CN104238136B - Polarization light emitting apparatus for light orientation and light orientation polarizing light irradiation method - Google Patents
Polarization light emitting apparatus for light orientation and light orientation polarizing light irradiation method Download PDFInfo
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- CN104238136B CN104238136B CN201410270138.3A CN201410270138A CN104238136B CN 104238136 B CN104238136 B CN 104238136B CN 201410270138 A CN201410270138 A CN 201410270138A CN 104238136 B CN104238136 B CN 104238136B
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
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- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Optics & Photonics (AREA)
- Manufacturing & Machinery (AREA)
- Engineering & Computer Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mathematical Physics (AREA)
- Liquid Crystal (AREA)
- Polarising Elements (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
A kind of polarization light emitting apparatus for light orientation and light orientation polarizing light irradiation method are provided, are the light orientation technologies that the inner evenness of light exposure can be made to become higher practicality by well-designed transport system.Light from the light source (3) for forming long illumination region irradiates irradiation area (R) via polarizer unit (4), transport system (2) conveys substrate (S) in a first direction, makes it reciprocal while irradiation area (R) is passed through.Along a first direction, transport system (2) conveys substrate (S) after the conveying toward road, before the conveying in circuit in a second direction for the boundary line (40) of each polarizer (41).Due to the state from substrate (S), conjugated in the position of boundary line (40), so exposure quantitative change is uniform.
Description
Technical field
The present invention relates to the irradiation techniques in the polarised light for carrying out light orientation when progress.
Background technology
In recent years, it is obtaining taking by the alignment films of the liquid crystal display element of representative, field angle compensation film of liquid crystal display panel
During to layer, the technology for being referred to as light orientation that row orientation is injected by illumination is gradually adopted.It is produced in the following, will be irradiated by light
Film, the layer of orientation are referred to as optical alignment film.In addition, " orientation " or " orientation process " refers to that certain properties for object assign
Directionality.
Light orientation irradiates polarised light to carry out by the film (hereinafter referred to as membrane material) to optical alignment film.Membrane material is, for example, poly-
Resin system as acid imide, the polarised light polarized to desired direction (direction that should be orientated) are irradiated to membrane material.Pass through photograph
The polarised light of provision wavelengths is penetrated, the molecular structure (such as side chain) of membrane material, can as the state being aligned to the direction of polarised light
Obtain optical alignment film.
Optical alignment film becomes to maximize with the enlargement for the liquid crystal display panel for using the optical alignment film.It is therefore desirable to
The width of the irradiation area of polarised light become larger to 1500mm and its more than, significantly wide cut.As to such wider width
Irradiation area irradiation polarised light polarized light illumination device, such as have disclosed device in patent document 1.The device has
With the rod type light source of the comparable length of width of irradiation area and make the wire grid polarization element of the light polarization from the light source,
Polarised light is irradiated to the membrane material being delivered up in the orthogonal side of the length direction relative to light source.Due to needing to shine in light orientation
It penetrates from visually to the polarised light of the wavelength of ultraviolet range, so as rod type light source, it is such using high-pressure mercury-vapor lamp in most cases
Ultraviolet light source.
Patent document 1：Japanese Unexamined Patent Publication 2006-126464 bulletins
Patent document 2：No. 4815995 bulletins of Japanese Patent Publication No.
The index of quality as light orientation processing, it is important that the uniformity of light exposure.The uniformity of so-called light exposure,
It is not only to refer to accumulated exposure amount in the face of membrane material uniformly, and it is illuminated to refer to that polarised light is uniformly measured with which kind of degree.That is,
It needs not irradiating (the hereinafter referred to as no polarization light) not polarized as far as possible, and in the state for only irradiating polarised light, thus
Make light exposure uniform.If it is exposed in the state of more no polarization light are partly included, exposure as a whole
Amount distribution is uniform, but this is partially in the state for not carried out light orientation fully.That is, light orientation uniformity this
On point, quality decline.
Become problem in the viewpoint uniformly irradiated of polarised light is the finiteness of polarizer.Wire grid polarization element
Although as that can will be good from the element visually to the light polarization of ultraviolet range, it be difficult to manufacture the element of large-size.
Therefore, using the structure of blocking by multiple wire grid polarization element arrangements, to cover irradiation area.
In the case where being arranged multiple wire grid polarization elements, from the boundary part (contact site of end face of each polarizer
Point) irradiation no polarization light, it cannot carry out light orientation processing in the location directly below of the boundary part of each polarizer.If
Carry out light orientation processing in the state of such non-uniform Illumination Distribution, then in the surface of workpiece (membrane material) pass through it is each partially
Shake element boundary part location directly below region in, become the insufficient state of light orientation, the face of light orientation processing
Interior uniformity declines.
Consider this problem, in patent document 1, barn door be set so that the boundary part of each polarizer to be blocked,
So that light is not projected from boundary part.By the way that barn door is configured, exposed in the region across the location directly below of barn door
Amount declines, but the considerations of be preferable compared with the light of no polarization is more irradiated and light orientation partly becomes inadequate.It hides
The illumination decline of polarised light at the location directly below of tabula rasa can make the output of light source become larger and become illumination on the whole
Height makes irradiation distance elongated and mitigates illumination decline.In addition, in the following description, so-called illumination, light exposure refer to about
Illumination, the light exposure of polarised light.
In addition, in order to eliminate the problem of illumination at the location directly below of barn door declines, patent document 2 discloses one
The light illuminator being made of light source and polarizer unit is arranged the construction of two by kind on the conveying direction of workpiece.At this
In construction so that the boundary line of each wire grid polarization element of polarizer unit in two light illuminators not on the same line
Arrangement, becomes the configuration being staggered on the vertical direction of the conveying direction relative to workpiece.If between two light illuminators
Additional workpiece simultaneously irradiates polarised light, even then passing through the location directly below of boundary line in a light illuminator (that is, shading
The location directly below of plate) workpiece surface region, also due to not passing through boundary line in another light illuminator just
The position of lower section, so exposure quantitative change is uniform on the whole.
By the technology of these patent documents 1 and patent document 2, uniform polarised light can be also carried out in a way
Irradiation, but in more demanding productivity or in the case of requiring higher uniformity, there is the aspect that cannot fully cope with.
On the other hand, in the technology of such light orientation, in addition to the object (workpiece) of polarizing light irradiation is that membrane material connects
Other than the situation for continuing the structure (hereinafter referred to as machining long workpieces) of connected length, also membrane material has been located on substrate, with membrane material
Substrate is the situation of workpiece.In such plate-like piece in the case of workpiece, have a various change as transport system, degree of freedom compared with
Greatly.Therefore, it is possible to think through well-designed transport system, it is possible to can be by the illumination caused by the use of above-mentioned barn door
It is unevenly distributed to homogenize and compensates and realize the higher light orientation processing of uniformity.
Invention content
The present invention considers the above problem and makes, it is therefore an objective to provide it is a kind of by well-designed transport system, can
Make the light orientation technology of the higher practicality of inner evenness of light exposure.
To solve the above-mentioned problems, the invention described in the technical solution 1 of the application is a kind of light orientation polarizing light irradiation
Device, the light illuminator for having irradiation area irradiation polarised light to setting and mode by workpiece to pass through irradiation area
The transport system of conveying, which is characterized in that light illuminator has the light source for forming long illumination region and configuration in light source with shining
Penetrate the polarizer unit between region；Multiple polarizers that polarizer unit is arranged by the length direction along illumination region
It forms；Workpiece is one by one cut off, and transport system is by making the workpiece holding body that remain workpiece mobile and conveying workpieces；Conveying
System is moved up by the first party that workpiece holding body is made to intersect in the length direction with illumination region, by workpiece to pass through irradiation
The mode in region conveys, and can make workpiece holding body in the direction of the boundary line of each polarizer with polarizer unit
The second party of intersection moves up；Movement based on from the workpiece holding body of transport system to second direction, makes from workpiece
The position of the boundary line of each polarizer relatively conjugates in a second direction when light irradiates.
In addition, to solve the above-mentioned problems, the invention described in technical solution 2, in the structure of above-mentioned technical proposal 1, tool
Have with lower structure：The movement to first direction based on above-mentioned transport system, makes above-mentioned workpiece holding body remain workpiece
Above-mentioned workpiece holding body passes through the mode of irradiation area to move back and forth, and circuit of the above-mentioned transport system after the completion of being moved toward road is moved
The movement to above-mentioned second direction is carried out before dynamic.
In addition, to solve the above-mentioned problems, the invention described in technical solution 3, in the structure of above-mentioned technical proposal 1, tool
There is following structure：Above-mentioned transport system carry out to above-mentioned first direction it is mobile when carry out shifting to above-mentioned second direction
It is dynamic.
In addition, to solve the above-mentioned problems, the invention described in technical solution 4, in the structure of above-mentioned technical proposal 1, tool
There is following structure：Above-mentioned light illuminator is the first light illuminator, multiple light illuminators as the second light illuminator；First light
The boundary line of each polarizer of illuminator and the boundary line of each polarizer of the second light illuminator are in above-mentioned second direction
It mutually staggers.
In addition, to solve the above-mentioned problems, the invention described in technical solution 5 is a kind of light orientation polarizing light irradiation side
Method irradiates the light from the light source for forming long illumination region by polarizer unit to irradiation area, and by workpiece to wear
The mode for crossing irradiation area conveys, so as to workpiece irradiation light orientation polarised light, which is characterized in that polarizer unit by
The multiple polarizers arranged along the length direction of illumination region are formed；Workpiece is one by one cut off, and the above method is：By making
The workpiece holding body that remain workpiece is mobile and conveying workpieces；By the way that workpiece holding body is made to intersect in the length direction with illumination region
First party move up, workpiece is conveyed to pass through the mode of irradiation area, and make workpiece holding body with polarizer
The second party that the direction of the boundary line of each polarizer of unit intersects moves up；By workpiece holding body to second direction
Conveying, makes the position of the boundary line of each polarizer from workpiece relatively be conjugated in a second direction when light irradiates.
In addition, to solve the above-mentioned problems, the invention described in technical solution 6, in the structure of above-mentioned technical proposal 5, tool
There is following structure：Movement to above-mentioned first direction makes above-mentioned workpiece holding body to remain the holding of the above-mentioned workpiece of workpiece
Body passes through the mode of irradiation area to move back and forth, and is carried out before the circuit movement after the completion of being moved toward road to above-mentioned second direction
Movement.
In addition, to solve the above-mentioned problems, the invention described in technical solution 7, in the structure of above-mentioned technical proposal 5, tool
There is following structure：Carry out to above-mentioned first direction it is mobile when carry out movement to above-mentioned second direction.
In addition, to solve the above-mentioned problems, the invention described in technical solution 8, in the structure of above-mentioned technical proposal 5, tool
There is following structure：Above-mentioned light illuminator is the first light illuminator, multiple light illuminators as the second light illuminator；Make
The boundary line of each polarizer of one light illuminator and the boundary line of each polarizer of the second light illuminator are in above-mentioned second party
It is carried out in the state of mutually staggering upwards.
As described below, the invention according to the technical solution 1 or 5 of the application, workpiece is defeated in a first direction
It is each inclined from workpiece in making by conveying in a second direction workpiece when sending and passing through irradiation area
Shake element boundary line position Relative Displacement in a second direction state, so whether there are boundary lines, pass through
Light exposure in the plane of illumination of workpiece is all uniform.
In addition, the invention according to technical solution 2 or 6, in addition to the effect above, due to moving back and forth workpiece,
So it is suitable for needing the situation of more light exposure.Further, since the carrying of workpiece is carried out in the side of irradiation area and is returned
It receives, so simplifying construction and action.
In addition, the invention according to technical solution 3 or 7, in addition to the effect above, due to the conveying to second direction
It is carried out during the conveying to first direction, so productive temp time shortens, productivity improves.
In addition, the invention according to technical solution 4 or 8, in addition to the effect above, due to being equipped with multiple light irradiations
Device, so easily make exposure quantitative change more, and since the boundary line of the polarizer in two polarizer units is staggered, so
Light exposure is uniform.Also, due to the conveying for having imported second direction, so light exposure can be made evenly.
Description of the drawings
Fig. 1 is the perspective sketch of the polarization light emitting apparatus for light orientation of embodiment for the present invention.
Fig. 2 is the section skeleton diagram of light illuminator 1 shown in FIG. 1, and (1) is cutting on the direction of the short side of irradiation area R
Face skeleton diagram, (2) are the section skeleton diagrams on the direction of the long side of irradiation area R.
Fig. 3 is the perspective sketch of shown in FIG. 15.
Fig. 4 is the plane skeleton diagram of table transferring mechanism 61,62 that transport system 2 has.
Fig. 5 is the front skeleton diagram of table transferring mechanism 61,62 that transport system 2 has.
Fig. 6 is the plane skeleton diagram of the action of the transport system 2 for the device for representing embodiment.
Fig. 7 is the plane skeleton diagram of the displacement distance to second direction for the device for representing embodiment.
Fig. 8 is the perspective sketch of the polarization light emitting apparatus for light orientation in relation to second embodiment.
Fig. 9 is the plan view of the allocation position for each polarizer unit 4 that outlined second embodiment.
Figure 10 is the plane skeleton diagram of the action of the transport system 2 for the device for representing second embodiment.
Figure 11 is the plane skeleton diagram of the displacement distance to second direction for the device for representing second embodiment.
Figure 12 is the polarization light emitting apparatus for light orientation for representing third embodiment and the plane skeleton diagram of method.
Figure 13 is the conveying for representing to be identified through importing the substrate S to second direction and accumulated exposure quantitative change is uniformly tested
Result figure.
Reference sign
1 light illuminator
2 transport systems
21 bottom plates
3 light sources
4 polarizer units
40 boundary lines
41 polarizers
43 barn doors
5
61 first table transferring mechanisms
611 first ball-screws
612 first linear guidance parts
613 first driving sources
62 second table transferring mechanisms
611 second ball-screws
612 second linear guide portions
613 second driving sources
7 control units
S substrates
R irradiation areas
Specific embodiment
Then, the form (hereinafter referred to as embodiment) for being used for implementing the present invention is illustrated.
Fig. 1 is the perspective sketch of the polarization light emitting apparatus for light orientation of embodiment for the present invention.Shown in Fig. 1
Polarized light illumination device be to carry out light to workpiece (hereinafter referred to as substrate) S of plate as carrying the crystal liquid substrate of membrane material to take
To the device of processing.
Specifically, the device of Fig. 1 has the light illuminator 1 of the irradiation area R irradiation polarised lights to setting and to wear
Cross the transport system 2 of the mode conveying substrate S of irradiation area R.As shown in Figure 1, irradiation area R is set to rectangular level
Region.Light illuminator 1 includes the light source 3 for forming long illumination region.The length direction of the illumination region of light source 3 and irradiation area R
Long side direction it is consistent.
Fig. 2 is the section skeleton diagram of light illuminator 1 shown in FIG. 1, and (1) is cutting on the direction of the short side of irradiation area R
Face skeleton diagram, (2) are the section skeleton diagrams on the direction of the long side of irradiation area R.As shown in Fig. 2, light illuminator 1 has composition
The light source 3 of long illumination region and the polarizer unit 4 being configured between light source 3 and irradiation area R.
As light source 3, rodlike high-pressure mercury-vapor lamp is used.In addition to this, also there are the feelings using metal halide lamp or LED
Condition.In addition, rodlike light source 3 is an example for the light source 3 for forming long illumination region, but forms and point light source 3 is arranged as a row
Structure can also form long illumination region.
The behind of light source 3 (with irradiation area R opposite sides), it is configured with mirror 31.Mirror 31 is on the length direction of light source 3
The structure of the length of extension covers the behind of light source 3 and makes a lateral reflection of the light to irradiation area R, is imitated so as to improve utilizing for light
Rate.The cross sectional shape of the reflecting surface of mirror 31 is in elliptical circular arc or parabola.
Polarizer unit 4 is by multiple polarizers 41 and remains the frames 42 of multiple polarizers 41 and forms.
In the embodiment, each polarizer 41 is wire grid polarization element 41.Each polarizer 41 is rectangular plate, in light source 3
It is arranged on the length direction of illumination region.Thus, the boundary line of each polarizer 41 is vertical with the length direction of illumination region.
The frame 42 that remain each polarizer 41 is longer rectangle on the direction for arranging each polarizer 41
Frame-shaped.
In addition, barn door 43 is equipped in a manner of covering each boundary line 40.Barn door 43 is so that from the portion of boundary line 40
Divide the component for not projecting no polarization light.
In addition, light source 3 and mirror 31 are housed in lamp house 32.Polarizer unit 4 is installed on the light irradiation of lamp house 32 with opening
Mouthful.
Transport system 2 is by making the workpiece holding body that remain substrate S move come conveying substrate S.In this embodiment,
Platform 5 is used as workpiece holding body.Fig. 3 is the perspective sketch of shown in FIG. 15.
As shown in Figures 1 and 3, platform 5 is rectangular, and the substantial middle in upside keeps substrate S.Platform 5 has retaining pin 51,
To keep substrate S in the position floated slightly from upper surface.Retaining pin 51 is integrally kept by platform 5, if platform 5 moves, is protected
The substrate S held is also moved together.
There are four retaining pin 51 is set on the position at rectangular angle.In addition to this, according to the size of substrate S, also have in
The situation that the position of centre is also provided with.Each retaining pin 51 is tubulose, is connected on vacuum pumping system (not shown), from opening for upper end
Mouthful attract and by substrate S vacuum suctions.
In addition, retaining pin 51 is not hampered in the manufacturing process of product of substrate S is used for the contact position of substrate S
The position hindered.For example, it is liquid crystal display manufacture substrate in substrate S and manufactures multiple liquid crystal displays from 1 plate base
In the case of, in the place deviateed from the region used to manufacture each liquid crystal display, contacted with retaining pin 51.
Transport system 2 has the table transferring mechanism 61,62 for moving platform 5 for the conveying of substrate S.Fig. 4 and Fig. 5 is defeated
The skeleton diagram of table transferring mechanism 61,62 that system 2 has is sent, Fig. 4 is plane skeleton diagram, and Fig. 5 is front skeleton diagram.
In this embodiment, the conveying substrate S on first, second two different directions of transport system 2.First direction
The vertical horizontal direction of the length direction of illumination region to be formed with light source 3.In addition, second direction is and polarizer unit
The direction that the direction of the boundary line 40 of 4 each polarizer 41 intersects.In this embodiment, second direction is and each polarization member
The vertical horizontal direction in the direction of the boundary line 40 of part 41.As described above, polarizer unit 4 is configured to, and makes each boundary line
40 direction is the horizontal direction vertical with the length direction of illumination region, so first direction and the direction one of each boundary line 40
It causes, second direction is the horizontal direction vertical with the direction of each boundary line 40.
The conveying of first direction is main conveying, is to irradiation area R conveying substrates for the loading position from substrate S
S, and while irradiation area R is passed through substrate S is made to reach the conveying of recovery position.The conveying of second direction is for making base
Light exposure in the face of plate S uniformly conveys.
As shown in Figure 1, transport system 2 has the first table transferring mechanism 61 that platform 5 is made to move in a first direction and makes platform
5 the second table transferring mechanisms 62 moved in a second direction.Platform 5 is mounted on bottom plate 21, and the first table transferring mechanism 61 is by making
Bottom plate 21 moves, and moves platform 5.Second table transferring mechanism 62 is fixed on bottom plate 21, moves platform 5 on bottom plate 21.
In this embodiment, it is set with substrate loading position in the side of irradiation area R.First table transferring mechanism 61 by
The first ball-screw 611 for extending from substrate loading position towards irradiation area R, in the both sides of the first ball-screw 611 and the
The the first linear guidance part 612 of a pair and drive the first of the first ball-screw 611 to drive that one ball-screw 611 extends parallel to
Dynamic source 613 is formed.
As shown in Figure 1, the first ball-screw 611 and a pair of first linear guidance part 612 are through irradiation area R and flatly
Extension.Link the first driving source 613 on one end of the first ball-screw 611, the other end is supported by bearing.A pair first
612 respective both ends of linear guide portion are supported by bearing.
Substantial middle in the lower surface of bottom plate 21, fixed (screw thread engages) screwed togather with the first ball-screw 611
First by drive block 22.In addition, in fixed a pair of first guiding block 23 in the lower surface of bottom plate 21.The fixation of first guiding block 23
Position corresponds to the position of the first linear guidance part 612 of both sides.Bearing is equipped in the first guiding block 23, the linear of both sides is led
Draw portion and penetrate through the first guiding block 23.
First driving source 613 is motor as AC servo motors, if the first driving source 613 rotates ball-screw,
Then bottom plate 21 and 5 one side of platform are guided by a pair of first linear guidance part 612, are integrally moved linearly on one side.It is maintained at platform as a result,
Substrate S on 5 is conveyed in a first direction.
In addition, the second table transferring mechanism 62 by be fixed on bottom plate 21 the second ball-screw 621, be equally fixed on bottom plate
On the second linear guide of a pair portion 622 and driving the second ball-screw 621 623 grade of the second driving source fixed.
Second ball-screw 621 and a pair of second linear guide portion 622 are fixed in a manner of extending in a second direction.
In the lower surface of platform 5 center, it is fixed screw togather with the second ball-screw 621 second by drive block 24.In addition, under platform 5
Fixed a pair of second guiding block 25 in surface.The fixed position of second guiding block 25 corresponds to the second linear guide portion of both sides
622 position.Bearing is equipped in the second guiding block 25, the linear guide portion of both sides penetrates through the second guiding block 25.
If the second driving source 623 rotates ball-screw, 5 one side of platform is guided by a pair of second linear guide portion 622,
It moves linearly on bottom plate 21 on one side.The substrate S being maintained at as a result, on platform 5 is conveyed in a second direction.
Fig. 6 is the plane skeleton diagram of the action of the transport system 2 for the device for representing embodiment.As shown in Fig. 6 (1),
Under original state, platform 5 is located at substrate loading position.If substrate S is positioned on platform 5 and is kept by each retaining pin 51, defeated
System 2 is sent to drive the first driving source 613, bottom plate 21 and platform 5 is made to advance in a first direction.If platform 5 reaches the first advance limit
Position is spent, then the first driving source 613 is stopped.As shown in Fig. 6 (2), the first advance limit positions are that the substrate S on platform 5 is complete
Across the position of irradiation area R.So-called " passing completely through " refers to that the rear of substrate S passes through irradiation area R.
Transport system 2 acts the second driving source 623 after the first advance limit positions make bottom plate 21 and platform 5 stops,
Platform 5 is made to move in a second direction on bottom plate 21.The second driving source 623 stops if platform 5 reaches the second advance limit positions
(Fig. 6 (3)).
Then, transport system 2 again acts the first driving source 613, makes bottom plate 21 and platform 5 reversed on first direction
It is mobile.That is, act the first driving source 613, so that the first ball-screw 611 reversely rotates.If platform 5 again passes through irradiation
Region R and reach substrate recovery position then the first driving source 613 stop (Fig. 6 (4)).
As shown in figure 4, polarized light illumination device has the control unit 7 controlled each portion of device.In addition, throughout
The sensor (not shown) of position equipped with monitoring bottom plate 21 and platform 5, the signal of each sensor are sent to control unit 7.And then
In the device of embodiment, it is contemplated to which substrate S is carried on platform 5, in addition returns the substrate S exposed from platform 5 by robot
It receives, control unit 7 carries out exchanging for signal between robot.
In control unit 7, the sequence for each portion including each driving source of transport system 2 is optimally controlled is installed
Program.Sequential programme sends control signal according to the signal from sensor to each portion, makes transport system 2 as shown in Figure 6
Action.
In above-mentioned transport system 2, from the viewpoint of the light exposure homogenization in the face of substrate S, to second direction
Displacement distance (uses d in the figure 7mRepresent) it is optimised.Hereinafter, this point is illustrated using Fig. 7.Fig. 7 is to represent embodiment party
The plane skeleton diagram of the displacement distance to second direction of the device of formula.
The movement of the platform 5 to second direction is also carried out other than first direction, is in order to avoid by above-mentioned boundary line 40
Location directly below at illumination decline caused by the unevenness of light exposure the problem of homogenizing.As described above, in embodiment
Device in, transport system 2 makes platform 5 move back and forth in a first direction.At this point, platform 5 is not by identical path return, and
It is to conjugate in the horizontal slightly, is returned by different paths.
Into road and circuit, when substrate S passes through irradiation area R, if identical path, Ze Wang is passed through in road
Position on the substrate S of the underface of boundary line 40 similarly passes through the location directly below of boundary line 40 in the loop.
In the conveying of such substrate S, the unevenness of light exposure is homogenized and will not be eliminated as caused by declining the illumination of locality.
On the other hand, if substrate S is returned by different paths, after passing through the position that illumination declines in Ze Wang roads
Position on substrate S passes through the position at the position for not being illumination decline and returns in the loop, so being exposed for as a whole
Amount becomes uniform.
But in this embodiment, in the boundary line 40 that multiple polarizers 41 are formed, there are multiple (polarizers 41
It it is three or more).Thus, if displacement distance dmWith the d of boundary line 40aDistance (or daIntegral multiple distance) unanimously, then
The position that region on the substrate S that the relatively low position of illumination is had passed through into road also passes through illumination relatively low in the loop, it is impossible to
Realize the homogenization of light exposure.Thus, to the displacement distance d of second directionmAs long as respectively polarization is first from polarizer unit 4
Leave distance (hereinafter, distance between boundary line 40) d in the boundary line 40 that part 41 is formedaIntegral multiple deviation can (dm≠n·
da, n is integer).From the viewpoint of productive temp time shortens, displacement distance dmShorter is preferred.Thus, displacement distance dm
In dm<daIn the range of suitably determined.
In addition, displacement distance dmFrom distance d between boundary line 40aDeviateed with which kind of degree, depending on each boundary line 40 just under
How is the situation that illumination in the region of side declines.It outlined the displacement distance d to second direction in the figure 7m, each boundary
Distance d between line 40aAnd the Illumination Distribution in the region of the underface of boundary line 40.Shown herein as Illumination Distribution be by
Illumination Distribution on the straight line of the second direction of the location directly below of boundary line 40 in irradiation area R.
As shown in Fig. 7 (1), the such narrow area of location directly below of boundary line 40 is limited in the decline of Illumination Distribution
In the case of domain, displacement distance dmIt is just sufficient more than the distance slightly of the unilateral width w in the region that illumination decline has occurred
It is enough.
On the other hand, as shown in Fig. 7 (2), in the width w that the region of illumination decline has occurred wider situations to a certain degree
Under, by displacement distance dmIt is set as being more than width w, but width w does not exceed distance d between each boundary line 40a1/2.Thus,
Displacement distance dmAs long as it is set as distance d between each boundary line 40a1/2.That is, if set to dm=da/ 2, no matter then wide
How degree w can realize uniform light exposure.But it is smaller in width w, d can also be set asm<da/ 2, it can be with
Make to become smaller to the displacement distance of second direction and shorten productive temp time.
In addition, following the example of about width w, is optimized according to the relationship of the light exposure uniformity with needs.Such as such as
Fruit light exposure uniformity is ± 5, then width w is set as declining from maximal illumination to the unilateral width in more than 10% region.
No matter how, all by displacement distance dmIt inputs to control unit 7, is recorded in storage part as controlling value in advance.And
And the second driving source 623 is sent as actuating quantity.
Hereinafter, to the whole action of the polarization light emitting apparatus for light orientation of the embodiment in relation to above structure into
Row explanation.The following description is also the explanation of the embodiment of the invention of light orientation polarizing light irradiation method.
Control unit 7 lights light source 3.Light from light source 3 by each polarizer 41 by, as polarised light, irradiating
To irradiation area R.Transport system 2 makes bottom plate 21 and platform 5 positioned at the substrate loading position as holding fix.
To batch feed mechanism as AGV (Auto Guided Vehicle) or pneumatic be passed through by the substrate S of light orientation
Sheet conveying mechanism is transported to polarized light illumination device as conveyer.Also, not shown robot is by a plate base S
It is placed on platform 5.Substrate S is placed on each retaining pin 51, by vacuum suction in each retaining pin 51.
If receiving the substrate from robot carries the signal completed, control unit 7 is sent to transport system 2 to be believed
Number, it is made to carry out above-mentioned a series of conveying action.Platform 5 is reciprocaled while irradiation area R is passed through as a result, across when, partially
Illumination of shaking is incident upon the substrate S on platform 5.Also, conjugating displacement distance d in the loopmPath in move, the face of substrate S
Interior each point is uniformly exposed.
If bottom plate 21 reaches substrate recovery position, control unit 7 sends to robot and believes after vacuum suction is closed
Number, it is made to recycle substrate S from platform 5.In addition, in this embodiment, the displacement distance in circuit is identical with the displacement distance toward road,
Thus substrate recovery position has conjugated the amount of the displacement distance d of second direction from substrate loading position.Robot is taught in advance,
Substrate S to be recycled in the substrate recovery position.
According to the polarized light illumination device in relation to structure described above and the embodiment of action or polarizing light irradiation side
Method, transport system 2 makes substrate S be moved back and forth while irradiation area R is passed through, after the conveying toward road, in circuit
Substrate S is made to move in a second direction before conveying, the path so as to which the path in circuit be made to become different from past road, shifting at this time
Dynamic distance dmDeviate from distance d between the boundary line 40 of each polarizer 41a, so the boundary line 40 of each polarizer 41 just under
The illumination decline of the position of side is compensated, and the exposure quantitative change in the face of substrate S is uniform.
Then, the device and method of second embodiment is illustrated.
Fig. 8 is the perspective sketch of the polarization light emitting apparatus for light orientation in relation to second embodiment.Shown in Fig. 8
The device of two embodiments has two light illuminators 1.What the construction of each light illuminator 1 and the device of first embodiment had
It constructs substantially same.
As shown in figure 8, the length direction of the illumination region of the light source 3 of two light illuminators 1 is vertical relative to first direction
Horizontal direction.Also, the configuration of each polarizer 41 of polarizer unit 4 mutually staggers in two light illuminators 1.To this
A little illustrated using Fig. 9.Fig. 9 is the plane of the allocation position for each polarizer unit 4 that outlined second embodiment
Figure.
As shown in figure 9, in two light illuminators 1, polarizer unit 4 is substantially identical construction, but respectively polarization
The allocation position of element 41 is different slightly.That is, each polarizer 41 of a polarizer unit 4 is relative to another polarization member
Each polarizer 41 of part unit 4 is in staggered configuration on the length direction of the illumination region of light source (not shown in fig.9).It is staggered
Amount is the 1/2 of the width t of each polarizer 41 in this embodiment.
In addition, in order to be set as the position being staggered like this, if the size shape of frame 42 and each polarizer 41, it is each partially
Shake element 41 quantity it is identical in two polarizer units 4, the position that will be set as being staggered relative to the installation site of lamp house 32
It puts.
Figure 10 is the plane skeleton diagram of the action of the transport system 2 for the device for representing second embodiment.Implement second
In mode, transport system 2 also makes the platform 5 that remain substrate S move in the first direction and a second direction, the movement of first direction
It is to move back and forth, in the two toward road and circuit, substrate S passes through irradiation area R, at this time polarizing light irradiation to substrate S.And
And the movement of second direction carries out between being moved toward road movement and toward road, into road and circuit, substrate S is not by
With path and across irradiation distance.In addition, two light illuminators 1 irradiate polarised light to respective irradiation area R.
Figure 11 is the plane skeleton diagram of the displacement distance to second direction for the device for representing second embodiment.In addition,
In fig. 11, in order to refer to, the situation of the movement without second direction is shown also.Figure 11 (1) is situation about not moving,
(2) it is mobile situation.
In Figure 11 (1) (2), by the Illumination Distribution I of the first light illuminator 11It represents, by the photograph of the second light illuminator 1
Spend distribution I2It represents.I1And I2With Fig. 7 again it is the straight line of the second direction by the location directly below of each boundary line 40
On Illumination Distribution.In addition, E represents the distribution of the light exposure in the face of the substrate S after reciprocal conveying.
According to the above description, substrate S is sequentially passing through each irradiation area R into road and circuit, receive polarised light
Irradiation.Thus, light exposure E is the amount for adding up to light exposure when passing through of each irradiation area R.In the case, in platform 5
Not in the case where second direction moves (in identical path reciprocal in the case of), also due to the configuration of each polarizer 41
It is staggered, so as shown in Fig. 7 (1), light exposure E is uniform to a certain extent.
The device of second embodiment, will be to the displacement distance d of second direction in order to which light exposure is made evenly to changemIt is set as
It is optimal.As shown in Fig. 7 (1), in the distribution without the light exposure E in the case of to the movement of second direction, exposure measures
The position of minimum is to have passed through the boundary line 40 of the polarizer unit 4 of some in two polarizer units 4 just
The position of lower section.In this second embodiment, due to two polarizer units 4 be staggered a polarizer 41 width one
Half (t/2) and be configured, so the interval at the position of minimalization is also t/2.The position of minimalization is to have passed through some polarization
The position of the underface of the boundary line 40 of cell 4, so could also say that each boundary wire spacing daFor t/2.
Thus, in order to make light exposure evenly from the state shown in Fig. 7 (1), due to boundary wire spacing da=t/2, institute
With displacement distance dmAs long as not with t/2 (or its integral multiple) unanimously.
Also, the unilateral width w in the region that light exposure declines is with situation shown in Fig. 7 inherently likewise, not
Can be more than distance d between boundary line 40a1/2.Thus, it is similary with the situation of first embodiment, if set to displacement distance dm=
da/ 2=t/4 (or its natural several times) is then optimal.
In the case of second embodiment, illumination is also declined to the width w of the unilateral side in region light exposures as needed
The degree of uniformity selects, in widthwIn the case of relatively narrow, also have displacement distance dmIt is set as the feelings of the distance shorter than t/4
Condition.
Then, the device and method of third embodiment is illustrated.Figure 12 is to represent that the light of third embodiment takes
To the plane skeleton diagram with polarized light illumination device and method.
The conveying by transport system 2 of the device of third embodiment is different from first, second embodiment.
First, in second embodiment, the conveying of the substrate S of first direction is to move back and forth, the conveying toward road and the conveying in circuit it
Between carry out the conveying of second direction, but in the third embodiment, by the conveying of first direction and the conveying of second direction simultaneously
It carries out.That is, control unit 7 sends signal to the first driving source 613 and the second driving source 623, drive the first driving source 613 and second
Dynamic source 623 acts simultaneously.But the action of the second driving source 623 does not need to always move in the action of the first driving source 613
Make, as long as only being acted during substrate S passes through irradiation area R.
In fig. 12, represent that the inner evenness of light quantity in the third embodiment becomes higher preferred substrate S's
Conveying.As shown in Figure 12 (1), it is preferred that in substrate S in a first direction by conveying and the side of leading edge arrival irradiation area R
The conveying of second direction starts at the time of edge, and second direction is defeated at the time of the rear of substrate S passes completely through irradiation area R
Send end.In Figure 12 (1), single dotted broken line represents the up-front certain point P of substrate S1Gui Trace, double dot dash line represent rear
Certain point P2Gui Trace.
Other than the situation shown in Figure 12 (1), as shown in Figure 12 (2) or to second direction movement across packet
Include situation about being carried out across the front and rear time-bands of the time-bands of irradiation area R.And then as shown in Figure 12 (3), to second direction
Movement may not be straight line, but zigzag.
Shown in Figure 12 in any case, to the displacement distance d of second directionmIt is all identical with the above embodiment.Separately
Outside, in any embodiment, it is required for displacement distance dmIt is not consistent with the integral multiple of boundary wire spacing a, but in addition to this,
The movement to second direction must also be avoided passing through, even if a substrate S parts are detached from from irradiation area R.
In the third embodiment, the conveying of substrate S can be made for only toward road.In the case, in irradiation area R
Side substrate S is mounted on platform 5, substrate S is recycled from platform 5 in opposite side.If set to it is only then given birth to toward the conveying on road
Production pitch time shortens, so being preferred on this point in productivity.
But in the third embodiment, reciprocal conveying can also be carried out and polarised light is irradiated to substrate S.In this feelings
Under condition, preferably toward road and circuit pass through irradiation area R during be also carried out at the same time the conveying of second direction.
If in addition, to irradiate polarised light to substrate S by reciprocal conveying, exposed compared with only toward the situation on road
Amount becomes 2 times (situations for not changing conveying speed).Thus, it is in the case of the light orientation processing for needing more light exposure
Appropriate.If making substrate S reciprocal transportations, the carrying and recycling of substrate S can be carried out in the side of irradiation area R, so
Make the simple structure on device and its periphery.Productive temp time is elongated with circuit a considerable amount, but by improving conveying speed,
Productive temp time can be shortened.
In the respective embodiments described above, the movement from the workpiece holding body that transport system 2 carries out to second direction can make
The position of the boundary line 40 of each polarizer 41 from substrate S relatively conjugates in a second direction when light irradiates.
Since the position of the boundary line 40 when light irradiates relatively conjugates, the area of illumination decline caused by the influence of boundary line 40
Domain conjugates in the face of substrate S, is achieved in the homogenization of light exposure.
In addition, in various embodiments, the conveying of the substrate S of first direction is the length direction with the illumination region of light source 3
Vertical direction, but it's not limited to that.The conveying of first direction is the conveying for substrate S is made to pass through irradiation area R, as long as
Intersect with the length direction of the illumination region of light source 3.Even if on one side by substrate S the illumination region relative to light source 3 length
The degree inclined side in direction is delivered up irradiating polarised light on one side, also can compensate for the presence of the boundary line 40 because of each polarizer 41
Caused by the unevenness of light exposure homogenize, can uniformly be exposed.In the case, also if importing the movement of second direction
Then light exposure becomes evenly.
In addition, second direction is the side with the boundary line 40 of each polarizer 41 in the respective embodiments described above and embodiment
To vertical direction, but it's not limited to that.Although it is equal to obtain light exposure along the direction conveying substrate S of boundary line 40
Homogenized effect but if being the direction intersected with the direction of boundary line 40, then can obtain effect.
In addition, in each embodiment and embodiment, platform 5 is adopted as the example of the component that substrate S is kept in conveying
, the component other than platform 5 can also be used.
In addition, as transport system 2, other than making the system of above-mentioned ball-screw rotation with driving source, also there is use
Such as in the situation for speciallyying permit such conveying mechanism (linear motor platform) using magnetic disclosed in No. 4581641 bulletin.The machine
Structure is platform 5 of the configuration equipped with magnetic pole on the platen for the salient pole for being arranged with magnetic substance with chessboard trellis on an upper, is passed through on one side
Air injection etc. make platform 5 float slightly from platen one side console 5 magnetic pole polarity, so as to make platform 5 move mechanism.It is adopting
In the case of with the mechanism, guide table 5 preferably is set in both sides also for the precision for the conveying direction for keeping substrate S
Movement linear guide portion.
Alternatively, it is also possible to and with utilize the conveying mechanism of magnetic and as described above using ball-screw and driving source
Conveying mechanism.Such as, it may be considered that the conveying mechanism (linear motor platform) using magnetic is used in conveying in a first direction, the
The conveying mechanism using ball-screw and driving source is used in the conveying in two directions.
In addition, in first, second embodiment, substrate recovery position is in second direction relative to substrate loading position
On conjugated displacement distance dmPosition, but substrate S can also be recycled in the position identical with substrate loading position.In this feelings
It is additional to make bottom plate 21 in the loop and platform 5 is moved with toward after the identical distance in road, it being made to move backward in a second direction under condition
Displacement distance dmAction.
Although productive temp time is elongated slightly, since robot always carries out the carrying of substrate S in identical position
And recycling, it is simplified so realizing in this regard.
In addition, as long as the structure that workpiece is one by one cut off, kept by workpiece holding body, may not be plate.Institute
Meaning is by the meaning except band-like continuous structure and the structure that is conveyed by roll-to-roll (Roll-to-Roll) " by cutting off "
Think.
In addition, the present invention is in the sense that the illumination of compensating polarizing light declines, additionally it is possible to be applied to polarizer unit
The boundary part of multiple polarizers is not provided with the construction of barn door.
[embodiment]
Then, it is uniform to expose quantitative change by importing the conveying of from the substrate S to second direction as described above for confirming
It is experiment as a result, being illustrated as embodiment.Figure 13 is the conveying for representing to be identified through importing the substrate S to second direction
And the figure of result that accumulated exposure quantitative change is uniformly tested.
In this experiment, the width of irradiation area R observed in a second direction is 1500mm, and light source 3 is high-pressure mercury
Lamp, the average illumination in irradiation area R is about 130mW/cm2。
The width t of each polarizer 41 is 150mm, thus boundary wire spacing is 150mm.In Figure 13 (1), represent not
Carry out the movement to second direction, when carrying out polarizing light irradiation into road and circuit with identical path conveying substrate S
Exposure distribution, represent in (2) after the conveying toward road, move it about distance 75mm in a second direction after carry out circuit
Conveying when exposure distribution become exposure distribution evenly.Exposure distribution is with Fig. 7 or Figure 11 again it is second party
Upward distribution.
As shown in Figure 13 (1), in the case of without the movement to second direction, observe that periodically light exposure is big
The position that width declines.The position that light exposure becomes minimum is the position of the underface for the boundary line 40 for having passed through each polarizer 41
The position put.In this embodiment, minimum value is 7.4% or so (± 14.8% uniformity) relative to maximum value.
On the other hand, in the embodiment for having imported the movement of second direction of about 80mm, as shown in Figure 13 (2), uniformly
Property greatly improves.In this embodiment, minimum value is 85% or so (± 7.5% uniformity) relative to maximum value.In this way it is found that
By suitably importing the movement of second direction, the uniformity of light exposure greatly improves.
Claims (6)
1. a kind of polarization light emitting apparatus for light orientation, have irradiation area irradiation polarised light to setting light illuminator, with
And the transport system for conveying workpiece to pass through the mode of irradiation area, which is characterized in that
Above-mentioned light illuminator has light source and polarizer unit, and above-mentioned light source has irradiation patterns long in particular directions,
To carry out light irradiation to irradiation area long in this direction, above-mentioned polarizer unit configuration is in above-mentioned light source and above-mentioned photograph
It penetrates between region；
Above-mentioned polarizer unit is made of multiple polarizers of the length direction arrangement along above-mentioned irradiation area, and
Boundary line between each above-mentioned polarizer has barn door；
Above-mentioned workpiece is one by one cut off, and above-mentioned transport system is mobile and defeated by making the workpiece holding body that remain above-mentioned workpiece
It serves and states workpiece；
Above-mentioned transport system passes through first direction that above-mentioned workpiece holding body is made to intersect in the length direction with above-mentioned irradiation area
Upper movement, it is above-mentioned to pass through being carried out conveying toward the mode of road movement and circuit movement by the above-mentioned irradiation area of carry out light irradiation
Workpiece, and above-mentioned boundary line of the above-mentioned workpiece holding body between each polarizer of above-mentioned polarizer unit can be made
Direction intersect second party move up；
From the workpiece holding body that above-mentioned transport system carries out into the movement of second direction, make each polarization from above-mentioned workpiece
The position of above-mentioned boundary line between element when light irradiates relatively conjugates and makes above-mentioned circuit movement warp in a second direction
The path different from above-mentioned past road movement is crossed, so as to improve the uniformity of the light exposure of the polarised light on above-mentioned workpiece.
2. polarization light emitting apparatus for light orientation as described in claim 1, which is characterized in that
Above-mentioned light illuminator is the first light illuminator, multiple light illuminators as the second light illuminator；
The boundary line of the boundary line of each polarizer of first light illuminator and each polarizer of the second light illuminator is above-mentioned
It is mutually staggered in second direction.
3. polarization light emitting apparatus for light orientation as described in claim 1, which is characterized in that
From the workpiece holding body that above-mentioned transport system carries out to the displacement distance of the movement of second direction than between above-mentioned boundary line
Distance it is small.
4. a kind of light orientation polarizing light irradiation method, using the light illuminator for having light source and polarizer unit, above-mentioned light
Source has irradiation patterns long in particular directions, above-mentioned inclined to carry out light irradiation to irradiation area long in this direction
The cell that shakes is configured to multiple polarizers that there is the length direction along irradiation area to arrange and each above-mentioned inclined
The barn door for the boundary line setting shaken between element, will be from above-mentioned light source in above-mentioned light orientation polarizing light irradiation method
Light is irradiated by polarizer unit to above-mentioned irradiation area, and the workpiece one by one cut off is kept simultaneously using workpiece holding body
Above-mentioned irradiation area is passed through, so as to convey above-mentioned workpiece, and to the polarised light of workpiece irradiation light orientation, feature exists
In,
First direction conveying and second direction conveying are carried out, in the conveying of above-mentioned first direction, by making above-mentioned workpiece holding body
Carried out on the first direction intersected in the length direction with above-mentioned irradiation area toward road is mobile and circuit movement, by above-mentioned workpiece with
It is conveyed across by the mode of the above-mentioned irradiation area of carry out light irradiation, in the conveying of above-mentioned second direction, by keeping workpiece
The second party that the direction of above-mentioned boundary line of the body between the polarizer of above-mentioned polarizer unit intersects moves up, and makes
The position of the above-mentioned barn door of the setting of the above-mentioned boundary line between each polarizer from above-mentioned workpiece is in second direction
On relatively conjugate and above-mentioned circuit made to move through the path different from above-mentioned past road movement, so as to improve on above-mentioned workpiece
The uniformity of the light exposure of polarised light.
5. light orientation polarizing light irradiation method as claimed in claim 4, which is characterized in that
Above-mentioned light illuminator is the first light illuminator, multiple light illuminators as the second light illuminator；
Make the boundary line of each polarizer of the first light illuminator and the boundary line of each polarizer of the second light illuminator upper
It states and above-mentioned light orientation polarizing light irradiation method is carried out in the state of being mutually staggered in second direction.
6. light orientation polarizing light irradiation method as claimed in claim 4, which is characterized in that
The displacement distance of above-mentioned second direction conveying is smaller than the distance between above-mentioned boundary line.
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| JP2013131208A JP5884776B2 (en) | 2013-06-22 | 2013-06-22 | Polarized light irradiation device for photo-alignment |
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| CN205427399U (en) * | 2015-02-06 | 2016-08-03 | 东芝照明技术株式会社 | Polarized light irradiation device for light aligning |
| JP6607003B2 (en) * | 2015-11-30 | 2019-11-20 | ウシオ電機株式会社 | Light irradiation apparatus and light irradiation method |
| JP6613949B2 (en) * | 2016-02-16 | 2019-12-04 | ウシオ電機株式会社 | Polarizing element unit and polarized light irradiation device |
| WO2017145975A1 (en) * | 2016-02-22 | 2017-08-31 | 株式会社ブイ・テクノロジー | Polarized light irradiation device |
| JP2017151405A (en) * | 2016-02-22 | 2017-08-31 | 株式会社ブイ・テクノロジー | Polarized light irradiation device |
| JP6945716B2 (en) * | 2018-03-09 | 2021-10-06 | 富士フイルム株式会社 | Method for forming a photoalignment film and method for manufacturing a laminate |
| CN110824780B (en) * | 2018-08-08 | 2022-04-08 | 夏普株式会社 | Method for manufacturing substrate having photo-alignment film |
| CN111552124B (en) * | 2020-05-26 | 2022-09-23 | 武汉京东方光电科技有限公司 | Optical alignment equipment and method |
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| JP4815995B2 (en) * | 2005-10-24 | 2011-11-16 | ウシオ電機株式会社 | Polarized light irradiation device for photo-alignment |
| JP2008107702A (en) * | 2006-10-27 | 2008-05-08 | Nakan Corp | Apparatus for forming photo-alignment layer |
| JP2009169386A (en) | 2007-12-18 | 2009-07-30 | Ulvac Japan Ltd | Optical irradiation device |
| JP2009295950A (en) * | 2008-05-09 | 2009-12-17 | Nsk Ltd | Scan exposure equipment and scan exposure method |
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