CN109323781A - A method of preparing flexible self energizing integrated pressure sensor array - Google Patents
A method of preparing flexible self energizing integrated pressure sensor array Download PDFInfo
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- CN109323781A CN109323781A CN201810952194.3A CN201810952194A CN109323781A CN 109323781 A CN109323781 A CN 109323781A CN 201810952194 A CN201810952194 A CN 201810952194A CN 109323781 A CN109323781 A CN 109323781A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/10—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation comprising heterojunctions between organic semiconductors and inorganic semiconductors
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
Abstract
The embodiment of the invention discloses a kind of pliable pressure sensor array preparation methods of novel self energizing, it can use crossed electrode and forms capacitive sensor array, and solar cell flexible is integrated on sensor array, sensor performance after integrated solar is held essentially constant, and a flexible capacitor is also added among sensor and solar battery.The sensor array of the method preparation of the embodiment of the present invention can work normally under light illumination, and can detect the pressure of minimum 1Pa, have the good linearity.And this method simple operations, cost is relatively low, is suitble to the needs of large-scale productionization.
Description
Technical field
The present invention relates to solar energy and sensor fields, prepare flexible self energizing integrated pressure biography more particularly, to a kind of
Feel the method for array.
Background technique
With between computer technology, the communication technology and sensing technology infiltration and intelligent terminal it is increasingly general
And strong technical support and vast market prospect are provided for the research of wearable sensor, application field is related to
Sport, game, medical treatment and scientific research etc..The wearable electronic for having tactilely-perceptible function is current one of research hotspot,
So the research and development of flexible sensor are particularly important with evolution.
Traditional sensor, since their rigidity can not capture analyte, signal conversion is very poor.In contrast,
Sensor flexible can more effectively capture object, and generate higher-quality signal.The research and development of flexible sensor need
It does and breaks through in the design of material, including the selection and synthesis of active material and conductive material and flexible substrate.For rigidity
Material, once it is thinning and form nanostructure, so that it may deformation occurs.In emerging flexible sensor material, a wiener
Rice material (such as nano wire, nanotube) and two-dimension nano materials (such as graphene) can also be brought as active material.And
Have highly sensitive and satisfactory electrical conductivity non-transition-metal oxide (such as ZnO, SnO2、Ln2O3And Ga2O3Deng) can also be brought
As active material.
CNTs(carbon nanotube) and AgNWs(silver nanowires) be all monodimension nanometer material, their electric conductivity, draftability,
Transparency is all very high.Different places is the reticular structure that CNTs is hexagon, and AgNWs is simple wire-like knot
Structure, this both will lead in performance somewhat difference, but for being applied on flexible sensor electrode, both
It can.
For base part, including polyimides (PI), polyether-ketone, polyether sulfone (PES), polycarbonate, Macrogol Ester
(PEN), polyester resin (PET), dimethyl silicone polymer (PDMS) etc. can all be used as preparing sensor substrate.Material it is heat-resisting
Property, chemical resistance, the transparency and the flexible practical application that all should be taken into account sensor.
The wearable electronic product of a new generation is required that wearing can be carried out on soft human body surface skin and can
To be stretched (average elongation is from 3% to 55%).Wearable electronic based on fiber also has vast platform, because
It has it is soft, can deformation, the characteristics such as ventilative, durable, washable, therefore also can be the important of the following flexible wearable electronic product
Use material.In addition, nano science and nanotechnology accelerate the miniaturization of electronic equipment in the fast development of last decade.Pass through
By the fusion of the technologies such as textile technology and electro-engineering, the advantageous properties of the two are combined, make modern electronic product
Have quickly response and the properties such as computing capability, flexible wearable, stretchable.
The work of general flexible sensor requires a stable power supply to provide energy, these power supplys are typically rigid
Property, and it is unsatisfactory for the demand of overall flexibility, needless to say health detecting etc. needs the device of high flexibility.
Summary of the invention
An object of the present invention is to provide a kind of pliable pressure sensor array preparation method of novel self energizing.
In one embodiment, a kind of method for preparing flexible self energizing integrated pressure sensor array is provided.This method packet
It includes: obtaining flexible base material, the flexible base material includes PDMS, PI, Ecoflex or PET；By the flexible substrates material
Material is successively cleaned by ultrasonic half an hour in acetone, ethyl alcohol and deionized water, then places in the vacuum chamber half an hour, and will be described
Flexible base material drying；Carbon nanotube, silver nanowires, zinc oxide nanowire or graphene are passed through into spraying method or 3D
Method of printing is sprayed or is printed on the flexible base material, is formed on the flexible base material a plurality of of the same size
Strips of conductive electrode；Using two flexible base materials with strips of conductive electrode by high molecular polymer film as medium
Layer is opposite to fit together, and obtains sensor array layer, wherein the high molecular polymer film is PDMS film, it is opposite to be bonded
The strips of conductive electrode on described two flexible base materials together is mutually perpendicular to；It is formed in the sensor array layer
Flexible capacitor layer；Glass substrate is successively cleaned by ultrasonic half an hour in acetone, ethyl alcohol and deionized water, then in vacuum chamber
Middle placement half an hour, and the glass substrate is dried；Flexible ITO is adhered into the glass substrate by heat-conducting double-sided adhesive tape
On；One layer of SnO 2 thin film is formed on the flexibility ITO by spin coating tin oxide nanoparticles, forms electron transfer layer, so
High annealing is carried out to the electron transfer layer afterwards；Calcium titanium ore bed is formed on the electron transport layer；In the calcium titanium ore bed
Upper spin coating Spiro-OMeTAD forms hole transmission layer；Electrode is formed on the hole transport layer, wherein the flexibility ITO,
The electron transfer layer, the calcium titanium ore bed, the hole transmission layer and the electrode form flexible solar battery layer；By institute
It states flexible solar battery layer to remove from the glass substrate, and is connected on the flexible capacitor layer.
In one embodiment, a plurality of strips of conductive electrode of the same size is formed on the flexible base material includes:
The strips of conductive electrode, and one layer of PDMS of spin coating on the strips of conductive electrode are obtained with the method for suction filtration, is then dissolved
Fall filter paper, makes in the strips of conductive electrode insertion PDMS.
In one embodiment, it includes: not consolidate that the flexible solar battery layer, which is connected to the flexible capacitor layer,
The PDMS of change is coated in the flexible capacitor layer surface, then the flexible solar battery layer is fitted to the institute for having applied PDMS
It states on flexible capacitor layer.
In one embodiment, 16 strips of conductive electrodes of the same size are formed on each flexible base material.
In one embodiment, the size of the sensor array layer is 2 centimetres of 2 cm x.
In one embodiment, two flexible base materials with strips of conductive electrode are passed through into high molecular polymer film
It include: one be spun to also uncured PDMS in described two flexible base materials as opposite fit together of dielectric layer
On a flexible base material, and another flexible base material is affixed on thereon, and solidifies the PDMS.
In one embodiment, two flexible base materials with strips of conductive electrode are passed through into high molecular polymer film
It include: to form high molecular polymer film with macromolecule polymer material as opposite fit together of dielectric layer；By described two
A flexible base material and the high molecular polymer film combine, wherein the high molecular polymer film is located at institute
It states between two flexible base materials as dielectric layer.
In the embodiment of the present invention, a kind of pliable pressure sensor array preparation method of novel self energizing is provided,
It can use the capacitive sensor array that 16 pairs of crossed electrodes form 16*16, and the size of entire device is the 2cm*2cm sun
Energy cell flexible is integrated on sensor array, and the sensor performance after integrated solar is held essentially constant, in order to incite somebody to action
The luminous energy that solar battery absorbs is converted to electrical energy for storage and use, also adds one among sensor and solar battery
A flexible capacitor.The sensor array of this method preparation can work normally under light illumination, and can detect minimum 1Pa
Pressure, have the good linearity.Process simple operations provided by the present invention, cost is relatively low, is suitble to extensive raw
The needs of productionization.
Detailed description of the invention
Fig. 1 is the signal of the flexible self energizing integrated pressure sensor array of method preparation according to an embodiment of the invention
Figure；
Fig. 2 is the schematic diagram for showing sensor array layer according to an embodiment of the invention.
Specific embodiment
Below in conjunction with the manufacture flexibility self energizing integrated pressure sensor array of the attached drawing embodiment that the present invention will be described in detail
Method specific steps.
With reference to Fig. 1 and Fig. 2, in one embodiment, a kind of method preparing flexible self energizing integrated pressure sensor array can
To include the following steps.
It is possible, firstly, to obtain flexible base material 60, the flexible base material 60 may include PDMS, PI, Ecoflex or
PET.Flexible base material 60 is successively cleaned by ultrasonic half an hour in acetone, ethyl alcohol and deionized water, then in the vacuum chamber
Half an hour is placed, and flexible base material 60 is dried.
Then, carbon nanotube, silver nanowires, zinc oxide nanowire or graphene are passed through into spraying method or 3D printing
Method is sprayed or is printed on flexible base material, and a plurality of strips of conductive electrode of the same size is formed on flexible base material
61, and two flexible base materials with strips of conductive electrode 61 are opposite as dielectric layer by high molecular polymer film
It fits together, obtains sensor array layer 6.Wherein high molecular polymer film can be PDMS film, opposite to be fitted in one
The strips of conductive electrode on two flexible base materials risen is mutually perpendicular to.Sensor display layer 6 on can also be arranged respectively with
The conducting wire 62 that each strips of conductive electrode 61 is electrically connected.The response variation of sensor array layer 6 is since thickness of dielectric layers variation is led
Cause capacitance variations.
It is then possible to form flexible capacitor layer 5 in sensor array layer 6.The flexible capacitor layer 5 can store or
Person, which discharges, uses solar cell layer energy obtained described below.
It is then possible to prepare solar cell layer and be connected in the sensor array layer 6.
In one embodiment, glass substrate successively can be cleaned by ultrasonic half an hour in acetone, ethyl alcohol and deionized water,
Then it places in the vacuum chamber half an hour, and glass substrate is dried, flexible ITO is then adhered into glass by heat-conducting double-sided adhesive tape
On glass substrate, and one layer of SnO 2 thin film is formed on flexible ITO by spin coating tin oxide nanoparticles, form electron transfer layer
4, and high annealing is carried out to electron transfer layer 4.Then, calcium titanium ore bed 3 is formed on electron transfer layer 4, and in calcium titanium ore bed 3
Upper spin coating Spiro-OMeTAD forms hole transmission layer 2.Finally, forming electrode 1 on hole transmission layer 2.In this way, flexibility ITO,
Electron transfer layer 4, calcium titanium ore bed 3, hole transmission layer 2 and electrode 1 form flexible solar battery layer.
It is then possible to which flexible solar battery layer is removed from glass substrate, and it is connected on flexible capacitor layer.One
In a embodiment, uncured PDMS can be coated in flexible capacitor layer surface, then be bonded flexible solar battery layer
Onto the flexible capacitor layer for having applied PDMS, so that solar cell layer can adhere securely to flexible capacitor layer.
In one embodiment, strips of conductive electrode above-mentioned can be obtained with the method filtered, and in strips of conductive electrode
One layer of PDMS of upper spin coating, then dissolves filter paper, make strips of conductive electrode insertion PDMS in, thus increase strips of conductive electrode with
The combination stability of flexible base material.
In one embodiment, the size of sensor array layer can be 2 centimetres of 2 cm x, and can be in each flexibility
16 strips of conductive electrodes of the same size are formed on base material.
In one embodiment, two flexible base materials with strips of conductive electrode are passed through into high molecular polymer film
It may include: that also uncured PDMS is spun in described two flexible base materials as opposite fit together of dielectric layer
A flexible base material on, and another flexible base material is affixed on thereon, and solidify the PDMS.
In one embodiment, two flexible base materials with strips of conductive electrode are passed through into high molecular polymer film
It also may include: to form polyphosphazene polymer with macromolecule polymer material (for example, PDMS) as opposite fit together of dielectric layer
Close object film；Described two flexible base materials and the high molecular polymer film are combined, wherein the high score
Sub- thin polymer film is used as dielectric layer between described two flexible base materials.
In the embodiment of the present invention, a kind of pliable pressure sensor array preparation method of novel self energizing is provided,
It can use the capacitive sensor array that 16 pairs of crossed electrodes form 16*16, and the size of entire device is the 2cm*2cm sun
Energy cell flexible is integrated on sensor array, and the sensor performance after integrated solar is held essentially constant, in order to incite somebody to action
The luminous energy that solar battery absorbs is converted to electrical energy for storage and use, also adds one among sensor and solar battery
A flexible capacitor.The sensor array of this method preparation can work normally under light illumination, and can detect minimum 1Pa
Pressure, have the good linearity.Process simple operations provided by the present invention, cost is relatively low, is suitble to extensive raw
The needs of productionization.
Above by specific embodiment, the present invention is described, but the present invention is not limited to these specific implementations
Example.It will be understood by those skilled in the art that various modifications, equivalent replacement, variation etc. can also be done to the present invention, these transformation
It, all should be within protection scope of the present invention without departing from spirit of the invention.In addition, " a reality described in the above many places
Apply example " indicate different embodiments, naturally it is also possible to it is completely or partially combined in one embodiment.
Claims (7)
1. a kind of method for preparing flexible self energizing integrated pressure sensor array characterized by comprising
Flexible base material is obtained, the flexible base material includes PDMS, PI, Ecoflex or PET；
The flexible base material is successively cleaned by ultrasonic half an hour in acetone, ethyl alcohol and deionized water, then in vacuum chamber
Middle placement half an hour, and the flexible base material is dried；
Carbon nanotube, silver nanowires, zinc oxide nanowire or graphene are sprayed by spraying method or 3D printing method
Or print on the flexible base material, a plurality of strips of conductive electricity of the same size is formed on the flexible base material
Pole；
Using two flexible base materials with strips of conductive electrode by high molecular polymer film as the opposite patch of dielectric layer
It is combined, obtains sensor array layer, wherein the high molecular polymer film is PDMS film, fit together relatively
Strips of conductive electrode on described two flexible base materials is mutually perpendicular to；
Flexible capacitor layer is formed in the sensor array layer；
Glass substrate is successively cleaned by ultrasonic half an hour in acetone, ethyl alcohol and deionized water, then places half in the vacuum chamber
Hour, and the glass substrate is dried；
Flexible ITO is adhered in the glass substrate by heat-conducting double-sided adhesive tape；
One layer of SnO 2 thin film is formed on the flexibility ITO by spin coating tin oxide nanoparticles, forms electron transfer layer, so
High annealing is carried out to the electron transfer layer afterwards；
Calcium titanium ore bed is formed on the electron transport layer；
Spin coating Spiro-OMeTAD forms hole transmission layer on the calcium titanium ore bed；
Electrode is formed on the hole transport layer, wherein the flexibility ITO, the electron transfer layer, the calcium titanium ore bed, institute
It states hole transmission layer and the electrode forms flexible solar battery layer；
The flexible solar battery layer is removed from the glass substrate, and is connected on the flexible capacitor layer.
2. the method as described in claim 1, which is characterized in that formed on the flexible base material by mask plate a plurality of
Strips of conductive electrode of the same size includes: the method acquisition strips of conductive electrode with suction filtration, and in the strips of conductive
One layer of PDMS of spin coating, then dissolves filter paper on electrode, makes in the strips of conductive electrode insertion PDMS.
3. method as described in claim 1 or 2, which is characterized in that be connected to the flexible solar battery layer described
Flexible capacitor layer includes: that uncured PDMS is coated in the flexible capacitor layer surface, then by the flexible solar
Battery layers fit on the flexible capacitor layer for having applied PDMS.
4. the method as described in any one of claims 1 to 3, it is characterised in that: on each flexible base material
Form 16 strips of conductive electrodes of the same size.
5. the method as described in any one of Claims 1-4, it is characterised in that: the size of the sensor array layer is 2
2 centimetres of cm x.
6. the method as described in any one of claim 1 to 5, which is characterized in that by two with strips of conductive electrode
Flexible base material includes: by also uncured PDMS as opposite fit together of dielectric layer by high molecular polymer film
It is spun on a flexible base material in described two flexible base materials, and another flexible base material is affixed on it
On, and solidify the PDMS.
7. the method as described in any one of claim 1 to 5, which is characterized in that by two with strips of conductive electrode
Flexible base material is fit together by high molecular polymer film as dielectric layer relatively
High molecular polymer film is formed with macromolecule polymer material；
Described two flexible base materials and the high molecular polymer film are combined, wherein the high molecular polymerization
Object film is used as dielectric layer between described two flexible base materials.
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Cited By (10)
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| CN109974907A (en) * | 2019-03-15 | 2019-07-05 | 钛深科技(深圳)有限公司 | Integrated pliable pressure sensor of actively powering |
| CN110564402A (en) * | 2019-09-16 | 2019-12-13 | 哈尔滨工业大学 | perovskite-like intermediate gel, preparation method thereof and method for preparing electronic skin by using perovskite-like intermediate gel |
| CN111211227A (en) * | 2020-01-13 | 2020-05-29 | 北京交通大学 | Preparation method of solar cell |
| CN111653534A (en) * | 2019-09-24 | 2020-09-11 | 浙江集迈科微电子有限公司 | Manufacturing method of three-dimensional heterogeneous module based on graphene as heat dissipation coating |
| CN111780659A (en) * | 2020-07-02 | 2020-10-16 | 山西工程职业学院 | Touch sensor based on pvdf piezoelectric film |
| CN111791623A (en) * | 2020-07-21 | 2020-10-20 | 艾感科技(广东)有限公司 | Method and device for preparing gas sensor array by ink-jet printing |
| CN112379537A (en) * | 2020-10-27 | 2021-02-19 | 季华实验室 | Perovskite-based spatial terahertz modulator and preparation method |
| CN112562349A (en) * | 2020-12-02 | 2021-03-26 | 湖北文理学院 | Traffic violation detection system |
| CN113049150A (en) * | 2021-02-02 | 2021-06-29 | 诺瑞(深圳)新技术有限公司 | Flexible pressure sensor, preparation method thereof, robot skin and wearable equipment |
| CN113156670A (en) * | 2021-03-29 | 2021-07-23 | 枣庄学院 | Metamaterial modulator |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109974907A (en) * | 2019-03-15 | 2019-07-05 | 钛深科技(深圳)有限公司 | Integrated pliable pressure sensor of actively powering |
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| CN111780659A (en) * | 2020-07-02 | 2020-10-16 | 山西工程职业学院 | Touch sensor based on pvdf piezoelectric film |
| CN111780659B (en) * | 2020-07-02 | 2022-06-28 | 山西工程职业学院 | Touch sensor based on pvdf piezoelectric film |
| CN111791623A (en) * | 2020-07-21 | 2020-10-20 | 艾感科技(广东)有限公司 | Method and device for preparing gas sensor array by ink-jet printing |
| CN112379537A (en) * | 2020-10-27 | 2021-02-19 | 季华实验室 | Perovskite-based spatial terahertz modulator and preparation method |
| CN112379537B (en) * | 2020-10-27 | 2023-01-31 | 季华实验室 | Perovskite-based spatial terahertz modulator and preparation method |
| CN112562349A (en) * | 2020-12-02 | 2021-03-26 | 湖北文理学院 | Traffic violation detection system |
| CN113049150A (en) * | 2021-02-02 | 2021-06-29 | 诺瑞(深圳)新技术有限公司 | Flexible pressure sensor, preparation method thereof, robot skin and wearable equipment |
| CN113156670A (en) * | 2021-03-29 | 2021-07-23 | 枣庄学院 | Metamaterial modulator |
| CN113156670B (en) * | 2021-03-29 | 2022-07-12 | 江苏大学 | Metamaterial modulator |
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