CN104257367B - One can attach pliable pressure sensor and preparation method thereof - Google Patents
One can attach pliable pressure sensor and preparation method thereof Download PDFInfo
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- CN104257367B CN104257367B CN201410471871.1A CN201410471871A CN104257367B CN 104257367 B CN104257367 B CN 104257367B CN 201410471871 A CN201410471871 A CN 201410471871A CN 104257367 B CN104257367 B CN 104257367B
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/02—Detecting, measuring or recording pulse, heart rate, blood pressure or blood flow; Combined pulse/heart-rate/blood pressure determination; Evaluating a cardiovascular condition not otherwise provided for, e.g. using combinations of techniques provided for in this group with electrocardiography or electroauscultation; Heart catheters for measuring blood pressure
- A61B5/0205—Simultaneously evaluating both cardiovascular conditions and different types of body conditions, e.g. heart and respiratory condition
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/02—Detecting, measuring or recording pulse, heart rate, blood pressure or blood flow; Combined pulse/heart-rate/blood pressure determination; Evaluating a cardiovascular condition not otherwise provided for, e.g. using combinations of techniques provided for in this group with electrocardiography or electroauscultation; Heart catheters for measuring blood pressure
- A61B5/0205—Simultaneously evaluating both cardiovascular conditions and different types of body conditions, e.g. heart and respiratory condition
- A61B5/02055—Simultaneously evaluating both cardiovascular condition and temperature
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/103—Detecting, measuring or recording devices for testing the shape, pattern, colour, size or movement of the body or parts thereof, for diagnostic purposes
- A61B5/11—Measuring movement of the entire body or parts thereof, e.g. head or hand tremor, mobility of a limb
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
- A61B2562/02—Details of sensors specially adapted for in-vivo measurements
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
- A61B2562/12—Manufacturing methods specially adapted for producing sensors for in-vivo measurements
Abstract
The invention discloses one and can attach pliable pressure sensor; it is characterized in that; comprise: flexible substrate, sensitive layer, electrode layer and flexible cover sheet; described sensitive layer is formed at flexible substrate surface and has three-dimensional cavernous structure; described electrode layer comprises at least two strip electrodes; described electrode is drawn from sensitive layer surface, and described flexible cover sheet is formed at sensitive layer surface and electrode layer is positioned at the part on sensitive layer surface.The invention also discloses a kind of preparation method attaching pliable pressure sensor.Method of the present invention has the advantage of simple, the easy to operate and applicable large-scale industrial production of cheaper starting materials, technique, and sensitive layer of the present invention has three-dimensional cavernous structure, realizes gas-solid biphase existence in material, has higher sensitivity; The frivolous softness of sensor of the present invention, can be processed to various shape, has advantage that is wearable, that can attach.
Description
Technical field
The present invention relates to a kind of sensor, particularly relate to one and can attach pliable pressure sensor and preparation method thereof.
Background technology
In recent years, along with the development of flexible electronic, electronic skin and electronic device can be attached show great application potential at industrial fields such as consumer electronics market, medical treatment & health, military affairs.Therefore, utilize different materials to prepare there is structure uniqueness, research that is novel wearable, that can attach electronic skin or flexible electronic device that is highly sensitive, good stability enjoys domestic and international researcher extensive concern, and becomes one of current important research frontier gradually.
Pressure transducer be a kind of can sense ambient pressure change sensor, and be widely used in wearable, can attach in electronic skin and electronic device.Catch to increase sharply with information age quantity of information, require the technology trends day by day strengthened with the ability of process information to be consistent, electronic skin or the requirement of electronic device to performance indications such as flexibility, accuracy, reliability, susceptivenesss more and more stricter, correspondingly, require also more and more stricter to the performance indications of pressure transducer.And the weak function sensor of traditional large volume is often difficult to meet above-mentioned requirements, therefore, they progressively replace by various dissimilar high-performance micro sensor.
At present, the Bao Zhenan teach problem group of bibliographical information as Stanford Univ USA is had to utilize polypyrrole (Polypyrrole, PPY) hydrogel material by heterogeneous reaction prepare there is hollow microsphere structure elastic conduction thin film for pressure transducer, but because PPY is a kind of macromolecule polymer material, can slowly degrade in long-term placement air, and this pressure transducer complicated process of preparation, cycle are long, because which limit its business application widely; In addition, be similar to the material of this conventional seals structure of microsphere, it is under ambient pressure effect, and pressure and material deformation are nonlinear, and this range of linearity that pressure and the signal of telecommunication can be caused to change is narrower, and namely the stability of this pressure transducer is bad.
In addition, professor's Yu Shuhong group of Chinese University of Science and Technology prepares the porous, electrically conductive sponge with fibrous reticular structure by the polyurethane sponge material that redox graphene is coated, and use it for resistive pressure sensor, though this pressure transducer detectability low (0.8Pa), sensitivity (1KPa
-1) not high enough; And the coated polyurethane sponge material of redox graphene be difficult to do thin, wearability is bad, poor biocompatibility, be not suitable for being applied in electronic skin.Therefore, how to prepare and there is flexibility, good biocompatibility, good stability, highly sensitive, lowest detectable limit is low and the important topic that thin pressure transducer is at present research can be done.
Summary of the invention
Technical problem to be solved by this invention be how to overcome existing pressure transducer be difficult to do thin, stability is bad, poor biocompatibility, sensitivity are low, the defect of lowest detection limit for height.
In order to solve the problems of the technologies described above; the invention provides one and can attach pliable pressure sensor; it comprises: flexible substrate, sensitive layer, electrode layer and flexible cover sheet; described sensitive layer is formed at flexible substrate surface and has three-dimensional cavernous structure; described electrode layer comprises at least two strip electrodes; described electrode is drawn from sensitive layer surface, and described flexible cover sheet is formed at sensitive layer surface and electrode layer is positioned at the part on sensitive layer surface.
Wherein, described volatile solvent can mix with material with carbon element, and plays very important effect in the process formed at three-dimensional cavernous structure.Along with the volatilization of volatile solvent in the process that three-dimensional cavernous structure is formed, can in flexible macromolecule polymer, form vent and introduce gas phase, realize gas-solid biphase existence in material, and then form the sensitive material of three-dimensional cavernous structure of similar ants ' nest shape.
Further, the size in the hole of described sensitive layer is 0.2 ~ 20 μm, and the gap between Kong Yukong is 10 ~ 200 μm.
Wherein, described material with carbon element, mass ratioes different between volatile solvent and flexible macromolecule polymer three, gap between prepared not of uniform size, the Kong Yukong with the sensitive material mesopore of three-dimensional cavernous structure is not etc., the size only having the poroid structure mesoporous of three-dimensional when preparation is 0.2 ~ 20 μm, and the gap between Kong Yukong is when being 10 ~ 200 μm, the sensitivity of described sensitive material is the highest and lowest detectable limit is minimum.
Further, described flexible substrate and flexible cover sheet all have good biocompatibility; Described electrode is drawn from sensitive layer or sensitive layer surface by the mode of pasting, printing or physics cutting.
Wherein, described flexible substrate and flexible cover sheet all have good biocompatibility, when referring to material and contact skin, and the reactions such as avirulence, nothing allergy or inflammatory reaction.
Further, the material of described electrode layer is conductive non-woven fabrics, Copper Foil, enamel-covered wire or the flat copper foil belt with pressure-sensitive adhesive, and the thickness of described conductive non-woven fabrics is 10 ~ 1000 μm, and width is 0.5 ~ 5mm; The thickness of described Copper Foil is 5 ~ 1000 μm, and width is 0.5 ~ 5mm; Described enamel-covered wire diameter is 50 ~ 500 μm, and the described flat copper foil belt thickness with pressure-sensitive adhesive is 10 ~ 200 μm.
Further, the material of described electrode layer is selected from one or more the combination in gold, platinum, nickel, silver, indium, CNT, Graphene, nano silver wire.
Further, the thickness of described flexible substrate is 10 ~ 2000 μm, and described flexible substrate is ethylene-vinyl acetate copolymer, polyvinyl alcohol, polydimethylsiloxane, polyethylene terephthalate, polyimides and poly one; Described flexible protective layer thickness is 5 ~ 50 μm, and described flexible cover sheet is polydimethylsiloxane, polyethylene or ethylene-vinyl acetate copolymer thin film.
Correspondingly, present invention also offers a kind of preparation method of pressure transducer, described preparation method comprises the following steps:
S1, flexible substrate to be cleaned and dry;
S2, material with carbon element and volatile solvent are mixed by a certain percentage after carry out supersound process, obtain slurry mixture, in slurry mixture, add a certain amount of flexible macromolecule polymer, after stirring mixture of viscous form;
S3, mixture of viscous form obtained in step S2 is coated in flexible substrate on the surface, is then heating and curing, and then forms the sensitive layer with three-dimensional cavernous structure;
S4, in step s3 sensitive layer surface draw at least two strip electrodes;
S5, the material of biocompatibility had at electrode layer and sensitive layer surface-coated, form protective layer, be then heating and curing, protective layer, electrode layer, sensitive layer and flexible substrate are combined together.
Further, in described step S2, the mass ratio of material with carbon element and volatile solvent is 1:1 ~ 1:50, and sonication treatment time is 1 ~ 120min, the flexible macromolecule polymer added in mixture and the mass ratio of material with carbon element are 1:0.5 ~ 1:50, and mixing time is 0.5 ~ 3h.
Wherein, the material with carbon element of described step S2 is one or more the combination in Graphene, redox graphene, graphene oxide, CNT, and described volatile solvent is one or more the combination in ethanol, carbon tetrachloride, dichloromethane, ethyl acetate and acetone.
Further, the heating-up temperature of described step S3 is 40 ~ 90 DEG C, and heat time heating time is 1 ~ 3h; The heating-up temperature of step S5 is 70 ~ 80 DEG C, and heat time heating time is 1 ~ 3h.
The described pliable pressure sensor that attaches can be attached on skin, detects (as heart rate and respiratory frequency), temperature monitoring, motion detection etc. for pulse detection, blood pressure detecting, physiology sign.
Of the present inventionly attach pliable pressure sensor and preparation method thereof, there is following beneficial effect:
1, method of the present invention has the advantage of simple, the easy to operate and applicable large-scale industrial production of cheaper starting materials, technique.
2, sensitive layer of the present invention has the three-dimensional cavernous structure of similar ants ' nest, realize gas-solid biphase existence in material, so have higher sensitivity, the range of linearity of ambient pressure to material deformation is wider, so the range of linearity of pressure and sensor electrical signal intensity is larger.
3, density and the size in the hole of three-dimensional cavernous structure can be regulated and controled by the ratio of adjustment material with carbon element, volatile solvent, flexible macromolecule polymer three, and then the sensitivity of regulation and control sensitive layer, thus obtain the highest sensitive layer of sensitivity.
4, sensitive layer of the present invention has good stability, then in conjunction with flexible substrate and protective layer, is easy to form stable entirety and manufactures and have the frivolous of optimum performance and attach pliable pressure sensor.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the structural representation that the present invention can attach pliable pressure sensor;
Fig. 2 is that the sensitive layer SEM of the embodiment of the present invention one schemes;
Fig. 3 is that the sensitive layer SEM of the embodiment of the present invention two schemes;
Fig. 4 is that the sensitive layer SEM of the embodiment of the present invention three schemes;
Fig. 5 is the current-vs-time figure of the embodiment of the present invention three.
In figure: 1-flexible cover sheet, 2-electrode layer, 3-sensitive layer, 4-flexible substrate.
Detailed description of the invention
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, the every other embodiment that those of ordinary skill in the art obtain under the prerequisite of not making creative work, all belongs to the scope of protection of the invention.
Embodiment one:
Refer to Fig. 1; embodiments provide one and can attach pliable pressure sensor; it comprises: flexible substrate 4, sensitive layer 3, electrode layer 2 and flexible cover sheet 1; described sensitive layer 3 is formed at flexible substrate 4 surface and has three-dimensional cavernous structure; described electrode layer 2 comprises two strip electrodes; described electrode is drawn from sensitive layer 3 surface, and described flexible cover sheet 1 is formed at sensitive layer 3 surface and electrode layer 2 is positioned at the part on sensitive layer 3 surface.
As shown in Figure 2, when Fig. 2 is material with carbon element in the embodiment of the present invention, mass ratio between volatile solvent and flexible macromolecule polymer three is 1:1:2, the prepared SEM figure with the sensitive material of three-dimensional cavernous structure.
Described sensitive layer has three-dimensional cavernous structure, and described three-dimensional cavernous structure is formed by following steps:
S1, by ultrasonic 1min after 1g redox graphene and 1g ethanol mix homogeneously, obtain slurry mixture, in slurry mixture, add 2g density is 1.043g/cm
3polydimethylsiloxane (Polydimethylsiloxane, PDMS), then to stir after 0.5h to obtain mixture of viscous form;
S2, mixture of viscous form evenly to be applied on flexible substrates, and the 3h that is heating and curing at 40 DEG C, make it polymerization, along with the volatilization of ethanol in this process, vent will be formed and then introduce gas phase in PDMS, realize gas-solid biphase existence in material, form the sensitive layer of the three-dimensional cavernous structure of similar ants ' nest shape, the size in the hole of described sensitive layer is uneven, and is 0.2 ~ 1 μm, gap between Kong Yukong not etc., is not 10 ~ 30 μm.
Wherein, the painting method in described step S2 can be spin coating, smear, brushes or print on flexible substrates.
Described flexible substrate is PDMS thin film, and thickness is 10 μm, and described flexible cover sheet is ultra-thin PDMS thin film, and its thickness is 5 μm, and described flexible substrate and flexible cover sheet all have excellent biocompatibility; Described electrode layer is ultra-thin conductive non-woven fabrics, and its thickness is 20 μm, and width is 0.5mm, draws two strip electrodes by the mode of pasting from sensitive layer surface.
Wherein, described electrode layer can also be Copper Foil, and its thickness is 5 μm, and width is 0.5mm, draws two strip electrodes by the mode of pasting from sensitive layer surface.
Correspondingly, present invention also offers a kind of preparation method attaching pliable pressure sensor, described preparation method comprises the following steps:
S1, flexible substrate to be cleaned and dry, described flexible substrate to be thickness the be PDMS thin film of 10 μm;
S2, by ultrasonic 1min after the ethanol mix homogeneously of 1g redox graphene and 1g, obtain slurry mixture, in slurry mixture, add the PDMS that quality is 2g, to stir after 0.5h to obtain mixture of viscous form;
S3, mixture of viscous form obtained in step S2 is coated in flexible substrate PDMS on the surface, then be heating and curing 3h at 40 DEG C, and then form the sensitive layer with three-dimensional cavernous structure, the size in the hole of described sensitive layer is uneven, and be 0.2 ~ 1 μm, gap between Kong Yukong not etc., is not 10 ~ 30 μm;
S4, in step s3 sensitive layer surface draw two strip electrodes;
S5, be the PDMS thin film of 5 μm at electrode layer and sensitive layer surface-coated thickness, form protective layer, be then heating and curing 1h at 70 DEG C, and protective layer, electrode layer, sensitive layer and flexible substrate are combined together.
Of the present inventionly attach pliable pressure sensor and preparation method thereof, there is following beneficial effect:
1, sensitive layer preparation process of the present invention is simple, convenient.
2, sensitive layer of the present invention has the three-dimensional cavernous structure of similar ants ' nest, realize gas-solid biphase existence in material, have higher sensitivity, the range of linearity of ambient pressure to material deformation is wider, so the range of linearity of pressure and sensor electrical signal intensity is larger.
3, by regulating material with carbon element, volatile solvent, the ratio of flexible macromolecule polymer three regulates and controls the density in the hole of three-dimensional cavernous structure and size is 0.2 ~ 1 μm, gap between Kong Yukong is 10 ~ 30 μm, thus obtains the highest sensitive layer of sensitivity.
4, the stability that the material with carbon element of sensitive material and flexible macromolecule polymer have had is prepared; therefore; the sensitive layer prepared has good stability, then in conjunction with flexible substrate and protective layer, is easy to form stable entirety and manufacture the frivolous pressure transducer with optimum performance.
The attached pliable pressure sensor of the present embodiment have frivolous, attaching property is good, accuracy of detection is high, to features such as skin are non-stimulated, the described sensitive layer attaching pliable pressure sensor can be responded to when human pulse is beated the lateral pressure that blood vessel wall produces, thus by originally can attach pliable pressure sensor be attached to the just right skin surface in human pulse position time, can detect and obtain human pulse ripple.
Embodiment two:
Refer to Fig. 1; embodiments provide one and can attach pliable pressure sensor; it comprises: flexible substrate 4, sensitive layer 3, electrode layer 2 and flexible cover sheet 1; described sensitive layer 3 is formed at flexible substrate 4 surface and has three-dimensional cavernous structure; described electrode layer 2 comprises two strip electrodes; described electrode is drawn from sensitive layer 3 surface, and described flexible cover sheet 1 is formed at sensitive layer 3 surface and electrode layer 2 is positioned at the part on sensitive layer 3 surface.
As shown in Figure 3, when Fig. 3 is material with carbon element in the embodiment of the present invention, mass ratio between volatile solvent and flexible macromolecule polymer three is 2:4:1, the prepared SEM figure with the sensitive material of three-dimensional cavernous structure.
Described sensitive layer has three-dimensional cavernous structure, and described three-dimensional cavernous structure is formed by following steps:
S1, by ultrasonic 60min after 2g redox graphene and 4g ethanol mix homogeneously, obtain slurry mixture, add the PDMS of 1g in the mixture, then to stir after 1h to obtain mixture of viscous form;
S2, mixture of viscous form evenly to be applied on flexible substrates, and the 1h that is heating and curing at 90 DEG C, make it polymerization, along with the volatilization of ethanol in this process, vent will be formed and then introduce gas phase in PDMS, realize gas-solid biphase existence in material, form the sensitive layer of the three-dimensional cavernous structure of similar ants ' nest shape, the size in the hole of described sensitive layer is uneven, is 2 ~ 5 μm, and gap between Kong Yukong is not etc., is 40 ~ 70 μm.
Wherein, the painting method in described step S2 can be spin coating, smear, brushes or print on flexible substrates.
Described flexible substrate is PDMS thin film, and thickness is 100 μm, and described flexible cover sheet is ultra-thin PDMS thin film, and its thickness is 20 μm, and described flexible substrate and flexible cover sheet all have good biocompatibility; Described electrode layer is ultra-thin conductive non-woven fabrics, and its thickness is 200 μm, and width is 5mm, draws two strip electrodes by the mode of pasting from sensitive layer surface.
Wherein, described electrode layer can also be Copper Foil, and its thickness is 100 μm, and width is 5mm, draws two strip electrodes by the mode of pasting from sensitive layer surface.
Correspondingly, present invention also offers a kind of preparation method attaching pliable pressure sensor, described preparation method comprises the following steps:
S1, flexible substrate to be cleaned and dry, described flexible substrate to be thickness the be PDMS thin film of 100 μm;
S2, by ultrasonic 60min after the ethanol mix homogeneously of 2g redox graphene and 4g, obtain slurry mixture, in slurry mixture, adding the PDMS that quality is 1g, (density is 1.043g/cm
3), obtain mixture of viscous form after stirring 1h;
S3, mixture of viscous form obtained in step S2 is coated in flexible substrate PDMS on the surface, then be heating and curing 1h at 90 DEG C, and then form the sensitive layer with three-dimensional cavernous structure, the size in the hole of described sensitive layer is uneven, it is 2 ~ 5 μm, and gap between Kong Yukong is not etc., is 40 ~ 70 μm;
S4, in step s3 sensitive layer surface draw two strip electrodes;
S5, be the PDMS thin film of 20 μm at electrode layer and sensitive layer surface-coated thickness, form protective layer, be then heating and curing 1h at 80 DEG C, and protective layer, electrode layer, sensitive layer and flexible substrate are combined together.
Of the present inventionly attach pliable pressure sensor and preparation method thereof, there is following beneficial effect:
1, sensitive layer preparation process of the present invention is simple, convenient.
2, sensitive layer of the present invention has the three-dimensional cavernous structure of similar ants ' nest, realize gas-solid biphase existence in material, so have higher sensitivity, the range of linearity of ambient pressure to material deformation is wider, so the range of linearity of pressure and sensor electrical signal intensity is larger.
3, by regulating material with carbon element, volatile solvent, the ratio of flexible macromolecule polymer three regulates and controls the density in the hole of three-dimensional cavernous structure and size is 2 ~ 5 μm, the gap between Kong Yukong is 40 ~ 70 μm, thus obtains the highest sensitive layer of sensitivity.
4, sensitive layer of the present invention has good stability, then in conjunction with flexible substrate and protective layer, is easy to form stable entirety and manufactures and have the frivolous of optimum performance and attach pliable pressure sensor.
The attached pliable pressure sensor of the embodiment of the present invention have frivolous, attaching property is good, accuracy of detection is high, to features such as skin are non-stimulated, be integrated in by flexible sensor on the fabric contacted with wrist or be directly attached to microseismic data wrist pulse gathering pulse, effective monitoring human wrist pulse is beated situation.
Embodiment three:
Refer to Fig. 1; embodiments provide one and can attach pliable pressure sensor; it comprises: flexible substrate 4, sensitive layer 3, electrode layer 2 and flexible cover sheet 1; described sensitive layer 3 is formed at flexible substrate 4 surface and has three-dimensional cavernous structure; described electrode layer 2 comprises two strip electrodes; described electrode is drawn from sensitive layer 3 surface, described flexible cover sheet 1 is formed at sensitive layer 3 surface and electrode layer 2 is positioned at the part on sensitive layer 3 surface.
As shown in Figure 4, when Fig. 4 is material with carbon element in the embodiment of the present invention, mass ratio between volatile solvent and flexible macromolecule polymer three is 1:3:1, the prepared SEM figure with the sensitive material of three-dimensional cavernous structure.
Described sensitive layer has three-dimensional cavernous structure, and described three-dimensional cavernous structure is formed by following steps:
S1, by ultrasonic 100min after 1g redox graphene and 3g ethanol mix homogeneously, obtain slurry mixture, in slurry mixture, add the PDMS of 1g, then to stir after 2h to obtain mixture of viscous form;
S2, mixture of viscous form evenly to be applied on flexible substrates, and the 2h that is heating and curing at 70 DEG C, make it polymerization, along with the volatilization of ethanol in this process, vent will be formed and then introduce gas phase in PDMS, realize gas-solid biphase existence in material, form the sensitive layer of the three-dimensional cavernous structure of similar ants ' nest shape, the size in the hole of described sensitive layer is uneven, is 7 ~ 13 μm, and gap between Kong Yukong is not etc., is 50 ~ 90 μm.
Wherein, the painting method in described step S2 can be spin coating, smear, brushes or print on flexible substrates.
Described flexible substrate is PDMS thin film, and thickness is 80 μm, and described flexible cover sheet is ultra-thin PDMS thin film, and its thickness is 10 μm, and described flexible substrate and flexible cover sheet all have good biocompatibility; Described electrode layer is ultra-thin conductive non-woven fabrics, and its thickness is 60 μm, and width is 1.5mm, is drawn from sensitive layer surface by the mode of pasting.
Wherein, described electrode layer can also be Copper Foil, and its thickness is 10 μm, and width is 5mm, is drawn from sensitive layer surface by the mode of pasting.
Correspondingly, present invention also offers a kind of preparation method of pressure transducer, described preparation method comprises the following steps:
S1, flexible substrate to be cleaned and dry, described flexible substrate to be thickness the be PDMS thin film of 80 μm;
S2, by ultrasonic 100min after the ethanol mix homogeneously of 1g redox graphene and 3g, obtain slurry mixture, in slurry mixture, adding the PDMS that quality is 1g, (density is 1.043g/cm
3), obtain mixture of viscous form after stirring 2h;
S3, mixture of viscous form obtained in step S2 is coated in flexible substrate PDMS on the surface, then be heating and curing 2h at 70 DEG C, and then form the sensitive layer with three-dimensional cavernous structure, the size in the hole of described sensitive layer is uneven, it is 7 ~ 13 μm, and gap between Kong Yukong is not etc., is 50 ~ 90 μm;
S4, in step s3 sensitive layer surface draw two strip electrodes;
S5, be the PDMS thin film of 10 μm at electrode layer and sensitive layer surface-coated thickness, form protective layer, be then heating and curing 2h at 70 DEG C, and protective layer, electrode layer, sensitive layer and flexible substrate are combined together.
Refer to Fig. 5, Fig. 5 be to originally can attach pliable pressure sensor apply pressure time current-vs-time figure, can find out in figure when in the time be 10.2s start to apply 0.8Pa pressure time, device output current signal obviously change.According to the computing formula of sensitivity
wherein,
before and after representing force, curent change is poor, draws by figure
represent the pressure differential 0.8Pa before and after curent change, I
0represent initial current value 121.2, calculate result S=8.25KPa
-1; In addition, when in the time be 10.2s start applying be less than 0.8Pa pressure time, device output current signal intensity is not obvious, so minimum detection is limited to 0.8Pa; When in the time be 10.2s start applying be greater than 0.8Pa pressure time, obviously, sensitivity is higher for the change of change output current signal.
Of the present inventionly attach pliable pressure sensor and preparation method thereof, there is following beneficial effect:
1, sensitive layer preparation process of the present invention is simple, convenient.
2, sensitive layer of the present invention has the three-dimensional cavernous structure of similar ants ' nest, realize gas-solid biphase existence in material, so have higher sensitivity, the range of linearity of ambient pressure to material deformation is wider, so the range of linearity of pressure and sensor electrical signal intensity is larger.
3, by regulating material with carbon element, volatile solvent, the ratio of flexible macromolecule polymer three regulates and controls the density in the hole of three-dimensional cavernous structure and size is 7 ~ 13 μm, gap between Kong Yukong is 50 ~ 90 μm, thus obtain the highest sensitive layer of sensitivity, be 8.25KPa according to calculating its sensitivity
-1, its lowest detection is limited to 0.8Pa.
4, sensitive layer of the present invention has good stability; again in conjunction with flexible substrate and protective layer; be easy on finished product medicated clothing, form stable entirety and manufacture the frivolous pliable pressure sensor that attaches with optimum performance, and then be applied to and can attach in device.
Embodiment four:
Refer to Fig. 1; embodiments provide one and can attach pliable pressure sensor; it comprises: flexible substrate 4, sensitive layer 3, electrode layer 2 and flexible cover sheet 1; described sensitive layer 3 is formed at flexible substrate 4 surface and has three-dimensional cavernous structure; described electrode layer 2 comprises four strip electrodes; described electrode is drawn from sensitive layer 3 surface, and described flexible cover sheet 1 is formed at sensitive layer 3 surface and electrode layer 2 is positioned at the part on sensitive layer 3 surface.
Described sensitive layer has three-dimensional cavernous structure, and described three-dimensional cavernous structure is formed by following steps:
S1, by ultrasonic 80min after 10g redox graphene powder and 100g ethanol mix homogeneously, obtain slurry mixture, in slurry mixture, add the polydimethylsiloxane of 1g, then to stir after 1.5h to obtain mixture of viscous form;
S2, mixture of viscous form evenly to be applied on flexible substrates, and the 2.5h that is heating and curing at 60 DEG C, make it polymerization, along with the volatilization of ethanol in this process, vent will be formed and then introduce gas phase in polydimethylsiloxane, realize gas-solid biphase existence in material, form the sensitive layer of the three-dimensional cavernous structure of similar ants ' nest shape, the size in the hole of described sensitive layer is uneven, is 15 ~ 20 μm, and gap between Kong Yukong is not etc., is 150 ~ 200 μm.
Wherein, redox graphene powder in step S1 can be changed to Graphene, graphene oxide, CNT (single wall or many walls), ethanol can be changed to the effumability solvents such as carbon tetrachloride, dichloromethane, ethyl acetate and acetone, and the painting method in described step S2 can also be smear, brush or print on flexible substrates.
Described flexible substrate is polyimides (Polyimide, PI) thin film, and thickness is 300 μm, and described flexible cover sheet is ultra-thin PDMS thin film, and its thickness is 10 μm, and described flexible substrate and flexible cover sheet all have good biocompatibility;
Described electrode layer material is redox graphene, and the mode of being cut by physics draws four strip electrodes from sensitive layer surface, and described thickness of electrode is 330 μm, and width is 0.5mm.
Described flexible substrate can also be ethylene-vinyl acetate copolymer (ethylene-vinylacetatecopolymer, EVA), polyvinyl alcohol (polyvinylalcohol, PVA), polyethylene (Polyethylene, PE) thin film and polyethylene terephthalate (Polyethyleneterephthalate, PET), thickness is 300 μm, and described flexible cover sheet can also be ultra-thin PE thin film and eva film, and its thickness is 12 μm; The material of described electrode layer can also be gold, platinum, nickel, silver, indium, CNT, nano silver wire, diameter 50 μm of enamel covered wires, 10 μm thick and with one or more the combination in the flat copper foil belt of pressure-sensitive adhesive.
Correspondingly, present invention also offers a kind of preparation method attaching pliable pressure sensor, described preparation method comprises the following steps:
S1, flexible substrate to be cleaned and dry, described flexible substrate to be thickness be EVA, PVA, PI, PE or the PET film of 300 μm;
S2, by ultrasonic 80min after the ethanol mix homogeneously of 10g redox graphene powder and 100g, obtain slurry mixture, in slurry mixture, adding the polydimethylsiloxane that quality is 1g, (density is 1.043g/cm
3), obtain mixture of viscous form after stirring 1.5h;
S3, mixture of viscous form obtained in step S2 is coated in flexible substrate EVA, PVA, PI, PE or PET film on the surface, then be heating and curing 2.5h at 60 DEG C, and then form the sensitive layer with three-dimensional cavernous structure, the size in the hole of described sensitive layer is uneven, it is 15 ~ 20 μm, and gap between Kong Yukong is not etc., is 150 ~ 200 μm;
S4, in step s3 sensitive layer surface draw four strip electrodes;
S5, at electrode layer and sensitive layer surface-coated thickness be 10 μm PDMS thin film, thickness to be the ultra-thin PE thin film of 12 μm or thickness the be eva film of 12 μm; form protective layer; then be heating and curing 1.5h at 80 DEG C, and protective layer, electrode layer, sensitive layer and flexible substrate are combined together.
Of the present inventionly attach pliable pressure sensor and preparation method thereof, there is following beneficial effect:
1, preparation method of the present invention has simple, the easy to operate advantage of technique.
2, sensitive layer of the present invention has the three-dimensional cavernous structure of similar ants ' nest, realize gas-solid biphase existence in material, so have higher sensitivity, the range of linearity of ambient pressure to material deformation is wider, so the range of linearity of pressure and sensor electrical signal intensity is larger.
3, by regulating material with carbon element, volatile solvent, the ratio of flexible macromolecule polymer three regulates and controls the density in the hole of three-dimensional cavernous structure and size is 15 ~ 20 μm, gap between Kong Yukong is 150 ~ 200 μm, thus obtains the highest sensitive layer of sensitivity.
4, sensitive layer of the present invention has good stability, then is flexible material in conjunction with flexible substrate and protective layer, is easy to form stable entirety and manufactures and have the frivolous of optimum performance and attach pliable pressure sensor.
Embodiment five:
Refer to Fig. 1; embodiments provide one and can attach pliable pressure sensor; it comprises: flexible substrate 4, sensitive layer 3, electrode layer 2 and flexible cover sheet 1; described sensitive layer 3 is formed at flexible substrate 4 surface and has three-dimensional cavernous structure; described electrode layer 2 comprises four strip electrodes; described electrode is drawn from sensitive layer 3 surface, and described flexible cover sheet 1 is formed at sensitive layer 3 surface and electrode layer 2 is positioned at the part on sensitive layer 3 surface.
Described sensitive layer has three-dimensional cavernous structure, and described three-dimensional cavernous structure is formed by following steps:
S1, by ultrasonic 80min after 15g redox graphene powder and 300g ethanol mix homogeneously, obtain slurry mixture, add the polydimethylsiloxane of 1g in the mixture, then to stir after 2.5h to obtain mixture of viscous form;
S2, mixture of viscous form evenly to be applied on flexible substrates, and the 1.5h that is heating and curing at 50 DEG C, make it polymerization, along with the volatilization of ethanol in this process, vent will be formed and then introduce gas phase in polydimethylsiloxane, realize gas-solid biphase existence in material, form the sensitive layer of the three-dimensional cavernous structure of similar ants ' nest shape, the size in the hole of described sensitive layer is uneven, is 10 ~ 25 μm, and gap between Kong Yukong is not etc., is 120 ~ 160 μm.
Wherein, redox graphene powder in step S1 can be changed to Graphene, graphene oxide, CNT (single wall or many walls), ethanol can be changed to the effumability solvents such as carbon tetrachloride, dichloromethane, ethyl acetate and acetone, and the painting method in described step S2 can also be printing, smear or brush on flexible substrates.
Described flexible substrate is PI thin film, and thickness is 500 μm, and described flexible cover sheet is ultra-thin PDMS thin film, and its thickness is 30 μm, and described flexible substrate and flexible cover sheet all have good biocompatibility; Described electrode layer material is Graphene, and the mode of being cut by physics draws four strip electrodes from sensitive layer surface, and described thickness of electrode is 600 μm, and width is 0.5mm.
Described flexible substrate can also be EVA, PVA, PE or PET film, and thickness is 500 μm, and described flexible cover sheet can also be ultra-thin PE thin film or eva film, and its thickness is 30 μm; The material of described electrode layer can also be gold, platinum, nickel, silver, indium, CNT, nano silver wire, diameter 150 μm of enamel covered wires, 50 μm thick and with one or more the combination in the flat copper foil belt of pressure-sensitive adhesive.
Correspondingly, present invention also offers a kind of preparation method attaching pliable pressure sensor, described preparation method comprises the following steps:
S1, flexible substrate to be cleaned and dry, described flexible substrate to be thickness be EVA, PVA, PI, PE or the PET film of 500 μm;
S2, by ultrasonic 80min after the ethanol mix homogeneously of 15g redox graphene powder and 300g, obtain slurry mixture, (density is 1.043g/cm to add the polydimethylsiloxane that quality is 1g in the mixture
3), obtain mixture of viscous form after stirring 2.5h;
S3, mixture of viscous form obtained in step S2 is coated in flexible substrate EVA, PVA, PI, PE or PET film on the surface, then be heating and curing 1.5h at 50 DEG C, and then form the sensitive layer with three-dimensional cavernous structure, the size in the hole of described sensitive layer is uneven, it is 10 ~ 25 μm, and gap between Kong Yukong is not etc., is 120 ~ 160 μm;
S4, in step s3 sensitive layer surface draw four strip electrodes;
S5, at electrode layer and sensitive layer surface-coated thickness be 40 μm PDMS thin film, thickness to be the ultra-thin PE thin film of 40 μm or thickness the be eva film of 40 μm; form protective layer; then be heating and curing 2h at 75 DEG C, and protective layer, electrode layer, sensitive layer and flexible substrate are combined together.
Of the present inventionly attach pliable pressure sensor and preparation method thereof, there is following beneficial effect:
1, method of the present invention has the advantage of simple, the easy to operate and applicable large-scale industrial production of cheaper starting materials, technique.
2, sensitive layer of the present invention has the three-dimensional cavernous structure of similar ants ' nest, realize gas-solid biphase existence in material, so have higher sensitivity, the range of linearity of ambient pressure to material deformation is wider, so the range of linearity of pressure and sensor electrical signal intensity is larger.
3, by regulating material with carbon element, volatile solvent, the ratio of flexible macromolecule polymer three regulates and controls the density in the hole of three-dimensional cavernous structure and size is 10 ~ 25 μm, gap between Kong Yukong is 120 ~ 160 μm, thus obtains the highest sensitive layer of sensitivity.
4, sensitive layer of the present invention has good stability, then is flexible material in conjunction with flexible substrate and protective layer, is easy to form stable entirety and manufactures and have the frivolous of optimum performance and attach pliable pressure sensor.
Embodiment six:
Refer to Fig. 1; embodiments provide one and can attach pliable pressure sensor; it comprises: flexible substrate 4, sensitive layer 3, electrode layer 2 and flexible cover sheet 1; described sensitive layer 3 is formed at flexible substrate 4 surface and has three-dimensional cavernous structure; described electrode layer 2 comprises two strip electrodes; described electrode is drawn from sensitive layer 3 surface, and described flexible cover sheet 1 is formed at sensitive layer 3 surface and electrode layer 2 is positioned at the part on sensitive layer 3 surface.
Described sensitive layer has three-dimensional cavernous structure, and described three-dimensional cavernous structure is formed by following steps:
S1, by ultrasonic 90min after 35g redox graphene powder and 1050g ethanol mix homogeneously, obtain slurry mixture, add the polydimethylsiloxane of 1g in the mixture, then to stir after 2h to obtain mixture of viscous form;
S2, mixture of viscous form evenly to be applied on flexible substrates, and the 2.5h that is heating and curing at 80 DEG C, make it polymerization, along with the volatilization of ethanol in this process, vent will be formed and then introduce gas phase in polydimethylsiloxane, realize gas-solid biphase existence in material, form the sensitive layer of the three-dimensional cavernous structure of similar ants ' nest shape, the size in the hole of described sensitive layer is uneven, is 6 ~ 10 μm, and gap between Kong Yukong is not etc., is 80 ~ 110 μm.
Wherein, redox graphene powder in step S1 can be changed to Graphene, graphene oxide, CNT (single wall or many walls), ethanol can be changed to the effumability solvents such as carbon tetrachloride, dichloromethane, ethyl acetate and acetone, and the painting method in described step S2 can also be printing, smear or brush on flexible substrates.
Described flexible substrate is PI thin film, and thickness is 1000 μm, and described flexible cover sheet is ultra-thin PDMS thin film, and its thickness is 45 μm, and described flexible substrate and flexible cover sheet all have good biocompatibility; Described electrode layer material is Graphene, and the mode of being cut by physics draws two strip electrodes from sensitive layer surface, and described thickness of electrode is 1000 μm, and width is 0.5mm.
Described flexible substrate can also be EVA, PVA, PE or PET film, and thickness is 1000 μm, and described flexible cover sheet can also be ultra-thin PE thin film or eva film, and its thickness is 40 μm; The material of described electrode layer can also be gold, platinum, nickel, silver, indium, CNT, nano silver wire, diameter 300 μm of enamel covered wires, 100 μm thick and with one or more the combination in the flat copper foil belt of pressure-sensitive adhesive.
Correspondingly, present invention also offers a kind of preparation method attaching pliable pressure sensor, described preparation method comprises the following steps:
S1, flexible substrate to be cleaned and dry, described flexible substrate to be thickness be EVA, PVA, PI, PE or the PET film of 1000 μm;
S2, by ultrasonic 90min after the ethanol mix homogeneously of 35g redox graphene powder and 1050g, obtain slurry mixture, (density is 1.043g/cm to add the polydimethylsiloxane that quality is 1g in the mixture
3), obtain mixture of viscous form after stirring 2h;
S3, mixture of viscous form obtained in step S2 is coated in flexible substrate EVA, PVA, PI, PE or PET film on the surface, then be heating and curing 2.5h at 80 DEG C, and then form the sensitive layer with three-dimensional cavernous structure, the size in the hole of described sensitive layer is uneven, it is 6 ~ 10 μm, and gap between Kong Yukong is not etc., is 80 ~ 110 μm;
S4, in step s3 sensitive layer surface draw two strip electrodes;
S5, at electrode layer and sensitive layer surface-coated thickness be 45 μm PDMS thin film, thickness to be the ultra-thin PE thin film of 45 μm or thickness the be eva film of 45 μm; form protective layer; then be heating and curing 2h at 75 DEG C, and protective layer, electrode layer, sensitive layer and flexible substrate are combined together.
Of the present inventionly attach pliable pressure sensor and preparation method thereof, there is following beneficial effect:
1, method of the present invention has the advantage of simple, the easy to operate and applicable large-scale industrial production of cheaper starting materials, technique.
2, sensitive layer of the present invention has the three-dimensional cavernous structure of similar ants ' nest, realize gas-solid biphase existence in material, so have higher sensitivity, the range of linearity of ambient pressure to material deformation is wider, so the range of linearity of pressure and sensor electrical signal intensity is larger.
3, by regulating material with carbon element, volatile solvent, the ratio of flexible macromolecule polymer three regulates and controls the density in the hole of three-dimensional cavernous structure and size is 6 ~ 10 μm, gap between Kong Yukong is 80 ~ 110 μm, thus obtains the highest sensitive layer of sensitivity.
4, sensitive layer of the present invention has good stability, then is flexible material in conjunction with flexible substrate and protective layer, is easy to form stable entirety and manufactures and have the frivolous of optimum performance and attach pliable pressure sensor.
Embodiment seven:
Refer to Fig. 1; embodiments provide one and can attach pliable pressure sensor; it comprises: flexible substrate 4, sensitive layer 3, electrode layer 2 and flexible cover sheet 1; described sensitive layer 3 is formed at flexible substrate 4 surface and has three-dimensional cavernous structure; described electrode layer 2 comprises two strip electrodes; described electrode is drawn from sensitive layer 3 surface, and described flexible cover sheet 1 is formed at sensitive layer 3 surface and electrode layer 2 is positioned at the part on sensitive layer 3 surface.
Described sensitive layer has three-dimensional cavernous structure, and described three-dimensional cavernous structure is formed by following steps:
S1, by ultrasonic 120min after 50g carbon nanotube powder and 2500g carbon tetrachloride mix homogeneously, obtain slurry mixture, add the polydimethylsiloxane of 1g in the mixture, then to stir after 3h to obtain mixture of viscous form;
S2, mixture of viscous form evenly to be applied on flexible substrates, and the 2h that is heating and curing at 75 DEG C, make it polymerization, along with the volatilization of carbon tetrachloride in this process, vent will be formed and then introduce gas phase in polydimethylsiloxane, realize gas-solid biphase existence in material, form the sensitive layer of the three-dimensional cavernous structure of similar ants ' nest shape, the size in the hole of described sensitive layer is uneven, is 12 ~ 16 μm, and gap between Kong Yukong is not etc., is 100 ~ 170 μm.
Wherein, CNT in step S1 can be changed to Graphene, redox graphene and graphene oxide, carbon tetrachloride can be changed to the effumability solvents such as ethanol, dichloromethane, ethyl acetate and acetone, and the painting method in described step S2 can also be printing, smear or brush on flexible substrates.
Described flexible substrate is PI thin film, and thickness is 2000 μm, and described flexible cover sheet is ultra-thin PDMS thin film, and its thickness is 50 μm, and described flexible substrate and flexible cover sheet all have biocompatibility; Described electrode layer material is nano silver wire, and draw two strip electrodes by the mode of printing from sensitive layer surface, described thickness of electrode is 1000 μm, and width is 0.5mm.
Described flexible substrate can also be EVA, PVA, PE or PET film, and thickness is 2000 μm, and described flexible cover sheet can also be ultra-thin PE thin film or eva film, and its thickness is 50 μm; The material of described electrode layer can also be gold, platinum, nickel, silver, indium, CNT, nano silver wire, diameter 500 μm of enamel covered wires, 200 μm thick and with one or more the combination in the flat copper foil belt of pressure-sensitive adhesive.
Correspondingly, present invention also offers a kind of preparation method attaching pliable pressure sensor, described preparation method comprises the following steps:
S1, flexible substrate to be cleaned and dry, described flexible substrate to be thickness be EVA, PVA, PI, PE or the PET film of 2000 μm;
S2, by ultrasonic 120min after the carbon tetrachloride mix homogeneously of 50g carbon nanotube powder and 2500g, obtain slurry mixture, (density is 1.043g/cm to add the polydimethylsiloxane that quality is 1g in the mixture
3), obtain mixture of viscous form after stirring 3h;
S3, mixture of viscous form obtained in step S2 is coated in flexible substrate EVA, PVA, PI, PE or PET film on the surface, then be heating and curing 2h at 75 DEG C, and then form the sensitive layer with three-dimensional cavernous structure, the size in the hole of described sensitive layer is uneven, it is 12 ~ 16 μm, and gap between Kong Yukong is not etc., is 100 ~ 170 μm;
S4, in step s3 sensitive layer surface draw two strip electrodes;
S5, at electrode layer and sensitive layer surface-coated thickness be 50 μm PDMS thin film, thickness to be the ultra-thin PE thin film of 50 μm or thickness the be eva film of 50 μm; form protective layer; then be heating and curing 3h at 80 DEG C, and protective layer, electrode layer, sensitive layer and flexible substrate are combined together.
Of the present inventionly attach pliable pressure sensor and preparation method thereof, there is following beneficial effect:
1, method of the present invention has the advantage of simple, the easy to operate and applicable large-scale industrial production of cheaper starting materials, technique.
2, sensitive layer of the present invention has the three-dimensional cavernous structure of similar ants ' nest, realize gas-solid biphase existence in material, so have higher sensitivity, the range of linearity of ambient pressure to material deformation is wider, so the range of linearity of pressure and sensor electrical signal intensity is larger.
3, by regulating material with carbon element, volatile solvent, the ratio of flexible macromolecule polymer three regulates and controls the density in the hole of three-dimensional cavernous structure and size is 12 ~ 16 μm, gap between Kong Yukong is 100 ~ 170 μm, thus obtains the highest sensitive layer of sensitivity.
4, the sensitive layer in the present invention has good stability, then in conjunction with flexible substrate and protective layer, is easy to manufacture in the stable entirety of formation have the frivolous of optimum performance and attach pliable pressure sensor.
The above is the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the premise without departing from the principles of the invention; can also make some improvements and modifications, these improvements and modifications are also considered as protection scope of the present invention.
Claims (10)
1. one kind can attach pliable pressure sensor, it is characterized in that, comprise: flexible substrate (4), sensitive layer (3), electrode layer (2) and flexible cover sheet (1), described sensitive layer (3) is formed at flexible substrate (4) surface and has three-dimensional cavernous structure, described sensitive layer (3) is by material with carbon element, volatile solvent and flexible high molecular material are prepared from, described electrode layer (2) comprises at least two strip electrodes, described electrode is drawn from sensitive layer (3) surface, described flexible cover sheet (1) is formed at sensitive layer (3) surface and electrode layer (2) is positioned at the surperficial part of sensitive layer (3).
2. according to claim 1ly attach pliable pressure sensor, the size in the hole of described sensitive layer (3) is 0.2 ~ 20 μm, and the gap between Kong Yukong is 10 ~ 200 μm.
3. according to claim 2ly attach pliable pressure sensor, it is characterized in that, described flexible substrate (4) and flexible cover sheet (1) all have good biocompatibility;
Described electrode is drawn from sensitive layer (3) surface by the mode of pasting, printing or physics cutting.
4. according to claim 3ly attach pliable pressure sensor, it is characterized in that, the material of described electrode layer (2) is conductive non-woven fabrics, Copper Foil, enamel-covered wire or the flat copper foil belt with pressure-sensitive adhesive, the thickness of described conductive non-woven fabrics is 10 ~ 1000 μm, the thickness of described Copper Foil is 5 ~ 1000 μm, the diameter of described enamel-covered wire is 50 ~ 500 μm, and the thickness of the described flat copper foil belt with pressure-sensitive adhesive is 10 ~ 200 μm.
5. according to claim 3ly attach pliable pressure sensor, it is characterized in that, the material of described electrode layer (2) is selected from one or more the combination in gold, platinum, nickel, silver, indium, CNT, Graphene.
6. the attached pliable pressure sensor according to claim 4 or 5, it is characterized in that, the thickness of described flexible substrate (4) is 10 ~ 2000 μm, and described flexible substrate (4) is ethylene-vinyl acetate copolymer, polyvinyl alcohol, polydimethylsiloxane, polyethylene terephthalate, polyimides and poly one;
Described flexible cover sheet (1) is polydimethylsiloxanefilm film, polyethylene or ethylene-vinyl acetate copolymer thin film, and its thickness is 5 ~ 50 μm.
7. can attach a preparation method for pliable pressure sensor, it is characterized in that, comprise the following steps:
S1, flexible substrate to be cleaned and dry;
S2, material with carbon element and volatile solvent are mixed by a certain percentage after carry out supersound process, obtain slurry mixture, in slurry mixture, add a certain amount of flexible macromolecule polymer, after stirring mixture of viscous form;
S3, mixture of viscous form obtained in step S2 is coated in flexible substrate on the surface, then be heating and curing, and then form the sensitive layer with three-dimensional cavernous structure, and the size in described sensitive layer hole is 0.2 ~ 20 μm, and the gap between Kong Yukong is 10 ~ 200 μm;
S4, in step s3 sensitive layer surface draw at least two strip electrodes, formed electrode layer;
S5, there is at electrode layer and sensitive layer surface-coated the material of good biocompatibility, form protective layer, be then heating and curing, protective layer, electrode layer, sensitive layer and flexible substrate are combined together.
8. the preparation method attaching pliable pressure sensor according to claim 7, it is characterized in that, in described step S2, the mass ratio of material with carbon element and volatile solvent is 1:1 ~ 1:50, sonication treatment time is 1 ~ 120min, the flexible macromolecule polymer added in mixture and the mass ratio of material with carbon element are 1:0.5 ~ 1:50, and mixing time is 0.5 ~ 3h.
9. the preparation method of the attached pliable pressure sensor according to claim 7 or 8, it is characterized in that, the material with carbon element of described step S2 is one or more the combination in Graphene, redox graphene, graphene oxide, CNT, and described volatile solvent is one or more the combination in ethanol, carbon tetrachloride, dichloromethane, ethyl acetate and acetone.
10. the preparation method of the attached pliable pressure sensor according to claim 7 or 8, is characterized in that, the heating-up temperature of described step S3 is 40 ~ 90 DEG C, and heat time heating time is 1 ~ 3h; The heating-up temperature of step S5 is 70 ~ 80 DEG C, and heat time heating time is 1 ~ 3h.
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| CN103743438B (en) * | 2013-12-31 | 2016-01-20 | 东北大学 | Compound soft line pressure shift sensitive element and method of production thereof |
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