CN104125718B - 垂直型基板剥离装置 - Google Patents

垂直型基板剥离装置 Download PDF

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Publication number
CN104125718B
CN104125718B CN201310300816.1A CN201310300816A CN104125718B CN 104125718 B CN104125718 B CN 104125718B CN 201310300816 A CN201310300816 A CN 201310300816A CN 104125718 B CN104125718 B CN 104125718B
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China
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substrate
stripping
framework
sides
vertical
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CN201310300816.1A
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English (en)
Chinese (zh)
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CN104125718A (zh
Inventor
郑赞洙
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CHANGSUNG CO LTD
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CHANGSUNG CO LTD
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Publication of CN104125718A publication Critical patent/CN104125718A/zh
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • C23F1/08Apparatus, e.g. for photomechanical printing surfaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B1/00Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
    • B05B1/12Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means capable of producing different kinds of discharge, e.g. either jet or spray
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/02Processes for applying liquids or other fluent materials performed by spraying
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
CN201310300816.1A 2013-04-26 2013-07-17 垂直型基板剥离装置 Active CN104125718B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2013-0046623 2013-04-26
KR1020130046623A KR101342616B1 (ko) 2013-04-26 2013-04-26 수직형 기판 박리 시스템

Publications (2)

Publication Number Publication Date
CN104125718A CN104125718A (zh) 2014-10-29
CN104125718B true CN104125718B (zh) 2017-05-03

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ID=49988558

Family Applications (1)

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CN201310300816.1A Active CN104125718B (zh) 2013-04-26 2013-07-17 垂直型基板剥离装置

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KR (1) KR101342616B1 (ko)
CN (1) CN104125718B (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101615125B1 (ko) * 2014-08-13 2016-04-25 제이엔케이히터(주) 페이스트 정량 토출장치
CN108162598B (zh) * 2017-12-26 2024-04-26 广东正业科技股份有限公司 一种喷印机及其喷头位置调整装置
CN108315749A (zh) * 2018-03-16 2018-07-24 合肥汇通控股股份有限公司 一种金属材料处理系统
KR102172665B1 (ko) * 2019-03-22 2020-11-03 주식회사 티케이씨 기판의 비접촉식 수직 처리시스템의 지그 이송장치
KR102150614B1 (ko) * 2019-03-22 2020-09-02 주식회사 티케이씨 지그 검사장치를 갖는 기판의 비접촉식 수직 처리시스템
KR102172662B1 (ko) * 2019-03-22 2020-11-03 주식회사 티케이씨 기판의 비접촉식 수직 처리시스템
KR102410120B1 (ko) * 2020-09-14 2022-06-21 주식회사 티케이씨 얼룩현상을 개선한 기판의 수직처리시스템

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW391151B (en) * 1996-12-03 2000-05-21 Tokyo Kakoki Kk Transmission processing unit
CN1576961A (zh) * 2003-07-18 2005-02-09 芝浦机械电子株式会社 基板的处理装置和处理方法
CN1962962A (zh) * 2005-11-08 2007-05-16 上村工业株式会社 电镀槽
CN101441987A (zh) * 2007-11-20 2009-05-27 细美事有限公司 基板清洗装置和方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2689097B2 (ja) * 1995-04-20 1997-12-10 東京化工機株式会社 プリント配線基板の搬送装置
JP4257897B2 (ja) * 2003-05-23 2009-04-22 株式会社ケミトロン メッキ装置
KR20110010965A (ko) * 2009-07-27 2011-02-08 삼성전기주식회사 수직이송 지그 및 이를 이용한 습식에칭 설비

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW391151B (en) * 1996-12-03 2000-05-21 Tokyo Kakoki Kk Transmission processing unit
CN1576961A (zh) * 2003-07-18 2005-02-09 芝浦机械电子株式会社 基板的处理装置和处理方法
CN1962962A (zh) * 2005-11-08 2007-05-16 上村工业株式会社 电镀槽
CN101441987A (zh) * 2007-11-20 2009-05-27 细美事有限公司 基板清洗装置和方法

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KR101342616B1 (ko) 2013-12-20
CN104125718A (zh) 2014-10-29

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