CN103615970A - Optical interferometer used for detecting inner arc surface of annular guide rail - Google Patents
Optical interferometer used for detecting inner arc surface of annular guide rail Download PDFInfo
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- CN103615970A CN103615970A CN201310585579.8A CN201310585579A CN103615970A CN 103615970 A CN103615970 A CN 103615970A CN 201310585579 A CN201310585579 A CN 201310585579A CN 103615970 A CN103615970 A CN 103615970A
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Abstract
The invention discloses an optical interferometer used for detecting the inner arc surface of an annular guide rail. The inner arc surface is located on the inner side or the outer side in the circumferential direction of the annular guide rail, a condensation convex lens of the inner arc surface is located between a laser and a collimation convex lens, and the focus of the condensation convex lens and the focus of the collimation convex lens coincide; a beam splitter located between the condensation convex lens and the collimation convex lens is used for dividing light of an auto-collimation convex lens into a first light beam and a second light beam; a reference lens is located on one side, back to the beam splitter, of the collimation convex lens, the surface, facing the collimation convex lens, of the reference lens is a convex surface, and the surface, back to the convex surface, of the reference lens is a standard spherical surface; a conical reflector is located in the annular guide rail to be detected, and a rotary shaft of the conical reflector, the axis of the annular guide rail and the axis of the reference lens coincide. According to the optical interferometer, feature information of the inner arc surface in the whole stereoscopic annular guide rail can be obtained at a time, and test efficiency, accuracy and reliability are also greatly improved.
Description
Technical field
The present invention relates to optical detection apparatus, relate in particular to a kind of optical interdferometer for detection of ring-shaped guide rail inner arc surface.
Background technology
Interference of light technology is modern times one of the most accurate effective measuring technologies, it integrates contemporary state-of-the-art technology, extensively adopt the newest fruits in the fields such as computer technology, laser technology, electronic technology, semiconductor technology, can complete quickly and accurately the check to optical element and system.At optical workshop of today, design processing and check debuging, proofreading and correct and testing to optical system from optical element, interferometer has become a kind of easy operating, reliable, high precision, intelligentized requisite test verification device, and it has immeasurable effect in the production in enormous quantities of optical element and system and check.
But existing interferometer often detects pattern deviation for face shape, for example bending or local bending or embossed area, detect and need repeatedly repeatedly to detect for the pattern of three-dimensional surface shape, can not once obtain whole three-dimensional surface shape patterns; Secondly, existing interferometer accuracy of detection and reliability are easily subject to the such environmental effects such as extraneous vibration and temperature, air-flow.Therefore, how to design the high precision of the whole three-dimensional circular guide rail of a kind of disposable acquisition inner arc surface pattern information, the optical interdferometer of reliability, become the direction that those skilled in the art make great efforts.
Summary of the invention
The invention provides a kind of optical interdferometer for detection of ring-shaped guide rail inner arc surface, the whole three-dimensional circular guide rail of this optical interdferometer disposable acquisition of energy inner arc surface pattern information, has also improved testing efficiency, precision and reliability simultaneously greatly.
For achieving the above object, the technical solution used in the present invention is: a kind of optical interdferometer for detection of ring-shaped guide rail inner arc surface, described inner arc surface along ring-shaped guide rail circumferentially and be positioned at inner side, comprise laser instrument, optically focused convex lens, beam splitter, as the collimation convex lens of object lens, with reference to lens and conical mirror, described optically focused convex lens between laser instrument and collimation convex lens and the focus of optically focused convex lens overlap with the focus that collimates convex lens; Described beam splitter is between optically focused convex lens and collimation convex lens, and for future, the light of autocollimation convex lens is divided into the first light beam and the second light beam; Describedly with reference to lens, be positioned at the opposing side of collimation convex lens and beam splitter, this is convex surface with reference to the lens surface relative with collimating convex lens, and this is standard sphere with reference to lens and the opposing surface of convex surface;
Described conical mirror is positioned at described ring-shaped guide rail to be detected, and the turning axle of conical mirror and ring-shaped guide rail and with reference to lens dead in line separately, and the circular conical surface of described conical mirror and the inner arc surface of ring-shaped guide rail are placed face-to-face; Come the convergent point that converges light formation after conical mirror reflection of self-reference lens to overlap with the center of curvature of inner arc surface;
Interference pattern receiving-member is positioned at described beam splitter one side, for receiving the second light beam from beam splitter.
It is as follows that technique scheme is further improved technical scheme:
1. in such scheme, when in described ring-shaped guide rail, the central axis of inner arc surface and the turning axle of conical mirror are vertical, the circular conical surface angle that is positioned at described conical mirror left and right side is right angle; When in described ring-shaped guide rail, the turning axle angle theta of the central axis of inner arc surface and conical mirror is acute angle, the circular conical surface angle that is positioned at described conical mirror left and right side is obtuse angle; When in described ring-shaped guide rail, the turning axle angle theta of the central axis of inner arc surface and conical mirror is obtuse angle, the circular conical surface angle that is positioned at described conical mirror left and right side is acute angle.
2. in such scheme, described optically focused convex lens are provided with one first aperture with the focus overlapping position of collimation convex lens.
3. in such scheme, between described beam splitter and interference pattern receiving-member, be provided with a second orifice diaphragm.
4. in such scheme, described interference pattern receiving-member is CCD camera or imaging screen.
5. in such scheme, described conical mirror is positioned at the focal length with reference to lens.
Because technique scheme is used, the present invention compared with prior art has following advantages:
1. the present invention is for detection of the optical interdferometer of ring-shaped guide rail inner arc surface, its optically focused convex lens between laser instrument and collimation convex lens and the focus of optically focused convex lens overlap with the focus that collimates convex lens; Described beam splitter is between optically focused convex lens and collimation convex lens, and for future, the light of autocollimation convex lens is divided into the first light beam and the second light beam; Describedly with reference to lens, be positioned at collimation convex lens and the opposing side of beam splitter, this is convex surface with reference to the lens surface relative with collimation convex lens, this is standard sphere with reference to lens and the opposing surface of convex surface, described conical mirror is positioned at described ring-shaped guide rail to be detected, and the turning axle of conical mirror and ring-shaped guide rail and with reference to lens dead in line separately, expanded sensing range, can detect information by the whole three-dimensional circular guide rail of real-time disposable acquisition inner arc surface pattern, improve testing efficiency and precision.
2. the present invention is for detection of the optical interdferometer of ring-shaped guide rail inner arc surface, its reference beam and measuring beam are through same light path, the variation of the environmental factor such as vibration and temperature, air-flow can produce common mode inhibition each other to external world, generally without shock insulation and constant temperature, also can obtain stable interference fringe, anti seismic efficiency is good, environmental requirement is low to external world, has greatly improved precision and reliability.
Accompanying drawing explanation
Accompanying drawing 1 is ring-shaped guide rail one structural representation of the present invention;
Accompanying drawing 2 is the optical interdferometer structural representation for detection of accompanying drawing 1 ring-shaped guide rail inner arc surface;
Accompanying drawing 3 is ring-shaped guide rail two structural representations of the present invention;
Accompanying drawing 4 is the optical interdferometer structural representation for detection of accompanying drawing 3 ring-shaped guide rail inner arc surfaces;
Accompanying drawing 5 is the structural representation that accompanying drawing 3 ring-shaped guide rails overturn after 180 °;
Accompanying drawing 6 is the optical interdferometer structural representation for detection of accompanying drawing 5 ring-shaped guide rail inner arc surfaces;
Accompanying drawing 7 is Perfect Interferometry schematic diagram of the present invention.
In above accompanying drawing: 1, inner arc surface; 2, ring-shaped guide rail; 3, laser instrument; 4, optically focused convex lens; 5, beam splitter; 6, collimation convex lens; 7, with reference to lens; 71, convex surface; 72, standard sphere; 8, conical mirror; 81, circular conical surface; 9, interference pattern receiving-member; 10, the first aperture; 11, second orifice diaphragm.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described:
Embodiment 1: a kind of optical interdferometer for detection of ring-shaped guide rail inner arc surface, described inner arc surface 1 along ring-shaped guide rail 2 circumferentially and be positioned at inner side, comprise laser instrument 3, optically focused convex lens 4, beam splitter 5, as the collimation convex lens 6 of object lens, with reference to lens 7 and conical mirror 8, described optically focused convex lens 4 between laser instrument 3 and collimation convex lens 6 and the focus of optically focused convex lens 4 overlap with the focus that collimates convex lens 6; Described beam splitter 5 between optically focused convex lens 4 and collimation convex lens 6, for future autocollimation convex lens 6 light be divided into the first light beam and the second light beam; Describedly with reference to lens 7, be positioned at the opposing side of collimation convex lens 6 and beam splitter 5, this is convex surface 71 with reference to lens 7 surface relative with collimation convex lens 6, and this is standard sphere 72 with reference to lens 7 and the opposing surface of convex surface 71;
Described conical mirror 8 is positioned at described ring-shaped guide rail 2 to be detected, and the turning axle of conical mirror 8 and ring-shaped guide rail 2 with reference to lens 7 dead in line separately, the circular conical surface 81 of described conical mirror 8 is placed face-to-face with the inner arc surface 1 of ring-shaped guide rail 2;
Come the convergent point that converges light formation after conical mirror 8 reflections of self-reference lens 7 to overlap with the center of curvature of inner arc surface 1;
Interference pattern receiving-member 9 is positioned at described beam splitter 5 one sides, for receiving the second light beam from beam splitter 5.
When in above-mentioned ring-shaped guide rail 2, the central axis of inner arc surface 1 and the turning axle of conical mirror 8 are vertical, circular conical surface 81 angles that are positioned at described conical mirror 8 left and right sides are right angle.
Above-mentioned optically focused convex lens 4 are provided with one first aperture 10 with the focus overlapping position of collimation convex lens 6.
Between above-mentioned beam splitter 5 and interference pattern receiving-member 9, be provided with a second orifice diaphragm 11.
Above-mentioned interference pattern receiving-member 9 is CCD camera or imaging screen.
Above-mentioned conical mirror 8 is positioned at the focal length with reference to lens 7.
Testing process is divided two, and as shown in accompanying drawing 1,2, first detecting measured piece is the first half of ring-shaped guide rail 2 inside surfaces, then measured piece is turned over to the detection that turnback realizes the latter half.
Embodiment 2: a kind of optical interdferometer for detection of ring-shaped guide rail inner arc surface, described inner arc surface 1 along ring-shaped guide rail 2 circumferentially and be positioned at inner side, comprise laser instrument 3, optically focused convex lens 4, beam splitter 5, as the collimation convex lens 6 of object lens, with reference to lens 7 and conical mirror 8, described optically focused convex lens 4 between laser instrument 3 and collimation convex lens 6 and the focus of optically focused convex lens 4 overlap with the focus that collimates convex lens 6; Described beam splitter 5 between optically focused convex lens 4 and collimation convex lens 6, for future autocollimation convex lens 6 light be divided into the first light beam and the second light beam; Describedly with reference to lens 7, be positioned at the opposing side of collimation convex lens 6 and beam splitter 5, this is convex surface 71 with reference to lens 7 surface relative with collimation convex lens 6, and this is standard sphere 72 with reference to lens 7 and the opposing surface of convex surface 71;
Described conical mirror 8 is positioned at described ring-shaped guide rail 2 to be detected, and the turning axle of conical mirror 8 and ring-shaped guide rail 2 with reference to lens 7 dead in line separately, the circular conical surface 81 of described conical mirror 8 is placed face-to-face with the inner arc surface 1 of ring-shaped guide rail 2;
Come the convergent point that converges light formation after conical mirror 8 reflections of self-reference lens 7 to overlap with the center of curvature of inner arc surface 1;
Interference pattern receiving-member 9 is positioned at described beam splitter 5 one sides, for receiving the second light beam from beam splitter 5.
When in above-mentioned ring-shaped guide rail 2, the central axis of inner arc surface 1 and the turning axle angle of conical mirror 8 are acute angle, in ring-shaped guide rail 2, the turning axle angle of the central axis of inner arc surface 1 and conical mirror 8 is as the criterion with acute angle, as shown in accompanying drawing 3,5, adopt two kinds of conical mirror 8, circular conical surface 81 angles of conical mirror 8 its left and right sides are an obtuse angle, and circular conical surface 81 angles of another kind of conical mirror 8 its left and right sides are acute angle.
Above-mentioned optically focused convex lens 4 are provided with one first aperture 10 with the focus overlapping position of collimation convex lens 6.
Between above-mentioned beam splitter 5 and interference pattern receiving-member 9, be provided with a second orifice diaphragm 11.
Above-mentioned interference pattern receiving-member 9 is CCD camera or imaging screen.
Above-mentioned conical mirror 8 is positioned at the focal length with reference to lens 7.
Testing process is divided two, first the conical mirror 8 that circular conical surface 81 angles that use conical mirror 8 left and right sides are obtuse angle, detect the first half of measured piece inside surface, then change the conical mirror 8 that circular conical surface 81 angles of left and right side are acute angle into the latter half of measured piece has been surveyed.
The present embodiment is for detection of the optical interdferometer of ring-shaped guide rail inner arc surface, and the course of work is as follows.
The described light beam by laser instrument 3 outgoing is converged at aperture 10 places in the focus that collimates convex lens 6 by optically focused convex lens 4, light beam sees through beam splitter 5 by collimating convex lens 6 with parallel light emergence, is incident upon with reference on lens 7.Its lower surface is standard sphere 72, the conical mirror 8 and vertical below that be put in reference to lens 7 coaxial with tested ring-shaped guide rail 2.Part light is from 72 reflections of standard sphere, and another part light is mapped on the interior inner arc surface 1 of measured piece through standard sphere 72, by measured surface, is reflected back a part of light.This two parts light is all through beam splitter 5 reflections, and at emergent pupil, 11 places form two bright aperture pictures.Again by interference pattern receiving-member 9CCD camera focusing on the interference fringe localization face between standard sphere 72 and the inner arc surface 1 of tested ring-shaped guide rail 2, just can absorb on localization face by the interference pattern forming between standard sphere 72 and tested inner arc surface 1, then the professional software in computing machine carries out corrugated recovery and information processing.As shown in Figure 1, during one-time detection, can only detect the first half of guide rail arc surface,
So tested ring-shaped guide rail 2 will be turned over to turnback after one-time detection completes, the inner arc surface 1 of realizing the latter half for 1 of embodiment detects; After turning over turnback for embodiment 2, also will change pyramid, the inner arc surface 1 that carries out the latter half detects.
Above-described embodiment is only explanation technical conceive of the present invention and feature, and its object is to allow person skilled in the art can understand content of the present invention and implement according to this, can not limit the scope of the invention with this.All equivalences that Spirit Essence is done according to the present invention change or modify, within all should being encompassed in protection scope of the present invention.
Claims (6)
1. the optical interdferometer for detection of ring-shaped guide rail inner arc surface, described inner arc surface (1) along ring-shaped guide rail (2) circumferentially and be positioned at inner side, it is characterized in that: comprise laser instrument (3), optically focused convex lens (4), beam splitter (5), as the collimation convex lens (6) of object lens, with reference to lens (7) and conical mirror (8), described optically focused convex lens (4) are positioned between laser instrument (3) and collimation convex lens (6) and the focus of optically focused convex lens (4) overlaps with the focus that collimates convex lens (6); Described beam splitter (5) is positioned between optically focused convex lens (4) and collimation convex lens (6), for the light of autocollimation convex lens in future (6), is divided into the first light beam and the second light beam; Describedly with reference to lens (7), be positioned at collimation convex lens (6) and the opposing side of beam splitter (5), this is convex surface (71) with reference to lens (7) surface relative with collimation convex lens (6), and this is standard sphere (72) with reference to the opposing surface of lens (7) and convex surface (71);
Described conical mirror (8) is positioned at described ring-shaped guide rail to be detected (2), and the turning axle of conical mirror (8) and ring-shaped guide rail (2) and with reference to lens (7) dead in line separately, the circular conical surface (81) of described conical mirror (8) is placed face-to-face with the inner arc surface (1) of ring-shaped guide rail (2), comes the convergent point that converges light formation after conical mirror (8) reflection of self-reference lens (7) to overlap with the center of curvature of inner arc surface (1);
Interference pattern receiving-member (9) is positioned at described beam splitter (5) one sides, for receiving the second light beam from beam splitter (5).
2. optical detection apparatus according to claim 1, it is characterized in that: when in described ring-shaped guide rail (2), the central axis of inner arc surface (1) and the turning axle of conical mirror (8) are vertical, circular conical surface (81) angle that is positioned at described conical mirror (8) left and right side is right angle; When in described ring-shaped guide rail (2), the central axis of inner arc surface (1) and the turning axle angle of conical mirror (8) are acute angle, circular conical surface (81) angle that is positioned at described conical mirror (8) left and right side is obtuse angle or acute angle.
3. optical detection apparatus according to claim 1 and 2, is characterized in that: described optically focused convex lens (4) are provided with one first aperture (10) with the focus overlapping position of collimation convex lens (6).
4. optical detection apparatus according to claim 1 and 2, is characterized in that: between described beam splitter (5) and interference pattern receiving-member (9), be provided with a second orifice diaphragm (11).
5. optical detection apparatus according to claim 1 and 2, is characterized in that: described interference pattern receiving-member (9) is CCD camera or imaging screen.
6. optical detection apparatus according to claim 1 and 2, is characterized in that: described conical mirror (8) is positioned at the focal length with reference to lens (7).
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| CN201310585579.8A CN103615970A (en) | 2013-11-19 | 2013-11-19 | Optical interferometer used for detecting inner arc surface of annular guide rail |
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| CN201310585579.8A CN103615970A (en) | 2013-11-19 | 2013-11-19 | Optical interferometer used for detecting inner arc surface of annular guide rail |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105865346A (en) * | 2016-03-02 | 2016-08-17 | 上海理鑫光学科技有限公司 | SMT paster part height indicator |
| CN111336946A (en) * | 2020-05-07 | 2020-06-26 | 西南科技大学 | Device and method for measuring surface appearance of inner wall of cylindrical part based on non-diffraction light beam |
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| CN105865346A (en) * | 2016-03-02 | 2016-08-17 | 上海理鑫光学科技有限公司 | SMT paster part height indicator |
| CN111336946A (en) * | 2020-05-07 | 2020-06-26 | 西南科技大学 | Device and method for measuring surface appearance of inner wall of cylindrical part based on non-diffraction light beam |
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Application publication date: 20140305 |