CN204863062U - A flexible sensor and speculum robot for speculum robot - Google Patents
A flexible sensor and speculum robot for speculum robot Download PDFInfo
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- CN204863062U CN204863062U CN201520420095.2U CN201520420095U CN204863062U CN 204863062 U CN204863062 U CN 204863062U CN 201520420095 U CN201520420095 U CN 201520420095U CN 204863062 U CN204863062 U CN 204863062U
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Abstract
The utility model discloses a flexible sensor of speculum robot, it includes flexible sensitive layer, be formed with upper and lower electrode layer on the upper and lower terminal surface of flexible sensitive layer respectively, and in the upper and lower terminal surface of flexible sensitive layer at least one has non planar formation, simultaneously still be provided with the resilient mounting layer between flexible sensitive layer and last electrode layer or the bottom electrode layer, flexible sensitive layer is less than 70 mu m with the thickness sum on resilient mounting layer. The utility model also provides a robot, especially a speculum robot. The utility model discloses a flexible sensor has high sensitivity, high stability, low detectability, low cost and an excellent crooked pliability ability, can well combine with the robot of isostructure not, and is further, by the robot that flexible sensor found still can realize operations such as intelligent removal, detection to and realize that good man -machine intelligence is mutual, and then accurate, high -efficient, safe, comfortable, real -time realization clinical test.
Description
Technical field
This utility model relates to a kind of biomimetic sensor, and particularly a kind of flexible sensor for sight glass robot and sight glass robot, belong to sensor and human-computer interaction technique field.
Background technology
Nineteen nineties rises, it is own through project verification that international sophisticated machine people plan (IARP) has held too much surgical robot seminar DARPA, the surgery carried out based on remote manipulation is studied, for war wound sham operated, surgery training, anatomic teaching.One of project that assisted surgery for robots and virtual surgery analogue system also develop as primary study by European Union, Centre National de la Recherche Scientifique.There is medical surgery operating robot marketable product in developed country, and carry out a large amount of case applied researcies clinically.Along with the development of the development of science and technology, particularly computer technology, the effect of Medical Robot in clinical is more and more subject to people's attention.Surgical operation secondary navigation system is as surgical 3rd eye, surgical doctor can be allowed to see the internal structure of operative site, avoid the surgical error caused because doctors experience is not enough, make operation safer, more reliably, more accurate, more scientific, there is extremely wide application prospect.Now, it has successfully been applied in the various fields such as neurosurgery, plastic surgery, urology department, vertebra, department of otorhinolaryngology, ophthalmology, knee joint excision and peritoneoscope.Being subject to the popular welcome of doctor and patient, is the inexorable trend of surgical robot development.
Along with the continuous expansion of people's research field, increasing people comes to realise, traditional rigid machine people is difficult to reach requirement when completing some complex work, so sight turns to by people have flexible robot, attempt in robot, to add flexible sensor to complete specific work, especially on bio-robot, the flexible bright spot adding its difference and conventional industrial robot especially.And the health of the Factors on Human classes such as dietary structure change, environmental pollution, stress creates negative influence, many people suffer the puzzlement of the intestinal tract diseases such as gastritis, enteritis and intestinal cancer.As the medical apparatus and instruments of etiologic diagnosis and treatment gastroenteropathy, in the diagnosis that endoscope becomes in human body the intestines and stomach sexually transmitted disease (STD), there is important value.But traditional sight glass does not possess perception, rebuffed direction and the size of stress cannot be differentiated, to such an extent as to probe cannot pass through, " perforation " accident even appears in damage gastrointestinal tissue, causes patient not accommodate misery.
Summary of the invention
For the deficiencies in the prior art, main purpose of the present utility model is to provide a kind of flexible sensor for sight glass robot and application thereof.
For realizing aforementioned invention object, the technical solution adopted in the utility model comprises:
A kind of flexible sensor for sight glass robot is provided among an embodiment of the present utility model, it comprises flexible sensitive layer, the upper and lower end face of described flexible sensitive layer is formed with upper and lower electrode layer respectively, and at least one in the upper and lower end face of described flexible sensitive layer has nonplanar structure, simultaneously also be provided with flexible support layers between described flexible sensitive layer and upper electrode layer or lower electrode layer, the thickness sum of described flexible sensitive layer and flexible support layers is less than 70 μm.
Comparatively preferred, the integral thickness of described flexible sensor is less than 70 μm.
The purposes of described flexible sensor is additionally provided among another embodiment of the present utility model.
Such as, wherein a kind of typical purposes comprises: provide a kind of robot, it comprises described flexible sensor.
More specifically, a kind of sight glass robot is provided in a case study on implementation of the present utility model, it comprises: described flexible sensor and data processing module, execution module and display module, described flexible sensor, execution module and display module are connected with described data processing module respectively.Wherein:
Described flexible sensor, in order to gather ambient pressure signal;
Data processing module, in order to receive and to process described pressure signal, and sends control instruction;
Execution module, in order to receive described control instruction, and performs corresponding task;
Display module, at least in order to show described pressure signal, data processing module export analytical data, execution module actuator state in one or more combination.
Wherein, the combination of any one or more in filtration module, signal amplification module, A/D modular converter can be also connected with between described flexible sensor and data processing module.
Compared with prior art, advantage of the present utility model comprises: the flexible sensor provided has the features such as high sensitivity, high stability, low detectability, low cost, especially also there is excellent bending flexility, be easy to robot " wearing ", can with the machine of different structure good combination per capita, and then effectively can overcome the defect of conventional machines people unaware ability, muting sensitivity; Further, the robot built by described flexible sensor and data processing unit, performance element etc., such as sight glass robot etc. also can realize the operation such as Intelligent mobile, detection, and realize good human-computer intellectualization, and then accurately, efficiently, safe, comfortable, real-time realize Clinical detection.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of flexible sensor in this utility model one exemplary embodiments;
Fig. 2 is the structured flowchart of a kind of endoscope robot system applying described flexible sensor in this utility model one exemplary embodiments;
Fig. 3 be in this utility model one exemplary embodiments a kind of flexible sensor and snake robot in conjunction with schematic diagram;
The detection signal figure of the robot system of colon endoscope shown in Fig. 4.
Detailed description of the invention
An aspect of the present utility model provides a kind of flexible sensor for sight glass robot, it comprises flexible sensitive layer, the upper and lower end face of described flexible sensitive layer is formed with upper and lower electrode layer respectively, and at least one in the upper and lower end face of described flexible sensitive layer has nonplanar structure.
Further, also flexible support layers is provided with between described flexible sensitive layer and upper electrode layer or lower electrode layer.
Preferably, the thickness of described flexible sensitive layer is 2 ~ 50 μm.
Preferably, the thickness of described flexible support layers is 1 ~ 100 μm.
Particularly preferred, the thickness sum of described flexible sensitive layer and flexible support layers is less than 70 μm, and described flexible sensor so can be made to possess the pliability substantially identical with human body skin, and lightweight, have good can the attached property of note and wearable property, can directly and skin bind.
Wherein, the material of described flexible sensitive layer can be preferably PDMS (polydimethylsiloxane) or other macromolecular materials, such as, in poly-polyethylene terephthalate, polyvinyl alcohol, polyvinyl formal, polyethylene any one or multiple.
Wherein, described flexible support layers is at least selected from polyethylene (PE) thin film, polrvinyl chloride (PVC) thin film, polyvinylidene chloride (PVDC) thin film.
More preferred, the integral thickness of described flexible sensor is less than 70 μm.
Among an embodiment, described nonplanar structure comprises a plurality of opposing projections and/or relative depressed portions.
Such as, described nonplanar structure can comprise a plurality of cone protruded out, or also can be the lobe of cylinder, prism or other non-regular shape.
Among a typical embodiments, the bottom surface of described cone is the square of 10 μm × 10 μm, and the angle of side and bottom surface is 54.7 °, and cone height is 7.06 μm.
In other embodiments, the shape of described flexible sensitive layer upper surface also can be wavy other nonplanar structures such as grade.
Wherein, the material of described upper and lower electrode layer can be selected from one or more the combination in gold, platinum, nickel, silver, indium, copper, CNT, Graphene, nano silver wire, but is not limited thereto.
Wherein, described upper and lower electrode layer all can adopt nanoscale, and such as thickness at below 100nm, suitably can certainly can adjust according to actual demand.
Further, described upper and lower electrode layer also loads extraction electrode by modes such as sticky pressure, welding, such as, conductive non-woven fabrics that thickness is about 0.08mm, that take into account flexibility and toughness, primarily of diameter be about 0.1mm enamel-covered wire composition, thickness about 20 μm and with the flat copper foil belt of pressure-sensitive adhesive, the pliable and tough extra thin copper foil that thickness is about 10 μm.
Further, described upper and lower electrode layer also can arrange protective layer, and its thickness is preferably less than 10 μm.
In described flexible sensor, the area, thickness, condition of cure etc. of sensitive layer, supporting layer and electrode layer etc. all can be optimized according to the demand of practical application, makes it well to combine with different base, and makes sensitivity reach best.
Of the present utility modelly another aspect provides a kind of robot, it comprises described flexible sensor.
Further, this utility model provides a kind of sight glass robot system, and it comprises:
Described flexible sensor, in order to gather ambient pressure signal,
Data processing module, in order to receive and to process described pressure signal, and sends control instruction,
Execution module, in order to receive described control instruction, and performs corresponding task,
And, display module, at least in order to show described pressure signal, data processing module export analytical data, execution module actuator state in one or more combination.
Further, the combination of any one or more in filtration module, signal amplification module, A/D modular converter can be also connected with between described flexible sensor and data processing module.
Below in conjunction with the accompanying drawing in this utility model embodiment, be described in detail the technical scheme in this utility model embodiment, obviously, described embodiment is only this utility model part embodiment, instead of whole embodiments.Based on the embodiment in this utility model, the every other embodiment that those of ordinary skill in the art obtain under the prerequisite not making creative work, all belongs to the scope of this utility model protection.
Refer to shown in Fig. 1, a kind of flexible sensor in the present embodiment one exemplary embodiments comprises flexible support layers 1, is formed at the sensitive layer 2 of the flexibility of supporting layer 1 upper surface, and is formed at upper electrode layer 3 and the lower electrode layer 4 of sensitive layer 2 upper surface and supporting layer 1 lower surface respectively.
Wherein, the material of described sensitive layer 2 is preferably PDMS (polydimethylsiloxane).And the upper surface of described sensitive layer 2 is nonplanar structure, it comprises the cone 21 of multiple projection, and the bottom surface of each cone 21 is for being the square of 10 μm × 10 μm, and the angle of side and bottom surface is 54.7 °, and cone height is 7.06 μm.
Described supporting layer 1 is preferably ultra-thin PE (polyethylene) thin film of high transparency high flexibility, and its thickness is preferably 12 μm.Wherein, described PE thin film both can help can complete delamination in the patterning PDMS film of silicon wafer surface and template, also can be used as the PDMS film that substrate supports is hereafter addressed simultaneously.
The material of described upper electrode layer 3 and lower electrode layer 4 can be selected from one or more the combination in gold, platinum, nickel, silver, indium, copper, CNT, Graphene, nano silver wire.
Further, in described flexible sensor, the integral thickness of supporting layer 1 and sensitive layer 2 is less than 70 μm, and particularly the integral thickness of described flexible sensor is less than 70 μm, therefore also can think a kind of ultrathin flexible sensor.
The flexible sensor of the present embodiment can make by the following method, comprising:
S1, make and can form the template of nonplanar structure
The present embodiment utilizes the technique such as photoetching, etching in MEMS processing and manufacturing technology to produce the template (preferably 4 cun of silicon wafers) with micro structure.First silicon wafer surface is carried out cleaning process, then spin coating photoresist, front baking, photoetching, development, after bake, finally utilize etching by Graphic transitions to Silicon Wafer, obtain the template with micro structure, concrete preparation method is as follows:
1, making sheet
Figure Software on Drawing drawing is made by utilizing after design demonstration, the width of simple increase pattern and be highly all conducive to the raising of device sensitivity, but after comprehensive, micro-pattern is preferably pyramid structure, tower bottom surface is the square of 10 μm × 10 μm, the angle of side and bottom surface is 54.7 °, and tower top is 7.06 μm to the distance of bottom surface.Mask plate is done according to the size of drawing.
2,4 cun of Silicon Wafers are prepared
Silicon Wafer adopts 4 cun of single-sided polishings, one side 300nm thermal oxide SiO
2layer Silicon Wafer, MOS grade acetone, deionized water ultrasonic 15 minutes respectively, then MOS level EtOH Sonicate dried up after 10 minutes, dried 10 minutes for following 105 DEG C.
3, graphical photoresist
A, whirl coating: at ready 4 cun of silicon wafer surface spin coatings 6-7 μm of photoresist, preferred AZ4620, pre-rotating speed 500rpm time 6s, spin coating rotating speed 400rpm time 30s;
B, front baking: front baking at 95 DEG C, 210s;
C, exposure: use MA6 contact photoetching machine, under Low-vacuum mode, expose 24s;
D, development: the proportioning of developer solution used is Tetramethylammonium hydroxide: deionized water=1:8, developing time 95s;
E, after bake: after bake 95 DEG C, 180s.
4, Graphic transitions is to Silicon Wafer
A, to remove photoresist: the photoresist glued membrane that equipment for burning-off photoresist by plasma is residual after removing development;
B, dry etching: use reactive ion etching (RIE) to remove patterned SiO
2layer, 6 minutes time
C, wet method orientation etching: etch 9 minutes with 30%KOH solution at 78 DEG C, finally form anti-rectangular pyramid structure in silicon wafer surface.
S2, in template, form sensitive layer
Then in template, cover the thin film that a kind of high molecular polymer (as polydimethylsiloxane) makes it evenly to be formed one deck very thin (preferred thickness is 50 μm).
S3, on sensitive layer, form one deck supporting layer
Ultra-thin PE (polyethylene) thin film (thickness is preferably 12 μm) of one deck high transparency high flexibility is formed again in the seamless bubble-free of above-mentioned film surface (have bubble, the situation in gap be also included within the inside).
S4, heat treatment, peel off the sensitive layer after solidification and supporting layer from template
Wait until after processing a period of time (preferably 2 ~ 3h) again under heating in vacuum environment that aforesaid liquid high molecular polymer PDMS thin film solidifies completely, simultaneously and PE film also combine together completely, next the high molecular polymer thin film of solidification is stripped down from silicon wafer template surface, thus just the micro-pattern complex in silicon wafer template is prepared the thin film with pyramid micro structure to PDMS fexible film, this film integral thickness <70 μm
S5, form upper electrode layer respectively at the lower surface of the upper surface of sensitive layer and supporting layer and lower electrode layer is respectively drawn (as sticky pressure, welding etc., this utility model is sticky pressure preferably), article one, (0.08mm is thick according to appointment takes into account conductive non-woven fabrics that is flexible and toughness to flexible electrode, diameter be about 0.1mm enamel-covered wire composition, about 20 μm thick and with the flat copper foil belt of pressure-sensitive adhesive, the Copper Foil of pliable and tough ultra-thin (10 μm thick), preferably pliable and tough, that about 0.08mm is thick conductive non-woven fabrics).
Finally cover one deck thin (thickness <10 μm) protective layer (preferred PDMS).
Referring to shown in Fig. 2 is a kind of colon endoscope robot system utilizing this flexible sensor to build again, it comprises flexible sensor A, execution module B, data processing module C and display module D, this system can pass through sensor senses, signal transmitting, signal processing and feedback, order and implementation, realizes the operations such as the Intelligent mobile of sight glass robot, detection.
More specifically, operationally, flexible sensor is in order to gather extraneous pressure signal; Data processing module carries out analyzing and processing to the pressure signal gathered, and assigns operational order, and execution module is executed the task.
Wherein, aforementioned each module can form closed loop system, to improve robot system control accuracy.In addition, also can comprise wired and/or wireless communication module within the system, realize man-machine this locality, long-distance intelligent is mutual.
Further, described flexible sensor can be combined on the snake robot of sight glass machine, be transmitted on data processing module (control system) by the signal of sensitive material collection in described sensor, control system can make feedback, next step operation sequence of instruction robot, and after filtering, amplification, signal after the processing of circuit such as A/D conversion can also be transmitted on terminal demonstration instrument, according to display occurring the signal such as amplitude, frequency, extract the characteristic parameter such as area, impulsive force information of being rebuffed, and then analysis obtains more effective data.
Refer to Fig. 3, this flexible sensing device is attached on snake robot (execution module), connect circuit, add that the signal that a small voltage (preferred 2-5V) is gathered by sensitive material is transmitted on controller, control system can make feedback, next step operation sequence of instruction snake robot.And after filtering, amplification, signal after the processing of circuit such as A/D conversion can also be transmitted on terminal demonstration instrument (display module), according to display occurring the signal such as amplitude, frequency, extract the characteristic parameter such as area, impulsive force information of being rebuffed, and then analyze the data more being had practicality.Referring to Fig. 4 is that " wearing the clothes " robot is being subject to the signal curve under different size pressure.
Flexible sensor is used for colon endoscope robot by this utility model, can in conjunction with the output signal of human colon bending die and pressure transducer, for robot location controls to provide feedback information, build position loop system, improve robot location control accuracy, thus realize man-machine interactive operation processes such as painless, the noninvasive test of human colon and minimally-invasive treatments.
It should be noted that, in this article, the such as relational terms of first and second grades and so on is only used for an entity or operation to separate with another entity or operating space, and not necessarily requires or imply the relation that there is any this reality between these entities or operation or sequentially.And, term " comprises ", " comprising " or its any other variant are intended to contain comprising of nonexcludability, thus make to comprise the process of a series of key element, method, article or equipment and not only comprise those key elements, but also comprise other key elements clearly do not listed, or also comprise by the intrinsic key element of this process, method, article or equipment.When not more restrictions, the key element limited by statement " comprising ... ", and be not precluded within process, method, article or the equipment comprising described key element and also there is other identical element.
The above is only the detailed description of the invention of the application; it should be pointed out that for those skilled in the art, under the prerequisite not departing from the application's principle; can also make some improvements and modifications, these improvements and modifications also should be considered as the protection domain of the application.
Claims (10)
1. the flexible sensor for sight glass robot, it is characterized in that comprising flexible sensitive layer, the upper and lower end face of described flexible sensitive layer is formed with upper and lower electrode layer respectively, and at least one in the upper and lower end face of described flexible sensitive layer has nonplanar structure, simultaneously also be provided with flexible support layers between described flexible sensitive layer and upper electrode layer or lower electrode layer, the thickness sum of described flexible sensitive layer and flexible support layers is less than 70 μm.
2. the flexible sensor for sight glass robot according to claim 1, is characterized in that the thickness of described flexible sensitive layer is 2 ~ 50 μm.
3. the flexible sensor for sight glass robot according to claim 1, is characterized in that described nonplanar structure comprises a plurality of opposing projections and/or relative depressed portions.
4. the flexible sensor for sight glass robot according to claim 3, it is characterized in that described nonplanar structure comprises a plurality of cone protruded out, the bottom surface of described cone is the square of 10 μm × 10 μm, and the angle of side and bottom surface is 54.7 °, and cone height is 7.06 μm.
5. the flexible sensor for sight glass robot according to claim 1, is characterized in that the integral thickness of described flexible sensor is less than 70 μm.
6. the flexible sensor for sight glass robot according to claim 1, it is characterized in that described upper electrode layer or lower electrode layer also lead to flexible electrode, described flexible extraction electrode comprises flat copper foil belt below 20 μm of conductive non-woven fabrics, thickness or the Copper Foil of thickness below 10 μm.
7. the flexible sensor for sight glass robot according to claim 1, is characterized in that described upper electrode layer and/or lower electrode layer are also coated with protective layer.
8. a robot, is characterized in that the flexible sensor comprised according to any one of claim 1-7.
9. a sight glass robot, it is characterized in that comprising the flexible sensor according to any one of claim 1-7 and data processing module, execution module and display module, described flexible sensor, execution module and display module are connected with described data processing module respectively.
10. sight glass robot according to claim 9, is characterized in that also being connected with the combination of any one or more in filtration module, signal amplification module, A/D modular converter between described flexible sensor and data processing module.
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| CN201520420095.2U CN204863062U (en) | 2015-06-17 | 2015-06-17 | A flexible sensor and speculum robot for speculum robot |
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| CN201520420095.2U CN204863062U (en) | 2015-06-17 | 2015-06-17 | A flexible sensor and speculum robot for speculum robot |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106308725A (en) * | 2015-06-17 | 2017-01-11 | 中国科学院苏州纳米技术与纳米仿生研究所 | Flexible sensor for endoscopy robot and application of flexible sensor |
| WO2018045980A1 (en) * | 2016-09-08 | 2018-03-15 | 北京纳米能源与系统研究所 | Deformable flexible nano generator and manufacturing method therefor, sensor and robot |
| CN110273322A (en) * | 2019-06-20 | 2019-09-24 | 京东方科技集团股份有限公司 | Nanometer paper and preparation method, the method and electronic equipment that carry out graphics process |
-
2015
- 2015-06-17 CN CN201520420095.2U patent/CN204863062U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106308725A (en) * | 2015-06-17 | 2017-01-11 | 中国科学院苏州纳米技术与纳米仿生研究所 | Flexible sensor for endoscopy robot and application of flexible sensor |
| WO2018045980A1 (en) * | 2016-09-08 | 2018-03-15 | 北京纳米能源与系统研究所 | Deformable flexible nano generator and manufacturing method therefor, sensor and robot |
| CN110273322A (en) * | 2019-06-20 | 2019-09-24 | 京东方科技集团股份有限公司 | Nanometer paper and preparation method, the method and electronic equipment that carry out graphics process |
| CN110273322B (en) * | 2019-06-20 | 2022-04-26 | 京东方科技集团股份有限公司 | Nano paper, preparation method, method for carrying out graphic processing and electronic equipment |
| US11630531B2 (en) | 2019-06-20 | 2023-04-18 | Beijing Boe Technology Development Co., Ltd. | Nano paper and preparation method, method for image processing and electronic device |
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