CN110017937A - A kind of pliable pressure sensor and preparation method thereof and pulse condition analyser - Google Patents
A kind of pliable pressure sensor and preparation method thereof and pulse condition analyser Download PDFInfo
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- CN110017937A CN110017937A CN201910274808.1A CN201910274808A CN110017937A CN 110017937 A CN110017937 A CN 110017937A CN 201910274808 A CN201910274808 A CN 201910274808A CN 110017937 A CN110017937 A CN 110017937A
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/02—Detecting, measuring or recording pulse, heart rate, blood pressure or blood flow; Combined pulse/heart-rate/blood pressure determination; Evaluating a cardiovascular condition not otherwise provided for, e.g. using combinations of techniques provided for in this group with electrocardiography or electroauscultation; Heart catheters for measuring blood pressure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
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Abstract
The invention discloses a kind of pliable pressure sensor and preparation method thereof and pulse condition analysers, the preparation method of the pliable pressure sensor includes first preparing the flexible isolating layer with several holes, then in the two sides of flexible isolating layer fitting setting electret layer, " sandwich " the formula structure for having cavity is formed, then electrode layer is set away from the surface of flexible isolating layer on electret layer respectively.In the above manner, the preparation method of pliable pressure sensor of the present invention is easy to operate, at low cost, obtained pliable pressure transducer sensitivity is high, fast response time.
Description
Technical field
The present invention relates to sensor technical fields, and in particular to a kind of pliable pressure sensor and preparation method thereof and feels the pulse
Instrument.
Background technique
With the development of electronic information technology, wearable smart machine gradually comes into people's lives, part of
The information such as movement, the health of human body can be monitored in real time, greatly facilitate and enrich people's lives.For example, in medical treatment & health
On, the various physiological signals of human body can be monitored using different systems, such as pulse wave, blood pressure and body temperature.Wherein, human pulse
The presented information of wave largely reflects the characteristic of many physiological and pathologicals in cardiovascular system of human body, can be used as clinic
The foundation of diagnosing and treating, always by the attention of medical field.Human pulse wave is utilized more than one thousand years in Traditional Chinese Medicine
As long as, the tentative prediction for carrying out disease diagnoses.In recent years, with the development of sensor monitoring technology, there is a variety of be based on
Different testing mechanisms are examined for the sensor of human pulse wave measurement, such as based on optics, image procossing, acoustics, pressure apparatus
Survey mechanism.Wherein, pliable pressure sensor can bear various deformation because it is with flexibility, can intuitively, accurately detect pulse
Wave and be widely used.And the existing most flexibility of pliable pressure sensor is inadequate at present, cannot be well adapted for human body table
The comfort in face is dressed, and inadequate with the compactness of human body, there are bright in terms of sensitivity, response, recovery time and preparation process
It is inadequate.
Summary of the invention
In order at least solve one of above-mentioned technical problem, the present invention provides a kind of pliable pressure sensor and preparation method thereof
And pulse condition analyser.
The technical scheme adopted by the invention is that: a kind of preparation method of pliable pressure sensor, comprising the following steps:
S1, flexible high molecular material layer is set in substrate, is then manufactured on the flexible high molecular material layer several
Hole peels off from the substrate the flexible high molecular material layer with hole, and flexible isolating layer is made；
S2, on the two sides of the flexible isolating layer, electret layer is arranged in fitting；
S3, electrode layer is set away from the surface of the flexible isolating layer on the electret layer respectively.
Preferably, the preparation method of the pliable pressure sensor further include: S4, will be on the flexible isolating layer in hole
Air dielectric ionization.Corona charging method specifically can be used to ionize the air dielectric on flexible isolating layer in hole.Due to staying
Polar body layer has electret characteristic, and the inner surface of electret layer can capture the free charge that the ionization of stored air medium generates, in hole
The positive and negative residual charge generated respectively on the electret layer of hole two sides constitutes huge electric dipole, to make sensor subsequent
The course of work is not necessarily to additional power source, it can be achieved that from driving, and mechanically deform is changed into electric signal transmission and is come out, high sensitivity, and
Stability is good.
In step S1, substrate generally selects hard substrate, before preparing flexible isolating layer, can first handle substrate make it have compared with
Low surface energy, in order to which flexible isolating layer is easy to peel off from the substrate when subsequent operation.The material of flexible isolating layer is generally
Flexible high molecular material, preferably flexible macromolecule polymer material, generally by flexible high molecular material and curing agent when preparation
Mixing is coated in substrate, then curing molding, and flexible high molecular material layer is made；It is manufactured on flexible high molecular material layer again
Several holes, the mode for manufacturing hole can be selected from hand engraving removing, using puncher punching and any one of laser ablation,
Void shape can be circle, hexagon, triangle or some irregular shapes, and hole preferred array formula is arranged, and punching rate is general
It is 10~70%；Preferably fabricated diameter is 1~5mm, and center spacing is the hole of 1.2~30mm；After the completion of punching, then will be flexible
Polymer material layer peels off from the substrate.
It preferably, further include to institute after the flexible high molecular material layer with hole is removed from matrix in step S1
It states the flexible high molecular material layer with hole and carries out surface modification treatment, flexible isolating layer is made；And/or step S2 is specific
Including first to electret layer progress surface modification treatment, then by treated, electret layer is bonded set on the flexible isolating layer
On two surfaces；The surface modification treatment is selected from least one of oxygen plasma etch processing, chemical reagent immersion treatment,
Chemical reagent used by the chemical reagent immersion treatment is selected from silane coupling agent.Silane coupling agent includes but is not limited to ammonia third
Ethyl triethoxy silicane alkane, aminopropyl trimethoxysilane, phenylaminomethyl triethoxysilane etc..By to electret layer and soft
Sexual isolation layer carries out surface modification treatment to enhance adhesive force, and flexible isolating layer is made to be easy to realize firm key with electret layer
It closes, promotes the stability of product.It is general the face to be fit of flexible isolating layer and electret layer to be only surface-treated, and
In some cases, other faces are incidentally handled together in order to easy to operate.
Preferably, in step S1, the flexible isolating layer with a thickness of 100~500 μm；In step S2, the electret
Layer with a thickness of 10~50 μm.
The present invention also provides a kind of pliable pressure sensors, by the preparation side of any of the above pliable pressure sensor
Method be made, including set gradually from the bottom to top first electrode layer, the first electret layer, flexible spacer layer, the second electret layer
And the second electrode lay；The flexible spacer layer is equipped with several holes.
In addition, the present invention also provides a kind of pulse condition analyser, including above-described pliable pressure sensor.
The method have the benefit that: the present invention provides a kind of pliable pressure sensor and preparation method thereof and feels the pulse
Instrument, the preparation method of the pliable pressure sensor include first preparing the flexible isolating layer with several holes, then flexibility every
The two sides fitting setting electret layer of absciss layer, forms " sandwich " the formula structure for having cavity, then carry on the back on electret layer respectively
Electrode layer is arranged in surface from flexible isolating layer.In the above manner, leading in the preparation method of pliable pressure sensor of the present invention
It crosses and hole is set on flexible spacer layer, it is possible to increase the flexibility of wall is conducive to deformation, improves the compactness with skin, and just
In obtaining biggish deformation when by lesser pressure, the sensitivity and response speed of sensor are improved；And entirely prepare work
Skill is simple, at low cost, and obtained pliable pressure sensor can be applied to medical treatment & health, human-computer interaction, robot electronic skin
Equal fields.
Detailed description of the invention
For the clearer technical solution illustrated in the embodiment of the present invention, will make below to required in embodiment description
Attached drawing briefly describes.
Fig. 1 is the structural schematic diagram of pliable pressure sensor obtained by the embodiment of the present invention 1；
Fig. 2 is the sectional view of II-II line along Fig. 1.
Specific embodiment
Present invention will be further explained below with reference to specific examples.It should be understood that these embodiments are merely to illustrate the present invention
Rather than it limits the scope of the invention.In addition, it should also be understood that, after reading the content taught by the present invention, those skilled in the art
Member can make various changes or modifications the present invention, and such equivalent forms equally fall within the application the appended claims and limited
Range.
Embodiment 1
A kind of preparation method of pliable pressure sensor, comprising the following steps: take clean sheet glass as substrate, and
Wherein one side spin coating or paste the upper uniform electret film material of a layer thickness, because its with lower surface can, in order to
Subsequent operation flexible isolating layer is easy to remove from glass sheet substrate.By Ecoflex prepolymer (Smooth-on, Ecoflex
The curing agent used of arranging in pairs or groups 00-35) and therewith mixes, it is then coated on the electret in glass sheet substrate by spin coating proceeding
On film material layer, specifically with the revolving speed spin coating 1min of 400rpm, 5min or so is kept to be formed by curing thickness about at 50 DEG C
150 μm of Ecoflex film.Existed using laser cutting machine (Universal VLS 6.60, cutting power are 10~20W)
It will be cut into the hole array that diameter is 2mm, center spacing is 3mm on Ecoflex film, patterned Ecoflex film is made,
Then it is removed from the electret film material layer in glass sheet substrate.The two sides of Ecoflex film is passed through into vacuum oxygen
Plasma (plasma power is 100~200W) processing forms hydroxyl, and processed film, which is dipped into mass fraction, is
In 10% 3-aminopropyltriethoxysilane (APTES) solution about for 24 hours, in the process, hydroxyl will in conjunction with APTES,
So that the two sides of Ecoflex film is sufficiently modified by APTES functional group.Two panels electret film is taken, with vacuum oxygen plasma
Processing (plasma power is 100~200W).Then, will treated electret film and Ecoflex film according to " electret
The sequence of body thin film-Ecoflex film-electret film " is stacked to form " sandwich " formula sandwich, then by sandwich
It is placed at a temperature of uniform pressure and 40~60 DEG C and keeps for 24 hours, pass through to be formed between electret film and Ecoflex film
Hydroxyl/APTES/ hydroxy chemical key realizes finally stable bonding.Deviate from Ecoflex film on two electret films respectively again
Surface conductive electrode layer, and extraction wire are set.
Fig. 1 and Fig. 2 are please referred to, Fig. 1 is the structural schematic diagram of the pliable pressure sensor as made from above method, Fig. 2
It is the sectional view of II-II line along Fig. 1.As depicted in figs. 1 and 2, which includes setting gradually from the bottom to top
First electrode layer 11, the first electret layer 12, flexible spacer layer 13, the second electret layer 14 and the second electrode lay 15, it is flexible
Wall 13 is equipped with several holes 131.The pliable pressure sensor is powered in measurement process acquires signal, wherein by
In flexible spacer layer 13 and the setting of 131 structure of hole thereon, it is possible to increase the flexibility of wall improves the compactness with skin,
Biggish deformation can be obtained when by lesser pressure, improve the sensitivity and response speed of sensor；And entirely prepare work
Skill is simple, at low cost.
Embodiment 2
A kind of preparation method of pliable pressure sensor, comprising the following steps: take clean sheet glass as substrate, and
Wherein one side spin coating or the upper uniform electret film material of a layer thickness of stickup.By Ecoflex prepolymer (Smooth-on,
Ecoflex 00-30) and the curing agent mixing used of arranging in pairs or groups therewith, it is then coated on by glass sheet substrate by spin coating proceeding
On electret film material layer on, specifically with the revolving speed spin coating 1min of 400rpm, keep 4hr or so to be formed by curing at 50 DEG C
The Ecoflex film that about 150 μm of thickness.It utilizes laser cutting machine (Universal VLS 6.60, cutting power are 10~20W)
It will be cut into the rectangular hole array that side length is 3mm on Ecoflex film, patterned Ecoflex film is made, then by it
It is removed from the electret film material layer in glass sheet substrate.Two panels electret film is taken, with vacuum oxygen plasma treatment
(plasma power is 100~200W), then by electret film and Ecoflex film according to " electret film-
The sequence of Ecoflex film-electret film " is stacked to form " sandwich " formula sandwich, is then placed on sandwich
Left and right for 24 hours is kept at a temperature of uniform pressure and 40~60 DEG C.Deviate from Ecoflex film on two electret films respectively again
Surface conductive electrode layer, and extraction wire are set.
Embodiment 3
A kind of preparation method of pliable pressure sensor, comprising the following steps: take clean sheet glass as substrate, and
Wherein one side spin coating or the upper uniform electret film material of a layer thickness of stickup；By Ecoflex prepolymer (Smooth-on,
Ecoflex 00-10) and the curing agent mixing used of arranging in pairs or groups therewith, it is then coated on by glass sheet substrate by spin coating proceeding
On electret film material layer on, specifically with the revolving speed spin coating 1min of 400rpm, keep 4hr or so to be formed by curing at 50 DEG C
The Ecoflex film that about 150 μm of thickness.It utilizes laser cutting machine (Universal VLS 6.60, cutting power are 10~20W)
It will be cut into the hole array that diameter is 3mm, center spacing is 5mm on Ecoflex film, it is thin that patterned Ecoflex is made
Film then removes it from the electret film material layer in glass sheet substrate.The two sides of Ecoflex film is passed through into vacuum
Oxygen plasma (plasma power is 100~200W) processing forms hydroxyl；Take two panels electret film, with vacuum oxygen etc. from
Daughter processing (plasma power is 100~200W), is dipped into the 3- amino that mass fraction is 10% for processed film
In propyl-triethoxysilicane (APTES) solution about for 24 hours, in the process, hydroxyl will be in conjunction with APTES, so that electret is thin
The surface of film is sufficiently modified by APTES functional group.Then, will treated electret film and Ecoflex film according to " electret
The sequence of body thin film-Ecoflex film-electret film " is stacked to form " sandwich " formula sandwich, then by sandwich
It is placed at a temperature of uniform pressure and 40~60 DEG C and keeps for 24 hours, pass through to be formed between electret film and Ecoflex film
Hydroxyl/APTES/ hydroxy chemical key realizes finally stable bonding.Deviate from Ecoflex film on two electret films respectively again
Surface conductive electrode layer, and extraction wire are set.Then matched using high voltage power supply (high direct voltage), corona pin and grounding electrode
It closes, the air dielectric between electret film in Ecoflex film hole is ionized using high-voltage corona mise-a-la-masse method, can specifically be incited somebody to action
Target sample is placed at the top of grounding electrode and is located at below corona needle point at 3cm, to point have a fainting spell during acupuncture treatment 15~30kV of application high voltage with
Decompose the air dielectric in sandwich film.By ionizing the air dielectric in sandwich film, oneself of generation is ionized
It is captured and stores by electret film by charge, so that being not necessarily to additional power source when working sensor, it can be achieved that becoming machinery from driving
Shape is changed into electric signal transmission and comes out, high sensitivity, and stability is good.
The preparation method of above embodiments pliable pressure sensor is easy to operate, at low cost, and obtained pliable pressure passes
Sensor high sensitivity, fast response time.
Although specifically showing and describing the present invention in conjunction with preferred embodiment, those skilled in the art should be bright
It is white, it is not departing from the spirit and scope of the present invention defined by described claims, it in the form and details can be right
The present invention makes a variety of changes, and is protection scope of the present invention.
Claims (10)
1. a kind of preparation method of pliable pressure sensor, which comprises the following steps:
S1, flexible high molecular material layer is set in substrate, then manufactures several holes on the flexible high molecular material layer,
Flexible high molecular material layer with hole is peeled off from the substrate, flexible isolating layer is made；
S2, on the two sides of the flexible isolating layer, electret layer is arranged in fitting；
S3, electrode layer is set away from the surface of the flexible isolating layer on the electret layer respectively.
2. the preparation method of pliable pressure sensor according to claim 1, which is characterized in that further include:
S4, the air dielectric on the flexible isolating layer in hole is ionized.
3. the preparation method of pliable pressure sensor according to claim 2, which is characterized in that in step S4, using electricity
Dizzy mise-a-la-masse method ionizes the air dielectric on flexible isolating layer in hole.
4. the preparation method of pliable pressure sensor according to any one of claim 1-3, which is characterized in that step S1
In, it further include the flexible high score to described with hole after the flexible high molecular material layer with hole is removed from matrix
Sub- material layer carries out surface modification treatment, and flexible isolating layer is made；
And/or step S2 is specifically included and is first carried out surface modification treatment to electret layer, then electret layer is bonded by treated
On two surfaces of the flexible isolating layer；
The surface modification treatment is selected from least one of oxygen plasma etch processing, chemical reagent immersion treatment, described
Chemical reagent used by chemical reagent immersion treatment is selected from silane coupling agent.
5. the preparation method of pliable pressure sensor according to claim 1, which is characterized in that in step S1, the hole
It arranges in array in hole.
6. the preparation method of pliable pressure sensor according to claim 5, which is characterized in that on the flexible isolating layer
Hole ratio be 10~70%.
7. the preparation method of pliable pressure sensor according to claim 6, which is characterized in that the diameter of described hole is
1~5mm, center spacing are 1.2~30mm.
8. the preparation method of pliable pressure sensor according to claim 1, which is characterized in that described soft in step S1
Sexual isolation layer with a thickness of 100~500 μm；In step S2, the electret layer with a thickness of 10~50 μm.
9. a kind of pliable pressure sensor, which is characterized in that the pliable pressure sensor is by any one of claim 1-8 institute
The preparation method of the pliable pressure sensor stated is made, including set gradually from the bottom to top first electrode layer, the first electret
Layer, flexible spacer layer, the second electret layer and the second electrode lay；The flexible spacer layer is equipped with several holes.
10. a kind of pulse condition analyser, which is characterized in that including pliable pressure sensor as claimed in claim 9.
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111855029A (en) * | 2020-07-24 | 2020-10-30 | 京东方科技集团股份有限公司 | Flexible pressure sensor, preparation method thereof and electronic device |
| CN112484888A (en) * | 2020-12-15 | 2021-03-12 | 燕山大学 | Flexible capacitive pressure sensor and preparation method thereof |
| WO2021102512A1 (en) * | 2019-11-29 | 2021-06-03 | The University Of Melbourne | Piezoresistive sensor |
| CN112945429A (en) * | 2021-01-29 | 2021-06-11 | 清华大学深圳国际研究生院 | High-sensitivity flexible pressure sensor and manufacturing method thereof |
| CN113029398A (en) * | 2021-03-08 | 2021-06-25 | 清华大学深圳国际研究生院 | High-sensitivity flexible pressure sensor for detecting heart sound signals |
| CN113959327A (en) * | 2021-10-14 | 2022-01-21 | 中国科学院力学研究所 | Multilayer structure strain sensor with high sensitivity |
| CN114199419A (en) * | 2021-11-09 | 2022-03-18 | 华中科技大学 | Flexible pressure sensor for shielding stretching and bending interference and preparation method thereof |
| WO2022160953A1 (en) * | 2021-01-29 | 2022-08-04 | 清华大学深圳国际研究生院 | Weak current amplifier circuit and sensor system |
| WO2022160954A1 (en) * | 2021-01-29 | 2022-08-04 | 清华大学深圳国际研究生院 | Multi-path fixed-point pressurising apparatus and sensor system |
| CN115808188A (en) * | 2022-11-25 | 2023-03-17 | 电子科技大学 | Ion capacitance type sensor with interlocking microstructure isolation regulation function |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103616097A (en) * | 2013-10-22 | 2014-03-05 | 中国石油大学(华东) | Flexible film tactile sensor and production method thereof |
| CN103700761A (en) * | 2013-11-27 | 2014-04-02 | 深圳市豪恩声学股份有限公司 | Piezoelectret structure and preparation method thereof |
| CN104257367A (en) * | 2014-09-16 | 2015-01-07 | 苏州能斯达电子科技有限公司 | Flexible pressure sensor with attaching function and preparation method thereof |
| CN106813812A (en) * | 2016-12-28 | 2017-06-09 | 华中科技大学 | A kind of electroactive flexible compound mould electric transducer of high pressure and preparation method thereof |
| CN107328497A (en) * | 2017-08-02 | 2017-11-07 | 深圳先进技术研究院 | A kind of signal detection sensing arrangement and preparation method thereof, signal detecting method |
| US20180073917A1 (en) * | 2015-03-17 | 2018-03-15 | Suzhou Institute Of Nano-Tech And Nano-Bionics (Sinano), Chinese Academy Of Science | Flexible conductive diaphragm, flexible vibration sensor and preparation method and application thereof |
| CN108063183A (en) * | 2017-11-30 | 2018-05-22 | 西安交通大学 | A kind of method that closing porous piezoelectric electret energy accumulator is prepared based on nano impression |
| CN108968929A (en) * | 2018-08-01 | 2018-12-11 | 中国科学院深圳先进技术研究院 | Pulse detecting device and preparation method thereof |
-
2019
- 2019-04-08 CN CN201910274808.1A patent/CN110017937A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103616097A (en) * | 2013-10-22 | 2014-03-05 | 中国石油大学(华东) | Flexible film tactile sensor and production method thereof |
| CN103700761A (en) * | 2013-11-27 | 2014-04-02 | 深圳市豪恩声学股份有限公司 | Piezoelectret structure and preparation method thereof |
| CN104257367A (en) * | 2014-09-16 | 2015-01-07 | 苏州能斯达电子科技有限公司 | Flexible pressure sensor with attaching function and preparation method thereof |
| US20180073917A1 (en) * | 2015-03-17 | 2018-03-15 | Suzhou Institute Of Nano-Tech And Nano-Bionics (Sinano), Chinese Academy Of Science | Flexible conductive diaphragm, flexible vibration sensor and preparation method and application thereof |
| CN106813812A (en) * | 2016-12-28 | 2017-06-09 | 华中科技大学 | A kind of electroactive flexible compound mould electric transducer of high pressure and preparation method thereof |
| CN107328497A (en) * | 2017-08-02 | 2017-11-07 | 深圳先进技术研究院 | A kind of signal detection sensing arrangement and preparation method thereof, signal detecting method |
| CN108063183A (en) * | 2017-11-30 | 2018-05-22 | 西安交通大学 | A kind of method that closing porous piezoelectric electret energy accumulator is prepared based on nano impression |
| CN108968929A (en) * | 2018-08-01 | 2018-12-11 | 中国科学院深圳先进技术研究院 | Pulse detecting device and preparation method thereof |
Non-Patent Citations (1)
| Title |
|---|
| 王波: "柔性驻极体发电机及其供能压力传感器应用研究", 《中国博士学位论文全文数据库 工程科技Ⅱ辑》 * |
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021102512A1 (en) * | 2019-11-29 | 2021-06-03 | The University Of Melbourne | Piezoresistive sensor |
| CN111855029A (en) * | 2020-07-24 | 2020-10-30 | 京东方科技集团股份有限公司 | Flexible pressure sensor, preparation method thereof and electronic device |
| CN111855029B (en) * | 2020-07-24 | 2022-10-04 | 京东方科技集团股份有限公司 | Flexible pressure sensor, preparation method thereof and electronic device |
| CN112484888A (en) * | 2020-12-15 | 2021-03-12 | 燕山大学 | Flexible capacitive pressure sensor and preparation method thereof |
| CN112945429A (en) * | 2021-01-29 | 2021-06-11 | 清华大学深圳国际研究生院 | High-sensitivity flexible pressure sensor and manufacturing method thereof |
| WO2022160953A1 (en) * | 2021-01-29 | 2022-08-04 | 清华大学深圳国际研究生院 | Weak current amplifier circuit and sensor system |
| WO2022160954A1 (en) * | 2021-01-29 | 2022-08-04 | 清华大学深圳国际研究生院 | Multi-path fixed-point pressurising apparatus and sensor system |
| CN113029398A (en) * | 2021-03-08 | 2021-06-25 | 清华大学深圳国际研究生院 | High-sensitivity flexible pressure sensor for detecting heart sound signals |
| CN113029398B (en) * | 2021-03-08 | 2022-06-10 | 清华大学深圳国际研究生院 | High-sensitivity flexible pressure sensor for detecting heart sound signals |
| CN113959327A (en) * | 2021-10-14 | 2022-01-21 | 中国科学院力学研究所 | Multilayer structure strain sensor with high sensitivity |
| CN114199419A (en) * | 2021-11-09 | 2022-03-18 | 华中科技大学 | Flexible pressure sensor for shielding stretching and bending interference and preparation method thereof |
| CN115808188A (en) * | 2022-11-25 | 2023-03-17 | 电子科技大学 | Ion capacitance type sensor with interlocking microstructure isolation regulation function |
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Application publication date: 20190716 |