CN103650142A - 电阻变化元件及其制造方法 - Google Patents
电阻变化元件及其制造方法 Download PDFInfo
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- CN103650142A CN103650142A CN201280001934.6A CN201280001934A CN103650142A CN 103650142 A CN103650142 A CN 103650142A CN 201280001934 A CN201280001934 A CN 201280001934A CN 103650142 A CN103650142 A CN 103650142A
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- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
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- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
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- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
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Images
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/841—Electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/24—Multistable switching devices, e.g. memristors based on migration or redistribution of ionic species, e.g. anions, vacancies
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/021—Formation of switching materials, e.g. deposition of layers
- H10N70/026—Formation of switching materials, e.g. deposition of layers by physical vapor deposition, e.g. sputtering
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/061—Shaping switching materials
- H10N70/063—Shaping switching materials by etching of pre-deposited switching material layers, e.g. lithography
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/821—Device geometry
- H10N70/826—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/841—Electrodes
- H10N70/8418—Electrodes adapted for focusing electric field or current, e.g. tip-shaped
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/883—Oxides or nitrides
- H10N70/8833—Binary metal oxides, e.g. TaOx
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Memories (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (20)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011010122 | 2011-01-20 | ||
JP2011-010122 | 2011-01-20 | ||
PCT/JP2012/000287 WO2012098879A1 (ja) | 2011-01-20 | 2012-01-18 | 抵抗変化素子およびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103650142A true CN103650142A (zh) | 2014-03-19 |
CN103650142B CN103650142B (zh) | 2016-05-11 |
Family
ID=46515514
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201280001934.6A Expired - Fee Related CN103650142B (zh) | 2011-01-20 | 2012-01-18 | 电阻变化元件及其制造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US9006698B2 (zh) |
JP (1) | JP5270046B2 (zh) |
CN (1) | CN103650142B (zh) |
WO (1) | WO2012098879A1 (zh) |
Cited By (5)
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CN104409627A (zh) * | 2014-10-30 | 2015-03-11 | 北京大学 | 一种小尺寸超薄阻变存储器及其制备方法 |
CN107228883A (zh) * | 2016-03-25 | 2017-10-03 | 松下知识产权经营株式会社 | 气体传感器、氢检测方法以及燃料电池汽车 |
CN108963070A (zh) * | 2017-05-18 | 2018-12-07 | 中国科学院微电子研究所 | 一种阻变存储器及其制作方法 |
CN109769394A (zh) * | 2017-09-04 | 2019-05-17 | 松下知识产权经营株式会社 | 气体传感器、气体检测装置、燃料电池汽车及气体传感器的制造方法 |
CN112018235A (zh) * | 2020-07-24 | 2020-12-01 | 厦门半导体工业技术研发有限公司 | 半导体器件和半导体器件的制造方法 |
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JP2014033094A (ja) * | 2012-08-03 | 2014-02-20 | Sharp Corp | 可変抵抗素子とその製造方法、及び、不揮発性半導体記憶装置 |
CN103730571B (zh) * | 2012-10-15 | 2018-07-27 | 马维尔国际贸易有限公司 | 在电阻式随机存取存储器单元中形成接触以降低单元编程所需电压的方法和装置 |
JP2014099557A (ja) * | 2012-11-15 | 2014-05-29 | Toshiba Corp | 抵抗変化素子、記憶装置および駆動方法 |
US8835272B1 (en) * | 2013-02-28 | 2014-09-16 | Sandia Corporation | Passive electrically switchable circuit element having improved tunability and method for its manufacture |
US9349950B2 (en) | 2013-03-13 | 2016-05-24 | Microchip Technology Incorporated | Resistive memory cell with trench-shaped bottom electrode |
US9444040B2 (en) | 2013-03-13 | 2016-09-13 | Microchip Technology Incorporated | Sidewall type memory cell |
US9349953B2 (en) * | 2013-03-15 | 2016-05-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | Resistance variable memory structure and method of forming the same |
US9608204B2 (en) * | 2013-09-09 | 2017-03-28 | Taiwan Semiconductor Manufacturing Company Ltd. | Resistive random access memory and manufacturing method thereof |
US9246084B2 (en) * | 2014-01-23 | 2016-01-26 | Taiwan Semiconductor Manufacturing Co., Ltd. | RRAM cell including V-shaped structure |
US9385313B2 (en) | 2014-02-19 | 2016-07-05 | Microchip Technology Incorporated | Resistive memory cell having a reduced conductive path area |
US9269606B2 (en) | 2014-02-19 | 2016-02-23 | Microchip Technology Incorporated | Spacer enabled active isolation for an integrated circuit device |
US9412942B2 (en) | 2014-02-19 | 2016-08-09 | Microchip Technology Incorporated | Resistive memory cell with bottom electrode having a sloped side wall |
US10003021B2 (en) | 2014-02-19 | 2018-06-19 | Microchip Technology Incorporated | Resistive memory cell with sloped bottom electrode |
US9318702B2 (en) | 2014-02-19 | 2016-04-19 | Microchip Technology Incorporated | Resistive memory cell having a reduced conductive path area |
US20160104839A1 (en) * | 2014-10-14 | 2016-04-14 | Seoul National University R&Db Foundation | Resistive random access memory device having nano-scale tip and nanowire, memory array using the same and fabrication method thereof |
KR101623854B1 (ko) * | 2014-10-14 | 2016-05-24 | 서울대학교산학협력단 | 나노 팁 구조를 갖는 저항성 메모리 소자 및 이를 이용한 메모리 어레이와 그 제조방법 |
KR20170091589A (ko) | 2014-11-26 | 2017-08-09 | 마이크로칩 테크놀로지 인코포레이티드 | 감소된 전도성 경로 영역 / 강화된 전계를 위한 스페이서 영역을 갖는 저항성 메모리 셀 |
FR3041808B1 (fr) * | 2015-09-30 | 2018-02-09 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Procede de realisation d'une cellule memoire resistive |
TWI569416B (zh) * | 2015-11-26 | 2017-02-01 | 華邦電子股份有限公司 | 電阻式隨機存取記憶體及其製造方法 |
KR102556820B1 (ko) * | 2015-12-30 | 2023-07-19 | 에스케이하이닉스 주식회사 | 시냅스 및 이를 포함하는 뉴로모픽 장치 |
US11043634B2 (en) | 2019-04-09 | 2021-06-22 | International Business Machines Corporation | Confining filament at pillar center for memory devices |
CN111987217A (zh) * | 2020-08-25 | 2020-11-24 | 上海华力微电子有限公司 | Rram单元结构及其制造方法 |
CN115458679A (zh) * | 2021-06-09 | 2022-12-09 | 联华电子股份有限公司 | 可变电阻式存储器装置及其形成方法 |
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JP2010027835A (ja) * | 2008-07-18 | 2010-02-04 | Renesas Technology Corp | 不揮発性記憶装置およびその製造方法 |
WO2010064446A1 (ja) * | 2008-12-04 | 2010-06-10 | パナソニック株式会社 | 不揮発性記憶素子及び不揮発性記憶装置 |
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JP2006344876A (ja) | 2005-06-10 | 2006-12-21 | Sharp Corp | 不揮発性記憶素子とその製造方法 |
KR101004207B1 (ko) | 2006-03-09 | 2010-12-24 | 파나소닉 주식회사 | 저항 변화형 소자, 반도체 장치, 및 그 제조 방법 |
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CN101828262B (zh) * | 2007-10-15 | 2012-06-06 | 松下电器产业株式会社 | 非易失性存储元件和使用该非易失性存储元件的非易失性半导体装置 |
WO2010087211A1 (ja) * | 2009-02-02 | 2010-08-05 | パナソニック株式会社 | 不揮発性記憶素子、不揮発性記憶装置、不揮発性半導体装置、および不揮発性記憶素子の製造方法 |
JP5477687B2 (ja) * | 2009-04-01 | 2014-04-23 | 日本電気株式会社 | スイッチング素子、スイッチング素子の動作方法、スイッチング素子の製造方法、書き換え可能な論理集積回路およびメモリ素子 |
US8391051B2 (en) * | 2009-04-10 | 2013-03-05 | Panasonic Corporation | Method of programming nonvolatile memory element |
US8072795B1 (en) * | 2009-10-28 | 2011-12-06 | Intermolecular, Inc. | Biploar resistive-switching memory with a single diode per memory cell |
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2012
- 2012-01-18 JP JP2012553625A patent/JP5270046B2/ja not_active Expired - Fee Related
- 2012-01-18 WO PCT/JP2012/000287 patent/WO2012098879A1/ja active Application Filing
- 2012-01-18 CN CN201280001934.6A patent/CN103650142B/zh not_active Expired - Fee Related
- 2012-01-18 US US13/810,708 patent/US9006698B2/en not_active Expired - Fee Related
Patent Citations (4)
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JP2010027835A (ja) * | 2008-07-18 | 2010-02-04 | Renesas Technology Corp | 不揮発性記憶装置およびその製造方法 |
WO2010064446A1 (ja) * | 2008-12-04 | 2010-06-10 | パナソニック株式会社 | 不揮発性記憶素子及び不揮発性記憶装置 |
WO2010086916A1 (ja) * | 2009-01-29 | 2010-08-05 | パナソニック株式会社 | 抵抗変化素子およびその製造方法 |
Cited By (7)
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CN104409627A (zh) * | 2014-10-30 | 2015-03-11 | 北京大学 | 一种小尺寸超薄阻变存储器及其制备方法 |
CN107228883A (zh) * | 2016-03-25 | 2017-10-03 | 松下知识产权经营株式会社 | 气体传感器、氢检测方法以及燃料电池汽车 |
CN107228883B (zh) * | 2016-03-25 | 2021-07-27 | 新唐科技日本株式会社 | 气体传感器、氢检测方法以及燃料电池汽车 |
CN108963070A (zh) * | 2017-05-18 | 2018-12-07 | 中国科学院微电子研究所 | 一种阻变存储器及其制作方法 |
CN109769394A (zh) * | 2017-09-04 | 2019-05-17 | 松下知识产权经营株式会社 | 气体传感器、气体检测装置、燃料电池汽车及气体传感器的制造方法 |
CN109769394B (zh) * | 2017-09-04 | 2022-04-22 | 新唐科技日本株式会社 | 气体传感器及其制造方法、气体检测装置、燃料电池汽车 |
CN112018235A (zh) * | 2020-07-24 | 2020-12-01 | 厦门半导体工业技术研发有限公司 | 半导体器件和半导体器件的制造方法 |
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US9006698B2 (en) | 2015-04-14 |
US20130112936A1 (en) | 2013-05-09 |
JPWO2012098879A1 (ja) | 2014-06-09 |
CN103650142B (zh) | 2016-05-11 |
WO2012098879A1 (ja) | 2012-07-26 |
JP5270046B2 (ja) | 2013-08-21 |
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