CN104451563B - 一种铜铟镓硒靶材的制备及应用方法 - Google Patents
一种铜铟镓硒靶材的制备及应用方法 Download PDFInfo
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- CN104451563B CN104451563B CN201310414057.1A CN201310414057A CN104451563B CN 104451563 B CN104451563 B CN 104451563B CN 201310414057 A CN201310414057 A CN 201310414057A CN 104451563 B CN104451563 B CN 104451563B
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- Prior art keywords
- indium gallium
- selenium
- target material
- gallium selenium
- copper
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- QNWMNMIVDYETIG-UHFFFAOYSA-N gallium(ii) selenide Chemical compound [Se]=[Ga] QNWMNMIVDYETIG-UHFFFAOYSA-N 0.000 title claims abstract description 60
- 239000013077 target material Substances 0.000 title claims abstract description 38
- 238000000034 method Methods 0.000 title claims abstract description 23
- 238000002360 preparation method Methods 0.000 title claims abstract description 15
- HVMJUDPAXRRVQO-UHFFFAOYSA-N copper indium Chemical compound [Cu].[In] HVMJUDPAXRRVQO-UHFFFAOYSA-N 0.000 title claims abstract 8
- 229910052738 indium Inorganic materials 0.000 claims abstract description 72
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims abstract description 72
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 33
- 229910052802 copper Inorganic materials 0.000 claims abstract description 33
- 239000010949 copper Substances 0.000 claims abstract description 33
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims abstract description 17
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 claims abstract description 17
- 229910052733 gallium Inorganic materials 0.000 claims abstract description 17
- 229910052711 selenium Inorganic materials 0.000 claims abstract description 17
- 239000011669 selenium Substances 0.000 claims abstract description 17
- 239000000758 substrate Substances 0.000 claims abstract description 14
- 238000002844 melting Methods 0.000 claims abstract description 13
- 230000008018 melting Effects 0.000 claims abstract description 13
- 238000004544 sputter deposition Methods 0.000 claims abstract description 13
- 238000000137 annealing Methods 0.000 claims abstract description 12
- 239000002994 raw material Substances 0.000 claims abstract description 9
- 229910001370 Se alloy Inorganic materials 0.000 claims description 10
- 239000010408 film Substances 0.000 claims description 10
- 238000007731 hot pressing Methods 0.000 claims description 10
- 239000000843 powder Substances 0.000 claims description 10
- 239000010409 thin film Substances 0.000 claims description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 9
- 229910045601 alloy Inorganic materials 0.000 claims description 9
- 239000000956 alloy Substances 0.000 claims description 9
- 239000007789 gas Substances 0.000 claims description 7
- 230000001681 protective effect Effects 0.000 claims description 7
- 238000000498 ball milling Methods 0.000 claims description 5
- 238000009413 insulation Methods 0.000 claims description 5
- 238000005498 polishing Methods 0.000 claims description 5
- 238000010583 slow cooling Methods 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 230000000994 depressogenic effect Effects 0.000 claims 1
- 229910001873 dinitrogen Inorganic materials 0.000 claims 1
- 238000002156 mixing Methods 0.000 abstract description 3
- 238000012958 reprocessing Methods 0.000 abstract description 2
- 229910001325 element alloy Inorganic materials 0.000 abstract 2
- 238000009792 diffusion process Methods 0.000 abstract 1
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 238000010792 warming Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000003723 Smelting Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910002059 quaternary alloy Inorganic materials 0.000 description 1
- 229910002058 ternary alloy Inorganic materials 0.000 description 1
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- Physical Vapour Deposition (AREA)
- Photovoltaic Devices (AREA)
Abstract
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CN201310414057.1A CN104451563B (zh) | 2013-09-12 | 2013-09-12 | 一种铜铟镓硒靶材的制备及应用方法 |
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CN201310414057.1A CN104451563B (zh) | 2013-09-12 | 2013-09-12 | 一种铜铟镓硒靶材的制备及应用方法 |
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CN104451563A CN104451563A (zh) | 2015-03-25 |
CN104451563B true CN104451563B (zh) | 2017-02-01 |
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Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN104925760B (zh) * | 2015-07-02 | 2017-02-08 | 成都先锋材料有限公司 | CIGS的Na掺杂方法、及其溅射靶材的制作方法 |
CN106001584A (zh) * | 2016-07-26 | 2016-10-12 | 大连理工大学 | 一种铸造法安全生产硅锆均匀混合金粉末工艺 |
CN106319469B (zh) * | 2016-10-28 | 2018-08-24 | 中国科学院宁波材料技术与工程研究所 | 一种铜铟镓合金靶材的制备方法 |
CN107099775A (zh) * | 2017-04-27 | 2017-08-29 | 柳州豪祥特科技有限公司 | 铜铟镓硒靶材金属化层的制备方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3897622B2 (ja) * | 2002-03-18 | 2007-03-28 | 松下電器産業株式会社 | 化合物半導体薄膜の製造方法 |
CN102199751A (zh) * | 2010-03-25 | 2011-09-28 | 慧濠光电科技股份有限公司 | 铜铟镓硒靶材的制作方法 |
JP4957968B2 (ja) * | 2007-11-12 | 2012-06-20 | 三菱マテリアル株式会社 | Cu−In−Ga三元系焼結合金スパッタリングターゲットおよびその製造方法 |
CN103215541A (zh) * | 2013-03-26 | 2013-07-24 | 无锡舒玛天科新能源技术有限公司 | 一种平面铜铟镓硒溅射靶材的制备方法 |
CN103290372A (zh) * | 2013-05-10 | 2013-09-11 | 无锡舒玛天科新能源技术有限公司 | 一种用于薄膜太阳能电池的铜铟镓旋转靶材制备方法 |
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2013
- 2013-09-12 CN CN201310414057.1A patent/CN104451563B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3897622B2 (ja) * | 2002-03-18 | 2007-03-28 | 松下電器産業株式会社 | 化合物半導体薄膜の製造方法 |
JP4957968B2 (ja) * | 2007-11-12 | 2012-06-20 | 三菱マテリアル株式会社 | Cu−In−Ga三元系焼結合金スパッタリングターゲットおよびその製造方法 |
CN102199751A (zh) * | 2010-03-25 | 2011-09-28 | 慧濠光电科技股份有限公司 | 铜铟镓硒靶材的制作方法 |
CN103215541A (zh) * | 2013-03-26 | 2013-07-24 | 无锡舒玛天科新能源技术有限公司 | 一种平面铜铟镓硒溅射靶材的制备方法 |
CN103290372A (zh) * | 2013-05-10 | 2013-09-11 | 无锡舒玛天科新能源技术有限公司 | 一种用于薄膜太阳能电池的铜铟镓旋转靶材制备方法 |
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CN104451563A (zh) | 2015-03-25 |
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