CN104450332A - Integrated circuit chip cleaning fluid and preparation method thereof - Google Patents

Integrated circuit chip cleaning fluid and preparation method thereof Download PDF

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Publication number
CN104450332A
CN104450332A CN201410674199.6A CN201410674199A CN104450332A CN 104450332 A CN104450332 A CN 104450332A CN 201410674199 A CN201410674199 A CN 201410674199A CN 104450332 A CN104450332 A CN 104450332A
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China
Prior art keywords
integrated circuit
scavenging solution
parts
mixture
ethanol
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Pending
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CN201410674199.6A
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Chinese (zh)
Inventor
熊开胜
张海防
谢建庭
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DONGCHEN-LEADER TESTING Co Ltd
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DONGCHEN-LEADER TESTING Co Ltd
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Priority to CN201410674199.6A priority Critical patent/CN104450332A/en
Publication of CN104450332A publication Critical patent/CN104450332A/en
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Abstract

The invention provides an integrated circuit chip cleaning fluid and a preparation method thereof. The integrated circuit chip cleaning fluid is prepared from the following components: nonyl phenol polyoxyethylene ether, citric acid, diglycol, methanol, dichloromethane, trichlorotrifluoroethane, alkylolamide, EDTA, triethanolamine, sulfamic acid and ethanol. The preparation method comprises the following steps: adding nonyl phenol polyoxyethylene ether, citric acid, diglycol, methanol and EDTA into a reaction kettle, and stirring and mixing under the vacuum heating condition, so as to obtain a mixture I; further adding dichloromethane, trichlorotrifluoroethane, alkylolamide and triethanolamine into a sealed container, and heating in vacuum to realize azeotropy, so as to obtain a mixture II; finally mixing the mixture I and the mixture II, adding sulfamic acid and ethanol, and uniformly stirring and mixing, so as to obtain the integrated circuit chip cleaning fluid. The integrated circuit chip cleaning fluid provided by the invention is excellent in rinsing property, small in foam and low in viscosity, does not affect a circuit chip, and can be widely applied to cleaning of integrated circuit chips.

Description

A kind of integrated circuit (IC) chip scavenging solution and preparation method thereof
Technical field
The invention belongs to clean-out system technical field, be specifically related to a kind of integrated circuit (IC) chip scavenging solution and preparation method thereof.
Background technology
Unicircuit (integrated circuit) is a kind of microelectronic device or parts.Adopt certain technique, together with the elements such as transistor required in a circuit, resistance, electric capacity and inductance and wire interconnects, be produced on a fritter or a few fritter semiconductor wafer or dielectric substrate, be then encapsulated in a shell, become the microstructure with required circuit function; Wherein all elements structurally form a whole, make electronic component stride forward major step towards microminiaturization, reduce power consumption, intellectuality and high reliability aspect.It represents with letter " IC " in circuit.
Integrated circuit (IC) chip can produce certain dirt in long-term use procedure; traditional removing method is cleaned by hairbrush; and the mode adopting scavenging solution to clean being of little use; because usually have certain remaining after scavenging solution cleaning, the normal work for circuit chip can produce certain impact.
Along with comprehensive electronization of industrial equipments in world wide, the development of auto-control, the production of all electronic equipment instrument and use rapid growth.The quick growth of unicircuit makes equipment on-line maintenance in the past professional in becoming the whole industry, trans-regional maintenance issues on a large scale among a small circle, and it effectively safeguards the more importantly problem also becoming special maintenance personnel and face, safer to operation, clean effect more preferably demand forces researchist constantly to study better clean-out system substitute.
Summary of the invention
The object of the invention is to overcome the deficiencies in the prior art and provide a kind of integrated circuit (IC) chip scavenging solution and preparation method thereof improve rinsing performance, shorten rinsing time, simultaneously on circuit chip without impact.
A kind of integrated circuit (IC) chip scavenging solution, comprise with parts by weight: NONYL PHENOL POLYOXYETHYLENE 1-5 part, citric acid 0.8-3 part, glycol ether 10-20 part, methyl alcohol 5-10 part, methylene dichloride 10-20 part, Freon 113 8-15 part, alkylol amide 2-8 part, EDTA 1-4 part, trolamine 1-5 part, thionamic acid 1-4 part, ethanol 10-20 part.
As further improvement, described integrated circuit (IC) chip scavenging solution, comprises with parts by weight: NONYL PHENOL POLYOXYETHYLENE 2-4 part, citric acid 2-2.5 part, glycol ether 14-18 part, methyl alcohol 7-9 part, methylene dichloride 16-19 part, Freon 113 10-13 part, alkylol amide 4-7 part, EDTA 2-4 part, trolamine 2-4 part, thionamic acid 1-3 part, ethanol 15-18 part.
Above-described integrated circuit (IC) chip scavenging solution, described ethanol can be 95% ethanol.
The preparation method of above-described integrated circuit (IC) chip scavenging solution, comprises the following steps:
Step one, adds in reactor by NONYL PHENOL POLYOXYETHYLENE, citric acid, glycol ether, methyl alcohol and EDTA, under vacuum tightness is 0.01-0.05MPa condition, is heated to 50-60 DEG C, stirs 20-30 minute, obtains mixture one;
Step 2, joins in encloses container by methylene dichloride, Freon 113, alkylol amide and trolamine, heats azeotropic 20-30 minute under vacuum, obtains mixture two;
Step 3, mixes mixture one with mixture two-phase, adds thionamic acid and ethanol, is uniformly mixed, and obtains integrated circuit (IC) chip scavenging solution.
The preparation method of described integrated circuit (IC) chip scavenging solution, the speed stirred in step one can be 100-120 rev/min.
The preparation method of described integrated circuit (IC) chip scavenging solution, in step 2, the vacuum tightness of vacuum condition can be 0.01-0.03MPa.
The preparation method of described integrated circuit (IC) chip scavenging solution, the condition be uniformly mixed in step 3 can be stirring velocity 80-100 rev/min, and whipping temp is room temperature, and churning time is 20-40 minute.
Integrated circuit (IC) chip scavenging solution washing power provided by the invention reaches more than 108%, and foaming properties is at below 8mm, and viscosity reaches 0.45mm 2s -1below, rinsing performance is excellent, and without visible detergent residue, foam is little, does not affect circuit chip, and viscosity is low, is convenient to cleaning, well can clean circuit chip the short period of time simultaneously, can be widely used in the cleaning of integrated circuit (IC) chip.
Embodiment
Embodiment 1
A kind of integrated circuit (IC) chip scavenging solution, comprise with parts by weight: NONYL PHENOL POLYOXYETHYLENE 1 part, citric acid 0.8 part, glycol ether 10 parts, methyl alcohol 5 parts, methylene dichloride 10 parts, Freon 113 8 parts, alkylol amide 2 parts, EDTA 1 part, trolamine 1 part, thionamic acid 1 part, 95% ethanol 10 parts.
The preparation method of above-described integrated circuit (IC) chip scavenging solution, comprises the following steps:
Step one, adds in reactor by NONYL PHENOL POLYOXYETHYLENE, citric acid, glycol ether, methyl alcohol and EDTA, under vacuum tightness is 0.01MPa condition, is heated to 50 DEG C, and stir 20 minutes, stirring velocity is 100 revs/min, obtains mixture one;
Step 2, joins in encloses container by methylene dichloride, Freon 113, alkylol amide and trolamine, is to heat azeotropic 20 minutes under the condition of 0.01MPa in vacuum tightness, obtains mixture two;
Step 3, mixes mixture one with mixture two-phase, adds thionamic acid and ethanol, is uniformly mixed, wherein stirring velocity 80 revs/min, and whipping temp is room temperature, and churning time is 20 minutes, obtains integrated circuit (IC) chip scavenging solution.
Embodiment 2
A kind of integrated circuit (IC) chip scavenging solution, comprises with parts by weight: NONYL PHENOL POLYOXYETHYLENE 2 parts, citric acid 2 parts, glycol ether 14 parts, methyl alcohol 7 parts, methylene dichloride 16 parts, Freon 113 10 parts, alkylol amide 4 parts, EDTA 2 parts, trolamine 2 parts, thionamic acid 1 part, 95% ethanol 15 parts.
The preparation method of above-described integrated circuit (IC) chip scavenging solution, comprises the following steps:
Step one, adds in reactor by NONYL PHENOL POLYOXYETHYLENE, citric acid, glycol ether, methyl alcohol and EDTA, under vacuum tightness is 0.02MPa condition, is heated to 53 DEG C, and stir 25 minutes, stirring velocity is 108 revs/min, obtains mixture one;
Step 2, joins in encloses container by methylene dichloride, Freon 113, alkylol amide and trolamine, is to heat azeotropic 22 minutes under the condition of 0.02MPa in vacuum tightness, obtains mixture two;
Step 3, mixes mixture one with mixture two-phase, adds thionamic acid and ethanol, is uniformly mixed, wherein stirring velocity 85 revs/min, and whipping temp is room temperature, and churning time is 26 minutes, obtains integrated circuit (IC) chip scavenging solution.
Embodiment 3
A kind of integrated circuit (IC) chip scavenging solution, comprise with parts by weight: NONYL PHENOL POLYOXYETHYLENE 3 parts, citric acid 2.3 parts, glycol ether 16 parts, methyl alcohol 8 parts, methylene dichloride 17 parts, Freon 113 12 parts, alkylol amide 5 parts, EDTA 3 parts, trolamine 3 parts, thionamic acid 2 parts, 95% ethanol 16 parts.
The preparation method of above-described integrated circuit (IC) chip scavenging solution, comprises the following steps:
Step one, adds in reactor by NONYL PHENOL POLYOXYETHYLENE, citric acid, glycol ether, methyl alcohol and EDTA, under vacuum tightness is 0.03MPa condition, is heated to 56 DEG C, and stir 28 minutes, stirring velocity is 110 revs/min, obtains mixture one;
Step 2, joins in encloses container by methylene dichloride, Freon 113, alkylol amide and trolamine, is to heat azeotropic 25 minutes under the condition of 0.02MPa in vacuum tightness, obtains mixture two;
Step 3, mixes mixture one with mixture two-phase, adds thionamic acid and ethanol, is uniformly mixed, wherein stirring velocity 90 revs/min, and whipping temp is room temperature, and churning time is 35 minutes, obtains integrated circuit (IC) chip scavenging solution.
Embodiment 4
A kind of integrated circuit (IC) chip scavenging solution, comprise with parts by weight: NONYL PHENOL POLYOXYETHYLENE 4 parts, citric acid 2.5 parts, glycol ether 18 parts, methyl alcohol 9 parts, methylene dichloride 19 parts, Freon 113 13 parts, alkylol amide 7 parts, EDTA 4 parts, trolamine 4 parts, thionamic acid 3 parts, 95% ethanol 18 parts.
The preparation method of above-described integrated circuit (IC) chip scavenging solution, comprises the following steps:
Step one, adds in reactor by NONYL PHENOL POLYOXYETHYLENE, citric acid, glycol ether, methyl alcohol and EDTA, under vacuum tightness is 0.04MPa condition, is heated to 58 DEG C, and stir 27 minutes, stirring velocity is 115 revs/min, obtains mixture one;
Step 2, joins in encloses container by methylene dichloride, Freon 113, alkylol amide and trolamine, is to heat azeotropic 30 minutes under the condition of 0.02MPa in vacuum tightness, obtains mixture two;
Step 3, mixes mixture one with mixture two-phase, adds thionamic acid and ethanol, is uniformly mixed, wherein stirring velocity 95 revs/min, and whipping temp is room temperature, and churning time is 36 minutes, obtains integrated circuit (IC) chip scavenging solution.
Embodiment 5
A kind of integrated circuit (IC) chip scavenging solution, comprise with parts by weight: NONYL PHENOL POLYOXYETHYLENE 5 parts, citric acid 3 parts, glycol ether 20 parts, methyl alcohol 10 parts, methylene dichloride 20 parts, Freon 113 15 parts, alkylol amide 8 parts, EDTA 4 parts, trolamine 5 parts, thionamic acid 4 parts, 95% ethanol 20 parts.
The preparation method of above-described integrated circuit (IC) chip scavenging solution, comprises the following steps:
Step one, adds in reactor by NONYL PHENOL POLYOXYETHYLENE, citric acid, glycol ether, methyl alcohol and EDTA, under vacuum tightness is 0.05MPa condition, is heated to 60 DEG C, and stir 30 minutes, stirring velocity is 120 revs/min, obtains mixture one;
Step 2, joins in encloses container by methylene dichloride, Freon 113, alkylol amide and trolamine, is to heat azeotropic 30 minutes under the condition of 0.03MPa in vacuum tightness, obtains mixture two;
Step 3, mixes mixture one with mixture two-phase, adds thionamic acid and ethanol, is uniformly mixed, wherein stirring velocity 100 revs/min, and whipping temp is room temperature, and churning time is 40 minutes, obtains integrated circuit (IC) chip scavenging solution.
Carry out performance test to the integrated circuit (IC) chip scavenging solution that above embodiment prepares, result is as follows:
As can be seen from above test-results, integrated circuit (IC) chip scavenging solution washing power provided by the invention reaches more than 108%, and foaming properties is at below 8mm, and viscosity reaches 0.45mm 2s -1below, rinsing performance is excellent, and without visible detergent residue, foam is little, does not affect circuit chip, and viscosity is low, is convenient to cleaning, well can clean circuit chip the short period of time simultaneously, therefore can be widely used in the cleaning of integrated circuit (IC) chip.

Claims (7)

1. an integrated circuit (IC) chip scavenging solution, is characterized in that, comprises with parts by weight: NONYL PHENOL POLYOXYETHYLENE 1-5 part, citric acid 0.8-3 part, glycol ether 10-20 part, methyl alcohol 5-10 part, methylene dichloride 10-20 part, Freon 113 8-15 part, alkylol amide 2-8 part, EDTA 1-4 part, trolamine 1-5 part, thionamic acid 1-4 part, ethanol 10-20 part.
2. integrated circuit (IC) chip scavenging solution according to claim 1, is characterized in that, comprise with parts by weight: NONYL PHENOL POLYOXYETHYLENE 2-4 part, citric acid 2-2.5 part, glycol ether 14-18 part, methyl alcohol 7-9 part, methylene dichloride 16-19 part, Freon 113 10-13 part, alkylol amide 4-7 part, EDTA 2-4 part, trolamine 2-4 part, thionamic acid 1-3 part, ethanol 15-18 part.
3. integrated circuit (IC) chip scavenging solution according to claim 1 and 2, is characterized in that, described ethanol is 95% ethanol.
4. the preparation method of the integrated circuit (IC) chip scavenging solution described in claim 1 or 2, is characterized in that, comprise the following steps:
Step one, adds in reactor by NONYL PHENOL POLYOXYETHYLENE, citric acid, glycol ether, methyl alcohol and EDTA, under vacuum tightness is 0.01-0.05MPa condition, is heated to 50-60 DEG C, stirs 20-30 minute, obtains mixture one;
Step 2, joins in encloses container by methylene dichloride, Freon 113, alkylol amide and trolamine, heats azeotropic 20-30 minute under vacuum, obtains mixture two;
Step 3, mixes mixture one with mixture two-phase, adds thionamic acid and ethanol, is uniformly mixed, and obtains integrated circuit (IC) chip scavenging solution.
5. the preparation method of integrated circuit (IC) chip scavenging solution according to claim 4, is characterized in that, the speed stirred in step one is 100-120 rev/min.
6. the preparation method of integrated circuit (IC) chip scavenging solution according to claim 4, is characterized in that, in step 2, the vacuum tightness of vacuum condition is 0.01-0.03MPa.
7. the preparation method of integrated circuit (IC) chip scavenging solution according to claim 4, is characterized in that, the condition be uniformly mixed in step 3 is stirring velocity 80-100 rev/min, and whipping temp is room temperature, and churning time is 20-40 minute.
CN201410674199.6A 2014-11-21 2014-11-21 Integrated circuit chip cleaning fluid and preparation method thereof Pending CN104450332A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105039035A (en) * 2015-06-30 2015-11-11 苏州东辰林达检测技术有限公司 Cleaning agent for integrated circuit chip and preparation method of cleaning agent
CN106085647A (en) * 2016-06-07 2016-11-09 中山市浩科化工科技有限公司 A kind of electronic chip scavenger specially
CN110684606A (en) * 2019-10-28 2020-01-14 江苏本川智能电路科技股份有限公司 Liquid medicine for cleaning PCB green oil and preparation method thereof

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105039035A (en) * 2015-06-30 2015-11-11 苏州东辰林达检测技术有限公司 Cleaning agent for integrated circuit chip and preparation method of cleaning agent
CN106085647A (en) * 2016-06-07 2016-11-09 中山市浩科化工科技有限公司 A kind of electronic chip scavenger specially
CN106085647B (en) * 2016-06-07 2018-08-17 中山市浩科化工科技有限公司 A kind of electronic chip scavenger specially
CN110684606A (en) * 2019-10-28 2020-01-14 江苏本川智能电路科技股份有限公司 Liquid medicine for cleaning PCB green oil and preparation method thereof
CN110684606B (en) * 2019-10-28 2021-05-11 江苏本川智能电路科技股份有限公司 Liquid medicine for cleaning PCB green oil and preparation method thereof

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Application publication date: 20150325