CN103874569B - 用于使用经历相变的还原材料来封装电子元件的方法和设备 - Google Patents

用于使用经历相变的还原材料来封装电子元件的方法和设备 Download PDF

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Publication number
CN103874569B
CN103874569B CN201280050764.0A CN201280050764A CN103874569B CN 103874569 B CN103874569 B CN 103874569B CN 201280050764 A CN201280050764 A CN 201280050764A CN 103874569 B CN103874569 B CN 103874569B
Authority
CN
China
Prior art keywords
molding cavity
reducing material
carrier
encapsulating material
cavity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201280050764.0A
Other languages
English (en)
Chinese (zh)
Other versions
CN103874569A (zh
Inventor
J·L·J·泽尔
W·G·J·加尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Besi Netherlands BV
Original Assignee
Besi Netherlands BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Besi Netherlands BV filed Critical Besi Netherlands BV
Publication of CN103874569A publication Critical patent/CN103874569A/zh
Application granted granted Critical
Publication of CN103874569B publication Critical patent/CN103874569B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/14Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
    • B29C45/14639Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components
    • B29C45/14655Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components connected to or mounted on a carrier, e.g. lead frame
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17Component parts, details or accessories; Auxiliary operations
    • B29C45/1701Component parts, details or accessories; Auxiliary operations using a particular environment during moulding, e.g. moisture-free or dust-free
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/14Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
    • B29C45/14639Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components
    • B29C45/14655Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components connected to or mounted on a carrier, e.g. lead frame
    • B29C2045/14663Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles for obtaining an insulating effect, e.g. for electrical components connected to or mounted on a carrier, e.g. lead frame the mould cavity walls being lined with a film, e.g. release film
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C2791/00Shaping characteristics in general
    • B29C2791/004Shaping under special conditions
    • B29C2791/005Using a particular environment, e.g. sterile fluids other than air
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/02Transfer moulding, i.e. transferring the required volume of moulding material by a plunger from a "shot" cavity into a mould cavity
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73201Location after the connecting process on the same surface
    • H01L2224/73203Bump and layer connectors
    • H01L2224/73204Bump and layer connectors the bump connector being embedded into the layer connector

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Injection Moulding Of Plastics Or The Like (AREA)
CN201280050764.0A 2011-10-18 2012-10-18 用于使用经历相变的还原材料来封装电子元件的方法和设备 Expired - Fee Related CN103874569B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
NL2007614A NL2007614C2 (nl) 2011-10-18 2011-10-18 Werkwijze en inrichting voor het met behulp van een reductie-materiaal dat een faseovergang ondergaat omhullen van elektronische componenten.
NL2007614 2011-10-18
PCT/NL2012/050724 WO2013066162A1 (en) 2011-10-18 2012-10-18 Method and device for encapsulating electronic components using a reduction material which undergoes a phase change

Publications (2)

Publication Number Publication Date
CN103874569A CN103874569A (zh) 2014-06-18
CN103874569B true CN103874569B (zh) 2017-02-15

Family

ID=47116232

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201280050764.0A Expired - Fee Related CN103874569B (zh) 2011-10-18 2012-10-18 用于使用经历相变的还原材料来封装电子元件的方法和设备

Country Status (9)

Country Link
JP (1) JP6133879B2 (ko)
KR (1) KR102017672B1 (ko)
CN (1) CN103874569B (ko)
DE (1) DE112012004392B4 (ko)
GB (1) GB2516148B (ko)
MY (1) MY165079A (ko)
NL (1) NL2007614C2 (ko)
SG (1) SG2014011431A (ko)
WO (1) WO2013066162A1 (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL2016011B1 (en) * 2015-12-23 2017-07-03 Besi Netherlands Bv Press, actuator set and method for encapsulating electronic components with at least two individual controllable actuators.
DE102017216711A1 (de) * 2017-09-21 2019-03-21 Robert Bosch Gmbh Vorrichtung und Verfahren zur Herstellung von mit einer Gießmasse zumindest bereichsweise überdeckten Bauelementen
DE102023200536A1 (de) 2023-01-24 2024-07-25 BSH Hausgeräte GmbH Verfahren zum spezifischen Spritzgießen von Haushaltsgeräte-Kunststoffbauteilen, sowie Spritzgießmaschine

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1554851A1 (de) * 1966-04-16 1970-01-22 Phoenix Gummiwerke Ag Verfahren zum Einspritzen einer plastischen Kautschuk- oder Kunststoffmischung in eine Hohlform
JPS6297812A (ja) * 1985-10-23 1987-05-07 Mitsubishi Electric Corp 樹脂成形方法
NL9400119A (nl) 1994-01-27 1995-09-01 3P Licensing Bv Werkwijze voor het met een hardende kunststof omhullen van een electronische component, electronische componenten met kunststofomhulling verkregen door middel van deze werkwijze en matrijs voor het uitvoeren der werkwijze.
DE4427309C2 (de) 1994-08-02 1999-12-02 Ibm Herstellung eines Trägerelementmoduls zum Einbau in Chipkarten oder andere Datenträgerkarten
JP3407987B2 (ja) * 1994-08-18 2003-05-19 Towa株式会社 樹脂封止成形用金型の保管方法及び電子部品の樹脂封止成形方法
JP3569224B2 (ja) * 2000-12-11 2004-09-22 アピックヤマダ株式会社 樹脂封止方法及び樹脂封止装置
US6770236B2 (en) * 2000-08-22 2004-08-03 Apic Yamada Corp. Method of resin molding
JP2006198813A (ja) * 2005-01-18 2006-08-03 Hitachi Chem Co Ltd 封止成形方法及び封止成形装置
JP2009099680A (ja) * 2007-10-15 2009-05-07 Panasonic Corp 光学デバイスおよびその製造方法
NL2003792C2 (nl) * 2009-07-17 2011-01-18 Fico Bv Werkwijze en inrichting voor het met gecontroleerde gasdruk omhullen van elektronische componenten.

Also Published As

Publication number Publication date
JP2014530510A (ja) 2014-11-17
WO2013066162A1 (en) 2013-05-10
JP6133879B2 (ja) 2017-05-24
KR20140079453A (ko) 2014-06-26
GB2516148A (en) 2015-01-14
GB2516148B (en) 2016-10-26
MY165079A (en) 2018-02-28
DE112012004392T5 (de) 2014-07-10
DE112012004392B4 (de) 2021-10-28
GB201407324D0 (en) 2014-06-11
NL2007614C2 (nl) 2013-04-22
SG2014011431A (en) 2014-06-27
CN103874569A (zh) 2014-06-18
KR102017672B1 (ko) 2019-09-03

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Granted publication date: 20170215

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