CN104114990B - 压力传感器模块 - Google Patents

压力传感器模块 Download PDF

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Publication number
CN104114990B
CN104114990B CN201380009546.7A CN201380009546A CN104114990B CN 104114990 B CN104114990 B CN 104114990B CN 201380009546 A CN201380009546 A CN 201380009546A CN 104114990 B CN104114990 B CN 104114990B
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CN
China
Prior art keywords
mentioned
pressure
wall portion
upper wall
atmospheric pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201380009546.7A
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English (en)
Chinese (zh)
Other versions
CN104114990A (zh
Inventor
泽村博之
津幡智志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hokuriku Electric Industry Co Ltd
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Hokuriku Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication of CN104114990A publication Critical patent/CN104114990A/zh
Application granted granted Critical
Publication of CN104114990B publication Critical patent/CN104114990B/zh
Expired - Fee Related legal-status Critical Current
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
CN201380009546.7A 2012-02-16 2013-02-14 压力传感器模块 Expired - Fee Related CN104114990B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2012031643 2012-02-16
JP2012-031643 2012-02-16
PCT/JP2013/053525 WO2013122141A1 (ja) 2012-02-16 2013-02-14 圧力センサモジュール

Publications (2)

Publication Number Publication Date
CN104114990A CN104114990A (zh) 2014-10-22
CN104114990B true CN104114990B (zh) 2016-08-31

Family

ID=48984250

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201380009546.7A Expired - Fee Related CN104114990B (zh) 2012-02-16 2013-02-14 压力传感器模块

Country Status (4)

Country Link
JP (1) JP5970485B2 (ko)
KR (1) KR102021804B1 (ko)
CN (1) CN104114990B (ko)
WO (1) WO2013122141A1 (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10006826B2 (en) * 2014-12-01 2018-06-26 Hokuriku Electric Industry Co., Ltd. Semiconductor pressure sensor device
CN115824490A (zh) * 2018-02-15 2023-03-21 三美电机株式会社 压力传感器装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1502039A (zh) * 2001-05-09 2004-06-02 ������˹�ͺ�ɪ�����Ϲ�˾ 带有水分过滤器的装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0469746U (ko) * 1990-10-26 1992-06-19
JPH08240495A (ja) * 1995-03-03 1996-09-17 Hitachi Ltd 半導体圧力センサ
JPH09178596A (ja) * 1995-12-25 1997-07-11 Matsushita Electric Works Ltd 圧力センサ
JPH09178598A (ja) * 1995-12-25 1997-07-11 Matsushita Electric Works Ltd 圧力センサの温度特性検査における温度制御方法
JP4072973B2 (ja) * 1998-09-07 2008-04-09 日本電産コパル電子株式会社 圧力変換器
EP1065488B1 (de) * 1999-07-01 2007-02-28 Endress + Hauser GmbH + Co. KG Relativdrucksensor
JP3721903B2 (ja) * 1999-11-30 2005-11-30 国産電機株式会社 内燃機関用制御ユニット
JP2004279091A (ja) * 2003-03-13 2004-10-07 Denso Corp 圧力センサ
JP4564775B2 (ja) * 2004-04-26 2010-10-20 日立オートモティブシステムズ株式会社 液体及び気体用圧力検出装置
US7180132B2 (en) 2004-09-16 2007-02-20 Fairchild Semiconductor Corporation Enhanced RESURF HVPMOS device with stacked hetero-doping RIM and gradual drift region
JP5853171B2 (ja) * 2010-12-13 2016-02-09 パナソニックＩｐマネジメント株式会社 半導体圧力センサおよびその製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1502039A (zh) * 2001-05-09 2004-06-02 ������˹�ͺ�ɪ�����Ϲ�˾ 带有水分过滤器的装置

Also Published As

Publication number Publication date
JPWO2013122141A1 (ja) 2015-05-18
KR102021804B1 (ko) 2019-09-17
KR20140127823A (ko) 2014-11-04
WO2013122141A1 (ja) 2013-08-22
CN104114990A (zh) 2014-10-22
JP5970485B2 (ja) 2016-08-17

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C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20160831

Termination date: 20220214