CN104137247B - Non-contact suction cup - Google Patents
Non-contact suction cup Download PDFInfo
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- CN104137247B CN104137247B CN201380010718.2A CN201380010718A CN104137247B CN 104137247 B CN104137247 B CN 104137247B CN 201380010718 A CN201380010718 A CN 201380010718A CN 104137247 B CN104137247 B CN 104137247B
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- confined space
- porous disc
- disc
- suction cup
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
Abstract
The present invention provides a kind of and can keep absorption at assigned position the workpiece of thinner thickness or down keep adsorbing the non-contact suction cup of the workpiece of this thinner thickness.The non-contact suction cup (1) of the present invention is characterised by possessing: the porous disc (2) of tabular, and it is formed with, in absorption FX, multiple passages (8) that through-thickness is through and extends；Support, it is connected to the rear side of porous disc and forms the support (4) of tabular of the 1st confined space between itself and the back side of porous disc, possesses the protuberance (16) of multiple island, the protuberance (16) of this island possesses the smooth top at the back side being connected to porous disc when linking in the position of the rear side openend of multiple passages, and the space between the protuberance of island is by as the 1st confined space；And base portion (6), its surface is linked to the rear side of support, the 2nd confined space is formed between this base portion and back side of support, it is formed with intercommunicating pore (18) at protuberance, this intercommunicating pore (18) is directed at the rear side openend of passage one end when linking, and is used for making passage and the connection of the 2nd confined space.
Description
Technical field
The present invention relates to a kind of non-contact suction cup, specifically, relate to one and carry out on adsorption plane simultaneously
The suspension of the workpiece realized by forced air and the noncontact by the absorption attracting the workpiece realized are inhaled
Dish.
Background technology
As the device processing the very thin workpiece of semiconductor crystal wafer, FPD glass baseplate equal thickness, it is known that
There is so-called vacuum tweezer.But, due to vacuum tweezer be when contacting with workpiece at science and engineering
Part, therefore there are the problems such as stress that workpiece is given.
It addition, as in the premise that the workpiece that FPD glass baseplate equal thickness is very thin is not given stress etc.
Under carry out the device that processes in a non-contact manner, propose to have spray forced air from the pore of porous plate and
Make workpiece suspend thus on porous plate, carry out the device (such as, patent document 1,2) carried.
Patent document 1: Japanese Unexamined Patent Publication 2008-110852 publication
Patent document 2: Japanese Unexamined Patent Publication 2011-084352 publication
Summary of the invention
The problem that invention is to be solved
The device of patent document 1 and 2 sprays air from the plate body (platform) of porous material and makes workpiece hang
Float on plate body, on the other hand, attract air from a part for plate body, thus maintain thickness
The flatness of very thin workpiece, carries the work of this very thin thickness on the table with contactless state
Part.
In the treatment process of the very thin workpiece of above-mentioned semiconductor crystal wafer, FPD glass baseplate equal thickness,
In addition to conveying workpieces on transport path, in addition it is also necessary to carry out the regulation holding a workpiece on workbench
Position, at certain position picking up work piece and the action such as it to be moved to other positions.
But, the device of patent document 1 and 2 cannot tackle such requirement.
On the other hand, as the dress that can the most down adsorb the workpiece keeping relatively thin
Put, propose there is the Bernoulli chuck utilizing so-called " bernoulli principle ".This Bernoulli chuck is following dress
Put: it is by making forced air from air compressor at the recess of the lower surface being formed at chuck
The lower surface blowout of interior convolution one edge, thus in the region of the underface of recess, produce absorption affinity and at it
Around produce buoyancy, thus in a non-contact manner the relatively thin absorption of workpieces such as semiconductor crystal wafer are maintained at
The downside of chuck.
But, due to the limited amount of the recess that this Bernoulli chuck can be formed, therefore local produces and inhales
Gravitation/buoyancy, thus cannot when without warpage, without strain etc. smooth absorption keep size relative
Bigger and relatively thin workpiece.
The present invention is contemplated to solve such problem points and make, and its object is to offer one can
The workpiece of thinner thickness keep absorption in assigned position or the work down keeping adsorbing this thinner thickness
The non-contact suction cup of part.
For solving the scheme of problem
Using the present invention, it is provided that a kind of non-contact suction cup, this non-contact suction cup is thin with contactless state absorption
The absorbate of tabular,
It is characterized in that,
This non-contact suction cup possesses:
The porous disc of tabular, its absorption FX be formed through-thickness through and extend multiple
Passage；
1st confined space, it configures in the way of adjacent with the back side of above-mentioned porous disc；
2nd confined space, it is isolated with above-mentioned 1st confined space；And
Communication means, it makes above-mentioned 2nd confined space connect with above-mentioned passage.
Use such structure, such as, by making the 1st confined space be connected with pressurized air source, make
2nd confined space is connected with attracting Reduced pressure source such that it is able to the pore spray from the surface of porous disc
Going out forced air, the passage from the surface of porous disc attracts air.Its result, at porous disc
On surface, it is possible to utilize attraction to hold a workpiece in assigned position, while utilizing forced air to make work
Part suspends.It is as a result, it is possible to keep workpiece relatively thin for semiconductor crystal wafer equal thickness in a non-contact manner
Adsorb the assigned position on the surface of porous disc upward or the table at porous disc downward
The downside in face the most down keeps the workpiece that clamping of semiconductor wafers equal thickness is relatively thin.
Owing to suction pressure (decompression) and supply gas pressure (pressurization) can be independently adjustable, therefore, it is possible to
Control confining force and suspending power.Thus, it is also possible to adjustment levitation gap.
Use other preferred technical schemes of the present invention,
This non-contact suction cup possesses:
The support of tabular, its superficial layer is laminated on the rear side of above-mentioned porous disc, and has recess, recessed at this
Above-mentioned 1st confined space is constituted between portion and the back side of this porous disc；And
Base portion, it is laminated in the rear side of above-mentioned support, and shape between this base portion and back side of this support
Become the 2nd confined space,
Above-mentioned support has the intercommunicating pore as above-mentioned communication means function, and one end of this intercommunicating pore exists
Being connected to the passage of above-mentioned porous disc during above-mentioned stacking, the other end is in the back side upper shed of this support.
Use other preferred technical schemes of the present invention,
Above-mentioned support possesses the protuberance of multiple island, and the protuberance of this island possesses in above-mentioned multiple ventilations
The position of the rear side openend in hole is connected to the smooth top at the back side of above-mentioned porous disc,
The through above-mentioned protuberance of above-mentioned intercommunicating pore also extends,
Space between above-mentioned protuberance is by as above-mentioned 1st confined space.
Use other preferred technical schemes of the present invention,
Above-mentioned base portion possesses the protuberance of multiple island on surface, and the protuberance of this island possesses in above-mentioned company
The smooth top at the back side of above-mentioned support it is connected to during knot,
Space between this protuberance is by as decompression stream, the other end of above-mentioned intercommunicating pore and this decompression
It is in fluid communication with stream.
Use other preferred technical schemes of the present invention,
Above-mentioned multiple protuberance has the shape of cross section of rectangle, and is configured to chessboard trellis,
Above-mentioned 1st confined space is formed as cancellate forced air stream.
Use such structure, it is possible to spray forced air equably from the pore of porous disc.
Use other preferred technical schemes of the present invention,
Above-mentioned relief groove is configured to clathrate.
Use such structure, it is possible to spray forced air from the passage of porous disc equably.
Use other preferred technical schemes of the present invention,
The other end of above-mentioned intercommunicating pore is at point of intersection and this decompression groove of above-mentioned cancellate decompression groove
Fluid communication.
Use such structure, it is possible to efficiency carries out the attraction from intercommunicating pore well.
Use the other technologies scheme of the present invention,
This non-contact suction cup possesses the support of tabular, and the shelf layer of this tabular is laminated on the back side of above-mentioned porous disc
Side, possesses the through hole corresponding with the passage of above-mentioned porous disc,
And then, this non-contact suction cup possesses base portion, and this base layers is laminated on the rear side of above-mentioned support, at this
The 2nd confined space is formed between base portion and the back side of this support,
It is formed with recess at the back side of above-mentioned porous disc, between this recess and above-mentioned support, constitutes above-mentioned
1 confined space,
The passage of above-mentioned porous disc is linked to the through hole of above-mentioned support, plays as above-mentioned communication means
Function.
Use other preferred technical schemes of the present invention,
This non-contact suction cup possesses frame component, this frame component have be configured at above-mentioned support and above-mentioned base portion it
Between annulus,
Above-mentioned 2nd confined space is formed by the inner space of above-mentioned annulus.
Recess at above-mentioned porous disc possesses the protuberance of multiple island, and the protuberance of this island has abutting
In the smooth top on the surface of above-mentioned support,
The protuberance of the through above-mentioned island of passage of above-mentioned porous disc.
Use other preferred technical schemes of the present invention,
Above-mentioned 1st confined space is forced air spatial portion,
Above-mentioned 2nd confined space is decompression spatial portion.
Use other preferred technical schemes of the present invention,
Above-mentioned passage configures in the way of the surface being scattered in above-mentioned porous disc is overall,
Use such structure, it is possible to the surface entirety of porous disc is used as absorption FX.
Use other preferred technical schemes of the present invention,
Above-mentioned porous disc is formed by porous carbon.
The effect of invention
Use the present invention, it is provided that a kind of the workpiece of thinner thickness can keep absorption in assigned position or
Down keep the non-contact suction cup adsorbing the workpiece of this thinner thickness.
Accompanying drawing explanation
Fig. 1 is the exploded perspective view of the non-contact suction cup of the 1st embodiment of the present invention.
Fig. 2 is the top view of the porous disc of the non-contact suction cup of Fig. 1.
Fig. 3 is the upward view of the porous disc of the non-contact suction cup of Fig. 1.
Fig. 4 is the figure of the part in the cross section being exaggerated the IV-IV line along Fig. 3.
Fig. 5 is the top view of the support of the non-contact suction cup of Fig. 1.
Fig. 6 is the upward view of the support of the non-contact suction cup of Fig. 1.
Fig. 7 is the top view of the base portion of the non-contact suction cup of Fig. 1.
Fig. 8 is the upward view of the variation of the support of non-contact suction cup.
Fig. 9 is the upward view of another variation of the support of non-contact suction cup.
Figure 10 is that the absorption of workpiece W carried out by the non-contact suction cup of Fig. 1 for explanation is fixed and (non-connect
Touch absorption) the schematic sectional view of state.
Figure 11 is to represent that the workpiece carried out by the work transfer device of the non-contact suction cup employing Fig. 1 is defeated
The figure of each operation sent.
Figure 12 is to represent that the workpiece carried out by the work transfer device of the non-contact suction cup employing Fig. 1 is defeated
The figure of each operation sent.
Figure 13 is to represent that the workpiece carried out by the work transfer device of the non-contact suction cup employing Fig. 1 is defeated
The figure of each operation sent.
Figure 14 is to represent that the workpiece carried out by the work transfer device of the non-contact suction cup employing Fig. 1 is defeated
The figure of each operation sent.
Figure 15 is to represent that the workpiece carried out by the work transfer device of the non-contact suction cup employing Fig. 1 is defeated
The figure of each operation sent.
Figure 16 is to represent that the workpiece carried out by the work transfer device of the non-contact suction cup employing Fig. 1 is defeated
The figure of each operation sent.
Figure 17 is to represent that the workpiece carried out by the work transfer device of the non-contact suction cup employing Fig. 1 is defeated
The figure of each operation sent.
Figure 18 is to represent that the workpiece carried out by the work transfer device of the non-contact suction cup employing Fig. 1 is defeated
The figure of each operation sent.
Figure 19 is to represent that the workpiece carried out by the work transfer device of the non-contact suction cup employing Fig. 1 is defeated
The figure of each operation sent.
Figure 20 is the exploded perspective viewed from above of the non-contact suction cup of the 2nd embodiment of the present invention
Figure.
Figure 21 is the exploded perspective observed from below of the non-contact suction cup of the 2nd embodiment of the present invention
Figure.
Figure 22 is the top view of the porous disc with other structures.
Figure 23 is the top view of the porous disc with other structures.
Figure 24 is the top view of the porous disc with other structures.
Figure 25 is the top view of the base portion with other structures.
Detailed description of the invention
Non-contact suction cup hereinafter, with reference to the accompanying drawings of embodiments of the present invention.
First, the structure of the non-contact suction cup of the 1st embodiment of the present invention is described.Fig. 1 is the present invention
The exploded perspective view of the non-contact suction cup 1 of the 1st embodiment.
The non-contact suction cup 1 of present embodiment is with contactless state clamping of semiconductor wafers, FPD glass
Semiconductor crystal wafer below laminal absorbate (workpiece), such as thickness 100 μm such as glass base material
Non-contact suction cup.As it is shown in figure 1, non-contact suction cup 1 possesses: discoideus porous disc 2, it is at upper table
Face possesses the binding domain of workpiece；The most discoideus disc carrier 4, it keeps from downside (rear side)
Porous disc 2；And the most discoideus base portion 6, it is linked to the rear side of support 4.
Porous disc 2 is formed by the porous carbon of aeration.It is many that the material of porous disc 2 is not limited to aeration
Hole carbon, it is also possible to use the porous material of other aerations, such as porous SiC Woelm Alumina etc..
Fig. 2 is the top view of porous disc 2, and Fig. 3 is the upward view of porous disc 2.
It is formed with multiple suction hole (passage) 8 at porous disc 2.As shown in Figures 2 and 3, suction hole 8
Spread all over the substantially entire surface of porous disc 2, and arrange in clathrate, i.e. to be arranged on tessellated intersection point
State alignment.In the present embodiment, the interval of suction hole 8 is set to about 25mm.
Fig. 4 is the figure of the part in the cross section being exaggerated the line VI--VI along Fig. 3.As shown in Figure 4, attract
Hole 8 is formed as the through each porous disc 2 of through-thickness and extends.Suction hole 8 is in the 2a side, surface of porous disc 2
Be formed as the minor diameter part 8a of diameter about 0.6mm, be formed as diameter 4mm in the 2b side, the back side of porous disc 2
The large-diameter portion 8b, minor diameter part 8a and large-diameter portion 8b of left and right is attenuated towards the surface 2a of porous disc 2 by top
Tapering 8c links.
Use such structure, when the large-diameter portion 8b of suction hole 8 is depressurized attraction, carry out comfortable porous disc 2
The air of surface 2a side opening, suction hole 8 minor diameter part 8a be attracted, be formed with suction hole more than 8
The absorption FX that the region, surface of porose disc 2 is fixed as the absorption carrying out workpiece.
Additionally, be formed with link hole 10 in the circumference of porous disc 2, this link hole 10 is for by porous disc even
Tie the connector such as screw in disc carrier 4 grade to run through.
Fig. 5 is the top view of disc carrier 4, and Fig. 6 is the upward view of disc carrier 4.
As it has been described above, disc carrier 4 is the most discoideus structure keeping porous disc 2 from downside (rear side)
Part, such as, is formed by metal materials such as aluminium alloys.Disc carrier 4 can also be set by CFRP PEEK etc.
Fat is formed.
As shown in Fig. 1, Fig. 4 and Fig. 5, at the upper surface of disc carrier 4, it is formed with ring-type in outer peripheral edge
Rising portions 12.It is more slightly larger than the external diameter of porous disc 2 that rising portions 12 is configured to internal diameter, the thickness of aspect ratio porous disc 2
Spend slightly lower.
Thus, when porous disc 2 is configured at space (recess) of the inner side of the rising portions 12 of disc carrier 4,
Become the state that the upper surface 2a of porous disc 2 configures slightly by top than the end face of the rising portions 12 of disc carrier 4.
It addition, the inside region at the rising portions 12 of the upper surface (bottom surface of recess) of disc carrier 4 is lattice
Being formed with the groove 14 that cross section is rectangle, the part separated by groove 14 is formed as horizontal sub-shape (chessboard trellis)
The protuberance 16 of the island that cross section is square.The protuberance 16 of island with in clathrate (chessboard trellis)
The groove 14 of ground configuration constitutes tessellated configuration together.
The end face of each protuberance 14 is smooth, and is equipped with the most through disc carrier 4 in central authorities
Intercommunicating pore 18.
Porous disc 2 and disc carrier 4 are configured at the space of the inner side of the rising portions 12 of disc carrier 4 with porous disc 2
Glued dose interior of state engages and fixes.Porous disc 2 and disc carrier 4 and then the connector such as to be bolted mutual
Link fixing.
Protuberance 14 be configured to porous disc 2 be configured at disc carrier 4 rising portions 12 inner side space in
Time, end face is connected to the openend of the large-diameter portion 8b of the suction hole 8 of the back side 2b of porous disc 2 with airtight conditions
The region of surrounding.
Its result, when glued dose of porous disc 2 is fixed on the space of the inner side of the rising portions 12 of disc carrier 4
Time, the groove 14 utilizing the configuration in clathrate and the porous disc 2 covering this groove 14 and the back side of porous disc 2 with
Confined space (the 1st confined space) it is formed with between the upper surface of disc carrier 4.
Intercommunicating pore 18 is configured to the diameter roughly the same for large-diameter portion 8b with the suction hole 8 with porous disc 2,
When porous disc 2 is incorporated in the angle position of regulation in the space of the inner side of the rising portions 12 of disc carrier 4
During place, this intercommunicating pore 18 is directed at each suction port 8 being formed at porous disc 2 in a thickness direction.
Its result, when porous disc 2 is accommodated in the inner side of rising portions 12 of disc carrier 4 with the angle position of regulation
Space in time, the suction port 8 of porous disc 2 is in fluid communication with the intercommunicating pore 18 of disc carrier 4.
Being formed with forced air inlet 20 in the periphery of disc carrier 4, this forced air inlet 20 is used for connecting
The confined space (the 1st confined space) formed by groove 14 and the space outerpace of disc carrier 4, and airtight to this
Space (the 1st confined space) imports forced air.
Its result, in the space that porous disc 2 is accommodated in the inner side of rising portions 12 of disc carrier 4 and glue
Connect under fixing state from forced air inlet 20 to the confined space the (the 1st formed by groove 14 and porous disc 2
Confined space) import forced air time, forced air enter constitute confined space (the 1st confined space)
The pore of porous disc 2 of upper surface, and through porous disc 2 from the surface entirety ejection of porous disc 2.
Fig. 7 is the top view of base portion 6.As it has been described above, base portion 6 is connected to the rear side of support 4 substantially
Discoideus component, such as, is formed by metal materials such as aluminium alloys.Base portion 6 can also be by CFRP PEEK
Formed Deng resin.
As shown in Figure 1 and Figure 7, base portion 6 has the diameter roughly the same with disc carrier 4, at smooth upper table
Face is formed with the base portion groove 22 that cross section is rectangle in lattice shape.Thus, when the smooth back of the body of disc carrier 4
When face engages with the upper surface of base portion 6, utilize cancellate base portion groove 22 and the disc carrier 4 covering it
The back side forms cancellate confined space (the 2nd confined space).
Base portion groove 22 is configured to when disc carrier 4 engages with the angle position of regulation with base portion 6, clathrate
Base portion groove 22 be directed at the intercommunicating pore 18 being formed at disc carrier 4 in a thickness direction.
Use such structure, when porous disc 2, disc carrier 4 and base portion 6 are with the angle position phase of regulation
During link, the suction hole 8 of porous disc 2 via disc carrier 4 intercommunicating pore 18 be formed at base portion 6 and disc carrier
The intersection point of confined space between 4, cancellate (the 2nd confined space) is connected.
It addition, be formed with the vacuum hole 24 as through hole in the periphery of base portion 6, this vacuum hole 24 is used for
Base portion groove 22 is made to be connected with the vacuum source of the outside of base portion 6.
Use such structure, when porous disc 2, disc carrier 4 and base portion 6 with regulation angle position
Under the state linked up when vacuum hole 24 carries out vacuum attraction, via disc carrier 4 intercommunicating pore 18 from
Each suction hole 8 of porous disc 2 attracts such that it is able to the work on porous disc 2 ground absorption porous disc 2
Part.
Disc carrier 4 and base portion 6 are linked by the connecting piece such as screw, bolt.By the upper surface along base portion 6
Periphery forms groove and configures O in this groove such that it is able to so that the cancellate base portion groove of base portion 6
22 modes being formed as airtight conditions link disc carrier 4 and base portion 6.Alternatively, it is also possible to be to utilize bonding agent
Link disc carrier 4 and the structure of base portion 6.
The non-contact suction cup having a structure in which in use, at porous disc 2, disc carrier 4 and base portion
6 with under the state that links up of angle position of regulation, from forced air inlet 20 by forced air to by
The confined space (the 1st confined space) that groove 14 and porous disc 2 are formed imports, and from the vacuum of base portion 6
Hole 24 carries out vacuum attraction, thus by workpiece non-contact adhesion on porous disc 2.
And then, even the workpiece bent (absorbate), it is also possible to make it put down along adsorption plane
Smoothization.
Above-mentioned embodiment is to form cancellate base portion groove 22 at the upper surface of base portion 6, utilize this base portion
Groove 22 forms the structure of the 2nd confined space, but can also be that the upper surface of base portion is set to tabular surface and
Form recess or groove at the back side of disc carrier thus between disc carrier and base portion, form the 2nd confined space
Structure.
Fig. 8 is the upward view of the disc carrier 4 ' of the variation for such structure.As shown in Figure 8, at dish
The bottom surface of support 4 ' is formed with relatively thin columned recess 22 '.
The discoideus base portion that the lower surface of this disc carrier 4 ' is smooth with upper surface engages, and utilizes base portion
It is relatively thin that smooth upper surface and relatively thin columned recess 22 ' are formed between disc carrier 4 ' and base portion
(the most relatively low) columned 2nd confined space.Sidewall at this disc carrier 4 ' is formed and recess
22 ' the vacuum holes being connected (not shown).
Fig. 9 is the disc carrier 4 of another variation for such structure " upward view.As it is shown in figure 9,
At disc carrier 4 " bottom surface be formed with cancellate groove 22 ".
This disc carrier 4 " also smooth with the upper surface discoideus base portion of lower surface engage, utilize base portion
Smooth upper surface and cancellate groove 22 " at disc carrier 4 " and base portion between formed by cancellate groove
The 2nd confined space formed.At this disc carrier 4 " sidewall be also formed with and cancellate groove 22 " be connected
Logical vacuum hole (not shown).
Figure 10 is for illustrating that (noncontact suction is fixed in the absorption of the workpiece W carried out by non-contact suction cup 1
Attached) the schematic sectional view of state.
As it has been described above, in use, when from outside compressed air source to by the groove 14 of disc carrier 4 and many
When the confined space that porose disc 2 is formed imports forced air, forced air is entered by the pore of porous disc 2
In porous disc 2, the most as indicated by the arrowp, spray from the surface 2a of porous disc 2.Utilize at this figure
The forced air sprayed as indicated by the arrowp in 10, workpiece W is suspended in surface (adsorption plane) 8a of dish
On.
On the other hand, utilize that carry out with the importing of forced air simultaneously, enter from the vacuum hole 24 of base portion 6
Row vacuum attraction, is suspended in the connection via disc carrier 4 of the workpiece W on surface (adsorption plane) 8a of dish
Hole 18 is attracted from each suction hole 8 of porous disc 2 as indicated by the arrowsv, thus is absorbed and fixed at by adding
Pressure air produced by buoyancy and by attraction produced by vacuum attraction mutually balance away from adsorption plane 8a
The position of predetermined distance G.
By adjusting by buoyancy produced by forced air (air capacity and air pressure) with by vacuum attraction institute
The attraction produced, it is also possible to when making non-contact suction cup 1 invert, i.e. the adsorption plane of porous disc 2
Under 2a state downward, in the downside of adsorption plane 2a with the fixing workpiece W of contactless state absorption.
Then, illustrate to be carried out by the work transfer device of the non-contact suction cup 1 employing present embodiment
Workpiece conveying.
Figure 11～Figure 19 is to represent the work carried out by the work transfer device 50 employing non-contact suction cup 1
The figure of each operation of part conveying.
As shown in Figure 11～Figure 19, work transfer device 50 is that so-called horizontal articulated type " remove by material
Fortune " robot.
Work transfer device 50 possesses: post 52；1st arm 56, its cardinal extremity is rotatable by shoulder joint 54
Be linked to the upper end of post 52；2nd arm 60, its cardinal extremity is rotatably linked to the 1st by elbow joint 58
The front end of arm 56；And hand 64, its cardinal extremity is rotatably linked to the 2nd arm by wrist joint 62
The front end of 60.The non-contact suction cup 1 of above-mentioned embodiment is so that adsorption plane 2a state downward is installed
Lower surface in hand 64.
Then, illustrate to utilize work transfer device 50 to carry to the 2nd processing means 68 from the 1st processing means 66
The action of workpiece W.
As shown in figure 11, workpiece W is held at the 1st by adsorbent equipment 70 absorption in the 1st processing means 66
On reason device 66.In the conveying operation of present embodiment, first, the 1st of work transfer device 50 the is made
Arm the 56 and the 2nd arm 60 launches to the direction of the 1st processing means 66, will be installed on the non-contact suction cup of hand 64
1 top (Figure 12) being configured at the workpiece W that absorption is maintained in the 1st processing means 66.
Then, post 52 shrinks, and makes non-contact suction cup 1 etc. drop to adsorb the height and position of workpiece W
(Figure 13).Then, start non-contact suction cup 1 imports forced air and carries out vacuum attraction, and stop
The absorption action of the adsorbent equipment 70 of the 1st processing means 66, thus workpiece W is absorbed and fixed at noncontact
Sucker 1 side (Figure 14).
Then, post 52 extends (Figure 15), and then, make the overall rotation centered by shoulder joint 54 of arm, make
Non-contact suction cup 1 moves the top (Figure 16) to the 2nd processing means 68.
And then, post 52 shrinks, and makes non-contact suction cup 1 etc. drop to the adsorbent equipment 72 of the 2nd processing means 68
The height and position (Figure 17) of the adsorbed workpiece W being fixed on non-contact suction cup 1 can be adsorbed.Then, open
The absorption action of the adsorbent equipment 72 of the 2nd processing means 68 that begins, and stop non-contact suction cup 1 is imported adding
Press air and carry out vacuum attraction, so that workpiece W is adsorbed in the adsorbent equipment 72 of the 2nd processing means 68
(Figure 18), and then, make arm be back to initial position, complete to carry operation (Figure 19).
Use non-contact suction cup as above, owing to making workpiece from adsorption plane entirety blowout forced air
While suspension, attract workpiece W from being distributed in the overall suction hole of adsorption plane, therefore, it is possible to not to work
Absorption of workpieces is fixed on assigned position with contactless state on the premise of applying the biggest stress by part.
Then, the structure of the non-contact suction cup of the 2nd embodiment of the present invention is described.Figure 20 is the present invention
The 2nd embodiment non-contact suction cup 100 from top observe exploded perspective view, Figure 21 is the present invention
The 2nd embodiment non-contact suction cup 100 from lower section observe exploded perspective view.
The non-contact suction cup 100 of present embodiment is identical with the non-contact suction cup 1 of the 1st embodiment, be with
The laminal absorbates (workpiece) such as contactless state clamping of semiconductor wafers, FPD glass baseplate,
The non-contact suction cup of such as semiconductor crystal wafer below thickness 100 μm.
As shown in Figure 20 and Figure 21, non-contact suction cup 100 possesses: discoideus porous disc 102, it is upper
Surface possesses the binding domain of workpiece；The most discoideus disc carrier 104, it is from downside (rear side)
Keep porous disc 102；And the most discoideus base portion 106, it is arranged in the rear side of disc carrier 104.
In non-contact suction cup 100, it is configured with between disc carrier 104 and base portion 106 and possesses annulus
The frame component 108 of 108a.
Porous disc 102 is formed by the porous carbon of aeration with the porous disc 2 of non-contact suction cup 1 identically.Many
The material of porose disc 102 is also not limited to the porous carbon of aeration, it is also possible to use other aerations many
Porous materials such as porous SiC Woelm Alumina etc..
Porous disc 102, integrated disc portions 104a of disc carrier 104, frame component 108 annulus 108a with
And integrated disc portions 106a of base portion 106 has roughly the same external diameter.And, in the present embodiment,
By porous disc 102, integrated disc portions 104a of disc carrier 104, the annulus 108a of frame component 108 and
The integrated disc portions 106a stacking of base portion 106 also utilizes bonding agent to be fixed, thus forms non-contact suction cup
100。
It addition, disc carrier 104, base portion 106 and frame component 108 possess respectively from integrated disc portions or ring-type
Part extend outward handle portion 104b of rectangle of roughly the same profile, 106b, 108b.
Disc carrier 104, base portion 106 and frame component 108 are by the metal material of aluminium alloy, CFRP PEEK
Formed Deng resin etc..
Porous disc 102 is formed multiple suction hole (passage) 109.Suction hole 109 is many to spread all over
The mode of the substantially entire surface of porose disc 102 configures.
Additionally, be formed with location when porous disc is linked to disc carrier 4 grade in the circumference of porous disc 102
Hole 110.
As shown in figure 21, at the lower surface of porous disc 102, ring-type dip portion 112 it is formed with in outer peripheral edge.
It is roughly equal with the external diameter of the round plate 104b of disc carrier 104 that dip portion 112 is configured to external diameter.That is, many
The lower surface of porose disc 102 is formed with discoid recess.Its result, props up when porous disc 102 is laminated in dish
Time on frame 104, between the upper surface and the lower surface of porous disc 102 of disc carrier 104, form confined space
(the 1st confined space).
Inside region in the dip portion 112 of the lower surface of porous disc 102 is formed with the groove of cross section rectangle
114, the part separated by groove 114 becomes the protuberance 116 that cross section is foursquare island.Island
The groove 114 that configures with in clathrate (chessboard trellis) of protuberance 116 together with constitute tessellated configuration.
The end face of each protuberance 114 is smooth, and is configured with the through porous disc of through-thickness 102 in central authorities
Suction hole 109.
Owing to the thickness of the protuberance 116 of island is roughly the same with the height of dip portion 112, therefore it is formed at
Confined space (the 1st confined space) between upper surface and the lower surface of porous disc 102 of disc carrier 104
Be formed as the confined space separated by the protuberance 116 of island.
It addition, be equipped with the through hole 118 of the through disc carrier of through-thickness 104 at disc carrier 104.Respectively
Through hole 118 has the diameter roughly the same with the suction hole 109 of porous disc 102, when by disc carrier 104 with
When the angle position of regulation is configured at porous disc 102, each through hole 118 is configured to and the suction of porous disc 102
Draw hole 109 to be directed at.
Its result, when porous disc 102 and disc carrier 104 phase stacking, the suction hole of porous disc 102 109 with
The through hole 118 of disc carrier 104 is in fluid communication.
It is as noted previously, as the annulus of the external diameter of the integrated disc portions of disc carrier 104, frame component 108
The external diameter of the integrated disc portions of external diameter and base portion 106 is roughly the same, therefore when the round plate of disc carrier 104
Point, the integrated disc portions of the annulus of frame component 108 and base portion 106 is formed as with alignment stacking
During non-contact suction cup 100, formed between the integrated disc portions and the integrated disc portions of base portion 106 of disc carrier 104
There is the confined space (the 2nd confined space) of the height roughly equal with the thickness of frame component 108.At this
Between integrated disc portions and the integrated disc portions of base portion 106 of disc carrier 104, confined space (the 2nd confined space)
It is connected with the suction hole 109 of porous disc 102 via the through hole 118 of disc carrier 104.
Its result, to confined air between in the integrated disc portions and the integrated disc portions of base portion 106 of disc carrier 104
Between (the 2nd confined space) when carrying out vacuum attraction, it is possible to via the through hole 118 of disc carrier 104 from many
Each suction hole 109 of porose disc 102 attracts such that it is able to many to adsorb in the way of porous disc 102
Workpiece on porose disc 102.
It addition, in the non-contact suction cup 100 of present embodiment, in handle portion 108b of frame component 108
It is formed with the attraction elongated hole 120,122 extended substantially in parallel and pressurization elongated hole 124.The attraction of both sides
The interior side of elongated hole 120,123 is connected with the inner space surrounded by the annulus 108a of frame component 108.
Thus, under the assembled state of non-contact suction cup 100, attract the circle of elongated hole 120,122 and disc carrier 104
Confined space (the 2nd confined space) between disc portion and the integrated disc portions of base portion 106 is connected.
And then, in the non-contact suction cup 100 of present embodiment, at integrated disc portions and the base of disc carrier 104
Confined space (the 2nd confined space) between the integrated disc portions in portion 106 is configured with multiple stiffener 126.
Stiffener 126 has the thickness roughly the same with the thickness of frame component 108.Its result, inhales in noncontact
Under the assembled state of dish 100, stiffener 126 is clamped under integrated disc portions 104a of disc carrier 104
Between the upper surface of integrated disc portions 106a of surface and base portion 106, thus when the round plate to disc carrier 104
The confined space (the 2nd confined space) between 104a and integrated disc portions 106a of base portion 106 is divided to reduce pressure
Time, the stiffener being crushed as suppression this confined space (the 2nd confined space) through-thickness is sent out
Wave function.
And then, the non-contact suction cup 100 of present embodiment possesses upper plate 128 and lower plate 130.Upper plate 128 He
Lower plate 130 has handle portion 104b with disc carrier 104, handle portion 106b of base portion 106 and frame structure
The rectangular shape that handle portion 108b of part 108 is roughly the same, under the assembled state of non-contact suction cup 100,
From above-below direction holding handle portion 104b, 106b, 108b.
Upper plate 128 has screw hole 132 in corner, and lower plate 130 has screw hole 134 in corner.Above-mentioned spiral shell
Nail under the assembled state of non-contact suction cup 100 in the vertical direction with the hand being formed at disc carrier 104
The corresponding screw hole 136 of the corner of shank 104b, corner corresponding of handle portion 106b of base portion 106
The corresponding screw hole 140 of the corner of handle portion 108b of screw hole 136 and frame component 108 is directed at,
By making not shown screw run through above-mentioned each screw hole 132,136,138,140 and 134, thus
Upper plate 128 and lower plate 130 is utilized to seize handle portion 104b of laminated arrangement, 106b, 108b on both sides by the arms.
It is formed with two through attraction openings 142,144 of through-thickness and pressurised openings in lower plate 130
146.Be formed at side attracts opening 142,144 via passing through under the assembled state of non-contact suction cup 100
The attraction path 148,150 of handle portion 106b of logical base portion 106 and the handle portion being formed at frame component 108
The attraction elongated hole 120,122 of 108b is connected, and then, with integrated disc portions and the base portion 106 of disc carrier 104
Integrated disc portions between confined space (the 2nd confined space) be connected.
On the other hand, pressurised openings 146 under the assembled state of non-contact suction cup 100 via through base portion
The pressurization path 152 of handle portion 106b of 106 is long with the pressurization of handle portion 108b being formed at frame component 108
Foreign side's sidepiece in hole 124 is connected.
And then, inward side (annulus side) portion of pressurization elongated hole 124 is via at non-contact suction cup 100
The pressurization path 154 of handle portion 104b of disc carrier 104 that be disposed above under assembled state, through and shape
Become confined space (the 1st confined air between the upper surface of disc carrier 104 and the lower surface of porous disc 102
Between) be connected.
In use, when importing forced air from pressurised openings 146 from outside compressed air source, add
It is airtight that pressure air inflow is formed between the upper surface of disc carrier 104 and the lower surface of porous disc 102
Space (the 1st confined space), and sprayed from surface by the pore of porous disc 102.
On the other hand, carried out by that carry out with importing forced air, self-gravitation opening 142,144 simultaneously
Vacuum attraction, each by from porous disc 102 of the workpiece being suspended on the surface (adsorption plane) of porous disc 102
Suction hole 109 attracts, and is absorbed and fixed at by buoyancy produced by forced air and is produced by vacuum attraction
The position away from adsorption plane predetermined distance of raw attraction balance.
By adjusting by buoyancy produced by forced air (air capacity and air pressure) with by vacuum attraction institute
The attraction produced, it is possible to when making non-contact suction cup 100 invert, i.e., make porous disc 102
Under adsorption plane state downward, with contactless state, absorption of workpieces is fixed on the downside of adsorption plane.
Additionally, integrated disc portions 104a at disc carrier 104 is formed with the assembled state at non-contact suction cup 100
The lower hole 110, location with porous disc 102 is directed at, hole, multiple location 156, at the annulus of frame component 108
The hole, location 110 dividing 108a to be formed under the assembled state of non-contact suction cup 100 with porous disc 102 is directed at
, hole, multiple location 158, integrated disc portions 106a at base portion 106 is formed at non-contact suction cup 100
Be directed at the hole 110, location of porous disc 102 under assembled state, hole, multiple location 160.
When assembling non-contact suction cup 100, to position the side that hole 110,156,158,160 is mutually aligned
Formula stacking porous disc 102, integrated disc portions 104a of disc carrier 104, the annulus 108a of frame component 108
And integrated disc portions 106a of base portion 106, the hole, location 110,156,158,160 after alignment is inserted
Enter not shown pin, thus be mutually located porous disc 102, disc carrier 104, frame component 108 and base portion
106, and they are adhesively fixed.
It addition, pin has the length highlighted upward from the surface of porous disc 102, at non-contact suction cup 100
Assembling after do not remove, and the workpiece being created as preventing being attracted to the surface of porous disc 102 is from many
The retainer of the surface landing of porose disc.
The present invention is not limited to above-mentioned embodiment, it is possible at the technological thought described in claims
In the range of carry out various change, deformation.
The non-contact suction cup of above-mentioned 1st embodiment is to set in lattice shape on discoideus porous disc 2
Put the structure of suction hole 8, but can also use on discoideus porous disc 2 ' as shown in figure 22
Annularly it is configured with the porous disc of suction hole 8 '.
It addition, as shown in figure 23 and figure 24, it is also possible to be the porous disc 2 at rectangle " in clathrate or ring
Be configured with multiple suction hole 8 shape " structure.In this case, the disc carrier 4 of rectangle is used " etc..
In the example of above-mentioned Figure 22～Figure 24, it is also possible to fit accordingly with the position of the suction hole of porous disc
The suction hole (passage) of local change porous disc and the position of the intercommunicating pore etc. of disc carrier.
And then, above-mentioned embodiment is that the 1st confined space is formed as pressurization space, the 2nd confined space is formed
For the structure of pressure reduction space, but can also be pressurization part and decompression part are exchanged each other and by the 1st
Confined space is set to pressure reduction space, the 2nd confined space is set to the structure of pressurization space.
It addition, above-mentioned 1st embodiment is to be formed in lattice shape on the smooth upper surface of base portion 6
The base portion groove 22 of cross section rectangle, and this base portion groove 22 is formed as the structure of the 2nd confined space.I.e., be
It is formed with identical with the protuberance 16 of the island of the upper surface of disc carrier 4 between cancellate base portion groove 22
The structure of the protuberance of island.However, it is also possible to as shown in figure 25, it is whole by the upper surface of base portion 6 '
Body is set to recess, is set to the 2nd confined space 22 ' of one in the way of being not separated into the protuberance of island
Structure.
Description of reference numerals
1, non-contact suction cup；2, porous disc；4, disc carrier；6, base portion；8, suction hole (ventilation
Hole)；10, hole is linked；12, rising portions；14, groove；16, protuberance；18, intercommunicating pore；20、
Forced air inlet；22, base portion groove；24, vacuum hole.
Claims (4)
1. a non-contact suction cup, this non-contact suction cup is laminal adsorbed with contactless state absorption
Thing, it is characterised in that
This non-contact suction cup possesses:
The porous disc of tabular, its absorption FX be formed through-thickness through and extend multiple
Passage；
1st confined space, it configures in the way of adjacent with the back side of above-mentioned porous disc, is used for importing
Forced air；
2nd confined space, it is isolated with above-mentioned 1st confined space, and the 2nd confined space can be depressurized；
Communication means, it connects above-mentioned 2nd confined space and above-mentioned passage；
The support of tabular, its superficial layer is laminated on the rear side of above-mentioned porous disc, and has recess, recessed at this
Above-mentioned 1st confined space is constituted between portion and the back side of this porous disc；And
Base portion, it is laminated in the rear side of above-mentioned support, and shape between this base portion and back side of this support
Become the 2nd confined space,
Above-mentioned support has:
As multiple intercommunicating pores of above-mentioned communication means function, one end of this intercommunicating pore is in above-mentioned stacking
Time be connected to the passage of above-mentioned porous disc, the other end is in the back side upper shed of this support；
The protuberance of multiple islands, the rear side that the protuberance of this island possesses at above-mentioned multiple passages is opened
The position of mouth end is connected to the smooth top at the back side of above-mentioned porous disc, the protuberance row of multiple islands
It is listed in the most whole of above-mentioned support,
The through above-mentioned protuberance of above-mentioned intercommunicating pore also extends,
Space between above-mentioned protuberance is by as above-mentioned 1st confined space.
2. a non-contact suction cup, this non-contact suction cup is laminal adsorbed with contactless state absorption
Thing, it is characterised in that
This non-contact suction cup possesses:
The porous disc of tabular, its absorption FX be formed through-thickness through and extend multiple
Passage；
1st confined space, it configures in the way of adjacent with the back side of above-mentioned porous disc, is used for importing
Forced air；
2nd confined space, it is isolated with above-mentioned 1st confined space, and the 2nd confined space can be depressurized；
Communication means, it connects above-mentioned 2nd confined space and above-mentioned passage；
The support of tabular, the shelf layer of this tabular is laminated on the rear side of above-mentioned porous disc, possesses many with above-mentioned
The through hole that the passage of porose disc is corresponding；
Base portion, this base layers is laminated on the rear side of above-mentioned support, between this base portion and back side of this support
Form the 2nd confined space,
It is formed with recess at the back side of above-mentioned porous disc, between this recess and above-mentioned support, constitutes above-mentioned
1 confined space,
The passage of above-mentioned porous disc is linked to the through hole of above-mentioned support, plays as above-mentioned communication means
Function,
This non-contact suction cup is also equipped with frame component, and this frame component has and is configured at above-mentioned support and above-mentioned base portion
Between annulus,
Above-mentioned 2nd confined space is formed by the inner space of above-mentioned annulus,
Recess at above-mentioned porous disc possesses the protuberance of multiple island, and the protuberance of this island has abutting
In the smooth top on the surface of above-mentioned support,
The protuberance of the through above-mentioned island of passage of above-mentioned porous disc,
Space between above-mentioned protuberance is by as above-mentioned 1st confined space.
Non-contact suction cup the most according to claim 1 and 2, it is characterised in that
Above-mentioned passage configures in the way of the surface being scattered in above-mentioned porous disc is overall.
Non-contact suction cup the most according to claim 1 and 2, it is characterised in that
Above-mentioned porous disc is formed by porous carbon.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012041171 | 2012-02-28 | ||
| JP2012-041171 | 2012-02-28 | ||
| PCT/JP2013/055491 WO2013129599A1 (en) | 2012-02-28 | 2013-02-28 | Non-contact suction plate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104137247A CN104137247A (en) | 2014-11-05 |
| CN104137247B true CN104137247B (en) | 2016-09-07 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201380010718.2A Active CN104137247B (en) | 2012-02-28 | 2013-02-28 | Non-contact suction cup |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5512052B2 (en) |
| KR (1) | KR101697839B1 (en) |
| CN (1) | CN104137247B (en) |
| TW (1) | TWI527747B (en) |
| WO (1) | WO2013129599A1 (en) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101627913B1 (en) * | 2014-05-26 | 2016-06-07 | 세메스 주식회사 | Table assembly for supporting semiconductor packages |
| CN104096980B (en) * | 2014-06-26 | 2016-01-20 | 长春光华微电子设备工程中心有限公司 | laser cutting vacuum absorbing platform |
| JP6949455B2 (en) * | 2014-12-24 | 2021-10-13 | 株式会社タンケンシールセーコウ | Non-contact transfer device and non-contact suction plate |
| JP6803177B2 (en) * | 2016-08-29 | 2020-12-23 | 株式会社日本製鋼所 | Laser irradiation device |
| CN106325007B (en) * | 2016-11-22 | 2017-11-17 | 江苏影速光电技术有限公司 | A kind of more turntable driving axles may move polygon prism light path direct write equipment |
| CN106444299B (en) * | 2016-11-22 | 2017-12-12 | 江苏影速光电技术有限公司 | A kind of DMD structures multiaxis may move light path direct write exposure machine |
| CN106444298B (en) * | 2016-11-22 | 2018-01-30 | 江苏影速光电技术有限公司 | A kind of DMD structures single shaft fixed light path direct write exposure machine |
| KR101749997B1 (en) * | 2017-01-17 | 2017-06-22 | 주식회사 21세기 | Upper mold for MLCC lamination |
| JP6898797B2 (en) * | 2017-07-10 | 2021-07-07 | 日本特殊陶業株式会社 | Vacuum suction device |
| JP6983578B2 (en) | 2017-08-25 | 2021-12-17 | 株式会社日本製鋼所 | Laser irradiation device, laser irradiation method, and manufacturing method of semiconductor device |
| JP7110005B2 (en) * | 2018-06-20 | 2022-08-01 | キヤノン株式会社 | Substrate rotation apparatus, substrate rotation method, lithographic apparatus, and article manufacturing method |
| JP7260984B2 (en) * | 2018-09-21 | 2023-04-19 | 日本特殊陶業株式会社 | Substrate holding member |
| NL2021859B1 (en) * | 2018-10-23 | 2020-05-13 | Suss Microtec Lithography Gmbh | Fixation system, support plate and method for production thereof |
| CN111482712A (en) * | 2020-04-27 | 2020-08-04 | 沈阳仪表科学研究院有限公司 | Auxiliary system for precision cutting equipment |
| KR102624060B1 (en) | 2021-09-29 | 2024-01-12 | 고려대학교 세종산학협력단 | Etching-object transfer device under vacuum atmosphere and Etching-object transfer method under vacuum atmosphere |
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| TW200731449A (en) * | 2005-07-19 | 2007-08-16 | Tokyo Electron Ltd | Surfacing type substrate transportation processing apparatus |
| CN102183876A (en) * | 2010-01-12 | 2011-09-14 | 细美事有限公司 | Substrate processing apparatus |
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| JPH0750336A (en) * | 1993-08-04 | 1995-02-21 | Hitachi Ltd | Differential suction type vacuum chuck |
| JP4814050B2 (en) | 2006-10-31 | 2011-11-09 | 株式会社妙徳 | Levitation transport unit |
| JP5145524B2 (en) * | 2007-10-25 | 2013-02-20 | 株式会社ブイ・テクノロジー | Exposure equipment |
| JP2011084352A (en) | 2009-10-14 | 2011-04-28 | Myotoku Ltd | Work levitation device |
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2013
- 2013-02-27 TW TW102107177A patent/TWI527747B/en active
- 2013-02-28 JP JP2013542287A patent/JP5512052B2/en active Active
- 2013-02-28 WO PCT/JP2013/055491 patent/WO2013129599A1/en active Application Filing
- 2013-02-28 CN CN201380010718.2A patent/CN104137247B/en active Active
- 2013-02-28 KR KR1020147024329A patent/KR101697839B1/en active IP Right Grant
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| TW200731449A (en) * | 2005-07-19 | 2007-08-16 | Tokyo Electron Ltd | Surfacing type substrate transportation processing apparatus |
| CN102183876A (en) * | 2010-01-12 | 2011-09-14 | 细美事有限公司 | Substrate processing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201343514A (en) | 2013-11-01 |
| JP5512052B2 (en) | 2014-06-04 |
| KR101697839B1 (en) | 2017-01-18 |
| JPWO2013129599A1 (en) | 2015-07-30 |
| WO2013129599A1 (en) | 2013-09-06 |
| KR20140129070A (en) | 2014-11-06 |
| CN104137247A (en) | 2014-11-05 |
| TWI527747B (en) | 2016-04-01 |
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