JP2004327439A - 永久磁気レンズおよび静電レンズを備える粒子光学装置 - Google Patents
永久磁気レンズおよび静電レンズを備える粒子光学装置 Download PDFInfo
- Publication number
- JP2004327439A JP2004327439A JP2004124235A JP2004124235A JP2004327439A JP 2004327439 A JP2004327439 A JP 2004327439A JP 2004124235 A JP2004124235 A JP 2004124235A JP 2004124235 A JP2004124235 A JP 2004124235A JP 2004327439 A JP2004327439 A JP 2004327439A
- Authority
- JP
- Japan
- Prior art keywords
- focusing
- lens
- magnetic
- particle
- energy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002245 particle Substances 0.000 claims abstract description 20
- 239000000696 magnetic material Substances 0.000 claims abstract description 9
- 230000003287 optical effect Effects 0.000 claims description 25
- 230000005684 electric field Effects 0.000 claims description 16
- 230000008859 change Effects 0.000 claims description 11
- 230000009471 action Effects 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims description 2
- 238000003384 imaging method Methods 0.000 claims description 2
- 238000011144 upstream manufacturing Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 1
- 230000001133 acceleration Effects 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 230000005686 electrostatic field Effects 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000013067 intermediate product Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000011163 secondary particle Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/145—Combinations of electrostatic and magnetic lenses
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/10—Lenses
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
【解決手段】粒子光学装置は、磁気または静電レンズでサンプル8上に荷電粒子のビーム1を集束する。異なるビームエネルギーでかかる装置を使用できることが望ましいがビームの集束位置9のサンプル8に関するシフトは望ましくない。永久磁気物質6の使用は磁気レンズ小型化に有利であるが、レンズ力を調整することは容易に可能ではない。本発明は、永久磁気物質を備えた磁気レンズと静電レンズによってビーム1での粒子エネルギーと関係なく集束位置9をどのようにして一定に維持することができるかを示す。かかる静電レンズは、加速レンズとして具体化される。
【選択図】図2
Description
2 管状電極
3 管状電極
4 極部分
5 極部分
6 永久磁気物質
7 コイル
8 サンプル
9 集束位置
10 光軸
11 集束装置
12 電源
13 ギャップ
20 曲線
21 曲線
22 曲線
23 領域
Claims (4)
- 集束位置(9)上に荷電粒子のビーム(1)を集束するための光軸(10)を有する集束装置(11)を備えて提供される粒子光学装置であって、該集束装置(11)は、
磁極部分(4、5)の支援で集束磁界(21)を生成するための磁気レンズと、
前記ビーム(1)がエネルギー変化を受ける、集束電界(20)を生成するための静電レンズと、を含み、
前記集束電界(20)が、前記集束磁気レンズ(21)と前記集束位置(9)との間に位置する領域に関して上流に位置し、
前記磁気レンズは、レンズ作用のために要求される前記集束磁界(21)を発生するための永久磁気物質(6)を備えて提供され、
前記エネルギー変化はエネルギー上昇の形態を有することを特徴とする粒子光学装置。 - 前記集束磁界(21)および集束電界(20)の両界が存在する、前記光軸(10)の周辺に領域が存在することを特徴とする請求項1に記載の粒子光学装置。
- 前記磁気レンズのサンプル側の極部分(5)は電気伝導性の物質からなり、静電レンズの電極として追加的に機能することを特徴とする請求項1または2のいずれか一項に記載の粒子光学装置。
- 撮像中に前記装置によって一定を維持される調整可能な前記集束位置(9)を与えるための調整手段を備えて提供されることを特徴とする請求項1乃至3のいずれか一項に記載の粒子光学装置。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL1023260A NL1023260C1 (nl) | 2003-04-24 | 2003-04-24 | Deeltjes-optisch apparaat met een permanent magnetische lens en een elektrostatische lens. |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004327439A true JP2004327439A (ja) | 2004-11-18 |
JP4676714B2 JP4676714B2 (ja) | 2011-04-27 |
Family
ID=32960321
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004124235A Expired - Fee Related JP4676714B2 (ja) | 2003-04-24 | 2004-04-20 | 永久磁気レンズおよび静電レンズを備える粒子光学装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7067820B2 (ja) |
EP (1) | EP1471562B1 (ja) |
JP (1) | JP4676714B2 (ja) |
CN (1) | CN100529726C (ja) |
DE (1) | DE602004027861D1 (ja) |
NL (1) | NL1023260C1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006196195A (ja) * | 2005-01-11 | 2006-07-27 | Neomax Co Ltd | 磁場レンズ用磁気回路 |
JP2014521193A (ja) * | 2011-06-29 | 2014-08-25 | ケーエルエー−テンカー コーポレイション | マルチコラム電子ビーム装置および方法 |
JP2022506149A (ja) * | 2018-11-16 | 2022-01-17 | エーエスエムエル ネザーランズ ビー.ブイ. | 電磁複合レンズ及びそのようなレンズを備えた荷電粒子光学システム |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6897443B2 (en) * | 2003-06-02 | 2005-05-24 | Harald Gross | Portable scanning electron microscope |
NL1026006C2 (nl) * | 2004-04-22 | 2005-10-25 | Fei Co | Deeltjes-optisch apparaat voorzien van lenzen met permanent magnetisch materiaal. |
JP4751635B2 (ja) * | 2005-04-13 | 2011-08-17 | 株式会社日立ハイテクノロジーズ | 磁界重畳型電子銃 |
JP4795847B2 (ja) * | 2006-05-17 | 2011-10-19 | 株式会社日立ハイテクノロジーズ | 電子レンズ及びそれを用いた荷電粒子線装置 |
CN101461026B (zh) * | 2006-06-07 | 2012-01-18 | Fei公司 | 与包含真空室的装置一起使用的滑动轴承 |
US20090067059A1 (en) * | 2007-09-11 | 2009-03-12 | William Patrick Crabtree | Device and method for altering the path of magnetic waves to record the activity thereof |
US9429631B2 (en) * | 2007-09-11 | 2016-08-30 | William Patrick Crabtree | Device and method for altering the path of radio waves to record the image information available in said waves |
WO2009157054A1 (ja) * | 2008-06-24 | 2009-12-30 | 株式会社アドバンテスト | マルチコラム電子ビーム露光装置及び磁場発生装置 |
DE102008062888B4 (de) * | 2008-12-23 | 2010-12-16 | Carl Zeiss Nts Gmbh | Teilchenoptische Vorrichtung mit Magnetanordnung |
US8921784B2 (en) * | 2009-11-26 | 2014-12-30 | Hitachi High-Technologies Corporation | Scanning electron microscope |
JP5259688B2 (ja) | 2010-12-09 | 2013-08-07 | 本田技研工業株式会社 | 走査型電子顕微鏡 |
US8319181B2 (en) * | 2011-01-30 | 2012-11-27 | Fei Company | System and method for localization of large numbers of fluorescent markers in biological samples |
EP2706554B1 (en) | 2012-09-10 | 2016-05-25 | Fei Company | Method of using a compound particle-optical lens |
JP6114981B2 (ja) | 2012-10-17 | 2017-04-19 | 株式会社リガク | X線発生装置 |
US9165745B2 (en) * | 2013-03-10 | 2015-10-20 | Maglen Pte Ltd | Permanent magnet based high performance multi-axis immersion electron lens array with low axial leakage field |
EP2827357A1 (en) | 2013-07-18 | 2015-01-21 | Fei Company | Magnetic lens for focusing a beam of charged particles |
TWI502616B (zh) * | 2014-08-08 | 2015-10-01 | Nat Univ Tsing Hua | 桌上型電子顯微鏡以及其廣域可調式磁透鏡 |
CN105307370A (zh) * | 2015-11-19 | 2016-02-03 | 丹东华日理学电气股份有限公司 | 基于以太网控制的微焦点x射线源装置 |
US10410827B2 (en) | 2017-05-03 | 2019-09-10 | Fei Company | Gun lens design in a charged particle microscope |
EP4095882A1 (en) | 2021-05-25 | 2022-11-30 | IMS Nanofabrication GmbH | Pattern data processing for programmable direct-write apparatus |
US20230015805A1 (en) | 2021-07-14 | 2023-01-19 | Ims Nanofabrication Gmbh | Electromagnetic Lens |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61101944A (ja) * | 1984-10-25 | 1986-05-20 | Nippon Telegr & Teleph Corp <Ntt> | 荷電粒子ビ−ム用集束装置 |
JPS62256352A (ja) * | 1986-04-24 | 1987-11-09 | イーツエーテー、インテグレイテツド、サーキツト、テスチング、ゲゼルシヤフト、フユア、ハルプライタープリユーフテヒニク、ミツト、ベシユレンクテル、ハフツング | 粒子線装置の静電磁気複合レンズ |
JPH025377A (ja) * | 1988-01-11 | 1990-01-10 | Telect Inc | ディジタル通信回路網交差接続モジュール |
JPH06162979A (ja) * | 1992-08-27 | 1994-06-10 | Toshiba Corp | 磁界界浸型電子銃 |
JPH1128544A (ja) * | 1997-07-03 | 1999-02-02 | Kanto Yakin Kogyo Kk | 金属のハニカム構造体の製造方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2115976A (en) * | 1982-02-26 | 1983-09-14 | Philips Electronic Associated | Charged particle beam apparatus |
DE3620727A1 (de) * | 1986-06-20 | 1987-12-23 | Pfisterer Elektrotech Karl | Schwingungsdaempfer fuer elektrische freileitungen |
GB2192092A (en) | 1986-06-25 | 1987-12-31 | Philips Electronic Associated | Magnetic lens system |
KR970005769B1 (ko) * | 1992-08-27 | 1997-04-19 | 가부시끼가이샤 도시바 | 자계 계침형 전자총 |
JPH0864163A (ja) * | 1994-08-19 | 1996-03-08 | Jeol Ltd | 荷電粒子ビーム装置 |
US5780859A (en) * | 1996-02-16 | 1998-07-14 | Act Advanced Circuit Testing Gesellschaft | Electrostatic-magnetic lens arrangement |
US6051839A (en) | 1996-06-07 | 2000-04-18 | Arch Development Corporation | Magnetic lens apparatus for use in high-resolution scanning electron microscopes and lithographic processes |
SG74599A1 (en) | 1997-09-27 | 2000-08-22 | Inst Of Material Res & Enginee | Portable high resolution scanning electron microscope column using permanent magnet electron lenses |
JPH11283544A (ja) | 1998-03-31 | 1999-10-15 | Advantest Corp | 電子ビーム照射装置 |
US6392231B1 (en) * | 2000-02-25 | 2002-05-21 | Hermes-Microvision, Inc. | Swinging objective retarding immersion lens electron optics focusing, deflection and signal collection system and method |
-
2003
- 2003-04-24 NL NL1023260A patent/NL1023260C1/nl not_active IP Right Cessation
-
2004
- 2004-04-13 EP EP04076144A patent/EP1471562B1/en not_active Expired - Lifetime
- 2004-04-13 DE DE602004027861T patent/DE602004027861D1/de not_active Expired - Lifetime
- 2004-04-20 JP JP2004124235A patent/JP4676714B2/ja not_active Expired - Fee Related
- 2004-04-21 US US10/829,002 patent/US7067820B2/en not_active Expired - Lifetime
- 2004-04-23 CN CNB2004100434134A patent/CN100529726C/zh not_active Expired - Lifetime
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61101944A (ja) * | 1984-10-25 | 1986-05-20 | Nippon Telegr & Teleph Corp <Ntt> | 荷電粒子ビ−ム用集束装置 |
JPS62256352A (ja) * | 1986-04-24 | 1987-11-09 | イーツエーテー、インテグレイテツド、サーキツト、テスチング、ゲゼルシヤフト、フユア、ハルプライタープリユーフテヒニク、ミツト、ベシユレンクテル、ハフツング | 粒子線装置の静電磁気複合レンズ |
JPH025377A (ja) * | 1988-01-11 | 1990-01-10 | Telect Inc | ディジタル通信回路網交差接続モジュール |
JPH06162979A (ja) * | 1992-08-27 | 1994-06-10 | Toshiba Corp | 磁界界浸型電子銃 |
JPH1128544A (ja) * | 1997-07-03 | 1999-02-02 | Kanto Yakin Kogyo Kk | 金属のハニカム構造体の製造方法 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006196195A (ja) * | 2005-01-11 | 2006-07-27 | Neomax Co Ltd | 磁場レンズ用磁気回路 |
JP4552191B2 (ja) * | 2005-01-11 | 2010-09-29 | 日立金属株式会社 | 磁場レンズ用磁気回路 |
JP2014521193A (ja) * | 2011-06-29 | 2014-08-25 | ケーエルエー−テンカー コーポレイション | マルチコラム電子ビーム装置および方法 |
JP2022506149A (ja) * | 2018-11-16 | 2022-01-17 | エーエスエムエル ネザーランズ ビー.ブイ. | 電磁複合レンズ及びそのようなレンズを備えた荷電粒子光学システム |
US11676793B2 (en) | 2018-11-16 | 2023-06-13 | Asml Netherlands B.V. | Apparatus of plural charged particle beams |
Also Published As
Publication number | Publication date |
---|---|
EP1471562A3 (en) | 2006-11-22 |
US7067820B2 (en) | 2006-06-27 |
CN100529726C (zh) | 2009-08-19 |
CN1590979A (zh) | 2005-03-09 |
JP4676714B2 (ja) | 2011-04-27 |
DE602004027861D1 (de) | 2010-08-12 |
NL1023260C1 (nl) | 2004-10-27 |
EP1471562A2 (en) | 2004-10-27 |
US20040211914A1 (en) | 2004-10-28 |
EP1471562B1 (en) | 2010-06-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4676714B2 (ja) | 永久磁気レンズおよび静電レンズを備える粒子光学装置 | |
TWI435362B (zh) | 帶電粒子裝置 | |
CN102103966B (zh) | 粒子光学组件 | |
US7064325B2 (en) | Apparatus with permanent magnetic lenses | |
US6825475B2 (en) | Deflection method and system for use in a charged particle beam column | |
US7821187B1 (en) | Immersion gun equipped electron beam column | |
JP2009193963A (ja) | 収差補正器及び位相板を備えたtem | |
KR19990028770A (ko) | 입자-광학 장치에서 렌즈 수차를 교정하기 위한 교정장치 | |
JP2007207634A (ja) | 収差補正装置を搭載した荷電粒子線装置 | |
EP2478546B1 (en) | Distributed ion source acceleration column | |
TWI641019B (zh) | 電子束成像設備、使用一電子束之成像方法及雙威恩過濾器單色器 | |
CN110313048B (zh) | 在多射束柱中减少的库仑相互作用 | |
JP4527289B2 (ja) | オージェ電子の検出を含む粒子光学装置 | |
KR102147728B1 (ko) | 고성능 검사용 주사 전자 현미경 디바이스, 및 그것을 동작시키는 방법 | |
WO2005071708A2 (en) | Focussing lens for charged particle beams | |
JP6138454B2 (ja) | 荷電粒子線装置 | |
JP2022524058A (ja) | 荷電粒子装置用のビームスプリッタ | |
JP5666227B2 (ja) | 色収差補正ビーム偏向器、色収差補正ビーム分離器、荷電粒子デバイス、色収差補正ビーム偏向器を動作させる方法、及び色収差補正ビーム分離器を動作させる方法 | |
JP2003022772A (ja) | 荷電粒子ビーム制御装置及びそれを用いた荷電粒子ビーム光学装置、ならびに荷電粒子ビーム欠陥検査装置 | |
JP2006120436A (ja) | 電子線装置及び該装置を用いたデバイス製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20070419 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20100215 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100223 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20100413 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20100416 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100721 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100810 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20101109 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20110118 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20110128 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140204 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4676714 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |