode (907c) on the right side of driving comb frame anchor point electrode (907b), second on the left of in the of driving comb anchor point on the right side of driving comb frame anchor point and second on the left of in the of second is connected respectively second and corresponding second driving comb anchor point extraction electrode (907a); To driving comb anchor point electrode (910c) on the right side of driving comb frame anchor point electrode (910b), the 3rd on the left of in the of the driving comb anchor point on the right side of driving comb frame anchor point and the 3rd on the left of in the of the 3rd is connected respectively the 3rd and corresponding 3rd driving comb anchor point extraction electrode (910a); To driving comb anchor point electrode (913c) and corresponding four-wheel drive comb anchor point extraction electrode (913a) on the right side of driving comb frame anchor point electrode (913b), the 4th on the left of in the of the driving comb anchor point on the right side of driving comb frame anchor point and the 4th on the left of in the of the 4th is connected respectively the 4th;
To drive on the left of in the of first drive detection comb frame anchor point to divide on the right side of detection comb frame anchor point and first to be connected first on the left of drive on the right side of detection comb frame anchor point electrode (903b) and first and drive detection comb frame anchor point electrode (903c) and corresponding first to drive detection comb frame extraction electrode (903a); To drive on the left of in the of second drive detection comb frame anchor point to divide on the right side of detection comb frame anchor point and second to be connected second on the left of drive on the right side of detection comb frame anchor point electrode (906b) and second and drive detection comb frame anchor point electrode (906c) and corresponding second to drive detection comb frame extraction electrode (906a); To drive on the left of in the of the 3rd drive detection comb frame anchor point to divide on the right side of detection comb frame anchor point and the 3rd to be connected the 3rd on the left of drive on the right side of detection comb frame anchor point electrode (909b) and the 3rd and drive detection comb frame anchor point electrode (909c) and the corresponding 3rd to drive detection comb frame extraction electrode (909a); To drive on the left of in the of the 4th drive detection comb frame anchor point to divide on the right side of detection comb frame anchor point and the 4th to be connected the 4th on the left of drive on the right side of detection comb frame anchor point electrode (912b) and the 4th and drive detection comb frame anchor point electrode (912c) and corresponding four-wheel drive detection comb frame extraction electrode (912a).
5., according to claim 2 for the bionical hair sensor of flow velocity and acceleration sensitivity, it is characterized in that: the rectangle mass in described first resonator (7-1), the second resonator (7-2), the 3rd resonator (7-3) and the 4th resonator (7-4) does reciprocal simple harmonic motion along the diametric(al) of mass (2) or annulus mass block (3) under the effect of the driving comb of its both sides.
6. according to claim 1 for the bionical hair sensor of flow velocity and acceleration sensitivity, it is characterized in that: the first negative stiffness effects comb group (8-1), second negative stiffness effects comb group (8-2), 3rd negative stiffness effects comb group (8-3) and the 4th negative stiffness effects comb group (8-4) are: by being separately fixed at the first resonator (7-1), second resonator (7-2), 3rd resonator (7-3) becomes insert group with the comb be fixed on mass (2) or annulus mass block (3) with the comb of the rectangle mass of the 4th resonator (7-4).
7. for the detection method of the bionical hair sensor of flow velocity and acceleration sensitivity, it is characterized in that: definition mass (2) or annulus mass block (3) place plane are XOY plane;
When outside has the fluid matasomatism being parallel to XOY plane to be parallel to the input of XOY plane acceleration in polymeric hair (1) or have, polymeric hair (1) can deflect, the mass (2) that is connected with polymeric hair (1) is driven in ring-type silicon micro-sensor structure to deflect, wherein the deflection of X-direction is delivered on mass (2), and mass (2) deflects under the support along torsion beam (4-2) in torsion beam (4-1) and second in Y direction is arranged first;
Y direction in polymeric hair (1) deflection be deflected through quality of connection block (2) and annulus mass block (3) first in torsion beam (4-1) and second torsion beam (4-2) be delivered on annulus mass block (3), annulus mass block (3) deflects under the support along the first outer torsion beam (5-1) that X-direction is arranged and the second outer torsion beam (5-2);
The deflection of mass (2) or annulus mass block (3), can drive the deflection of the part comb in the first negative stiffness effects comb group (8-1), the second negative stiffness effects comb group (8-2) or the 3rd negative stiffness effects comb group (8-3), the 4th negative stiffness effects comb group (8-4) respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510203285.3A CN104833350B (en) | 2015-04-24 | 2015-04-24 | For flow velocity and the sensitive bionical hair sensor of acceleration and detection method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510203285.3A CN104833350B (en) | 2015-04-24 | 2015-04-24 | For flow velocity and the sensitive bionical hair sensor of acceleration and detection method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104833350A true CN104833350A (en) | 2015-08-12 |
| CN104833350B CN104833350B (en) | 2017-05-31 |
Family
ID=53811387
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510203285.3A Expired - Fee Related CN104833350B (en) | 2015-04-24 | 2015-04-24 | For flow velocity and the sensitive bionical hair sensor of acceleration and detection method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104833350B (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106679514A (en) * | 2016-12-05 | 2017-05-17 | 南京航空航天大学 | Shell sensor assembly for perceiving spacial airflow changes through piezoelectric cilia |
| CN107421526A (en) * | 2017-07-04 | 2017-12-01 | 东南大学 | A kind of bionical twin shaft hair sensor device |
| CN107655465A (en) * | 2017-08-28 | 2018-02-02 | 东南大学 | The bionical hair flow velocity of resonant mode, the acceleration microsensor of two-stage lever amplification |
| CN108387755A (en) * | 2018-02-05 | 2018-08-10 | 东南大学 | Resonant mode flow sensor measure and control device based on hair structure |
| CN110850111A (en) * | 2019-10-09 | 2020-02-28 | 东南大学 | Rotary array device based on bionic resonance hair sensor |
| CN110850110A (en) * | 2019-10-09 | 2020-02-28 | 东南大学 | Pipeline side line array device based on bionic resonance hair sensor |
| CN111208316A (en) * | 2020-02-24 | 2020-05-29 | 吉林大学 | Bionic airflow omnidirectional sensing flexible sensor and preparation method thereof |
| CN111208315A (en) * | 2020-02-24 | 2020-05-29 | 吉林大学 | Bionic hairy airflow velocity sensor and preparation method thereof |
| CN111521170A (en) * | 2020-05-22 | 2020-08-11 | 东南大学 | Master-slave mass micro mechanical hair gyroscope for driving amplitude amplification |
| CN112180116A (en) * | 2020-09-09 | 2021-01-05 | 西安交通大学 | Flexible bionic lateral line sensor of integrated IPMC sensing structure |
| CN112504498A (en) * | 2021-02-03 | 2021-03-16 | 南京高华科技股份有限公司 | Annular structure temperature sensor |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102749479A (en) * | 2012-06-18 | 2012-10-24 | 东南大学 | Vertical axis silicon micro resonant mode accelerometer based on negative stiffness effect |
| CN103900548A (en) * | 2014-04-22 | 2014-07-02 | 东南大学 | Silicon micro full-decoupling dual-mass dual-line vibratory gyroscope |
| US20140283604A1 (en) * | 2012-10-26 | 2014-09-25 | The Regents Of The University Of Michigan | Three-dimensional microelectromechanical systems structure |
| CN104459181A (en) * | 2014-12-31 | 2015-03-25 | 东南大学 | Bionic hair sensor for flow velocity, acceleration and angular velocity sensitivity |
-
2015
- 2015-04-24 CN CN201510203285.3A patent/CN104833350B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102749479A (en) * | 2012-06-18 | 2012-10-24 | 东南大学 | Vertical axis silicon micro resonant mode accelerometer based on negative stiffness effect |
| US20140283604A1 (en) * | 2012-10-26 | 2014-09-25 | The Regents Of The University Of Michigan | Three-dimensional microelectromechanical systems structure |
| CN103900548A (en) * | 2014-04-22 | 2014-07-02 | 东南大学 | Silicon micro full-decoupling dual-mass dual-line vibratory gyroscope |
| CN104459181A (en) * | 2014-12-31 | 2015-03-25 | 东南大学 | Bionic hair sensor for flow velocity, acceleration and angular velocity sensitivity |
Non-Patent Citations (3)
| Title |
|---|
| A.M.K.DAGAMSEH: "From nature to MEMS: towards the detection-limit of crickets" hair sensors", 《PROC.OF SPIE》 * |
| GIJS J.M.KRIJNEN 等: "MEMS based hair flow-sensors as model systems for acoustic perception studies", 《NANOTECHNOLOGY》 * |
| 杨波 等: "利用负刚度效应调谐的硅调谐式陀螺仪", 《光学 精密工程》 * |
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106679514B (en) * | 2016-12-05 | 2018-03-13 | 南京航空航天大学 | A kind of piezoelectricity cilium aware space air-flow changes bullet sensor cluster |
| CN106679514A (en) * | 2016-12-05 | 2017-05-17 | 南京航空航天大学 | Shell sensor assembly for perceiving spacial airflow changes through piezoelectric cilia |
| CN107421526A (en) * | 2017-07-04 | 2017-12-01 | 东南大学 | A kind of bionical twin shaft hair sensor device |
| CN107421526B (en) * | 2017-07-04 | 2020-05-05 | 东南大学 | Bionic double-shaft hair sensor device |
| CN107655465B (en) * | 2017-08-28 | 2020-08-14 | 东南大学 | Two-stage lever amplification resonant bionic hair flow velocity and acceleration micro-sensor |
| CN107655465A (en) * | 2017-08-28 | 2018-02-02 | 东南大学 | The bionical hair flow velocity of resonant mode, the acceleration microsensor of two-stage lever amplification |
| CN108387755A (en) * | 2018-02-05 | 2018-08-10 | 东南大学 | Resonant mode flow sensor measure and control device based on hair structure |
| CN110850111A (en) * | 2019-10-09 | 2020-02-28 | 东南大学 | Rotary array device based on bionic resonance hair sensor |
| CN110850110A (en) * | 2019-10-09 | 2020-02-28 | 东南大学 | Pipeline side line array device based on bionic resonance hair sensor |
| CN110850111B (en) * | 2019-10-09 | 2021-03-23 | 东南大学 | Rotary array device based on bionic resonance hair sensor |
| CN111208316A (en) * | 2020-02-24 | 2020-05-29 | 吉林大学 | Bionic airflow omnidirectional sensing flexible sensor and preparation method thereof |
| CN111208315A (en) * | 2020-02-24 | 2020-05-29 | 吉林大学 | Bionic hairy airflow velocity sensor and preparation method thereof |
| CN111521170A (en) * | 2020-05-22 | 2020-08-11 | 东南大学 | Master-slave mass micro mechanical hair gyroscope for driving amplitude amplification |
| CN112180116A (en) * | 2020-09-09 | 2021-01-05 | 西安交通大学 | Flexible bionic lateral line sensor of integrated IPMC sensing structure |
| CN112180116B (en) * | 2020-09-09 | 2021-11-19 | 西安交通大学 | Flexible bionic lateral line sensor of integrated IPMC sensing structure |
| CN112504498A (en) * | 2021-02-03 | 2021-03-16 | 南京高华科技股份有限公司 | Annular structure temperature sensor |
| CN112504498B (en) * | 2021-02-03 | 2021-04-20 | 南京高华科技股份有限公司 | Annular structure temperature sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104833350B (en) | 2017-05-31 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104833350A (en) | Bionic hair sensor for being sensitive to flow velocity and accelerated velocity vectors and detection method thereof | |
| CN104459181B (en) | A kind of bionical hair sensor sensitive for flow velocity, acceleration and angular speed | |
| TWI507347B (en) | Micromechanical sensor element | |
| CN106629571A (en) | Weakly coupled MEMS resonance type accelerometer based on mode localization effect | |
| CN104374953A (en) | Split type differential silicon micro resonant accelerometer | |
| CN102162756B (en) | Fully symmetric miniature silicon resonant pressure sensor | |
| CN104121984B (en) | A kind of high-sensitivity resonance formula MEMS vector hydrophone structure | |
| CN102759637B (en) | MEMS (micro electro mechanical system) triaxial acceleration transducer and manufacture method thereof | |
| CN106153241B (en) | A kind of MEMS capacitive pressure sensor | |
| CN108375371A (en) | A kind of four-degree-of-freedom weak coupling resonance type accelerometer based on mode localization effect | |
| CN101216498A (en) | Dual spindle differential capacitance type micromechanical accelerameter | |
| CN103900546A (en) | Micro-electromechanical six-axis inertial sensor | |
| CN102647657B (en) | Monolithic integrated MEMS (Micro-electromechanical Systems) piezoresistive ultrasonic sensor | |
| CN110146725A (en) | Resonance micro electromechanical acceleration transducer and accelerometer | |
| CN105182005B (en) | A kind of accelerometer | |
| CN101759136B (en) | Fully-decoupled vibrating micromechanical gyroscope | |
| CN101089624A (en) | Electric tuning resonance differential frequency accelerator | |
| CN102901520B (en) | Method for improving temperature stability of capacitor type micromechanical sensor and micromechanical sensor | |
| CN113514666B (en) | Micromechanical accelerometer based on PT symmetrical resonator and detection method thereof | |
| CN109883603A (en) | A kind of silicon micro-resonance type presser sensor chip resonator based on SOI | |
| CN107449415A (en) | Nanometer grating micromechanical gyro | |
| CN101746708A (en) | Complete coupling capacitance type micromachined gyroscope | |
| CN106443068B (en) | Torsional differential quartz resonance acceleration sensor chip | |
| CN109001490A (en) | High-sensitivity torsional pendulum type silicon micro-accelerometer and preparation method thereof | |
| CN105300368A (en) | Holosymmetric decoupling vibrating gyroscope capable of directly outputting frequency |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| EXSB | Decision made by sipo to initiate substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170531 |