CN104810314A - 工业用机器人 - Google Patents

工业用机器人 Download PDF

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Publication number
CN104810314A
CN104810314A CN201510039803.2A CN201510039803A CN104810314A CN 104810314 A CN104810314 A CN 104810314A CN 201510039803 A CN201510039803 A CN 201510039803A CN 104810314 A CN104810314 A CN 104810314A
Authority
CN
China
Prior art keywords
arm
motor
encoder
hand
main part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201510039803.2A
Other languages
English (en)
Chinese (zh)
Inventor
矢泽隆之
志村芳树
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nidec Sankyo Corp
Original Assignee
Nidec Sankyo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nidec Sankyo Corp filed Critical Nidec Sankyo Corp
Priority to CN201911086701.0A priority Critical patent/CN110808225A/zh
Publication of CN104810314A publication Critical patent/CN104810314A/zh
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/06—Programme-controlled manipulators characterised by multi-articulated arms

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
CN201510039803.2A 2014-01-29 2015-01-27 工业用机器人 Pending CN104810314A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201911086701.0A CN110808225A (zh) 2014-01-29 2015-01-27 工业用机器人

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014014565A JP6499826B2 (ja) 2014-01-29 2014-01-29 産業用ロボット
JP2014-014565 2014-01-29

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201911086701.0A Division CN110808225A (zh) 2014-01-29 2015-01-27 工业用机器人

Publications (1)

Publication Number Publication Date
CN104810314A true CN104810314A (zh) 2015-07-29

Family

ID=53695037

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201510039803.2A Pending CN104810314A (zh) 2014-01-29 2015-01-27 工业用机器人
CN201911086701.0A Pending CN110808225A (zh) 2014-01-29 2015-01-27 工业用机器人

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201911086701.0A Pending CN110808225A (zh) 2014-01-29 2015-01-27 工业用机器人

Country Status (3)

Country Link
JP (1) JP6499826B2 (ja)
KR (1) KR101694602B1 (ja)
CN (2) CN104810314A (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107538471A (zh) * 2016-06-29 2018-01-05 精工爱普生株式会社 机器人、机器人控制装置及机器人系统
CN108237526A (zh) * 2016-12-27 2018-07-03 精工爱普生株式会社 机器人
CN109202941A (zh) * 2017-06-29 2019-01-15 日本电产三协株式会社 工业用机器人的手及工业用机器人
CN110154038A (zh) * 2018-02-16 2019-08-23 日本电产三协株式会社 机器人的位置信息恢复方法
CN110153991A (zh) * 2018-02-16 2019-08-23 日本电产三协株式会社 工业用机器人的调节方法

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6638878B2 (ja) * 2015-12-01 2020-01-29 株式会社安川電機 ロボット、ロボットシステム、ロボットのメンテナンス方法
KR102327388B1 (ko) * 2016-12-29 2021-11-16 현대중공업지주 주식회사 진공로봇
JP6902422B2 (ja) 2017-07-28 2021-07-14 日本電産サンキョー株式会社 産業用ロボット
JP6869137B2 (ja) 2017-07-28 2021-05-12 日本電産サンキョー株式会社 産業用ロボット
JP7094115B2 (ja) 2018-02-16 2022-07-01 日本電産サンキョー株式会社 産業用ロボットの補正値算出方法
JP7074494B2 (ja) 2018-02-16 2022-05-24 日本電産サンキョー株式会社 産業用ロボットの補正値算出方法
JP7129788B2 (ja) 2018-02-16 2022-09-02 日本電産サンキョー株式会社 産業用ロボットの補正値算出方法
JP6999443B2 (ja) 2018-02-16 2022-01-18 日本電産サンキョー株式会社 産業用ロボットの補正値算出方法
JP6999444B2 (ja) 2018-02-16 2022-01-18 日本電産サンキョー株式会社 産業用ロボットの補正値算出方法
JP7097722B2 (ja) 2018-03-20 2022-07-08 日本電産サンキョー株式会社 ロボットの位置情報復元方法
JP6798591B2 (ja) * 2019-08-30 2020-12-09 株式会社安川電機 ロボット、ロボットシステム、ロボットのメンテナンス方法
JP2022158392A (ja) * 2021-04-02 2022-10-17 日本電産サンキョー株式会社 産業用ロボットのハンドおよび産業用ロボット

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0567490U (ja) * 1992-12-24 1993-09-07 ファナック株式会社 産業用ロボット
CN1401461A (zh) * 2001-08-07 2003-03-12 株式会社三协精机制作所 机器手的定位方法及其装置
CN1408514A (zh) * 2001-10-01 2003-04-09 日本伺服株式会社 多关节机器人及其臂装置
CN201027091Y (zh) * 2006-08-03 2008-02-27 陈延行 仓库管理机器人
CN101583852A (zh) * 2007-02-26 2009-11-18 株式会社安川电机 绝对值编码器装置及多转检测方法
CN102132126A (zh) * 2008-08-26 2011-07-20 株式会社尼康 编码器系统、信号处理方法、以及发送信号生成输出装置
CN103465275A (zh) * 2013-09-24 2013-12-25 昆山泰丰自动化技术有限公司 一种机械手编码器供电系统

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JPH0230484A (ja) * 1988-07-15 1990-01-31 Hitachi Ltd マニピユレータ
JPH0819985A (ja) * 1994-07-04 1996-01-23 Mitsubishi Electric Corp ロボット装置
JPH08216072A (ja) * 1995-02-20 1996-08-27 Tokico Ltd 工業用ロボット
US5794487A (en) * 1995-07-10 1998-08-18 Smart Machines Drive system for a robotic arm
GB9706625D0 (en) * 1997-04-01 1997-05-21 Khairallah Charles Hyper-redundant robot
JPH11254378A (ja) * 1998-03-13 1999-09-21 Ebara Corp 基板ハンドリングロボット
US6605914B2 (en) * 2001-08-24 2003-08-12 Xerox Corporation Robotic toy modular system
JP2005051188A (ja) * 2003-07-28 2005-02-24 Yasuhito Itagaki 搬送工程レイアウト方法並び複合機能ロボット及び完全密閉構造を成したクランプ方式アライナ装置。
JP4605560B2 (ja) * 2005-12-05 2011-01-05 日本電産サンキョー株式会社 産業用ロボット
CN100562410C (zh) * 2006-11-10 2009-11-25 沈阳新松机器人自动化股份有限公司 一种平面多关节机器人
WO2008111410A1 (ja) * 2007-03-14 2008-09-18 Kabushiki Kaisha Yaskawa Denki 基板搬送ロボット
US20090084927A1 (en) * 2007-09-27 2009-04-02 Fanuc Ltd Industrial robot
JP5462064B2 (ja) 2010-04-28 2014-04-02 日本電産サンキョー株式会社 産業用ロボット
JP5344315B2 (ja) * 2010-11-04 2013-11-20 株式会社安川電機 ロボットの手首構造及びロボット
JP5803173B2 (ja) * 2011-03-17 2015-11-04 株式会社デンソーウェーブ ロボット制御装置およびキャリブレーション方法
JP2013027948A (ja) * 2011-07-28 2013-02-07 Seiko Epson Corp ロボット装置及びロボット装置の制御方法
JP5403021B2 (ja) * 2011-09-08 2014-01-29 株式会社安川電機 ロボット、ロボットの設置方法および製造装置
JP2012035408A (ja) * 2011-11-09 2012-02-23 Kawasaki Heavy Ind Ltd 基板搬送ロボット
JP5472283B2 (ja) * 2011-12-21 2014-04-16 株式会社安川電機 ロボットのアーム構造およびロボット

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0567490U (ja) * 1992-12-24 1993-09-07 ファナック株式会社 産業用ロボット
CN1401461A (zh) * 2001-08-07 2003-03-12 株式会社三协精机制作所 机器手的定位方法及其装置
CN1408514A (zh) * 2001-10-01 2003-04-09 日本伺服株式会社 多关节机器人及其臂装置
CN201027091Y (zh) * 2006-08-03 2008-02-27 陈延行 仓库管理机器人
CN101583852A (zh) * 2007-02-26 2009-11-18 株式会社安川电机 绝对值编码器装置及多转检测方法
CN102132126A (zh) * 2008-08-26 2011-07-20 株式会社尼康 编码器系统、信号处理方法、以及发送信号生成输出装置
CN103465275A (zh) * 2013-09-24 2013-12-25 昆山泰丰自动化技术有限公司 一种机械手编码器供电系统

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107538471A (zh) * 2016-06-29 2018-01-05 精工爱普生株式会社 机器人、机器人控制装置及机器人系统
CN108237526A (zh) * 2016-12-27 2018-07-03 精工爱普生株式会社 机器人
CN108237526B (zh) * 2016-12-27 2022-10-28 精工爱普生株式会社 机器人
CN109202941A (zh) * 2017-06-29 2019-01-15 日本电产三协株式会社 工业用机器人的手及工业用机器人
CN109202941B (zh) * 2017-06-29 2022-02-18 日本电产三协株式会社 工业用机器人的手及工业用机器人
CN110154038A (zh) * 2018-02-16 2019-08-23 日本电产三协株式会社 机器人的位置信息恢复方法
CN110153991A (zh) * 2018-02-16 2019-08-23 日本电产三协株式会社 工业用机器人的调节方法
CN110153991B (zh) * 2018-02-16 2022-06-28 日本电产三协株式会社 工业用机器人的调节方法

Also Published As

Publication number Publication date
JP6499826B2 (ja) 2019-04-10
CN110808225A (zh) 2020-02-18
KR101694602B1 (ko) 2017-01-09
JP2015139854A (ja) 2015-08-03
KR20150090834A (ko) 2015-08-06

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Application publication date: 20150729

RJ01 Rejection of invention patent application after publication