CN103855064B - Transport mechanism - Google Patents
Transport mechanism Download PDFInfo
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- CN103855064B CN103855064B CN201310596891.7A CN201310596891A CN103855064B CN 103855064 B CN103855064 B CN 103855064B CN 201310596891 A CN201310596891 A CN 201310596891A CN 103855064 B CN103855064 B CN 103855064B
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- Prior art keywords
- plate workpiece
- mentioned
- holding claws
- transport mechanism
- peripheral part
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- 230000007723 transport mechanism Effects 0.000 title claims abstract description 66
- 210000000078 claw Anatomy 0.000 claims abstract description 96
- 230000002093 peripheral effect Effects 0.000 claims abstract description 52
- 238000007599 discharging Methods 0.000 claims description 3
- 230000001737 promoting effect Effects 0.000 abstract 1
- 239000011159 matrix material Substances 0.000 description 53
- 230000007246 mechanism Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 230000011218 segmentation Effects 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Abstract
The present invention provides a kind of transport mechanism, is able to maintain that alignment of the plate workpiece relative to the retaining surface for keeping workbench, while plate workpiece is drop to retaining surface.The transport mechanism of the present invention is configured to, and has：Holding claws（46）, it keeps plate workpiece（W）Peripheral part；Guiding pin（47）, its drawn spring（43）It is connected with holding claws；And move portion（44）It makes holding claws moving radially along plate workpiece, when keeping plate workpiece, by being furthered holding claws by move portion, and holding claws is contacted with the peripheral part of plate workpiece, and guide pin to be subject to the influence of holding claws and contacted with the peripheral part of plate workpiece, when decontroling plate workpiece, by promoting holding claws by move portion, guiding pin is left and holding claws is kept out of the way from the peripheral part of plate workpiece, the peripheral part of plate workpiece is guided by guiding pin by the elastic force of extension spring.
Description
Technical field
The present invention relates to the peripheral part and the transport mechanism of the edge clamped-in style transported for keeping plate workpiece.
Background technology
In the past, the transport mechanism as conveyance plate workpiece was known to by transporting pad to keep the surface of plate workpiece simultaneously
The transport mechanism transported., may be to conveyance due to surface contact with conveyance pad of plate workpiece in the transport mechanism
The contact surface of pad pollutes, and therefore, the contact surface of conveyance pad is cleaned by wiper mechanism.But even after cleaning
Conveyance pad, if accompanying foreign matter between the contact surface of conveyance pad and the surface of plate workpiece, may be caused to damage to plate workpiece
Wound.Therefore, the transport mechanism that the edge clamped-in style of plate workpiece can be transported not contacting the surface with plate workpiece is used
(for example, referring to patent document 1).
Prior art literature
Patent document 1：Japanese Unexamined Patent Publication 2007-258450 publications
However, in the transport mechanism described in patent document 1, in multiple holding claws formed with V-shaped valley, plate workpiece
Peripheral part is maintained in the V-shaped valley.When moving into plate workpiece to holding workbench, the top of workbench is being kept, it is multiple
Holding claws is kept out of the way from the peripheral part of plate workpiece, and thus, plate workpiece drops to the guarantor of holding workbench by free-falling
Hold on face.Accordingly, there exist it is such the problem of：When transporting plate workpiece, even if making the guarantor of plate workpiece alignment holding workbench
Face is held, in the dropping process of plate workpiece, plate workpiece can also produce deviation relative to the position of retaining surface.
The content of the invention
The present invention is in view of such aspect and the invention completed, its purpose is to provide a kind of conveyance of edge clamped-in style
Mechanism, can make plate workpiece land while alignment of the maintenance plate workpiece relative to the retaining surface for keeping workbench
To retaining surface.
The transport mechanism of the present invention is such mechanism：By keep plate workpiece peripheral part maintaining part come holding plate
Shape workpiece, and plate workpiece is transported on the holding workbench with retaining surface, above-mentioned retaining surface is used for the plate being held round
The lower surface of shape workpiece, above-mentioned transport mechanism are characterized in that above-mentioned maintaining part includes：Holding claws, it is outer with plate workpiece
Side and lower surface contact at circumference；Guiding pin, it is set up in parallel with above-mentioned holding claws and is connect with the side of plate workpiece
Touch；Extension spring, it applies elastic force along the center that is radially orientated of plate workpiece to above-mentioned guiding pin；And the 1st sliding block, it is to logical
Cross above-mentioned extension spring and the above-mentioned guiding pin of movement is oriented, above-mentioned transport mechanism has：2nd sliding block, it is by above-mentioned guarantor
The movement for holding portion is oriented in plate workpiece radially；And move portion, it makes above-mentioned maintaining part be moved along the radial direction of plate workpiece
It is dynamic, when keeping plate workpiece, by the work of above-mentioned move portion make the above-mentioned maintaining part of at least three along plate workpiece radially towards
Moved to center, so that the contacts side surfaces of above-mentioned guiding pin and plate workpiece, and make above-mentioned holding claws and plate workpiece
Side and lower surface contact at peripheral part, when discharging plate workpiece, pass through above-mentioned move portion so as to keep plate workpiece
Work the above-mentioned maintaining part of at least three is moved along the side radially outwardly of plate workpiece, leave above-mentioned guiding pin and make above-mentioned
Holding claws is moved to the outside of plate workpiece, above-mentioned holding claws is left the peripheral part of plate workpiece, but pass through above-mentioned stretching
The elastic force of spring makes above-mentioned guiding pin continue the contacts side surfaces with plate workpiece, so as to maintain the plate that above-mentioned transport mechanism is kept
Shape workpiece is in the position relative to the parallel direction of above-mentioned retaining surface, after plate workpiece is transported to above-mentioned holding workbench,
At least three maintaining part is set to be moved along the side radially outwardly of plate workpiece by the work of above-mentioned move portion, so that this draws
Guide pin is integratedly moved with the holding claws to the outside of plate workpiece, the guiding pin is left the peripheral part of plate workpiece.
According to the structure, in the state of plate workpiece is kept using at least three holding claws, guiding pin is by stretching bullet
The elastic force of spring and with the contacts side surfaces of the peripheral part of plate workpiece.In addition, even if holding claws leaves from the peripheral part of plate workpiece,
Guiding pin also continues to contacts side surfaces with the peripheral part of plate workpiece, so that from the plate workpiece that holding claws is fallen by along guiding
Pin guides.Therefore, even the transport mechanism of edge clamped-in style can also be held in the tabular work of transport mechanism in maintenance
Part while the position relationship of parallel direction, makes tabular work with the retaining surface of holding workbench in the state of position alignment
Part is drop in retaining surface.
Invention effect
According to the present invention, when discharging plate workpiece, by only make holding claws from plate workpiece leave and by guiding pin come
The whereabouts of plate workpiece is guided, plate workpiece can maintained relative to the same of the alignment for the retaining surface for keeping workbench
When, plate workpiece is drop in retaining surface.
Brief description of the drawings
Fig. 1 is the stereogram of the transport mechanism of present embodiment.
Fig. 2 is the exploded perspective view of the maintaining part of the transport mechanism of present embodiment.
Fig. 3 is the decomposition side view of the maintaining part of the transport mechanism of present embodiment.
Fig. 4 is the explanatory drawin for taking out of action for taking out of plate workpiece of the transport mechanism based on present embodiment.
Fig. 5 is the explanatory drawin for moving into action for moving into plate workpiece of the transport mechanism based on present embodiment.
Label declaration
1 transport mechanism
2 keep workbench
4 maintaining parts
21 retaining surfaces
41 holding claws matrixes
42 pin matrixes
43 extension springs
44 move portions
46 holding claws
47 guiding pins
52 lower sliding blocks (the 2nd sliding block)
Side slide (the 1st sliding block) on 55
64 limitation projections
W plate workpieces
Embodiment
Hereinafter, the transport mechanism of present embodiment is illustrated referring to the drawings.Fig. 1 is the transport mechanism of present embodiment
Stereogram.In addition, in the present embodiment, the transporter of the edge clamped-in style of the peripheral part to keeping plate workpiece at three
Structure carries out example and illustrates, but the invention is not restricted to the structure.Transport mechanism is to maintain the peripheral part of plate workpiece
Structure more than at three.
As shown in Figure 1, transport mechanism 1 is assembled in the transport mechanism of the edge clamped-in style in various processing unit (plant)s, this is removed
Mechanism 1 is sent to be configured to keep the peripheral part of plate workpiece W and be transported to plate workpiece W keep on workbench 2.Tabular
Workpiece is W-shaped to become substantially discoideus, its surface marks off multiple regions by segmentation preset lines (not shown).By segmentation preset lines
Each region marked off is formed with circuits such as IC (integrated circuit), LSI (large scale integrated circuit).In addition, as plate workpiece
W, enumerates exemplified by the semiconductor wafers such as silicon, GaAs and illustrates, but can also be ceramics, glass, sapphire (Al2O3) system
Inorganic material substrate etc..
In the upper surface of holding workbench 2 by porous ceramic film material formed with retaining surface 21, above-mentioned retaining surface 21 is to plate
The lower surface of shape workpiece W is kept.Retaining surface 21 is by keeping the flow path in workbench 2 through switching valve (not shown) and suction
The supply source 26 of source 25 and compressed air connects.When keeping workbench 2 to receive plate workpiece W from transport mechanism 1, retaining surface
21 connection destination is switched to suction source 25, so that plate workpiece W is adsorbed to retaining surface 21.When from keep workbench 2
When joining plate workpiece W to transport mechanism 1, the connection destination of retaining surface 21 is switched to the supply source 26 of compressed air, from
And plate workpiece W is set to float from retaining surface 21 to the height that can carry out edge clamping by transport mechanism 1.
Transport mechanism 1 is configured with 3 maintaining parts 4 to keep tabular on the bottom plate 3 for general triangular shape is overlooked
The peripheral part of workpiece W.By 3 column portions 31 connecting plate 32 is supported by the center of bottom plate 3, the bottom plate 3 is through the connecting plate 32
Support is on arm (not shown).Each maintaining part 4 is configured to, and the peripheral part of plate workpiece W is kept by holding claws 46, and can
A pair of of guiding pin 47 is set to touch the peripheral part of plate workpiece W.Plate workpiece W is in the state of being kept pawl 46 and keeping, by one
Guiding pin 47 is guided, above-mentioned a pair of of guiding pin 47 is disposed in parallel in the both sides of holding claws 46.
Holding claws 46 is fixed on holding claws matrix 41, and above-mentioned holding claws matrix 41 can be slidably arranged on bottom plate 3.
A pair of guiding pin 47 is fixed on pin matrix 42, and above-mentioned pin matrix 42 can be slidably arranged on holding claws matrix 41.In addition,
Holding claws matrix 41 is connected with 42 drawn spring 43 of pin matrix, and pin matrix 42 is drawn by the elastic force of extension spring 43 is close to guarantor
Hold pawl matrix 41.In addition, holding claws matrix 41 is connected with DYN dynamic move portion 44, by the driving of move portion 44, matrix is sold
42 move forward and backward together with holding claws matrix 41 along the radial direction of plate workpiece W.
Each maintaining part 4 and move portion 44 are covered by the cover 45 that lower surface opens, holding claws 46 and a pair of of guiding pin 47
Protruded downwards from bottom plate 3.In addition, the state Fig. 1 shows the cover 45 for taking next maintaining part 4.In the transport mechanism 1, make
In the state of holding claws 46 and a pair of of guiding pin 47 are contacted with the peripheral part of plate workpiece W, it can only make holding claws 46 from plate
The peripheral part of shape workpiece W is kept out of the way.Thus, even if plate workpiece W is decontroled from each holding claws 46, plate workpiece W mono- can be made
While guided by a pair of guiding pin 47, while the retaining surface 21 towards holding workbench 2 is fallen.
The detailed construction of the maintaining part of transport mechanism is illustrated with reference to Fig. 2 and Fig. 3.Fig. 2 is present embodiment
The exploded perspective view of the maintaining part of transport mechanism.Fig. 3 is the decomposition side view of the maintaining part of the transport mechanism of present embodiment.
As shown in FIG. 2 and 3, bottom plate 3 is formed as extending laterally the corner of triangle and is used as setting for maintaining part 4
It is general triangular shape to put region 33 and overlook.Leading along radiation direction extension is configured with each setting area 33 of bottom plate 3
Rail 51, can slidably be provided with lower sliding block 52 (the 2nd sliding block) on guide rail 51.It is fixed with the upper surface of lower sliding block 52
Holding claws matrix 41.It is rectangular shape that holding claws matrix 41, which is formed as along guide rail 51 extending and overlooking, holding claws matrix 41
Substantially first half is formed as heavy wall, substantially latter half of to be formed as thin-walled.
Holding claws matrix 41 is fixed on lower sliding block 52 for the substantially latter half of of thin-walled, holding claws matrix 41 for heavy wall
Substantially first half stretched out laterally than the setting area 33 of bottom plate 3.Protruded in holding claws matrix 41 from the setting area 33
Front end be fixed with the holding claws 46 of the peripheral part for keeping plate workpiece W.Front end of the holding claws 46 from holding claws matrix 41
Extend and have in bottom downwards the pawl point 57 protruded inwardly.By the side of the peripheral part that makes plate workpiece W and
Lower surface is contacted with the pawl point 57 of holding claws 46, can keep plate workpiece W by multiple maintaining parts 4.In addition, holding claws 46 is each
From being independently formed in holding claws matrix 41, but can also be formed as one.
The standing wall portion 61 for bearing the driving force from move portion 44 is provided with the rearward end of holding claws matrix 41.Move portion
44 be the DYN dynamic linear actuator for making bar 66 flexible after electric signal is received, and the ratio for being arranged on bottom plate 3 is set
The position of region 33 in the inner part.Move portion 44 is positioned by locating piece 67, and move portion 44 makes bar 66 towards setting area
33 protrude.Be fixed with the standing wall portion 61 of holding claws matrix 41 in the end of bar 66, holding claws matrix 41 by bar 66 it is flexible and
Moved along guide rail 51 in advance and retreat direction.
The substantially first half of holding claws matrix 41 becomes base portion 62, which supports pin matrix 42 as that can slide
It is dynamic.The guide rail 54 extended along radiation direction is configured with the upper surface of base portion 62, can slidably be set on guide rail 54
There is upper side slide 55 (the 1st sliding block).Pin matrix 42 is fixed with the upper surface of upper side slide 55.Sell matrix 42 have with it is opposite
In in inverted U-shaped bending section 71 and being bent on the vertical section in direction that the base portion 62 of holding claws matrix 41 is slided
A pair of of supporting part 72 of a pair of of guiding pin 47 of two sides support in portion 71.
Each guiding pin 47 is configured to, and guide portion 77 can be telescopically connected to the lower end of pin main body 75 through contained spring 76
Portion, above-mentioned pin main body 75 extend downwards from supporting part 72.Guiding pin 47 is located in the side of holding claws 46, guiding pin 47
Guide portion 77 is more prominent (with reference to (a) of Fig. 4) downwards than the pawl point 57 of holding claws 46.When by transport mechanism 1 to be transported,
Height adjustment is carried out on the basis of guide portion 77, makes the pawl point 57 of holding claws 46 with keeping workbench 2 not contact.At this time, pass through
Contained spring 76, guiding pin 47 are provided with stroke, the error of short transverse are absorbed by stroke, therefore, it is possible to easy
Ground carries out the height adjustment of transport mechanism 1.
In addition, pin 42 drawn spring 43 of matrix is connected with holding claws matrix 41.The one end of extension spring 43 and setting
Card rationed marketing 73 in 71 upper surface of bending section of pin matrix 42 is locking, and the other end of extension spring 43 is with being arranged on holding claws base
The card rationed marketing 63 of 61 upper surface of standing wall portion of body 41 is locking.Pin matrix 42 is pulled to standing wall portion 61 by the elastic force of extension spring 43
Side.Restricted projection 64 is set in standing wall portion 61, the movement to 61 side of standing wall portion of the 64 banking pin matrix 42 of limitation projection.Pin
Matrix 42 touches the end of limitation projection 64 by the elastic force of extension spring 43, thus, pin matrix 42 and holding claws matrix
41 integratedly act.
The length adjustment of limitation projection 64 is so that the peripheral part of guiding pin 47 from plate workpiece W are at the time of keep out of the way than protecting
Evening is held at the time of the peripheral part of pawl 46 from plate workpiece W is kept out of the way.That is, holding claws matrix 41 is promoted by move portion 44, and only
The peripheral part of holding claws 46 from plate workpiece W is set to keep out of the way (with reference to (c) of Fig. 5).In addition further promoted by move portion 44
Holding claws matrix 41, makes pin matrix 42 touch limitation projection 64, so that the peripheral part of guiding pin 47 from plate workpiece W are kept out of the way
(with reference to (f) of Fig. 5).Leave guiding pin 47 in this way, transport mechanism 1 is formed and only make what holding claws 46 was kept out of the way from plate workpiece W
State.
With reference to Fig. 4 and Fig. 5 to transport mechanism taking out of action and move into action and illustrate to plate workpiece.Fig. 4
It is the explanatory drawin for taking out of action for taking out of plate workpiece of the transport mechanism based on present embodiment.Fig. 5 is to be based on this embodiment party
The explanatory drawin for moving into action for moving into plate workpiece of the transport mechanism of formula.In addition, the transport mechanism pair shown in Fig. 4 and Fig. 5
Taking out of action and moving into action for plate workpiece is to represent an exemplary action, can carry out appropriate change.
First, with reference to Fig. 4, the action that takes out of for taking out of plate workpiece W based on transport mechanism 1 is illustrated.Such as Fig. 4
(a) shown in, plate workpiece W is maintained in the retaining surface 21 for keeping workbench 2, and transport mechanism 1 is keeping the top of workbench 2
It is standby.At this time, holding claws matrix 41 is pushed to outside by move portion 44, and each holding claws 46 and each guiding pin 47 are determined
The radial outside of plate workpiece W is arrived in position.Guiding pin 47 leans on plate workpiece W sides (inner side) than the pawl point 57 of holding claws 46.In addition, draw
The lower end of guide pin 47 slightly protrudes downwards than the lower end of holding claws 46.
Next, as shown in (b) of Fig. 4, transport mechanism 1 declines and makes the lower end of guiding pin 47 with keeping workbench 2 to connect
Touch.As mentioned above due to guiding pin 47 is configured to stretch, therefore the position adjustment of short transverse is absorbed by stroke
Error.Therefore, height of the transport mechanism 1 of present embodiment with adjusting transport mechanism 1 by the upper and lower axle of arm (not shown)
The structure of degree, which is compared, makes height adjustment become easy.In addition, in the state of it have adjusted the height of transport mechanism 1, holding claws 46
Pawl point 57 be positioned as it is more slightly higher than retaining surface 21.
Next, as shown in (c) of Fig. 4, stop suction of the retaining surface 21 to plate workpiece W, from retaining surface 21 to tabular
The back side injection compressed air of workpiece W.Thus, plate workpiece W rear side formed with compressed air layer so that tabular work
Part W floats from retaining surface 21.In addition, while plate workpiece W is blown afloat from retaining surface 21, protected by move portion 44 to further
Hold pawl matrix 41.Also, the pawl point 57 of holding claws 46 enters the gap of retaining surface 21 and plate workpiece W, and guides pin 47
Abutted with the peripheral part of plate workpiece W.Thus, the peripheral part of plate workpiece W is kept the pawl point 57 of pawl 46 and triggers, so that by removing
Mechanism 1 is sent to keep the peripheral part of plate workpiece W.
With reference to Fig. 5, the action of moving into for moving into plate workpiece W based on transport mechanism 1 is illustrated.Such as (a) institute of Fig. 5
Show, transport mechanism 1 is located in the top for keeping workbench 2 in the state of plate workpiece W is remain.At this time, holding claws base
Body 41 carries out position adjustment by move portion 44, contacts holding claws 46 and the peripheral part of plate workpiece W.In addition, pin matrix
42 drawn springs 43 and be connected with holding claws matrix 41, guiding pin 47 tabular work is pulled to by the elastic force of extension spring 43
The peripheral part of part W.Under the state, pin matrix 42 leaves from the end of limitation projection 64.
Next, as shown in (b) of Fig. 5, transport mechanism 1 declines and makes the lower end of guiding pin 47 with keeping workbench 2 to connect
Touch, the height and position of transport mechanism 1 is adjusted.It is meanwhile parallel between retaining surfaces 21 of the plate workpiece W with keeping workbench 2
The position relationship in direction is adjusted.Also, position adjustment is carried out in short transverse and parallel direction to transport mechanism 1
Under state, the pawl point 57 of holding claws 46 is positioned as more slightly higher than retaining surface 21.Therefore, holding claws 46 will not be with keeping workbench 2
Contact and holding workbench 2 is caused to damage.
Next, as Fig. 5 (c) shown in, holding claws matrix 41 by move portion 44 by promotion and displacement distance L1 so that
The peripheral part of pawl point 57 from the plate workpiece W of holding claws 46 are kept out of the way.At this time, since limitation projection 64 does not connect with pin matrix 42
Touch, so the driving force of move portion 44 is not transferred to pin matrix 42.Therefore, it is possible to only make holding claws 46 from plate workpiece W's
Peripheral part is kept out of the way, and makes guiding pin 47 continue to contact with the peripheral part of plate workpiece W by the elastic force of extension spring 43.
Next, as shown in (d) of Fig. 5, the peripheral part by making holding claws 46 from plate workpiece W leaves, and makes tabular
The retaining surface 21 of workpiece W towards holding workbench 2 is fallen.At this time, since the peripheral part of plate workpiece W continues to be directed pin 47 to draw
Lead, so being able to maintain that the state of plate workpiece W alignment retaining surfaces 21, while plate workpiece W is landed to retaining surface 21.So
Afterwards, plate workpiece W is loaded onto in retaining surface 21 in an aligned state, and plate workpiece W suctions are maintained in retaining surface 21.
Next, as Fig. 5 (e) shown in, holding claws matrix 41 by move portion 44 by promotion and displacement distance L2 so that
The limitation projection 64 of holding claws matrix 41 touches pin matrix 42.Then, as shown in (f) of Fig. 5, holding claws matrix 41 is passed through
Projection 64 is limited, pin matrix 42 overcomes the elastic force of extension spring 43 and promoted, so that holding claws 46 is with guiding pin 47 integratedly
Keep out of the way from the peripheral part of plate workpiece W.
In this way, in the transport mechanism 1 of present embodiment, make holding claws 46 and guiding pin 47 by stages from tabular work
Part W leaves, and evening at the time of leave the peripheral part of guiding pin 47 from plate workpiece W.Thereby, it is possible to leave guiding pin 47 and only
Holding claws 46 is left from plate workpiece W, while being guided by guiding pin 47 to plate workpiece W, plate workpiece W is filled
It is downloaded in the retaining surface 21 for keeping workbench 2.
In addition, in the transport mechanism 1 of present embodiment, move portion 44 is made of DYN dynamic linear actuator.Therefore,
Plate workpiece W when easily can initially be set can absorb setting for transport mechanism 1 relative to the alignment of retaining surface 21
Count error etc..In this case, electric signal corresponding with correction value is input to move portion 44 from external device (ED), implement plate workpiece W
Relative to the alignment of retaining surface 21.
As described above, transport mechanism 1 according to the present embodiment, is keeping plate workpiece W's by 3 holding claws 46
Under state, guiding pin 47 is by the elastic force of extension spring 43 and the contacts side surfaces of the peripheral part with plate workpiece W.In addition, even if
The peripheral part of holding claws 46 from plate workpiece W leave, and guiding pin 47 also continues to the contacts side surfaces with plate workpiece W peripheral parts, from
The plate workpiece W that holding claws 46 is fallen is guided along guiding pin 47.Therefore, even the transport mechanism of edge clamped-in style
1 can also be configured to, and maintain the parallel side of retaining surfaces 21 of the plate workpiece W (being maintained at transport mechanism 1) with keeping workbench 2
To position relationship, while plate workpiece W is drop in retaining surface 21 in the state of position alignment.
In addition, the invention is not restricted to the above embodiment, can make various changes to implement the present invention.In above-mentioned implementation
, can be into the range of the effect of the present invention is played on not limited to this such as the illustrated size and shapes of attached drawing in mode
The appropriate change of row.In addition, can suitably it be changed in the range of the object of the invention is not departed to implement the present invention.
For example, in the above-described embodiment, the pawl point 57 of holding claws 46 is prominent structure to catch on plate workpiece W
Peripheral part, but the invention is not restricted to the structure.Holding claws 46 can keep plate workpiece W, for example, it is also possible to protect
Hold the V-shaped valley of peripheral part of the pawl 46 formed with clamping plate workpiece W.
In addition, in the above-described embodiment, guiding pin 47 is configured to stretch, but the invention is not restricted to the knot
Structure.Guiding pin 47 can also be configured to not stretch.
In addition, in the above-described embodiment, formed as the 1st, the upper side slide 55 of the 2nd sliding block and lower sliding block 52
To be slided on guide rail 51,54, but the invention is not restricted to the structure.1st, the 2nd sliding block is configured to guiding pin 47 and protects
Hold pawl 46 movement be oriented in plate workpiece W radially.
In addition, in the above-described embodiment, move portion 44 is configured to be driven by electric cylinder, but the invention is not restricted to
The structure.Move portion 44 is configured to make the moving radially along plate workpiece W of maintaining part 4, for example, it is also possible to pass through air gas
Cylinder is driven.
In addition, in the above-described embodiment, movement of the limitation projection 64 to pin matrix 42 limits, for example,
It can also be formed by the way that bolt is screwed into standing wall portion 61.In addition, limitation projection 64 can also be integrally formed in standing wall portion 61
On.
In addition, in the above-described embodiment, transport mechanism 1 is configured to be correspondingly provided with a pair with each holding claws 46 to draw
Guide pin 47, but the invention is not restricted to the structure.Guiding pin 47 is correspondingly provided with transport mechanism 1 and each holding claws 46 i.e.
Can, the number for guiding pin 47 is not particularly limited.
Industrial utilization possibility
As described above, the present invention has the effect that：Plate workpiece can maintained relative to the holding for keeping workbench
While the alignment in face, plate workpiece is drop in retaining surface, particularly, go forward side by side to the peripheral part for keeping plate workpiece
The transport mechanism of the edge clamped-in style of row conveyance is useful.
Claims (1)
1. a kind of transport mechanism, it is by keeping the maintaining part of the peripheral part of plate workpiece to keep plate workpiece, and by tabular
For work transporting on the holding workbench with retaining surface, above-mentioned retaining surface is used for the lower surface for the plate workpiece being held round,
Above-mentioned transport mechanism is characterized in that,
Above-mentioned maintaining part includes：Holding claws, side and lower surface at its peripheral part with plate workpiece contact；Guiding pin,
It is set up in parallel with above-mentioned holding claws and with the contacts side surfaces of plate workpiece；Extension spring, it is radially orientated along plate workpiece
Center applies elastic force to above-mentioned guiding pin；And the 1st sliding block, its to by above-mentioned extension spring and the above-mentioned guiding of movement sell into
Row orientation,
Above-mentioned transport mechanism has：2nd sliding block, the movement of above-mentioned maintaining part is oriented in plate workpiece radially by it；And
Move portion, it makes above-mentioned maintaining part moving radially along plate workpiece,
When keeping plate workpiece, radial direction of the above-mentioned maintaining part of at least three along plate workpiece is made by the work of above-mentioned move portion
Moved towards center, so that the contacts side surfaces of above-mentioned guiding pin and plate workpiece, and make above-mentioned holding claws and plate workpiece
Peripheral part at side and lower surface contact so as to keeping plate workpiece,
When discharging plate workpiece, radial direction of the above-mentioned maintaining part of at least three along plate workpiece is made by the work of above-mentioned move portion
Towards outside move, leave above-mentioned guiding pin and make outside from above-mentioned holding claws to plate workpiece move, make above-mentioned holding claws from
The peripheral part of plate workpiece is opened, but above-mentioned guiding pin is continued the side with plate workpiece by the elastic force of above-mentioned extension spring
Contact, so that plate workpiece that above-mentioned transport mechanism keeps is maintain in the position relative to the parallel direction of above-mentioned retaining surface,
After plate workpiece is transported to above-mentioned holding workbench, at least three maintaining part is made along plate by the work of above-mentioned move portion
The movement of side radially outwardly of shape workpiece, so that the guiding pin is integratedly moved with the holding claws to the outside of plate workpiece,
The guiding pin is set to leave the peripheral part of plate workpiece.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012-264917 | 2012-12-04 | ||
| JP2012264917A JP6091867B2 (en) | 2012-12-04 | 2012-12-04 | Transport mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103855064A CN103855064A (en) | 2014-06-11 |
| CN103855064B true CN103855064B (en) | 2018-04-17 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310596891.7A Active CN103855064B (en) | 2012-12-04 | 2013-11-22 | Transport mechanism |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP6091867B2 (en) |
| CN (1) | CN103855064B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017183665A (en) * | 2016-03-31 | 2017-10-05 | 芝浦メカトロニクス株式会社 | Substrate carrier device, substrate processing apparatus, and substrate processing method |
| JP6811951B2 (en) * | 2017-02-03 | 2021-01-13 | 株式会社ディスコ | Transport mechanism |
| JP6975056B2 (en) * | 2018-01-29 | 2021-12-01 | 株式会社ディスコ | Transport mechanism |
| CN117878044B (en) * | 2024-03-12 | 2024-06-04 | 四川富美达微电子股份有限公司 | Lead frame transfer system |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101060093A (en) * | 2006-04-19 | 2007-10-24 | 东京毅力科创株式会社 | Substrate transportation and processing apparatus |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH075991Y2 (en) * | 1988-05-31 | 1995-02-15 | 株式会社明電舎 | Transport hand |
| JP4147358B2 (en) * | 1998-12-07 | 2008-09-10 | 澁谷工業株式会社 | Work gripping device |
| JP2002043393A (en) * | 2000-07-25 | 2002-02-08 | Assist Japan Kk | Notch aligning apparatus |
| JP2004083180A (en) * | 2002-08-26 | 2004-03-18 | Sharp Corp | Transporting method and device for sheet-form base board |
-
2012
- 2012-12-04 JP JP2012264917A patent/JP6091867B2/en active Active
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- 2013-11-22 CN CN201310596891.7A patent/CN103855064B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101060093A (en) * | 2006-04-19 | 2007-10-24 | 东京毅力科创株式会社 | Substrate transportation and processing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6091867B2 (en) | 2017-03-08 |
| JP2014110364A (en) | 2014-06-12 |
| CN103855064A (en) | 2014-06-11 |
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