CN103839843A - 排列用掩模 - Google Patents

排列用掩模 Download PDF

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Publication number
CN103839843A
CN103839843A CN201310383108.9A CN201310383108A CN103839843A CN 103839843 A CN103839843 A CN 103839843A CN 201310383108 A CN201310383108 A CN 201310383108A CN 103839843 A CN103839843 A CN 103839843A
Authority
CN
China
Prior art keywords
mask
opening
shape
workpiece
alignment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201310383108.9A
Other languages
English (en)
Chinese (zh)
Inventor
小林良弘
田丸裕仁
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maxell Ltd
Original Assignee
Hitachi Maxell Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Maxell Ltd filed Critical Hitachi Maxell Ltd
Publication of CN103839843A publication Critical patent/CN103839843A/zh
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/012—Manufacture or treatment of bump connectors, dummy bumps or thermal bumps
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
    • H10W72/281—Auxiliary members
    • H10W72/285—Alignment aids, e.g. alignment marks

Landscapes

  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Wire Bonding (AREA)
CN201310383108.9A 2012-11-22 2013-08-29 排列用掩模 Pending CN103839843A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012-256573 2012-11-22
JP2012256573A JP6150500B2 (ja) 2012-11-22 2012-11-22 配列用マスク

Publications (1)

Publication Number Publication Date
CN103839843A true CN103839843A (zh) 2014-06-04

Family

ID=50803223

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201310383108.9A Pending CN103839843A (zh) 2012-11-22 2013-08-29 排列用掩模

Country Status (3)

Country Link
JP (1) JP6150500B2 (https=)
KR (1) KR20140066080A (https=)
CN (1) CN103839843A (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI582873B (zh) * 2015-02-26 2017-05-11 Hitachi Maxell A masking method for manufacturing the same, and a method of manufacturing the solder bump
CN106981428A (zh) * 2016-01-19 2017-07-25 日立麦克赛尔株式会社 配列用掩膜及其制造方法、焊料凸块的形成方法
TWI910094B (zh) * 2018-08-09 2026-01-01 日商麥克賽爾股份有限公司 配列用遮罩

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201602715A (zh) * 2014-07-07 2016-01-16 日立麥克賽爾股份有限公司 配列用遮罩及其製造方法
JP6381322B2 (ja) * 2014-07-07 2018-08-29 マクセルホールディングス株式会社 配列用マスク
JP2018170529A (ja) * 2018-07-31 2018-11-01 マクセルホールディングス株式会社 配列用マスク
JP7256083B2 (ja) * 2019-07-02 2023-04-11 マクセル株式会社 配列用マスク
JP7170456B2 (ja) * 2018-08-09 2022-11-14 マクセル株式会社 配列用マスク

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3497550B2 (ja) * 1994-03-14 2004-02-16 株式会社東芝 バンプの形成方法
JPH08264932A (ja) * 1995-03-23 1996-10-11 Hitachi Techno Eng Co Ltd はんだバンプ形成法
JP2004253770A (ja) * 2003-01-31 2004-09-09 Hitachi Metals Ltd 導電性ボールの配列方法および配列装置
JP2009182068A (ja) * 2008-01-30 2009-08-13 Kyushu Hitachi Maxell Ltd 配列用マスク及びその製造方法
JP2012227466A (ja) * 2011-04-22 2012-11-15 Bonmaaku:Kk ボール搭載マスク

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI582873B (zh) * 2015-02-26 2017-05-11 Hitachi Maxell A masking method for manufacturing the same, and a method of manufacturing the solder bump
CN106981428A (zh) * 2016-01-19 2017-07-25 日立麦克赛尔株式会社 配列用掩膜及其制造方法、焊料凸块的形成方法
TWI610376B (zh) * 2016-01-19 2018-01-01 日立麥克賽爾股份有限公司 配列用遮罩及其製造方法、焊料凸塊之形成方法
CN106981428B (zh) * 2016-01-19 2022-05-24 麦克赛尔株式会社 配列用掩膜及其制造方法、焊料凸块的形成方法
TWI910094B (zh) * 2018-08-09 2026-01-01 日商麥克賽爾股份有限公司 配列用遮罩

Also Published As

Publication number Publication date
JP6150500B2 (ja) 2017-06-21
KR20140066080A (ko) 2014-05-30
JP2014107282A (ja) 2014-06-09

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PB01 Publication
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20140604