CN104094091B - 半导体发光元件用测定装置以及半导体发光元件用测定方法 - Google Patents

半导体发光元件用测定装置以及半导体发光元件用测定方法 Download PDF

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Publication number
CN104094091B
CN104094091B CN201280068969.1A CN201280068969A CN104094091B CN 104094091 B CN104094091 B CN 104094091B CN 201280068969 A CN201280068969 A CN 201280068969A CN 104094091 B CN104094091 B CN 104094091B
Authority
CN
China
Prior art keywords
light
emitting elements
semiconductor light
distance
led101
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201280068969.1A
Other languages
English (en)
Chinese (zh)
Other versions
CN104094091A (zh
Inventor
望月学
藤森昭
藤森昭一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinkawa Ltd
Pioneer Corp
PFA Corp
Original Assignee
Pioneer Corp
Pioneer FA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pioneer Corp, Pioneer FA Corp filed Critical Pioneer Corp
Publication of CN104094091A publication Critical patent/CN104094091A/zh
Application granted granted Critical
Publication of CN104094091B publication Critical patent/CN104094091B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/0266—Field-of-view determination; Aiming or pointing of a photometer; Adjusting alignment; Encoding angular position; Size of the measurement area; Position tracking; Photodetection involving different fields of view for a single detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
    • G01J1/0425—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using optical fibers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0218—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0289—Field-of-view determination; Aiming or pointing of a spectrometer; Adjusting alignment; Encoding angular position; Size of measurement area; Position tracking
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • G01J3/504—Goniometric colour measurements, for example measurements of metallic or flake based paints
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/06—Restricting the angle of incident light
    • G01J2001/067—Restricting the angle of incident light for angle scan
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J2001/4247—Photometry, e.g. photographic exposure meter using electric radiation detectors for testing lamps or other light sources
    • G01J2001/4252—Photometry, e.g. photographic exposure meter using electric radiation detectors for testing lamps or other light sources for testing LED's
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/005—Processes
    • H01L33/0093—Wafer bonding; Removal of the growth substrate

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Led Devices (AREA)
CN201280068969.1A 2012-03-27 2012-03-27 半导体发光元件用测定装置以及半导体发光元件用测定方法 Expired - Fee Related CN104094091B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2012/057987 WO2013145132A1 (ja) 2012-03-27 2012-03-27 半導体発光素子用の測定装置

Publications (2)

Publication Number Publication Date
CN104094091A CN104094091A (zh) 2014-10-08
CN104094091B true CN104094091B (zh) 2016-08-24

Family

ID=49258499

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201280068969.1A Expired - Fee Related CN104094091B (zh) 2012-03-27 2012-03-27 半导体发光元件用测定装置以及半导体发光元件用测定方法

Country Status (3)

Country Link
JP (1) JP5813861B2 (ja)
CN (1) CN104094091B (ja)
WO (1) WO2013145132A1 (ja)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1871689A (zh) * 2003-10-28 2006-11-29 株式会社尼康 投影机曝光装置、曝光方法以及元件制造方法
CN101276154A (zh) * 2007-03-30 2008-10-01 Asml荷兰有限公司 光刻设备和方法
CN101320216A (zh) * 2008-06-18 2008-12-10 上海微电子装备有限公司 一种微光刻照明光瞳的整形结构
JP4892118B1 (ja) * 2010-11-30 2012-03-07 パイオニア株式会社 発光素子用受光モジュール及び発光素子用検査装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62211538A (ja) * 1986-03-12 1987-09-17 Oki Electric Ind Co Ltd 半導体発光素子の発光特性測定方法
JPH05107107A (ja) * 1991-10-16 1993-04-27 Omron Corp 発光素子検査装置
JP3628344B2 (ja) * 1993-12-28 2005-03-09 株式会社リコー 半導体検査装置
JPH09113411A (ja) * 1995-10-17 1997-05-02 Hitachi Cable Ltd 受光装置
JP4061822B2 (ja) * 2000-06-26 2008-03-19 松下電工株式会社 赤外線モジュールの特性測定方法
JP3778362B2 (ja) * 2004-03-29 2006-05-24 株式会社テクノローグ Ｌｅｄ発光測定装置
JP2007019237A (ja) * 2005-07-07 2007-01-25 Tokyo Seimitsu Co Ltd 両面発光素子用プロービング装置
JP2008180661A (ja) * 2007-01-26 2008-08-07 Shin Etsu Handotai Co Ltd 電子デバイス検査装置及び電子デバイス検査方法
US8064058B2 (en) * 2007-07-18 2011-11-22 GE Lighting Solutions, LLC Light distribution measurement system
JP2010091441A (ja) * 2008-10-09 2010-04-22 Arkray Inc 光量モニタリング装置、および光量モニタリング方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1871689A (zh) * 2003-10-28 2006-11-29 株式会社尼康 投影机曝光装置、曝光方法以及元件制造方法
CN101276154A (zh) * 2007-03-30 2008-10-01 Asml荷兰有限公司 光刻设备和方法
CN101320216A (zh) * 2008-06-18 2008-12-10 上海微电子装备有限公司 一种微光刻照明光瞳的整形结构
JP4892118B1 (ja) * 2010-11-30 2012-03-07 パイオニア株式会社 発光素子用受光モジュール及び発光素子用検査装置

Also Published As

Publication number Publication date
JP5813861B2 (ja) 2015-11-17
WO2013145132A1 (ja) 2013-10-03
JPWO2013145132A1 (ja) 2015-08-03
CN104094091A (zh) 2014-10-08

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C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CP02 Change in the address of a patent holder

Address after: Tokyo, Japan

Co-patentee after: PIONEER FA Corp.

Patentee after: PIONEER Corp.

Address before: Kanagawa

Co-patentee before: Pioneer Fa Corp.

Patentee before: PIONEER Corp.

CP02 Change in the address of a patent holder
CP01 Change in the name or title of a patent holder
CP01 Change in the name or title of a patent holder

Address after: Tokyo, Japan

Co-patentee after: PFA Co.

Patentee after: PIONEER Corp.

Address before: Tokyo, Japan

Co-patentee before: Pioneer Fa Corp.

Patentee before: PIONEER Corp.

TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20180827

Address after: Tokyo, Japan

Co-patentee after: PFA Co.

Patentee after: SHINKAWA Ltd.

Address before: Tokyo, Japan

Co-patentee before: PFA Co.

Patentee before: PIONEER Corp.

CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20160824

Termination date: 20210327