JP6975056B2 - Transport mechanism - Google Patents

Description

The present invention relates to a transfer mechanism that holds and conveys the outer peripheral edge of a wafer.

In a processing device for cutting or grinding a wafer, for example, when the back surface side on which the device is not formed cannot be sucked and held, an edge clamp type transfer mechanism for holding the outer peripheral edge of the wafer is used.

The edge clamp type transfer mechanism is provided with at least three holding claws, and by moving the holding claws toward the radial center of the wafer, the holding claws are placed between the holding surface of the table holding the wafer and the lower surface of the wafer. (See, for example, Patent Document 1). Further, when the holding claw is inserted between the holding surface and the lower surface of the wafer, air is ejected from the holding surface to float the wafer.

JP-A-2015-216191

However, there is a part where the wafer is not sufficiently lifted, and the outer peripheral edge where the wafer is not sufficiently lifted may come into contact with the tip of the holding claw, resulting in chipping of the wafer.

In the present invention, such a problem is considered, and in a transfer mechanism in which a holding claw is inserted between the lower surface of the wafer and the holding surface to hold the outer periphery of the wafer, the lower surface of the wafer and the holding surface are transferred to each other. The purpose is to ensure the entry of the holding claws.

In the present invention, the circular plate-shaped work held on the holding surface of the holding table is separated from the holding surface, the outer peripheral portion of the plate-shaped work is held by the holding portion, and the plate-shaped work is carried out from the holding table. It is a mechanism, and at least three holding portions are arranged at equal angles about the center of the plate-shaped work, and air is directed toward the plate-shaped work from the outer peripheral side of the plate-shaped work held on the holding surface. The air nozzle that ejects the plate-shaped work, the guide pillar that contacts the outer peripheral edge of the plate-shaped work and guides the plate-shaped work in the surface direction of the holding surface, and the plate that enters the lower surface side of the outer peripheral portion of the plate-shaped work. A holding claw for holding the shaped work, a movable support portion in which the air nozzle, the guide column, and the holding claw are arranged, an advancing / retreating means for advancing / retreating the movable support portion in the radial direction of the plate-shaped work, and the said. It is provided with a guide portion that makes the guide pillar movable in the radial direction of the plate-shaped work, and an urging means for urging the guide pillar in a direction toward the center of the plate-shaped work, and ejects air from the air nozzle. Then, the plate-shaped work is levitated from the holding surface, and the movable support portion is moved toward the center of the plate-shaped work by the advancing / retreating means so that the guide column is brought into contact with the outer peripheral edge of the plate-shaped work. Further, the movable support portion is moved in the same direction, and the holding claw is inserted between the lower surface of the plate-shaped work and the holding surface to hold the plate-shaped work.

In the present invention, the plate-shaped work is floated by the air nozzle ejecting air from the outer peripheral side of the plate-shaped work toward the center, and the holding claw supports the plate-shaped work while the guide pillar supports the plate-shaped work, and the holding claw is the lower surface of the plate-shaped work. Holds the plate-shaped work that has entered between the holding surface and the holding surface. Therefore, the plate-shaped work can be reliably lifted and the holding claw can be inserted between the lower surface of the plate-shaped work and the holding surface, and it is possible to prevent the plate-shaped work from being chipped.

It is a front view which shows the example of the transport mechanism. It is a partially enlarged plan view which shows the holding claw, the air nozzle and the guide pillar which make up a transport mechanism. It is a partially enlarged front view which shows the state which lowered the air nozzle and brought it into contact with the holding surface of a holding table. It is a partially enlarged front view which shows the state which the plate-shaped work was raised from the holding surface by ejecting air from an air nozzle. It is a partially enlarged front view showing a state in which air is ejected from an air nozzle to raise the plate-shaped work from a holding surface and the guide pillar is in contact with the outer peripheral edge of the plate-shaped work. It is a partially enlarged plan view which shows the state in which the plate-shaped work is floated from the holding surface by ejecting air from an air nozzle, and the guide pillar is brought into contact with the outer peripheral edge of the plate-shaped work. With the plate-shaped work floating from the holding surface by ejecting air from the air nozzle and the guide column in contact with the outer peripheral edge of the plate-shaped work, the holding claws are placed between the lower surface of the plate-shaped work and the holding surface of the holding table. It is a partially enlarged front view which shows the state which made it enter into. With the plate-shaped work floating from the holding surface by ejecting air from the air nozzle and the guide column in contact with the outer peripheral edge of the plate-shaped work, the holding claws are placed between the lower surface of the plate-shaped work and the holding surface of the holding table. It is a partially enlarged plan view which shows the state which made it enter into.

The transport mechanism 1 shown in FIG. 1 is a mechanism for carrying out the plate-shaped work W held on the holding surface 910 of the holding table 9 provided in various processing devices and the like while being separated from the holding surface 910, and is a driving means (not shown). A transport arm 21 that can be moved by being driven by a motor or an air cylinder), a shaft portion 22 that hangs down from the transport arm 21, an upper plate 23 attached to the lower end of the shaft portion 22, and a vertical movement with respect to the upper plate 23. At least three support shafts 31, a hanging portion 32 attached to the upper end of each support shaft 31 to support each support shaft 31 in a suspended state, and a lower plate fixed to the lower end of each support shaft 31. It is equipped with 33. The support shaft 31 is loosely fitted in the through hole 231 penetrating the front and back of the upper plate 23. Further, the hanging portion 32 is formed to have a diameter larger than the inner diameter of the through hole 231 and regulates the lowering range of the support shaft 31.

On the other hand, the holding table 9 is composed of a suction portion 91 made of a porous member and a frame body 92 that supports the suction portion 91 from the lower side and the outer peripheral side. The suction unit 91 is connected to the suction source 94 via an on-off valve 93. The upper surface of the suction portion 91 is a holding surface 910 for holding the plate-shaped work W, and by opening the on-off valve 93, a suction force is applied to the holding surface 910 to suck and hold the plate-shaped work W. can. The holding surface 910 also includes an upper surface of a frame body 92 formed flush with the holding surface 910.

The lower plate 33 is provided with at least three holding portions 3 for holding the plate-shaped work W at equal angular intervals in the circumferential direction of the lower plate 33. Each of the holding portions 3 is provided with a movable support portion 4 that is movable in the radial direction of the plate-shaped work W, and an advancing / retreating means 5 that advances / retracts the movable support portion 4 in the radial direction of the plate-shaped work W. ..

Each advancing / retreating means 5 is composed of, for example, a piston rod 51 extending in the radial direction, a cylinder 52 for moving the piston rod 51 in the radial direction, and a guide portion 53 extending in the same direction as the piston rod 51. A movable support portion 4 is fixed to the tip of the piston rod 51, and the movable support portion 4 is guided by the guide portion 53 and moves in the same direction as the piston rod 51 moves.

Each movable support portion 4 includes a guide pillar 6 extending downward from the movable support portion 4 and formed in a substantially columnar shape, and a holding claw 7 extending downward from the movable support portion 4 and further extending toward the center from the lower end thereof. It supports an air nozzle 8 that extends downward from the movable support portion 4 and ejects air from the lower end thereof toward the center of the plate-shaped work W.

The holding claw 7 and the air nozzle 8 are fixed to the movable support portion 4 or integrally formed with the movable support portion 4. The lower surface 71 of the tip of the holding claw 7 is formed parallel to the holding surface 910, and the upper surface 72 is a slope that descends toward the center of the plate-shaped work W.

A flow path 81 is formed inside the air nozzle 8, and one end of the flow path 81 communicates with the air source 82. On the other hand, the other end of the flow path 81 is open at the ejection port 83. The ejection port 83 at the tip of the air nozzle 8 is located lower than the lower surface 71 of the holding claw 7. Further, the tip of the holding claw 7 is located closer to the plate-shaped work W than the ejection port 83 of the air nozzle 8.

As shown in FIG. 2, the tip of the holding claw 7 faces the center of the plate-shaped work W. On the other hand, two air nozzles 8 are arranged for one holding claw 7. The ejection port 83 of the two air nozzles 8 faces the tip of the holding claw 7.

As shown in FIG. 1, an urging means 61 for urging the guide column 6 in the direction toward the center of the plate-shaped work is interposed between the movable support portion 4 and the guide column 6. As the urging means 61, for example, a spring can be used. As shown in FIG. 2, the guide pillar 6 may be fixed to the tip of the arm 62 and the arm 62 may be swiveled so that the guide pillar 6 comes into contact with the plate-shaped work W. In this case, for example, a spiral spring can be used as the urging means 61.

Hereinafter, a case where the plate-shaped work W held on the holding table 9 is carried out by using the transport mechanism 1 configured as described above will be described. As shown in FIG. 3, the outer peripheral portion Wc of the plate-shaped work W is chamfered in a round shape, and the outer peripheral peripheral portion Wd is a portion of the outer peripheral portion Wc having the largest outer diameter. Further, the on-off valve 93 is open, the lower surface Wb of the plate-shaped work W is held by the holding surface 910, and the upper surface Wa is exposed.

First, the transport arm 21 shown in FIG. 1 is swiveled so that the center of the lower plate 33 and the center of the suction portion 91 coincide with each other. Then, the entire transport mechanism 1 is lowered, and as shown in FIG. 3, the lower surface 84 of either one of the two air nozzles 8 is brought into contact with the holding surface 910 with respect to one holding claw 7. At this time, the support shaft 31 rises in the through hole 231 and the holding portion 3 moves upward relative to the upper plate 23. When the lower surfaces 84 of at least three air nozzles 8 come into contact with the holding surface 910 in this way, the ejection port 83 of the air nozzle 8 is directed between the lower surface Wb of the outer peripheral portion Wc of the plate-shaped work W and the holding surface 910. Further, by bringing the lower surface 84 of the air nozzle 8 into contact with the holding surface 910, the lower plate 33 suspended by the hanging structure is lifted from the upper plate 23 and is parallel to the holding surface 910. The lower surfaces 84 of the two air nozzles 8 may be formed flush with each other with respect to one holding claw 7. Further, one air nozzle 8 may be used for one holding claw 7.

Next, as shown in FIG. 4, the on-off valve 93 is closed so that the suction force does not act on the holding surface 910. Then, with the lower surface 84 of the air nozzle 8 still in contact with the holding surface 910, as shown in FIG. 4, air 831 is ejected from all the air nozzles 8 located on the outer peripheral side of the plate-shaped work W. As a result, the outer peripheral portion Wc of the plate-shaped work W is floated. The plate-shaped work W may be entirely levitated as shown in FIG. 4, but it is sufficient that at least a portion of the outer peripheral portion Wc located on the inner peripheral side of the holding claw 7 is levitated.

Next, as shown in FIGS. 5 and 6, the advancing / retreating means 5 moves the movable support portion 4 toward the center of the plate-shaped work W while the air 831 is continuously ejected from the ejection port 83. The guide pillar 6 is brought into contact with the outer peripheral edge Wd of the plate-shaped work W to hold the outer peripheral portion Wc. As a result, the plate-shaped work W is in a state where the plate-shaped work W is not laterally displaced by at least three guide columns 6. Since the three guide pillars 6 are driven by the respective advancing / retreating means 5 and move independently toward the center of the plate-shaped work W, the center of the plate-shaped work W and the center of the lower plate 33 are one. If not, the plate-shaped work W is guided in the surface direction of the holding surface 910. After that, all the guide columns 6 come into contact with the three points of the outer peripheral edge Wd of the plate-shaped work W, and it is possible to prevent the plate-shaped work W from being displaced in the surface direction of the holding surface 910.

Next, as shown in FIGS. 7 and 8, the advancing / retreating means 5 further moves the movable support portion 4 toward the center of the plate-shaped work W while the air 831 is continuously ejected from the ejection port 83. , The holding claw 7 is inserted between the holding surface 910 and the lower surface Wb of the plate-shaped work W. Then, as the holding claw 7 moves toward the center of the plate-shaped work W, the plate-shaped work W rises along the inclination of the upper surface 72 of the holding claw 7, and the plate-shaped work W is caused by at least three holding claws 7. Be retained. When the holding claw 7 is inserted between the holding surface 910 and the lower surface Wb of the plate-shaped work W, the outer peripheral portion Wc of the plate-shaped work W is raised by the ejection of air from the ejection port 83 of the air nozzle 8. Therefore, the holding claw 7 can be surely entered and held.

When the holding claw 7 is inserted between the holding surface 910 and the lower surface Wb of the plate-shaped work W, the plate-shaped work W is supported by the guide pillar 6 on the outer peripheral edge Wd of the plate-shaped work W. Guided by the side surface of the guide pillar 6, it rises. Therefore, it is possible to prevent the plate-shaped work W from laterally shifting in the surface direction of the holding surface 910.

Next, the plate-shaped work W is separated from the holding surface 910 of the holding table 9 by raising the transport arm 21 shown in FIG. 1 while maintaining the horizontal position of the holding claw 7. Then, the plate-shaped work W can be transported to a desired position by turning the transport arm 21 or the like.

As described above, in the transport mechanism 1, the air nozzle 8 floats the plate-shaped work W by ejecting air from the outer peripheral side of the plate-shaped work W toward the plate-shaped work W, and the guide pillar 6 causes the plate-shaped work W to float. The holding claw 7 holds the plate-shaped work W that has entered between the lower surface Wb of the plate-shaped work W and the holding surface 910. Therefore, the plate-shaped work W can be reliably levitated so that the holding claw 7 can enter between the lower surface Wb of the plate-shaped work W and the holding surface 910, and it is possible to prevent the plate-shaped work W from being chipped. can.

Further, the guide pillar 6, the holding claw 7 and the air nozzle 8 are supported by the movable support portion 4, and the advancing / retreating means 5 advances / retreats the movable support portion 4 in the radial direction of the plate-shaped work W, whereby the guide pillar 6, the holding claw 7 and the holding claw 8 are supported. Since the 7 and the air nozzle 8 can be moved, it is not necessary to separately provide a drive mechanism for the guide pillar 6, the holding claw 7, and the air nozzle 8, and it is possible to prevent the device configuration from becoming complicated.

In the above embodiment, the suction unit 91 of the holding table 9 is connected only to the suction source 94 via the on-off valve 93, but the suction unit 91 is connected to the suction source 94 and the air supply source via the switching valve. It may be configured to be selectively connected. In such a configuration, in parallel with ejecting air from the ejection port 83, the suction portion 91 is communicated with the air supply source to eject air from the holding surface 910, whereby the plate-shaped work W is more reliably held on the holding surface. It can be surfaced from 910.

1: Transfer mechanism 21: Transfer arm 22: Shaft part 23: Upper plate 231: Through hole 3: Holding mechanism 31: Support shaft 32: Suspended part 33: Lower plate 4: Movable support part 5: Advance / retreat means 51: Piston rod 52: Cylinder 53: Guide part 6: Guide pillar 61: Energizing means 7: Holding claw 71: Bottom surface 72: Top surface 8: Air nozzle 81: Flow path 82: Air source 83: Spout 84: Bottom surface 9: Holding table 91: Suction part 910: Holding surface 92: Frame body 93: On-off valve 94: Suction source W: Plate-shaped work Wa: Top surface Wb: Bottom surface Wc: Outer peripheral part Wd: Outer peripheral edge

Claims (1)

A transport mechanism that separates the circular plate-shaped work held on the holding surface of the holding table from the holding surface, holds the outer peripheral portion of the plate-shaped work by the holding portion, and carries out the plate-shaped work from the holding table. ,
At least three holding portions are arranged at an equal angle around the center of the plate-shaped work.
An air nozzle that ejects air from the outer peripheral side of the plate-shaped work held on the holding surface toward the plate-shaped work, and
A guide pillar that comes into contact with the outer peripheral edge of the plate-shaped work and guides the plate-shaped work in the surface direction of the holding surface.
A holding claw that enters the lower surface side of the outer peripheral portion of the plate-shaped work and holds the plate-shaped work.
A movable support portion in which the air nozzle, the guide pillar, and the holding claw are arranged, and
An advancing / retreating means for advancing / retracting the movable support portion in the radial direction of the plate-shaped work,
A guide portion that makes the guide column movable in the radial direction of the plate-shaped work, and
An urging means for urging the guide pillar in a direction toward the center of the plate-shaped work, and
Equipped with
The guide pillar is moved toward the center of the plate-shaped work by ejecting air from the air nozzle to levitate the plate-shaped work from the holding surface and moving the movable support portion toward the center of the plate-shaped work by the advancing / retreating means. A transport mechanism that brings the movable support portion into contact with the outer peripheral edge of the plate, moves the movable support portion in the same direction, and causes the holding claw to enter between the lower surface of the plate-shaped work and the holding surface to hold the plate-shaped work.

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