CN104264112A - 一种哑光膜真空光学镀膜方法 - Google Patents

一种哑光膜真空光学镀膜方法 Download PDF

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CN104264112A
CN104264112A CN201410545072.4A CN201410545072A CN104264112A CN 104264112 A CN104264112 A CN 104264112A CN 201410545072 A CN201410545072 A CN 201410545072A CN 104264112 A CN104264112 A CN 104264112A
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王亚榆
仇志刚
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Tongda (Shishi) Technology Co.,Ltd.
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    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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    • C23C14/083Oxides of refractory metals or yttrium
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    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/35Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/354Introduction of auxiliary energy into the plasma

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Abstract

本发明公开了一种哑光膜真空光学镀膜方法,采用了二氧化锆和二氧化钛这两种高折射率的镀膜膜料,并采用了先蒸镀二氧化锆镀层再蒸镀二氧化钛镀层的二次镀膜工艺,镀膜后塑胶材料的透光率在可见光范围内保持在80%-90%,且透光率是渐变的,不会出现明显的透光率波峰和波谷,从而使塑胶材料达到哑光,整体均匀无色,又能反射出精美的纹理外观效果。与现行生产工艺相比,由于仅采用两层的真空光学膜层,降低了生产成本。与现有技术五层以上的镀膜相比,缩短了生产周期。

Description

一种哑光膜真空光学镀膜方法
技术领域
本发明涉及一种镀膜方法,具体是一种哑光膜的镀膜方法。
背景技术
随着手机在人们日常生活中的普及,用户对手机外观的需求呈现出多元化的趋势。例如,要求手机外壳具有哑光效果,即呈若隐若现的哑光、整体均匀无色、又能反射纹理效果,进而使产品外观更加美观。塑胶材料(如PET,PC,PMMA,PVCC等)本来具有一定的光学性能和物理机械性,如果不镀膜,其纹理及质感效果无法体现;若通过实施附加光学镀膜膜层,可使得塑胶材料体现出上述哑光效果。
传统喷涂工艺难以达到在手机外壳上达到上述哑光的外观效果,现有技术中只有真空光学镀膜,即在手机外壳上镀上几层光学镀膜材料,可达到上述哑光的外观效果。
但是现有的真空光学镀膜方法,其镀膜颜色不均匀,会在局部产生不均匀的色块,为了实现整体均匀无色,就需要镀多层膜进行均衡,镀膜层数通常达到五层以上,存在加工周期长、成本高的缺点。
因此,现有技术尚有待改进和发展。
发明内容
本发明的目的是提供一种加工周期短、成本较低的哑光膜真空光学镀膜方法。
为了实现上述目的,本发明采用如下技术方案:
一种哑光膜真空光学镀膜方法,通过如下步骤实现:
S1:把塑胶材料放入真空镀膜设备,并将真空镀膜设备炉内真空压力环境抽至5×10-3~6×10-3Pa;
S2:利用真空镀膜设备在塑胶材料上蒸镀或磁控溅射一层纯度为99.99%的厚度为10-200nm的二氧化锆镀层;
S3:利用真空镀膜设备在上述二氧化锆镀层的基础上再蒸镀或磁控溅射一层纯度为99.99%的厚度为10-200nm的二氧化钛镀层,得到整体均匀无色的哑光镀膜;
蒸镀或磁控溅射二氧化钛镀层时需要进行离子辅助,具体是:往真空镀膜设备通入氩气,氩气流量是10-20sccm,阳极电压是100-140V,阳极电流是6-9A,灯丝电流是6-9A;同时通入氧气,通入氩气和氧气后真空镀膜设备内的压力环境保持在1.0×10-2Pa~2.6×10-2Pa。
为了保证镀膜膜层的附着力,进行上述步骤S2前先在真空镀膜设备内对上述塑胶材料进行高能量等离子表面处理,具体是:通入氩气,氩气流量是10-20sccm,阳极电压是100-140V,阳极电流是6-9A,灯丝电流是6-9A,压力环境保持在1.0×10-2Pa~1.5×10-2Pa。
采用上述方案后,本发明所提供的真空光学镀膜方法,由于采用了二氧化锆和二氧化钛这两种高折射率(两者折射率都大于1.9)的镀膜膜料(或磁控镀膜靶材),并采用了先蒸镀(或磁控溅射)二氧化锆镀层再蒸镀(或磁控溅射)二氧化钛镀层的二次镀膜工艺,镀膜后塑胶材料的透光率在可见光范围内保持在80%-90%,且透光率是渐变的,不会出现明显的透光率波峰和波谷,从而使塑胶材料达到哑光,整体均匀无色,又能反射出精美的纹理外观效果。与现行生产工艺相比,由于仅采用两层的真空光学膜层,降低了生产成本。与现有技术五层以上的镀膜相比,缩短了生产周期。此镀膜方法在蒸发镀膜机及磁控溅射镀膜机上都可以实现镀制。
具体实施方式
本发明的一种哑光膜真空光学镀膜方法,通过如下步骤实现:
S1:把塑胶材料放入真空镀膜设备,并将真空镀膜设备炉内真空压力环境抽至5×10-3~6×10-3Pa;
S2:利用真空镀膜设备在塑胶材料上蒸镀或磁控溅射一层纯度为99.99%的厚度为10-200nm的二氧化锆镀层;
S3:利用真空镀膜设备在上述二氧化锆镀层的基础上再蒸镀或磁控溅射一层纯度为99.99%的厚度为10-200nm的二氧化钛镀层,得到整体均匀无色的哑光镀膜;
蒸镀或磁控溅射二氧化钛镀层时需要进行离子辅助,具体是:往真空镀膜设备通入氩气,氩气流量是10-20sccm,阳极电压是100-140V,阳极电流是6-9A,灯丝电流是6-9A;同时通入氧气,通入氩气和氧气后真空镀膜设备内的压力环境保持在1.0×10-2Pa~2.6×10-2Pa。
为了保证镀膜膜层的附着力,进行上述步骤S2前先在真空镀膜设备内对上述塑胶材料进行高能量等离子表面处理,具体是:通入氩气,氩气流量是10-20sccm,阳极电压是100-140V,阳极电流是6-9A,灯丝电流是6-9A,压力环境保持在1.0×10-2Pa~1.5×10-2Pa。
采用上述方案后,本发明所提供的真空光学镀膜方法,由于采用了二氧化锆和二氧化钛这两种高折射率(两者折射率都大于1.9)的镀膜膜料(或磁控镀膜靶材),并采用了先蒸镀(或磁控溅射)二氧化锆镀层再蒸镀(或磁控溅射)二氧化钛镀层的二次镀膜工艺,镀膜后塑胶材料的透光率在可见光范围内保持在80%-90%,且透光率是渐变的,不会出现明显的透光率波峰和波谷,从而使塑胶材料达到哑光,整体均匀无色,又能反射出精美的纹理外观效果。与现行生产工艺相比,由于仅采用两层的真空光学膜层,降低了生产成本。与现有技术五层以上的镀膜相比,缩短了生产周期。
本发明的镀膜方法在蒸发镀膜机及磁控溅射镀膜机上都可以实现镀制。所述的蒸镀或磁控溅射是本领域常用的工艺方法。

Claims (2)

1.一种哑光膜真空光学镀膜方法,其特征在于:通过如下步骤实现:
S1:把塑胶材料放入真空镀膜设备,并将真空镀膜设备炉内真空压力环境抽至5×10-3~6×10-3Pa;
S2:利用真空镀膜设备在塑胶材料上蒸镀或磁控溅射一层纯度为99.99%的厚度为10-200nm的二氧化锆镀层;
S3:利用真空镀膜设备在上述二氧化锆镀层的基础上再蒸镀或磁控溅射一层纯度为99.99%的厚度为10-200nm的二氧化钛镀层,得到整体均匀无色的哑光镀膜;
蒸镀或磁控溅射二氧化钛镀层时需要进行离子辅助,具体是:往真空镀膜设备通入氩气,氩气流量是10-20sccm,阳极电压是100-140V,阳极电流是6-9A,灯丝电流是6-9A;同时通入氧气,通入氩气和氧气后真空镀膜设备内的压力环境保持在1.0×10-2Pa~2.6×10-2Pa。
2.根据权利要求1所述的一种哑光膜真空光学镀膜方法,其特征在于:进行上述步骤S2前先在真空镀膜设备内对上述塑胶材料进行高能量等离子表面处理,具体是:通入氩气,氩气流量是10-20sccm,阳极电压是100-140V,阳极电流是6-9A,灯丝电流是6-9A,压力环境保持在1.0×10-2Pa~1.5×10-2Pa。
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104928624A (zh) * 2015-03-20 2015-09-23 刘姒 一种金属托槽表面构筑纳米二氧化锆涂层的方法
CN108059483A (zh) * 2017-12-12 2018-05-22 北京小米移动软件有限公司 氧化锆陶瓷、氧化锆陶瓷壳体及其制备方法
CN112593197A (zh) * 2020-12-25 2021-04-02 苏州市三同电子科技有限公司 一种真空磁控手机后壳镀膜工艺

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004085231A (ja) * 2002-08-23 2004-03-18 Citizen Watch Co Ltd 時計用カバーガラス
JP2005266685A (ja) * 2004-03-22 2005-09-29 Seiko Epson Corp 光学素子およびその製造方法
CN102560363A (zh) * 2012-03-08 2012-07-11 天津美泰真空技术有限公司 一种在可见光区域反射无色光的减反射膜制作方法
JP2012247512A (ja) * 2011-05-26 2012-12-13 Tamron Co Ltd プラスチック光学部品の反射防止膜及びプラスチック光学部品の反射防止膜の製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004085231A (ja) * 2002-08-23 2004-03-18 Citizen Watch Co Ltd 時計用カバーガラス
JP2005266685A (ja) * 2004-03-22 2005-09-29 Seiko Epson Corp 光学素子およびその製造方法
JP2012247512A (ja) * 2011-05-26 2012-12-13 Tamron Co Ltd プラスチック光学部品の反射防止膜及びプラスチック光学部品の反射防止膜の製造方法
CN102560363A (zh) * 2012-03-08 2012-07-11 天津美泰真空技术有限公司 一种在可见光区域反射无色光的减反射膜制作方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104928624A (zh) * 2015-03-20 2015-09-23 刘姒 一种金属托槽表面构筑纳米二氧化锆涂层的方法
CN104928624B (zh) * 2015-03-20 2018-04-10 刘姒 一种金属托槽表面构筑纳米二氧化锆涂层的方法
CN108059483A (zh) * 2017-12-12 2018-05-22 北京小米移动软件有限公司 氧化锆陶瓷、氧化锆陶瓷壳体及其制备方法
CN108059483B (zh) * 2017-12-12 2021-03-09 北京小米移动软件有限公司 氧化锆陶瓷、氧化锆陶瓷壳体及其制备方法
CN112593197A (zh) * 2020-12-25 2021-04-02 苏州市三同电子科技有限公司 一种真空磁控手机后壳镀膜工艺

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