CN104716206B - 一种提高镀减反射膜后电池片返工品转换效率的方法 - Google Patents
一种提高镀减反射膜后电池片返工品转换效率的方法 Download PDFInfo
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Abstract
本发明公开了一种提高镀减反射膜后电池片返工品转换效率的方法,其工艺步骤为:1)配置10%浓度的HF溶液,把彩虹片放入HF溶液中浸泡5~10分钟;2)清洗甩干后镀膜面向下经过背腐蚀刻蚀槽进行单面腐蚀;3)吹干后,用下表面作扩散面制PN结,周边刻蚀,镀减反射膜,丝网印刷。本发明采用目前生产线设备,改进了工艺流程,提高了返工品的成品率,同时转换效率比正常片工艺高0.1%左右;发明技术返工片厚度只需去除2~3μm,保证了电池片厚度,碎片率降低。
Description
技术领域
本发明属于太阳能电池技术领域,特别涉及一种提高镀减反射膜后电池片返工品转换效率和降低碎片的方法。
背景技术
目前,单、多晶硅太阳电池的主要制造工艺已经标准化,其主要步骤如下:
1、化学清洗及表面织构化处理:通过化学反应使原本光亮的硅片表面形成凸凹不平的结构以增加光的吸收;
2、扩散:P型硅片在磷扩散后表面变成N型,形成PN结,使得硅片具有光伏效应。扩散的浓度、深度以及均匀性直接影响太阳电池的电性能,扩散进杂质的总量用方块电阻来衡量,杂质总量越小,方块电阻越大;
3、周边刻蚀:该步骤的目的在于去掉扩散时在硅片边缘形成的将PN结两端短路的导电层;
4、沉积减反射膜:目前主要有两类减反射膜,氮化硅膜和氧化钛膜,主要起减反射和钝化的作用;
5、印刷电极;
6、烧结:是印刷电极与硅片形成合金的过程。
目前采用的减反射膜为氮化硅膜,它利用低温等离子体作能量源,将样品置于低气压下辉光放电的阴极上,利用辉光放电(或另加发热体)使样品升温到预定的温度,然后通入适量的反应气体,经一系列化学反应和等离子体反应,在样品表面形成固态减反射薄膜。太阳能电池制作工艺中,应用的是NH3和SiH4形成等离子体,在硅片上形成一层SiNx薄膜,它主要起到钝化和减反射的作用,膜厚控制在80~85μm,折射率2.10~2.14。
而周边刻蚀现有技术一般为:采用化学溶液腐蚀对硅片进行的处理,刻蚀槽工艺为,硝酸:氢氟酸:硫酸:水=10:1:4:4(380L),温度:7度,刻蚀深度:1~1.5um;碱洗槽浓度:5%(去除多孔硅)+水洗;酸洗槽浓度:7%(去除金属离子)+水洗+吹干;背刻蚀采用特殊设备,让硅片漂浮在液位上,只对非PN结面及四边腐蚀的一种工艺。
生产过程中出现设备报警、特气异常等情况,都会造成彩虹片(太阳能电池减反射膜一般控制在80±5nm的蓝色膜,低于70nm时就会呈现红黄不良膜,称为彩虹片),进行HF清洗后去除不干净,需退回清洗重新腐蚀及后续工艺。目前生产线中对镀膜出现的彩虹片返工流程,采用10%HF去除氮化硅膜——返回前清洗重新制绒腐蚀至后续工艺,采用HF腐蚀氮化硅不能完全去除,此种工艺对硅片厚度必须去除6~7μm,增加了碎片率及降低了转换效率。
本发明采用目前生产线设备,改进了工艺流程,达到提高返工品的成品率,同时转换效率与正常片工艺差异控制在0.1%左右;发明技术返工片厚度只需去除2~3μm,保证了电池片厚度,碎片率降低;正常返工腐蚀液体的浓度为本发明工艺刻蚀浓度的1.5倍,其反应速率也比本发明反应速率高,本发明采用反应速率低的药液进行单面腐蚀,转换效率比正常返工工艺高0.1%左右。
发明内容
发明目的:为了克服现有技术的缺陷,特设计一种提高镀减反射膜后电池片返工品转换效率和降低碎片率的方法,保证电池片厚度,提高返工品的成品率。
技术方案:一种提高镀减反射膜后电池片返工品转换效率的方法,其工艺步骤为:
1、配置10%浓度的HF溶液,把彩虹片放入HF溶液中浸泡5~10分钟;
反应原理:Si3N4+4HF+9H2O=3H2siO3(沉淀)+4NH4F;
2、清洗甩干后镀膜面向下经过背腐蚀刻蚀槽进行单面腐蚀(如图1所示),
依次经过以下几道工艺:
(1)刻蚀槽工艺:硝酸:氢氟酸:硫酸:水=10:1:4:4(总体积380L);
温度:9度;
刻蚀深度:2~3μm;
(2)碱洗工艺:碱槽内碱浓度5%(去除多孔硅),且碱洗后需经过水清洗工艺;
(3)酸洗工艺:酸槽内酸浓度7%(去除金属离子),且酸洗后需经过水清洗及吹干工艺;
3、吹干后,用下表面作扩散面制PN结,周边刻蚀,镀减反射膜,丝网印刷。
本发明的有益效果:本发明采用目前生产线设备,改进了工艺流程,提高了返工品的成品率,同时转换效率比正常片工艺高0.1%左右;发明技术返工片厚度只需去除2~3μm(而正常腐蚀为双面腐蚀去除厚度4~5μm),保证了电池片厚度,碎片率降低。
附图说明
图1是本发明刻蚀槽工艺示意图。
具体实施方式
为了使本发明的目的、技术方案和优点更加清楚,下面结合附图和具体实施例对本发明进行详细描述。
正常返工与本发明返工碎片率及转换效率对比:
以上所述仅为本发明的较佳实例而已,并不用以限制本发明,在本发明的精神和原则之内所作的任何修改、等同替换、改进等,均应包含在本发明的系统方法之内。
Claims (1)
1.一种提高镀减反射膜后电池片返工品转换效率的方法,其特征在于,其工艺步骤为:
1)配置10%浓度的HF溶液,把彩虹片放入HF溶液中浸泡5~10分钟;
2)清洗甩干后镀膜面向下经过背腐蚀刻蚀槽进行单面腐蚀,依次经过以下几道工艺:
(1)刻蚀槽工艺:硝酸:氢氟酸:硫酸:水=10:1:4:4,总体积380L;
温度:9度;
刻蚀深度:2~3μm;
(2)碱洗工艺:碱槽内碱浓度5%,且碱洗后需经过水清洗工艺;
(3)酸洗工艺:酸槽内酸浓度7%,且酸洗后需经过水清洗及吹干工艺;
3)吹干后,用下表面作扩散面制PN结,周边刻蚀,镀减反射膜,丝网印刷。
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CN108091728A (zh) * | 2017-12-21 | 2018-05-29 | 天津市职业大学 | 一种太阳电池玻璃失效减反射膜的重涂修复和增效方法 |
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CN102306687A (zh) * | 2011-09-28 | 2012-01-04 | 湖南红太阳新能源科技有限公司 | 一种晶体硅太阳能电池pecvd彩虹片返工方法 |
CN102709390A (zh) * | 2012-05-29 | 2012-10-03 | 奥特斯维能源(太仓)有限公司 | 一种单晶半成品印刷前异常硅片去除pn结的处理方法 |
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CN102306687A (zh) * | 2011-09-28 | 2012-01-04 | 湖南红太阳新能源科技有限公司 | 一种晶体硅太阳能电池pecvd彩虹片返工方法 |
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