CN104242858A - 振动元件、振子、振荡器、电子设备以及移动体 - Google Patents
振动元件、振子、振荡器、电子设备以及移动体 Download PDFInfo
- Publication number
- CN104242858A CN104242858A CN201410270270.4A CN201410270270A CN104242858A CN 104242858 A CN104242858 A CN 104242858A CN 201410270270 A CN201410270270 A CN 201410270270A CN 104242858 A CN104242858 A CN 104242858A
- Authority
- CN
- China
- Prior art keywords
- base
- vibrating
- vibrating element
- arm
- fixing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007423 decrease Effects 0.000 claims description 14
- 239000000463 material Substances 0.000 description 40
- 239000010453 quartz Substances 0.000 description 32
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 32
- 239000000758 substrate Substances 0.000 description 21
- 239000000853 adhesive Substances 0.000 description 20
- 230000001070 adhesive effect Effects 0.000 description 20
- 230000000694 effects Effects 0.000 description 17
- 238000006073 displacement reaction Methods 0.000 description 12
- 239000010931 gold Substances 0.000 description 10
- 238000005452 bending Methods 0.000 description 9
- 230000006870 function Effects 0.000 description 9
- 239000011651 chromium Substances 0.000 description 7
- 239000000470 constituent Substances 0.000 description 6
- 238000003384 imaging method Methods 0.000 description 6
- 230000033001 locomotion Effects 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 5
- 241000251131 Sphyrna Species 0.000 description 4
- 238000013459 approach Methods 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- 238000004891 communication Methods 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 230000010355 oscillation Effects 0.000 description 4
- 229910052709 silver Inorganic materials 0.000 description 4
- 239000004332 silver Substances 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 2
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- PSHMSSXLYVAENJ-UHFFFAOYSA-N dilithium;[oxido(oxoboranyloxy)boranyl]oxy-oxoboranyloxyborinate Chemical compound [Li+].[Li+].O=BOB([O-])OB([O-])OB=O PSHMSSXLYVAENJ-UHFFFAOYSA-N 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 229910052746 lanthanum Inorganic materials 0.000 description 2
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 239000010955 niobium Substances 0.000 description 2
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000035882 stress Effects 0.000 description 2
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 241000251468 Actinopterygii Species 0.000 description 1
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- WQZGKKKJIJFFOK-GASJEMHNSA-N Glucose Natural products OC[C@H]1OC(O)[C@H](O)[C@@H](O)[C@@H]1O WQZGKKKJIJFFOK-GASJEMHNSA-N 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 244000089486 Phragmites australis subsp australis Species 0.000 description 1
- 235000014676 Phragmites communis Nutrition 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- KGWWEXORQXHJJQ-UHFFFAOYSA-N [Fe].[Co].[Ni] Chemical compound [Fe].[Co].[Ni] KGWWEXORQXHJJQ-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000008280 blood Substances 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000788 chromium alloy Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000011231 conductive filler Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000008103 glucose Substances 0.000 description 1
- 239000003353 gold alloy Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920003192 poly(bis maleimide) Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- -1 silver halide Chemical class 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
- 230000002277 temperature effect Effects 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders or supports
- H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
- H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
- H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
- H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
- H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders or supports
- H03H9/10—Mounting in enclosures
- H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
- H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
- H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/21—Crystal tuning forks
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Oscillators With Electromechanical Resonators (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013127980A JP2015002548A (ja) | 2013-06-18 | 2013-06-18 | 振動素子、振動子、発振器、電子機器および移動体 |
| JP2013-127980 | 2013-06-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104242858A true CN104242858A (zh) | 2014-12-24 |
Family
ID=52018731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410270270.4A Pending CN104242858A (zh) | 2013-06-18 | 2014-06-17 | 振动元件、振子、振荡器、电子设备以及移动体 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20140368287A1 (enExample) |
| JP (1) | JP2015002548A (enExample) |
| CN (1) | CN104242858A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107431475A (zh) * | 2015-03-31 | 2017-12-01 | 株式会社村田制作所 | 谐振器 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI634742B (zh) * | 2013-11-16 | 2018-09-01 | 精工愛普生股份有限公司 | 振動片、振動子、振盪器、電子機器及移動體 |
| CN115428336A (zh) | 2020-04-27 | 2022-12-02 | 株式会社村田制作所 | 谐振器以及谐振装置 |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52129395A (en) * | 1976-04-23 | 1977-10-29 | Seiko Instr & Electronics Ltd | Tuner fork type peizoelectric resonatpr |
| JPS58170110A (ja) * | 1982-03-30 | 1983-10-06 | Citizen Watch Co Ltd | 水晶振動子 |
| JP2005094724A (ja) * | 2003-09-17 | 2005-04-07 | Herutsu Kk | 音叉型水晶振動子 |
| US7061167B2 (en) * | 2003-05-16 | 2006-06-13 | Seiko Epson Corporation | Tuning-fork-type piezoelectric vibrating reed and tuning-fork-type piezoelectric vibrator |
| JP2007271498A (ja) * | 2006-03-31 | 2007-10-18 | Kyocera Kinseki Corp | 加速度センサ |
| JP2009100480A (ja) * | 2008-10-14 | 2009-05-07 | Piedekku Gijutsu Kenkyusho:Kk | 水晶ユニットと水晶発振器の製造方法 |
| CN101878590A (zh) * | 2008-09-26 | 2010-11-03 | 株式会社大真空 | 音叉型压电振动片以及音叉型压电振动装置 |
| CN102025341A (zh) * | 2009-09-11 | 2011-04-20 | 精工爱普生株式会社 | 振动片、振子、振荡器及电子设备 |
| JP2012186679A (ja) * | 2011-03-07 | 2012-09-27 | Seiko Epson Corp | 圧電振動素子、圧電振動子、圧電発振器、及び電子機器 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3493292A (en) * | 1966-07-22 | 1970-02-03 | Bulova Watch Co Inc | Tuning fork structures |
| JPS5694813A (en) * | 1979-12-27 | 1981-07-31 | Seiko Instr & Electronics Ltd | Tuning fork type piezoelectric oscillator |
| US7084556B1 (en) * | 2005-06-09 | 2006-08-01 | Eta Sa Manufacture Horlogere Suisse | Small-sized piezoelectric resonator |
| JP5476964B2 (ja) * | 2009-12-09 | 2014-04-23 | セイコーエプソン株式会社 | 振動子、発振器、ジャイロ及び電子機器 |
| JP5479931B2 (ja) * | 2010-02-03 | 2014-04-23 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動子、発振器、電子機器および電波時計 |
| EP2624450B1 (en) * | 2011-02-25 | 2015-02-11 | Daishinku Corporation | Piezoelectric vibrating reed, piezoelectric vibrator, method for manufacturing piezoelectric vibrating reed, and method for manufacturing piezoelectric vibrator |
| JP2014135654A (ja) * | 2013-01-10 | 2014-07-24 | Sii Crystal Technology Inc | 圧電振動片、圧電振動子、発振器、電子機器及び電波時計 |
| JP2014135655A (ja) * | 2013-01-10 | 2014-07-24 | Sii Crystal Technology Inc | 圧電振動片、圧電振動子、発振器、電子機器及び電波時計 |
| JP6013228B2 (ja) * | 2013-02-25 | 2016-10-25 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動子、発振器、電子機器及び電波時計 |
| JP6148881B2 (ja) * | 2013-03-11 | 2017-06-14 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片、圧電振動子、発振器、電子機器及び電波時計 |
| JP6145288B2 (ja) * | 2013-03-15 | 2017-06-07 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片、圧電振動子、発振器、電子機器、及び電波時計 |
-
2013
- 2013-06-18 JP JP2013127980A patent/JP2015002548A/ja not_active Withdrawn
-
2014
- 2014-06-17 CN CN201410270270.4A patent/CN104242858A/zh active Pending
- 2014-06-18 US US14/307,999 patent/US20140368287A1/en not_active Abandoned
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52129395A (en) * | 1976-04-23 | 1977-10-29 | Seiko Instr & Electronics Ltd | Tuner fork type peizoelectric resonatpr |
| JPS58170110A (ja) * | 1982-03-30 | 1983-10-06 | Citizen Watch Co Ltd | 水晶振動子 |
| US7061167B2 (en) * | 2003-05-16 | 2006-06-13 | Seiko Epson Corporation | Tuning-fork-type piezoelectric vibrating reed and tuning-fork-type piezoelectric vibrator |
| CN101425790A (zh) * | 2003-05-16 | 2009-05-06 | 精工爱普生株式会社 | 音叉型压电振动片及音叉型压电振子 |
| JP2005094724A (ja) * | 2003-09-17 | 2005-04-07 | Herutsu Kk | 音叉型水晶振動子 |
| JP2007271498A (ja) * | 2006-03-31 | 2007-10-18 | Kyocera Kinseki Corp | 加速度センサ |
| CN101878590A (zh) * | 2008-09-26 | 2010-11-03 | 株式会社大真空 | 音叉型压电振动片以及音叉型压电振动装置 |
| JP2009100480A (ja) * | 2008-10-14 | 2009-05-07 | Piedekku Gijutsu Kenkyusho:Kk | 水晶ユニットと水晶発振器の製造方法 |
| CN102025341A (zh) * | 2009-09-11 | 2011-04-20 | 精工爱普生株式会社 | 振动片、振子、振荡器及电子设备 |
| JP2012186679A (ja) * | 2011-03-07 | 2012-09-27 | Seiko Epson Corp | 圧電振動素子、圧電振動子、圧電発振器、及び電子機器 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107431475A (zh) * | 2015-03-31 | 2017-12-01 | 株式会社村田制作所 | 谐振器 |
| CN107431475B (zh) * | 2015-03-31 | 2020-08-11 | 株式会社村田制作所 | 谐振器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2015002548A (ja) | 2015-01-05 |
| US20140368287A1 (en) | 2014-12-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109067379B (zh) | 振动元件、振子、振荡器、电子设备以及移动体 | |
| CN104079263B (zh) | 振动元件、振子、振荡器、电子设备、传感器以及移动体 | |
| CN104079262A (zh) | 振动元件、振子、振荡器、电子设备以及移动体 | |
| KR20140118840A (ko) | 진동 소자, 진동자, 발진기, 전자 기기 및 이동체 | |
| CN104079260A (zh) | 振动元件、振子、振荡器、电子设备以及移动体 | |
| TWI649964B (zh) | 振動元件、振動子、振盪器、電子機器及移動體 | |
| CN104242860B (zh) | 振动片、振子、电子器件、电子设备以及移动体 | |
| CN104242866B (zh) | 振动元件、振子、振荡器、电子设备以及移动体 | |
| CN104753491B (zh) | 振子、振荡器、电子设备、物理量传感器和移动体 | |
| JP2015128262A (ja) | 振動片、振動子、発振器、電子機器、センサーおよび移動体 | |
| CN104242858A (zh) | 振动元件、振子、振荡器、电子设备以及移动体 | |
| JP2014200050A (ja) | 振動素子、振動子、発振器、電子機器および移動体 | |
| CN104079254B (zh) | 振动元件、振子、振荡器、电子设备以及移动体 | |
| CN104660169A (zh) | 振动元件、振子、振荡器、电子设备及移动体 | |
| JP2015149592A (ja) | 振動素子、振動子、発振器、電子機器および移動体 | |
| JP7439852B2 (ja) | 振動素子、振動子、発振器、電子機器および移動体 | |
| JP6816805B2 (ja) | 振動素子、振動子、発振器、電子機器および移動体 | |
| JP6521148B2 (ja) | 振動素子、振動子、発振器、電子機器および移動体 | |
| JP2019115079A (ja) | 振動素子、振動子、発振器、電子機器および移動体 | |
| JP2018061286A (ja) | 振動素子、振動子、発振器、電子機器および移動体 | |
| JP2015089052A (ja) | 振動素子、振動子、発振器、電子機器および移動体 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20141224 |