CN103695190A - 新型硅片清洗液 - Google Patents
新型硅片清洗液 Download PDFInfo
- Publication number
- CN103695190A CN103695190A CN201310747719.7A CN201310747719A CN103695190A CN 103695190 A CN103695190 A CN 103695190A CN 201310747719 A CN201310747719 A CN 201310747719A CN 103695190 A CN103695190 A CN 103695190A
- Authority
- CN
- China
- Prior art keywords
- parts
- silicon wafer
- novel silicon
- cleaning
- scavenging solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 37
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 34
- 239000010703 silicon Substances 0.000 title claims abstract description 34
- 238000004140 cleaning Methods 0.000 title abstract description 23
- 239000007788 liquid Substances 0.000 title abstract description 4
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 claims abstract description 24
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 16
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 claims abstract description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 12
- 230000002000 scavenging effect Effects 0.000 claims description 18
- 239000013543 active substance Substances 0.000 claims description 8
- VBICKXHEKHSIBG-UHFFFAOYSA-N 1-monostearoylglycerol Chemical group CCCCCCCCCCCCCCCCCC(=O)OCC(O)CO VBICKXHEKHSIBG-UHFFFAOYSA-N 0.000 claims description 7
- 241000675108 Citrus tangerina Species 0.000 claims description 7
- LDDQLRUQCUTJBB-UHFFFAOYSA-N ammonium fluoride Chemical compound [NH4+].[F-] LDDQLRUQCUTJBB-UHFFFAOYSA-N 0.000 claims description 7
- 239000003921 oil Substances 0.000 claims description 7
- 230000007935 neutral effect Effects 0.000 claims description 5
- 239000008367 deionised water Substances 0.000 claims description 2
- 229910021641 deionized water Inorganic materials 0.000 claims description 2
- 229940075507 glyceryl monostearate Drugs 0.000 claims description 2
- 239000001788 mono and diglycerides of fatty acids Substances 0.000 claims description 2
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 abstract 1
- 235000019499 Citrus oil Nutrition 0.000 abstract 1
- 239000010500 citrus oil Substances 0.000 abstract 1
- 239000004094 surface-active agent Substances 0.000 abstract 1
- 239000000203 mixture Substances 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 238000003756 stirring Methods 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 231100000989 no adverse effect Toxicity 0.000 description 2
- 239000003082 abrasive agent Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000035800 maturation Effects 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310747719.7A CN103695190B (zh) | 2013-12-31 | 2013-12-31 | 硅片清洗液 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310747719.7A CN103695190B (zh) | 2013-12-31 | 2013-12-31 | 硅片清洗液 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103695190A true CN103695190A (zh) | 2014-04-02 |
CN103695190B CN103695190B (zh) | 2016-06-08 |
Family
ID=50356859
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201310747719.7A Active CN103695190B (zh) | 2013-12-31 | 2013-12-31 | 硅片清洗液 |
Country Status (1)
Country | Link |
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CN (1) | CN103695190B (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104498209A (zh) * | 2014-12-31 | 2015-04-08 | 镇江市港南电子有限公司 | 一种新型特效硅片清洗液 |
CN104498208A (zh) * | 2014-12-31 | 2015-04-08 | 镇江市港南电子有限公司 | 一种新型特效硅片清洗液制备方法 |
CN104531369A (zh) * | 2014-12-31 | 2015-04-22 | 镇江市港南电子有限公司 | 一种高效率易清洗的硅片清洗剂 |
CN106085638A (zh) * | 2016-06-27 | 2016-11-09 | 孙立民 | 一种牦牛骨饰品保养液及其制备方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101957563A (zh) * | 2009-07-13 | 2011-01-26 | 安集微电子(上海)有限公司 | 一种含氟等离子刻蚀残留物清洗液 |
CN102399648A (zh) * | 2010-09-10 | 2012-04-04 | 安集微电子(上海)有限公司 | 一种含氟清洗液 |
CN102827707A (zh) * | 2011-06-16 | 2012-12-19 | 安集微电子科技(上海)有限公司 | 一种等离子刻蚀残留物清洗液 |
-
2013
- 2013-12-31 CN CN201310747719.7A patent/CN103695190B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101957563A (zh) * | 2009-07-13 | 2011-01-26 | 安集微电子(上海)有限公司 | 一种含氟等离子刻蚀残留物清洗液 |
CN102399648A (zh) * | 2010-09-10 | 2012-04-04 | 安集微电子(上海)有限公司 | 一种含氟清洗液 |
CN102827707A (zh) * | 2011-06-16 | 2012-12-19 | 安集微电子科技(上海)有限公司 | 一种等离子刻蚀残留物清洗液 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104498209A (zh) * | 2014-12-31 | 2015-04-08 | 镇江市港南电子有限公司 | 一种新型特效硅片清洗液 |
CN104498208A (zh) * | 2014-12-31 | 2015-04-08 | 镇江市港南电子有限公司 | 一种新型特效硅片清洗液制备方法 |
CN104531369A (zh) * | 2014-12-31 | 2015-04-22 | 镇江市港南电子有限公司 | 一种高效率易清洗的硅片清洗剂 |
CN106085638A (zh) * | 2016-06-27 | 2016-11-09 | 孙立民 | 一种牦牛骨饰品保养液及其制备方法 |
Also Published As
Publication number | Publication date |
---|---|
CN103695190B (zh) | 2016-06-08 |
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C06 | Publication | ||
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C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C41 | Transfer of patent application or patent right or utility model | ||
CB03 | Change of inventor or designer information |
Inventor after: Wang Lubao Inventor after: Wang Haiqing Inventor after: Wang You Inventor after: Lu Jinggang Inventor before: Nie Jingen |
|
COR | Change of bibliographic data | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20160513 Address after: 212200 Jiangsu Province Economic Development Zone of Yangzhong Port Road Applicant after: Jiangsu Meike Silicon Energy Co., Ltd. Address before: 212132 Dongfang Road, Dagang mechanical and Electrical Industrial Park, Dagang District, Zhenjiang, Jiangsu Applicant before: Zhenjiang Gangnan Electric Co., Ltd. |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Solar cell silicon wafer cleaning solution and application method thereof Effective date of registration: 20191113 Granted publication date: 20160608 Pledgee: China Everbright Bank, Limited by Share Ltd, Nanjing branch Pledgor: Jiangsu Meike Silicon Energy Co., Ltd. Registration number: Y2019320000280 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20210127 Granted publication date: 20160608 Pledgee: China Everbright Bank Limited by Share Ltd. Nanjing branch Pledgor: JIANGSU MEIKE SILICON ENERGY Co.,Ltd. Registration number: Y2019320000280 |
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PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20210204 Address after: No.198 Guangming Road, Yangzhong Economic Development Zone, Zhenjiang City, Jiangsu Province Patentee after: Jiangsu Meike Solar Energy Technology Co.,Ltd. Address before: 212200 GANGLONG Road, Yangzhong Economic Development Zone, Jiangsu Province Patentee before: JIANGSU MEIKE SILICON ENERGY Co.,Ltd. |
|
TR01 | Transfer of patent right | ||
CP01 | Change in the name or title of a patent holder |
Address after: No.198 Guangming Road, Yangzhong Economic Development Zone, Zhenjiang City, Jiangsu Province Patentee after: Jiangsu Meike Solar Energy Technology Co., Ltd Address before: No.198 Guangming Road, Yangzhong Economic Development Zone, Zhenjiang City, Jiangsu Province Patentee before: Jiangsu Meike Solar Energy Technology Co., Ltd |
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CP01 | Change in the name or title of a patent holder |