CN111211227A - Preparation method of solar cell - Google Patents

Preparation method of solar cell Download PDF

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Publication number
CN111211227A
CN111211227A CN202010033197.4A CN202010033197A CN111211227A CN 111211227 A CN111211227 A CN 111211227A CN 202010033197 A CN202010033197 A CN 202010033197A CN 111211227 A CN111211227 A CN 111211227A
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solar cell
ito
electrode
metal electrode
evaporation
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孙盟杰
梁春军
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Beijing Jiaotong University
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Beijing Jiaotong University
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Priority to CN202010033197.4A priority Critical patent/CN111211227A/en
Publication of CN111211227A publication Critical patent/CN111211227A/en
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K30/00Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
    • H10K30/10Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation comprising heterojunctions between organic semiconductors and inorganic semiconductors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K30/00Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
    • H10K30/80Constructional details
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • H10K71/16Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/549Organic PV cells

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Photovoltaic Devices (AREA)

Abstract

The invention provides a preparation method of a solar cell. The method comprises the following steps: the method comprises the following steps of sputtering an ITO transparent electrode onto plane glass through magnetron sputtering, and manufacturing the whole piece of ITO conductive glass by using a photoetching method, wherein the ITO transparent electrode is of an inverted U-shaped structure and comprises a plurality of ITO thin film strips which are vertically arranged in parallel; an evaporation mask plate is attached to the ITO conductive glass, a metal electrode is moved into a vacuum environment to be evaporated, the metal electrode comprises a plurality of evaporation masks which are vertically arranged in parallel, and the middle part of the evaporation mask is a hollow part. And removing the mask after the metal electrode evaporation is finished to obtain the manufactured solar cell device. The invention increases the wear resistance of the electrode of the battery device; the contact of the test clip is not contacted with the metal electrode, so that the test durability of the battery device is improved. The glass cover plate and the packaging material are used for non-contact packaging, so that damage to the electrode in the packaging process and corrosion of the packaging material to the solar cell device are avoided.

Description

Preparation method of solar cell
Technical Field
The invention relates to the technical field of solar cells, in particular to a preparation method of a solar cell.
Background
Metal halide perovskites have been found to be suitable as photovoltaic materials for only a decade of time. Perovskite solar cells have been developed today to be almost as efficient as the best conventional silicon-based cells. In the test process of preparing perovskite solar cell devices in a laboratory, the test of the photoelectric conversion efficiency is to irradiate the solar cell through a light source simulator and measure the solar cell in real time by using a source meter.
The packaging scheme of the perovskite solar cell in the prior art is as follows: the test source meter is typically directly connected to the sample cell using an alligator clip, which directly contacts the metal electrodes. In laboratory packaging, the packaging scheme is usually contact packaging, the packaging material is usually light-cured resin or AB glue, and the packaging material needs to directly contact the active area of the solar cell and cover a part of the metal electrode.
The above-mentioned packaging scheme of perovskite solar cells in the prior art has the following disadvantages: because the electrode of vacuum evaporation is fragile, the test fixture is very easy to clamp through the electrode, so that the device is short-circuited; in addition, when laboratory packaging is carried out, the packaging material in the packaging scheme is in direct contact with the active region of the battery, the packaging material often reacts with the active layer of the perovskite battery to damage the battery, the operation difficulty is high, and the metal electrode is easy to damage. Therefore, the packaging scheme of the perovskite solar cell in the prior art has high requirements on equipment and very strict requirements on operation technology, and is not favorable for preparing efficient and stable cell devices in a laboratory.
Disclosure of Invention
Embodiments of the present invention provide a method for manufacturing a solar cell, so as to overcome the disadvantages of the prior art.
In order to achieve the purpose, the invention adopts the following technical scheme.
A method of fabricating a solar cell, comprising:
the method comprises the following steps of sputtering an ITO transparent electrode onto plane glass through magnetron sputtering, and manufacturing the whole piece of ITO conductive glass by using a photoetching method, wherein the ITO transparent electrode is of an inverted U-shaped structure and comprises a plurality of ITO thin film strips which are vertically arranged in parallel;
preparing a carrier transmission layer, an active layer and a modification layer on the ITO conductive glass, then attaching an evaporation mask plate on the ITO conductive glass, and moving the ITO conductive glass into a vacuum environment to evaporate a metal electrode, wherein the metal electrode comprises a plurality of evaporation masks which are vertically arranged in parallel, and the middle part of the evaporation mask is a hollow part;
and removing the mask after the metal electrode evaporation is finished to obtain the manufactured solar cell device.
Preferably, the method further comprises:
when testing the solar cell devices, taking the substrate as a circuit board, taking the solar cell devices as elements on the circuit board, clamping the test fixture on the circuit board, arranging four solar cell devices on each substrate, arranging the four solar cell devices at the intersection of an ITO transparent electrode and a metal electrode in the middle of the substrate, and arranging 6 ITO films on the substrate;
the testing fixture is clamped below the substrate, a contact of the testing fixture is only contacted with the ITO transparent electrodes in the solar cell devices, 4 ITO transparent electrodes in the middle of the substrate are connected with the metal electrodes and used as extension lines of the metal electrodes, the metal electrodes are cathodes of four solar cells respectively, and the left ITO and the right ITO are transparent electrodes and are common anodes of the four solar cells.
Preferably, the method further comprises:
when the solar cell device is packaged, AB glue is used as a packaging material, the packaging process is completed in a nitrogen glove box, after the packaging is completed, nitrogen is filled between the effective area of the solar cell device and cover plate glass, the packaging material is not in direct contact with the effective area of the perovskite solar cell, and the packaging material is not in direct contact with a metal electrode.
Preferably, the solar cell includes: perovskite solar cell.
According to the technical scheme provided by the embodiment of the invention, the ITO transparent electrode is used for prolonging the metal electrode, so that the wear resistance of the electrode of the battery device is improved; the contact of the test clip is not contacted with the metal electrode, so that the test durability of the battery device is improved. The glass cover plate and the packaging material are used for non-contact packaging, so that damage to the electrode in the packaging process and corrosion of the packaging material to the solar cell device are avoided.
Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic diagram of a battery device formed by ITO transparent electrodes and metal electrodes according to the present invention;
FIG. 2 is a schematic view of a test fixture provided in the present invention;
fig. 3 is a schematic view of a non-contact packaging scheme of a perovskite solar cell provided by the invention.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.
As used herein, the singular forms "a", "an", "the" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof. It will be understood that when an element is referred to as being "connected" or "coupled" to another element, it can be directly connected or coupled to the other element or intervening elements may also be present. Further, "connected" or "coupled" as used herein may include wirelessly connected or coupled. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
For the convenience of understanding the embodiments of the present invention, the following description will be further explained by taking several specific embodiments as examples in conjunction with the drawings, and the embodiments are not to be construed as limiting the embodiments of the present invention.
The invention provides a substrate design and packaging technology for preparing perovskite solar cells in a laboratory, wherein the durability of devices is improved through electrode design in a preparation and packaging scheme, the cells are effectively prevented from being damaged in testing, and simple and quick non-contact packaging is realized.
The invention provides a perovskite solar cell, a test fixture and a packaging tool thereof.
Fig. 1 is a schematic diagram of a battery device formed by an ITO (Indium tin oxide) transparent electrode and a metal electrode, where ITO is a transparent metal oxide, and is very thin and 150 nm thick, and has high electrical conductivity. Has been widely used in products such as mobile phone screens. In fig. 1, the left drawing is a structural view of an ITO transparent electrode, the middle drawing is a structural view of an evaporation mask, and the right drawing is a structural view of a perovskite solar cell device obtained after an evaporation treatment. Wherein 1 and 6 are ITO transparent electrodes, 2 and 5 are glass substrates, 4 are evaporation mask plates, 3 are hollow parts of vacuum evaporation mask plates, and 7 are metal electrodes finished by evaporation.
The electrode is set into two parts, one part is an ITO transparent electrode which is of an inverted U-shaped structure and comprises a plurality of ITO thin film strips which are vertically arranged in parallel. The ITO transparent electrode is relatively wear-resistant and is not easy to corrode.
The second part is a metal electrode, the metal electrode is prepared through vacuum evaporation, the middle drawing is a structural drawing of an evaporation mask plate and comprises a plurality of evaporation masks which are vertically arranged in parallel, and the middle part of each evaporation mask is a hollow part.
The ITO transparent electrode is formed by magnetron sputtering on plane glass, and then patterns are prepared by using a photoetching method to prepare the whole piece of ITO conductive glass, wherein the whole piece of ITO conductive glass is the ITO transparent electrode. The preparation of the whole solar cell device also comprises the preparation of a current carrier transmission layer, an active layer and other modification layers on the ITO conductive glass. After a carrier transmission layer, an active layer and other modification layers are prepared on the ITO conductive glass, an evaporation mask is attached to the ITO conductive glass, and then the ITO conductive glass is moved into a vacuum environment to evaporate a metal electrode. And removing the mask after the metal electrode evaporation is finished, and obtaining the finished product of the solar cell device.
Fig. 2 is a schematic diagram of a test fixture according to the present invention, wherein the test fixture may be a 3M test fixture. The substrate is a whole circuit board, the solar cell device is equivalent to an element on the circuit board, and the test fixture is clamped on the circuit board. Each substrate is provided with four solar cell devices which are arranged at the intersection of an ITO transparent electrode and a metal electrode in the middle of the substrate, and 6 ITO films are arranged on the substrate. When testing, the test fixture is clamped below the substrate, the contact of the test fixture is only contacted with the ITO transparent electrode in the cell device, the 4 ITO transparent electrodes in the middle of the substrate are connected with the metal electrode and used as the extension lines of the metal electrode, the electrodes are the cathodes of the four solar cells respectively, and the left ITO and the right ITO are transparent electrodes and are the common anode of the four solar cells. Because the contact of the test clamp is not contacted with the metal electrode, and the conducting layer of the ITO transparent electrode is compact and wear-resistant, the design improves the test durability of the battery device.
Fig. 3 is a schematic view of a non-contact packaging scheme of a perovskite solar cell provided by the invention. In fig. 3, 1 is a package cover glass, and 2 is a package adhesive. The encapsulation scheme uses AB glue with high viscosity as the encapsulation material. Because the packaging process is finished in the nitrogen glove box, after the packaging is finished, nitrogen is filled between the effective area of the perovskite solar cell and the cover plate glass, and the packaging material is not in direct contact with the effective area of the perovskite solar cell. In addition, because the metal electrode is prolonged by using the ITO, the packaging material is not directly contacted with the metal electrode, and the accidental damage to the metal electrode in the packaging process is avoided.
The solar cell includes: perovskite solar cell. This encapsulation is also applicable to other types of laboratory-fabricated solar cells.
In conclusion, the ITO transparent electrode is used for prolonging the metal electrode, so that the wear resistance of the electrode of the battery device is improved; the contact of the test clip is not contacted with the metal electrode, so that the test durability of the battery device is improved. The glass cover plate and the packaging material are used for non-contact packaging, so that damage to the electrode in the packaging process and corrosion of the packaging material to the solar cell device are avoided.
Those of ordinary skill in the art will understand that: the figures are merely schematic representations of one embodiment, and the blocks or flow diagrams in the figures are not necessarily required to practice the present invention.
Those of ordinary skill in the art will understand that: the components in the devices in the embodiments may be distributed in the devices in the embodiments according to the description of the embodiments, or may be correspondingly changed in one or more devices different from the embodiments. The components of the above embodiments may be combined into one component, or may be further divided into a plurality of sub-components.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (4)

1. A method for manufacturing a solar cell, comprising:
the method comprises the following steps of sputtering an ITO transparent electrode onto plane glass through magnetron sputtering, and manufacturing the whole piece of ITO conductive glass by using a photoetching method, wherein the ITO transparent electrode is of an inverted U-shaped structure and comprises a plurality of ITO thin film strips which are vertically arranged in parallel;
preparing a carrier transmission layer, an active layer and a modification layer on the ITO conductive glass, then attaching an evaporation mask plate on the ITO conductive glass, and moving the ITO conductive glass into a vacuum environment to evaporate a metal electrode, wherein the metal electrode comprises a plurality of evaporation masks which are vertically arranged in parallel, and the middle part of the evaporation mask is a hollow part;
and removing the mask after the metal electrode evaporation is finished to obtain the manufactured solar cell device.
2. The method of claim 1, further comprising:
when testing the solar cell devices, taking the substrate as a circuit board, taking the solar cell devices as elements on the circuit board, clamping the test fixture on the circuit board, arranging four solar cell devices on each substrate, arranging the four solar cell devices at the intersection of an ITO transparent electrode and a metal electrode in the middle of the substrate, and arranging 6 ITO films on the substrate;
the testing fixture is clamped below the substrate, a contact of the testing fixture is only contacted with the ITO transparent electrodes in the solar cell devices, 4 ITO transparent electrodes in the middle of the substrate are connected with the metal electrodes and used as extension lines of the metal electrodes, the metal electrodes are cathodes of four solar cells respectively, and the left ITO and the right ITO are transparent electrodes and are common anodes of the four solar cells.
3. The method of claim 2, further comprising:
when the solar cell device is packaged, AB glue is used as a packaging material, the packaging process is completed in a nitrogen glove box, after the packaging is completed, nitrogen is filled between the effective area of the solar cell device and cover plate glass, the packaging material is not in direct contact with the effective area of the perovskite solar cell, and the packaging material is not in direct contact with a metal electrode.
4. The method according to any one of claims 1 to 3, wherein the solar cell comprises: perovskite solar cell.
CN202010033197.4A 2020-01-13 2020-01-13 Preparation method of solar cell Withdrawn CN111211227A (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1688038A (en) * 2005-04-18 2005-10-26 中国科学院长春应用化学研究所 Single-layer organic memory and mfg. method thereof
CN103903862A (en) * 2012-12-27 2014-07-02 北京大学 Transparent flexible electrochemical device based on planar comb-shaped electrode structure, and preparation method thereof
CN205542904U (en) * 2016-02-26 2016-08-31 景德镇陶瓷学院 A non -contact wrapper spare for perovskite solar cell
CN106463549A (en) * 2014-06-11 2017-02-22 信越化学工业株式会社 Solar cell and method for manufacturing solar cell
CN109323781A (en) * 2018-08-21 2019-02-12 电子科技大学 A method of preparing flexible self energizing integrated pressure sensor array

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1688038A (en) * 2005-04-18 2005-10-26 中国科学院长春应用化学研究所 Single-layer organic memory and mfg. method thereof
CN103903862A (en) * 2012-12-27 2014-07-02 北京大学 Transparent flexible electrochemical device based on planar comb-shaped electrode structure, and preparation method thereof
CN106463549A (en) * 2014-06-11 2017-02-22 信越化学工业株式会社 Solar cell and method for manufacturing solar cell
CN205542904U (en) * 2016-02-26 2016-08-31 景德镇陶瓷学院 A non -contact wrapper spare for perovskite solar cell
CN109323781A (en) * 2018-08-21 2019-02-12 电子科技大学 A method of preparing flexible self energizing integrated pressure sensor array

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