CN104300934B - 振动片、振子、振荡器、电子设备以及移动体 - Google Patents
振动片、振子、振荡器、电子设备以及移动体 Download PDFInfo
- Publication number
- CN104300934B CN104300934B CN201410338689.9A CN201410338689A CN104300934B CN 104300934 B CN104300934 B CN 104300934B CN 201410338689 A CN201410338689 A CN 201410338689A CN 104300934 B CN104300934 B CN 104300934B
- Authority
- CN
- China
- Prior art keywords
- base
- vibrating
- vibrating piece
- width
- arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 235000014676 Phragmites communis Nutrition 0.000 title description 2
- 239000010410 layer Substances 0.000 claims description 26
- 239000011651 chromium Substances 0.000 claims description 12
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 11
- 229910052804 chromium Inorganic materials 0.000 claims description 11
- 239000011247 coating layer Substances 0.000 claims description 7
- 230000005284 excitation Effects 0.000 claims description 6
- 230000007423 decrease Effects 0.000 abstract description 8
- 230000035939 shock Effects 0.000 abstract 1
- 239000010453 quartz Substances 0.000 description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 18
- 230000015572 biosynthetic process Effects 0.000 description 16
- 239000000758 substrate Substances 0.000 description 12
- 238000005452 bending Methods 0.000 description 11
- 230000006870 function Effects 0.000 description 10
- 239000000470 constituent Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 238000003384 imaging method Methods 0.000 description 6
- 238000004088 simulation Methods 0.000 description 6
- 238000004891 communication Methods 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 5
- 230000005684 electric field Effects 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- 230000009467 reduction Effects 0.000 description 5
- 239000012141 concentrate Substances 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 238000003860 storage Methods 0.000 description 4
- 230000007704 transition Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000035515 penetration Effects 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000010955 niobium Substances 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 230000009466 transformation Effects 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 241000251468 Actinopterygii Species 0.000 description 1
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- WQZGKKKJIJFFOK-GASJEMHNSA-N Glucose Natural products OC[C@H]1OC(O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-GASJEMHNSA-N 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- KGWWEXORQXHJJQ-UHFFFAOYSA-N [Fe].[Co].[Ni] Chemical compound [Fe].[Co].[Ni] KGWWEXORQXHJJQ-UHFFFAOYSA-N 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000008280 blood Substances 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000788 chromium alloy Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000011231 conductive filler Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000013039 cover film Substances 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000008103 glucose Substances 0.000 description 1
- 239000003353 gold alloy Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
- GGCZERPQGJTIQP-UHFFFAOYSA-N sodium;9,10-dioxoanthracene-2-sulfonic acid Chemical compound [Na+].C1=CC=C2C(=O)C3=CC(S(=O)(=O)O)=CC=C3C(=O)C2=C1 GGCZERPQGJTIQP-UHFFFAOYSA-N 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
- H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
- H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
-
- G—PHYSICS
- G04—HOROLOGY
- G04F—TIME-INTERVAL MEASURING
- G04F5/00—Apparatus for producing preselected time intervals for use as timing standards
- G04F5/04—Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses
- G04F5/06—Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses using piezoelectric resonators
- G04F5/063—Constructional details
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
- H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
- H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
- H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders or supports
- H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
- H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders or supports
- H03H9/10—Mounting in enclosures
- H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
- H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/21—Crystal tuning forks
- H03H9/215—Crystal tuning forks consisting of quartz
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Oscillators With Electromechanical Resonators (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013149982A JP6209886B2 (ja) | 2013-07-18 | 2013-07-18 | 振動片、振動子、発振器、電子機器および移動体 |
| JP2013-149982 | 2013-07-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104300934A CN104300934A (zh) | 2015-01-21 |
| CN104300934B true CN104300934B (zh) | 2018-12-04 |
Family
ID=52320539
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410338689.9A Active CN104300934B (zh) | 2013-07-18 | 2014-07-16 | 振动片、振子、振荡器、电子设备以及移动体 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9178470B2 (enExample) |
| JP (1) | JP6209886B2 (enExample) |
| CN (1) | CN104300934B (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI634742B (zh) * | 2013-11-16 | 2018-09-01 | 精工愛普生股份有限公司 | 振動片、振動子、振盪器、電子機器及移動體 |
| JPWO2015075899A1 (ja) * | 2013-11-22 | 2017-03-16 | パナソニックＩｐマネジメント株式会社 | 角速度センサ素子および角速度センサ |
| JP6519995B2 (ja) * | 2014-06-30 | 2019-05-29 | セイコーエプソン株式会社 | 振動素子、振動素子の製造方法、振動子、ジャイロセンサー、電子機器および移動体 |
| JP2016146595A (ja) | 2015-02-09 | 2016-08-12 | セイコーエプソン株式会社 | 振動片の製造方法、ウェハー、振動片、振動子、発振器、リアルタイムクロック、電子機器、および移動体 |
| JP7026444B2 (ja) * | 2017-03-06 | 2022-02-28 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片の製造方法 |
| JP7054177B2 (ja) * | 2018-02-07 | 2022-04-13 | リバーエレテック株式会社 | 水晶デバイス及びその製造方法 |
| CN112703673B (zh) * | 2018-09-28 | 2024-04-12 | 株式会社村田制作所 | 谐振子和谐振装置 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1811460A (zh) * | 2005-01-25 | 2006-08-02 | 日本电波工业株式会社 | 角速度传感器及其制造方法 |
| CN101330282A (zh) * | 2007-06-19 | 2008-12-24 | 爱普生拓优科梦株式会社 | 压电振子及其制造方法以及压电振子用盖 |
| CN102170275A (zh) * | 2010-02-25 | 2011-08-31 | 精工爱普生株式会社 | 振动片、振子、振荡器以及电子设备 |
| CN103033176A (zh) * | 2011-09-29 | 2013-04-10 | 精工爱普生株式会社 | 传感器元件及其制造方法、传感器装置以及电子设备 |
Family Cites Families (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0503807B1 (en) * | 1991-03-12 | 1996-09-25 | New Sd, Inc. | Single ended tuning fork inertial sensor and method |
| JP2003318699A (ja) * | 2002-04-23 | 2003-11-07 | Piedekku Gijutsu Kenkyusho:Kk | 水晶ユニットとその製造方法 |
| JP4288914B2 (ja) * | 2002-08-21 | 2009-07-01 | パナソニック株式会社 | 共振デバイスの製造方法 |
| JP4033100B2 (ja) * | 2003-09-29 | 2008-01-16 | セイコーエプソン株式会社 | 圧電デバイスと圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器 |
| JP2007201936A (ja) | 2006-01-27 | 2007-08-09 | Epson Toyocom Corp | 圧電振動片と圧電デバイス |
| JP4525623B2 (ja) * | 2006-03-23 | 2010-08-18 | エプソントヨコム株式会社 | 圧電振動片の製造方法 |
| JP2008048275A (ja) * | 2006-08-18 | 2008-02-28 | Epson Toyocom Corp | 圧電振動片および圧電デバイス |
| US7863803B2 (en) * | 2007-05-30 | 2011-01-04 | Epson Toyocom Corporation | Tuning fork resonator element and tuning fork resonator |
| JP5175128B2 (ja) * | 2008-04-04 | 2013-04-03 | 日本電波工業株式会社 | 音叉型圧電振動片および圧電デバイス |
| JP5584500B2 (ja) * | 2009-05-01 | 2014-09-03 | 日本電波工業株式会社 | 圧電フレーム及び圧電デバイス |
| US8552624B2 (en) * | 2009-09-18 | 2013-10-08 | Seiko Epson Corporation | Impact resistance vibrating reed, vibrator, oscillator, and electronic device |
| JP5482250B2 (ja) * | 2010-02-02 | 2014-05-07 | セイコーエプソン株式会社 | 振動体および振動デバイス |
| JP5782707B2 (ja) | 2010-12-01 | 2015-09-24 | セイコーエプソン株式会社 | 電子機器 |
| JP5732728B2 (ja) * | 2010-02-25 | 2015-06-10 | セイコーエプソン株式会社 | 振動片、振動子及び発振器 |
| JP2012129904A (ja) | 2010-12-17 | 2012-07-05 | Seiko Epson Corp | 電子機器 |
| US8692632B2 (en) | 2010-03-17 | 2014-04-08 | Seiko Epson Corporation | Resonator element, resonator, oscillator, and electronic device |
| JP5504999B2 (ja) | 2010-03-17 | 2014-05-28 | セイコーエプソン株式会社 | 振動片、振動子、発振器 |
| JP5589517B2 (ja) | 2010-04-08 | 2014-09-17 | セイコーエプソン株式会社 | 振動片、振動子及び発振器 |
| JP5533213B2 (ja) | 2010-05-10 | 2014-06-25 | セイコーエプソン株式会社 | 振動片、振動子及び発振器 |
| JP2011239132A (ja) | 2010-05-10 | 2011-11-24 | Seiko Epson Corp | 振動片、振動子及び発振器 |
| EP2395661A1 (fr) * | 2010-06-10 | 2011-12-14 | The Swatch Group Research and Development Ltd. | Résonateur thermocompensé aux premier et second ordres |
| JP5793387B2 (ja) | 2011-09-30 | 2015-10-14 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片、圧電振動子、発振器、電子機器、及び電波時計 |
| JP5823802B2 (ja) | 2011-09-30 | 2015-11-25 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片の製造方法 |
| JP5872314B2 (ja) * | 2012-02-13 | 2016-03-01 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片、圧電振動子、発振器、電子機器、及び電波時計 |
| JP5910287B2 (ja) | 2012-04-25 | 2016-04-27 | セイコーエプソン株式会社 | 振動片、振動子、発振器および電子機器 |
| JP6119134B2 (ja) * | 2012-07-19 | 2017-04-26 | セイコーエプソン株式会社 | 振動片、振動子、発振器および電子機器 |
-
2013
- 2013-07-18 JP JP2013149982A patent/JP6209886B2/ja active Active
-
2014
- 2014-07-16 CN CN201410338689.9A patent/CN104300934B/zh active Active
- 2014-07-18 US US14/335,217 patent/US9178470B2/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1811460A (zh) * | 2005-01-25 | 2006-08-02 | 日本电波工业株式会社 | 角速度传感器及其制造方法 |
| CN101330282A (zh) * | 2007-06-19 | 2008-12-24 | 爱普生拓优科梦株式会社 | 压电振子及其制造方法以及压电振子用盖 |
| CN102170275A (zh) * | 2010-02-25 | 2011-08-31 | 精工爱普生株式会社 | 振动片、振子、振荡器以及电子设备 |
| CN103033176A (zh) * | 2011-09-29 | 2013-04-10 | 精工爱普生株式会社 | 传感器元件及其制造方法、传感器装置以及电子设备 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6209886B2 (ja) | 2017-10-11 |
| US9178470B2 (en) | 2015-11-03 |
| CN104300934A (zh) | 2015-01-21 |
| JP2015023423A (ja) | 2015-02-02 |
| US20150022276A1 (en) | 2015-01-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104300934B (zh) | 振动片、振子、振荡器、电子设备以及移动体 | |
| JP5910287B2 (ja) | 振動片、振動子、発振器および電子機器 | |
| TWI634742B (zh) | 振動片、振動子、振盪器、電子機器及移動體 | |
| JP6349622B2 (ja) | 振動素子、振動子、発振器、電子機器および移動体 | |
| CN104079263B (zh) | 振动元件、振子、振荡器、电子设备、传感器以及移动体 | |
| CN104079262A (zh) | 振动元件、振子、振荡器、电子设备以及移动体 | |
| KR20140118840A (ko) | 진동 소자, 진동자, 발진기, 전자 기기 및 이동체 | |
| JP2014200051A (ja) | 振動素子、振動子、発振器、電子機器および移動体 | |
| US20150137900A1 (en) | Resonator element, resonator, oscillator, electronic device, and mobile object | |
| US20140266485A1 (en) | Resonator, oscillator, electronic apparatus, and moving object | |
| CN104300933A (zh) | 振动片、振子、振荡器、电子设备以及移动体 | |
| US20150137902A1 (en) | Resonator element, resonator, oscillator, electronic apparatus, and mobile object | |
| CN104242858A (zh) | 振动元件、振子、振荡器、电子设备以及移动体 | |
| JP2015002556A (ja) | 振動片、振動子、発振器、電子機器および移動体 | |
| JP7439852B2 (ja) | 振動素子、振動子、発振器、電子機器および移動体 | |
| JP2015002549A (ja) | 振動素子、振動子、発振器、電子機器および移動体 | |
| JP6521148B2 (ja) | 振動素子、振動子、発振器、電子機器および移動体 | |
| JP6816805B2 (ja) | 振動素子、振動子、発振器、電子機器および移動体 | |
| JP6614227B2 (ja) | 振動素子、振動子、発振器、電子機器および移動体 | |
| JP2019115079A (ja) | 振動素子、振動子、発振器、電子機器および移動体 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |