CN103779356A - 一种显示面板母板及其制备方法 - Google Patents

一种显示面板母板及其制备方法 Download PDF

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CN103779356A
CN103779356A CN201410026858.5A CN201410026858A CN103779356A CN 103779356 A CN103779356 A CN 103779356A CN 201410026858 A CN201410026858 A CN 201410026858A CN 103779356 A CN103779356 A CN 103779356A
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electrical insulator
insulator layer
display floater
display panel
precut region
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杨光
沈鹏
王晏酩
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BOE Technology Group Co Ltd
Beijing BOE Optoelectronics Technology Co Ltd
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Beijing BOE Optoelectronics Technology Co Ltd
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Priority to PCT/CN2014/080235 priority patent/WO2015109738A1/zh
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Abstract

本发明提供一种显示面板母板及其制备方法，属于显示技术领域，其可解决现有的由于显示面板母板中的电学绝缘层的内部应力较大造成显示面板母板中其他图形偏移的问题。本发明的显示面板母板包括：多个间隔设置的显示面板区域，以及与显示面板区域相邻的预切割区域，其中，在所述显示面板母板中至少部分设于所述预切割区域的电学绝缘层被去除。

Description

一种显示面板母板及其制备方法
技术领域
本发明属于显示技术领域，具体涉及一种显示面板母板及其
制备方法。
背景技术
在显示技术领域中，显示装置以其体积小、功耗低、无辐射、分辨率高等优点被广泛地应用于现代数字信息化设备中。
所述显示装置包括显示面板，其中，显示面板是通过将两块显示面板母板（阵列基板母板和彩膜基板母板）对盒后进行切割形成，其中，显示面板母板上设置有切割线（切割线所在位置为显示面板母板上的预切割区域），切割线将显示面板母板划分为多个显示面板（显示面板所在位置为显示面板母板的显示面板区域），在根据切割线完成对显示面板母板的切割后，一个显示面板区域对应一个显示面板。
一般形成显示面板母板的步骤包括：在玻璃基底上进行大面积的成膜、曝光，以及大面积刻蚀，形成显示面板母板的各层结构。除大部分电学绝缘层以外，通常其他都被刻蚀形成了图形（例如栅线，数据线，透明电极），由于各层的电学绝缘层（栅极绝缘层、钝化层等电学绝缘层）的沉积具有不同的应力，造成玻璃基底的内缩或者外扩。
例如钝化层和栅极绝缘层是大面积成膜，最终只是形成少量的过孔。刻蚀之后，无法起到应力释放的作用。所以在形成钝化层、栅极绝缘层的工艺后，玻璃基底受到钝化层、栅极绝缘层等大面积的电学绝缘层内部应力的影响，内缩或者外扩的趋势很不稳定，对后续工艺造成了较大的影响，特别是很容易造成形成于这些电学绝缘层上方的膜层发生图形的偏移。
发明内容
本发明所要解决的技术问题包括，针对现有的显示面板母板存在的上述问题，提供一种可以改善图形偏移的显示面板母板及其制备方法。
解决本发明技术问题所采用的技术方案是一种显示面板母板，其包括：间隔设置的显示面板区域，以及与显示面板区域相邻的预切割区域，在所述显示面板母板中至少部分设于所述预切割区域的电学绝缘层被去除。
本发明的显示面板母板中由于至少部分设于预切割区域的电学绝缘层被去除，故其可以会很好的释放该电学绝缘层的内部应力，因而可以很好地避免电学绝缘层内部较大的应力对设于该电学绝缘层上方或下方的其它膜层的影响，进而可以对显示面板母板上由于电学绝缘层内部应力较大造成其他图形偏移的现象进行改善。
优选的是，所述预切割区域的电学绝缘层全部被去除。
优选的是，剩余的所述电学绝缘层的边缘处设有坡度角。
进一步优选的是，所述坡度角的角度在30度～70度之间。
优选的是，所述电学绝缘层为钝化层、栅极绝缘层、刻蚀阻挡层中的任一种或多种。
解决本发明技术问题所采用的技术方案是一种显示面板母板的制备方法，所述显示面板母板包括：间隔设置的显示面板区域，以及与显示面板相邻的预切割区域，所述制备方法包括：
形成电学绝缘层；
通过构图工艺去除至少部分设于所述预切割区域的电学绝缘层。
优选的是，所述预切割区域的电学绝缘层全部被去除。
进一步优选的是，所述通过构图工艺去除至少部分设于所述预切割区域的电学绝缘层包括：在构图工艺中，采用边缘处设有锯齿状的掩膜板对所述预切割区域的电学绝缘层进行构图工艺，以使剩余的所述预切割区域的电学绝缘层处形成坡度角。
附图说明
图1为本发明的实施例1的显示基板母板的示意图；
图2a和图2b为本发明的实施例2的显示基板母板的制备方法的示意图；
图3为本发明的实施例2的显示基板母板的制备方法中锯齿状掩膜板部分结构示意图。
其中附图标记为：101、基底；102、电学绝缘层（薄膜）；103、光刻胶；104、接触过孔区域的光刻胶；105、预切割区域电学绝缘层将要被去除区域的光刻胶；106、接触过孔；107、预切割区域电学绝缘层被去除区域；108、锯齿状掩膜板部分结构；Q1、显示面板区域；Q2、预切割区域。
具体实施方式
为使本领域技术人员更好地理解本发明的技术方案，下面结合附图和具体实施方式对本发明作进一步详细描述。
需要说明的是，本发明中所称的图案、图形指的是通过构图工艺形成的各种结构；本发明中所称的构图工艺包括光刻胶涂布、掩模、曝光、显影、刻蚀、光刻胶剥离等部分或全部工艺，光刻胶以正性光刻胶为例，但是这并非对本发明的限制。
实施例1：
如图1所示，本实施例提供一种显示面板母板，该显示面板母板包括：间隔设置的显示面板区域Q1，以及与显示面板区域Q1相邻的预切割区域Q2。其中，显示面板区域Q1与显示面板所在位置相对应，预切割区域Q2与切割线所在位置相对应。在该显示面板母板中至少部分设于预切割区域Q2的电学绝缘层102被去除。
由于本实施例的显示面板母板中的至少部分设于预切割区域Q2的电学绝缘层102被去除，故其可以会很好的释放该电学绝缘层102的内部应力，因而可以很好地避免电学绝缘层102内部的较大应力对设于该电学绝缘层102上方或下方的其它膜层的影响，进而可以对显示面板母板上由于电学绝缘层102内部应力较大造成其他图形偏移的现象进行改善。
为了可以尽可能大的释放电学绝缘层102的内部应力，优选地将预切割区域Q2的电学绝缘层102全部被去除。
当然尽可能大的释放电学绝缘层102的内部应力的同时还要保证沉积在该电学绝缘层102上方的其他膜层不受影响，特别是当由于预切割区域Q2的电学绝缘层102被去除产生的段差对后续工艺的影响，例如在形成配向膜后摩擦取向时，由于段差的存在，在摩擦时将会产生起伏，进而会对取向造成相应的影响（摩擦取向的方向如图1所示的箭头方向）。此时可以优选地，在剩余的所述电学绝缘层102的边缘处保留一定的坡度角，使得在电学绝缘层102在预切割区域Q2被去除部分的坡度更加平缓，减小在膜材取向时的起伏，当然在显示面板区域Q1的电学绝缘层102处仍然保留过孔处的坡度角，这样可以缓解由于预切割区域Q2处的电学绝缘层102被去除造成的影响。该坡度角优选在30度～70度之间，当然可以根据具体情况具体设定。
其中，优选地，该电学绝缘层102为钝化层、栅极绝缘层和刻蚀阻挡层中的任一种或多种。其中，钝化层设于薄膜晶体管的源漏电极层与像素电极层之间，像素电极可以通过贯穿钝化层的接触过孔与漏极连接；栅极绝缘层用于将栅极层与有源区隔开；源漏电极通过贯穿刻蚀阻挡层的接触过孔与有源区连接。通常这些电学绝缘层上只设置有少量的过孔，所以内部应力无法很好的释放，此时将预切割区域Q2中至少部分电学绝缘层去除，可以很好的将其内部应力释放，同时可以改善由于各层电学绝缘层由于内部应力过大造成的其他图形产生偏移的问题。当然在显示面板母板中其他的设于预切割区域Q2的电学绝缘层也可以被去除。
实施例2：
如图2a和2b所示，本实施例提供一种显示面板母板的制备方法，所述显示面板母板包括：间隔设置的显示面板区域，以及与显示面板相邻的预切割区域，其包括下述步骤：
在基底101上形成一层电学绝缘层薄膜102，并在该电学绝缘层薄膜102上涂覆光刻胶103，对光刻胶曝光显影，接触过孔区域的光刻胶104和预切割区域电学绝缘层将要被去除区域的光刻胶105被去除，如图2a中所示。
当然，形成接触过孔的步骤，可与以上步骤同步，也可单独。当包括多个电学绝缘层102时，可以先分别形成的各层的接触过孔，再统一除去预切割区域的电学绝缘层102。
在完成上述步骤的基底101上，通过构图工艺在基底上形成包括电学绝缘层102的图形，且至少部分设于所述预切割区域的电学绝缘层102被去除（电学绝缘层被去除区域如图2b中107所示），当然同时还在该电学绝缘层102上的形成相应的接触过孔106，如图2b所示。
由于本实施例的显示面板母板中的至少部分设于预切割区域的电学绝缘层102被去除，故其可以会很好的释放该电学绝缘层102的内部应力，因而可以很好地避免电学绝缘层102内部的较大应力对设于该电学绝缘层102上方或下方的其它膜层的影响，进而可以对显示面板母板上由于电学绝缘层内部应力较大造成其他图形偏移的现象进行改善。
为了尽可能大的释放改电学绝缘层102的内部应力，优选地，所述预切割区域的电学绝缘层102全部被去除。
如图3所示，进一步优选地，所述通过构图工艺在基底上形成包括电学绝缘层102的图形，采用边缘处设有锯齿状的掩膜板108。由于采用该种掩膜板，使得在所述电学绝缘层102的边缘处保留一定的坡度角，进而避免由于预切割区域的电学绝缘层102被去除产生的段差对后续工艺的影响。具体地说，对形成有电学绝缘层薄膜的基底形成一层光刻胶，并选用锯齿状掩膜板进行曝光，此时光线在锯齿状掩膜板的尖角处产生衍射，可在光刻胶上形成有坡度角，然后可进行干法刻蚀，设于光刻胶下方的电学绝缘层将会复制光刻胶的坡度角，进而在预切割区域Q2处的电学绝缘层102的边缘处形成有较平缓的坡度角。这样既可以降低对后续的摩擦取向工艺的影响，又可以有效释放钝化层的应力。需要说明的是，该锯齿状掩膜板在对应预切割区域的电学绝缘层102的位置有所变化，其他区域的掩膜图形可根据需要设置，以在显示基板上形成其他图形，在此不作限定。
需要说明的是，本实施例中形成显示面板母板的其他膜层和其他结构是采用现有的制备方法，在此不详细描述。
可以理解的是，以上实施方式仅仅是为了说明本发明的原理而采用的示例性实施方式，然而本发明并不局限于此。对于本领域内的普通技术人员而言，在不脱离本发明的精神和实质的情况下，可以做出各种变型和改进，这些变型和改进也视为本发明的保护范围。

Claims (8)

1.一种显示面板母板，其包括：多个间隔设置的显示面板区域，以及与显示面板区域相邻的预切割区域，其特征在于，在所述显示面板母板中至少部分设于所述预切割区域的电学绝缘层被去除。
2.根据权利要求1所述的显示面板母板，其特征在于，所述预切割区域的电学绝缘层全部被去除。
3.根据权利要求1或2所述的显示面板母板，其特征在于，剩余的所述电学绝缘层的边缘处设有坡度角。
4.根据权利要求3所述的显示面板母板，其特征在于，所述坡度角的角度在30度～70度之间。
5.根据权利要求1所述的显示面板母板，其特征在于，所述电学绝缘层为钝化层、栅极绝缘层、刻蚀阻挡层中的任一种或多种。
6.一种显示面板母板的制备方法，其特征在于，所述显示面板母板包括：间隔设置的显示面板区域，以及与显示面板相邻的预切割区域，所述制备方法包括：
形成电学绝缘层；
通过构图工艺去除至少部分设于所述预切割区域的电学绝缘层。
7.根据权利要求6所述的显示面板母板的制备方法，其特征在于，所述预切割区域的电学绝缘层全部被去除。
8.根据权利要求6或7所述的显示面板母板的制备方法，其特征在于，所述通过构图工艺去除至少部分设于所述预切割区域的电学绝缘层包括：在构图工艺中，采用边缘处设有锯齿状的掩膜板对所述预切割区域的电学绝缘层进行构图工艺，以使剩余的所述预切割区域的电学绝缘层处形成坡度角。
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