CN104217910B - 在透射电子显微镜中使用相位片的方法 - Google Patents

在透射电子显微镜中使用相位片的方法 Download PDF

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Publication number
CN104217910B
CN104217910B CN201410170093.2A CN201410170093A CN104217910B CN 104217910 B CN104217910 B CN 104217910B CN 201410170093 A CN201410170093 A CN 201410170093A CN 104217910 B CN104217910 B CN 104217910B
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China
Prior art keywords
phase plate
film
phase
sample
electron microscope
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CN201410170093.2A
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Chinese (zh)
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CN104217910A (zh
Inventor
B.布伊吉塞
R.S.达内韦
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Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
FEI Co
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Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
FEI Co
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Priority claimed from EP13165356.0A external-priority patent/EP2797100A1/en
Application filed by Max Planck Gesellschaft zur Foerderung der Wissenschaften eV, FEI Co filed Critical Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/263—Contrast, resolution or power of penetration
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/285—Emission microscopes, e.g. field-emission microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2614—Holography or phase contrast, phase related imaging in general, e.g. phase plates

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
CN201410170093.2A 2013-04-25 2014-04-25 在透射电子显微镜中使用相位片的方法 Active CN104217910B (zh)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
EP13165356.0 2013-04-25
EP13165356.0A EP2797100A1 (en) 2013-04-25 2013-04-25 Method of using a phase plate in a transmission electron microscope
EP13180361.1 2013-08-14
EP13180361 2013-08-14
EP13190405.4 2013-10-28
EP13190405 2013-10-28

Publications (2)

Publication Number Publication Date
CN104217910A CN104217910A (zh) 2014-12-17
CN104217910B true CN104217910B (zh) 2017-09-12

Family

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Family Applications (1)

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CN201410170093.2A Active CN104217910B (zh) 2013-04-25 2014-04-25 在透射电子显微镜中使用相位片的方法

Country Status (4)

Country Link
US (1) US9129774B2 (https=)
EP (1) EP2797101B1 (https=)
JP (1) JP6286270B2 (https=)
CN (1) CN104217910B (https=)

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EP3007201B1 (en) * 2014-10-08 2016-09-28 Fei Company Aligning a featureless thin film in a TEM
US10109453B2 (en) * 2015-03-18 2018-10-23 Battelle Memorial Institute Electron beam masks for compressive sensors
US10170274B2 (en) * 2015-03-18 2019-01-01 Battelle Memorial Institute TEM phase contrast imaging with image plane phase grating
EP3104155A1 (en) * 2015-06-09 2016-12-14 FEI Company Method of analyzing surface modification of a specimen in a charged-particle microscope
US10504695B2 (en) 2015-12-25 2019-12-10 Hitachi High-Technologies Corporation Charged particle beam device and phase plate
WO2017189212A1 (en) 2016-04-29 2017-11-02 Battelle Memorial Institute Compressive scanning spectroscopy
CN110168355A (zh) * 2016-12-19 2019-08-23 Asml荷兰有限公司 未接地样本的带电粒子束检查
US10295677B2 (en) 2017-05-08 2019-05-21 Battelle Memorial Institute Systems and methods for data storage and retrieval
EP3474308A1 (en) * 2017-10-17 2019-04-24 Universiteit Antwerpen Spatial phase manipulation of charged particle beam

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Also Published As

Publication number Publication date
EP2797101B1 (en) 2017-05-31
JP2014216319A (ja) 2014-11-17
JP6286270B2 (ja) 2018-02-28
US9129774B2 (en) 2015-09-08
CN104217910A (zh) 2014-12-17
US20140326876A1 (en) 2014-11-06
EP2797101A1 (en) 2014-10-29

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