CN104698512B - 具有防反射功能的部件及其制造方法 - Google Patents
具有防反射功能的部件及其制造方法 Download PDFInfo
- Publication number
- CN104698512B CN104698512B CN201410743609.8A CN201410743609A CN104698512B CN 104698512 B CN104698512 B CN 104698512B CN 201410743609 A CN201410743609 A CN 201410743609A CN 104698512 B CN104698512 B CN 104698512B
- Authority
- CN
- China
- Prior art keywords
- film
- substrate
- aluminum oxide
- convex
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 13
- 238000000034 method Methods 0.000 claims abstract description 55
- 239000000463 material Substances 0.000 claims abstract description 49
- 238000000231 atomic layer deposition Methods 0.000 claims abstract description 23
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 16
- 230000003667 anti-reflective effect Effects 0.000 claims abstract description 6
- 239000000758 substrate Substances 0.000 claims description 97
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 57
- 238000010335 hydrothermal treatment Methods 0.000 claims description 31
- 238000005530 etching Methods 0.000 claims description 26
- 238000001312 dry etching Methods 0.000 claims description 12
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 10
- 239000011521 glass Substances 0.000 claims description 9
- 230000003287 optical effect Effects 0.000 claims description 9
- 238000009835 boiling Methods 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 238000001027 hydrothermal synthesis Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 136
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 65
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 230000000694 effects Effects 0.000 description 6
- 239000007800 oxidant agent Substances 0.000 description 6
- 238000005240 physical vapour deposition Methods 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 210000004027 cell Anatomy 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 229910052593 corundum Inorganic materials 0.000 description 2
- 238000002438 flame photometric detection Methods 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 238000003980 solgel method Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 229910001845 yogo sapphire Inorganic materials 0.000 description 2
- 239000011324 bead Substances 0.000 description 1
- 210000000170 cell membrane Anatomy 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/118—Anti-reflection coatings having sub-optical wavelength surface structures designed to provide an enhanced transmittance, e.g. moth-eye structures
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/12—Optical coatings produced by application to, or surface treatment of, optical elements by surface treatment, e.g. by irradiation
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Laminated Bodies (AREA)
- Optical Filters (AREA)
- Liquid Crystal (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013254257A JP2015114381A (ja) | 2013-12-09 | 2013-12-09 | 反射防止機能を有する部材およびその製造方法 |
| JP2013-254257 | 2013-12-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104698512A CN104698512A (zh) | 2015-06-10 |
| CN104698512B true CN104698512B (zh) | 2017-09-01 |
Family
ID=53345830
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410743609.8A Expired - Fee Related CN104698512B (zh) | 2013-12-09 | 2014-12-08 | 具有防反射功能的部件及其制造方法 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2015114381A (enrdf_load_stackoverflow) |
| KR (1) | KR101833586B1 (enrdf_load_stackoverflow) |
| CN (1) | CN104698512B (enrdf_load_stackoverflow) |
| TW (1) | TWI632392B (enrdf_load_stackoverflow) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102388422B1 (ko) * | 2017-08-30 | 2022-04-20 | 현대자동차주식회사 | 차량용 투명 기판 및 그 제조방법 |
| JP6794325B2 (ja) * | 2017-08-31 | 2020-12-02 | 富士フイルム株式会社 | 導電性基材、導電性基材の製造方法、積層体およびタッチパネル |
| CN107793041A (zh) * | 2017-09-29 | 2018-03-13 | 广东星弛光电科技有限公司 | 具有耐磨氧化铝镀膜层的钢化玻璃的制备方法 |
| JP2020537188A (ja) * | 2017-10-11 | 2020-12-17 | アールト ユニバーシティ ファンデーション エスアール | 物体の被膜 |
| WO2019225518A1 (ja) * | 2018-05-22 | 2019-11-28 | 富士フイルム株式会社 | 凹凸構造付き基体の製造方法 |
| CN110600567A (zh) * | 2018-05-25 | 2019-12-20 | 中国电子科技集团公司第十八研究所 | 一种空间太阳电池用全反射玻璃盖片及其制备方法 |
| EP3951445A4 (en) * | 2019-03-27 | 2022-12-21 | Kuraray Co., Ltd. | HUD DEVICE AND THIN IRREGULAR PATTERN FILM |
| US11714212B1 (en) * | 2020-09-14 | 2023-08-01 | Apple Inc. | Conformal optical coatings for non-planar substrates |
| CN114578462A (zh) * | 2021-03-22 | 2022-06-03 | 浙江舜宇光学有限公司 | 光学成像镜头 |
| CN113985504B (zh) * | 2021-12-27 | 2022-04-26 | 诚瑞光学(苏州)有限公司 | 光学镜片 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102560419A (zh) * | 2011-11-29 | 2012-07-11 | 华东师范大学 | 一种氧化铝超薄薄膜的制备方法 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002343790A (ja) * | 2001-05-21 | 2002-11-29 | Nec Corp | 金属化合物薄膜の気相堆積方法及び半導体装置の製造方法 |
| JP2004176081A (ja) * | 2002-11-25 | 2004-06-24 | Matsushita Electric Works Ltd | 原子層堆積法による光学多層膜の製造方法 |
| CN101479777B (zh) * | 2006-05-31 | 2011-07-06 | 株式会社半导体能源研究所 | 显示设备和电子装置 |
| WO2008001670A1 (fr) * | 2006-06-30 | 2008-01-03 | Oji Paper Co., Ltd. | Masque de gravure de film monoparticulaire et son procédé de production, procédé de production d'une structure fine avec un masque de gravure de film monoparticulaire et structure fine obtenue à l'aide du procédé de production |
| JP5279344B2 (ja) * | 2007-06-06 | 2013-09-04 | キヤノン株式会社 | 光学素子の製造方法 |
| US10041169B2 (en) * | 2008-05-27 | 2018-08-07 | Picosun Oy | System and method for loading a substrate holder carrying a batch of vertically placed substrates into an atomic layer deposition reactor |
| CN102639307B (zh) * | 2009-11-27 | 2014-08-06 | 夏普株式会社 | 模具的制作方法和蛾眼结构的制作方法 |
| JP5279858B2 (ja) * | 2010-05-07 | 2013-09-04 | キヤノン株式会社 | 酸化アルミニウム前駆体ゾル、および光学用部材の製造方法 |
| JP5912228B2 (ja) * | 2010-05-17 | 2016-04-27 | 凸版印刷株式会社 | ガスバリア性積層体の製造方法 |
| US20120207973A1 (en) * | 2011-02-15 | 2012-08-16 | Canon Kabushiki Kaisha | Optical member, method of manufacturing the same, and optical system using the same |
| JP5647924B2 (ja) * | 2011-03-18 | 2015-01-07 | 富士フイルム株式会社 | 光学部材の製造方法 |
| EP2645136B1 (en) * | 2012-03-29 | 2017-01-18 | Canon Kabushiki Kaisha | Optical member having textured structure and method of producing same |
-
2013
- 2013-12-09 JP JP2013254257A patent/JP2015114381A/ja active Pending
-
2014
- 2014-12-01 TW TW103141593A patent/TWI632392B/zh not_active IP Right Cessation
- 2014-12-08 CN CN201410743609.8A patent/CN104698512B/zh not_active Expired - Fee Related
- 2014-12-08 KR KR1020140174955A patent/KR101833586B1/ko not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102560419A (zh) * | 2011-11-29 | 2012-07-11 | 华东师范大学 | 一种氧化铝超薄薄膜的制备方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2015114381A (ja) | 2015-06-22 |
| TWI632392B (zh) | 2018-08-11 |
| TW201534956A (zh) | 2015-09-16 |
| KR20150067057A (ko) | 2015-06-17 |
| CN104698512A (zh) | 2015-06-10 |
| KR101833586B1 (ko) | 2018-02-28 |
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Legal Events
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170901 |
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| CF01 | Termination of patent right due to non-payment of annual fee |